BR112016001710A2 - método para fabricação de uma nanoestrutura e artigos nanoestruturados - Google Patents
método para fabricação de uma nanoestrutura e artigos nanoestruturadosInfo
- Publication number
- BR112016001710A2 BR112016001710A2 BR112016001710A BR112016001710A BR112016001710A2 BR 112016001710 A2 BR112016001710 A2 BR 112016001710A2 BR 112016001710 A BR112016001710 A BR 112016001710A BR 112016001710 A BR112016001710 A BR 112016001710A BR 112016001710 A2 BR112016001710 A2 BR 112016001710A2
- Authority
- BR
- Brazil
- Prior art keywords
- plasma
- substrate
- nanostructure
- layer
- compounds
- Prior art date
Links
- 239000002086 nanomaterial Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 6
- -1 alkyl metal compounds Chemical class 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 239000008246 gaseous mixture Substances 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 abstract 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical class CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000003153 chemical reaction reagent Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 229920001577 copolymer Polymers 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229910010272 inorganic material Inorganic materials 0.000 abstract 1
- 239000011147 inorganic material Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910001507 metal halide Inorganic materials 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 150000003961 organosilicon compounds Chemical class 0.000 abstract 1
- 239000006104 solid solution Substances 0.000 abstract 1
- 230000001131 transforming effect Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/302—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/60—Details of absorbing elements characterised by the structure or construction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3341—Reactive etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Laminated Bodies (AREA)
- Drying Of Semiconductors (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361858670P | 2013-07-26 | 2013-07-26 | |
| US201361867733P | 2013-08-20 | 2013-08-20 | |
| US201462018761P | 2014-06-30 | 2014-06-30 | |
| PCT/US2014/047782 WO2015013387A1 (en) | 2013-07-26 | 2014-07-23 | Method of making a nanostructure and nanostructured articles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BR112016001710A2 true BR112016001710A2 (pt) | 2017-08-01 |
Family
ID=52393807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR112016001710A BR112016001710A2 (pt) | 2013-07-26 | 2014-07-23 | método para fabricação de uma nanoestrutura e artigos nanoestruturados |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10119190B2 (enExample) |
| EP (1) | EP3024777B1 (enExample) |
| JP (1) | JP6505693B2 (enExample) |
| KR (2) | KR20210151999A (enExample) |
| CN (1) | CN105431376B (enExample) |
| BR (1) | BR112016001710A2 (enExample) |
| SG (2) | SG11201600606TA (enExample) |
| WO (1) | WO2015013387A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015153597A1 (en) | 2014-04-03 | 2015-10-08 | 3M Innovative Properties Company | Polishing pads and systems and methods of making and using the same |
| CN107429136B (zh) | 2015-02-27 | 2020-07-17 | 3M创新有限公司 | 双面涂布胶带 |
| EP3313458A1 (en) | 2015-06-29 | 2018-05-02 | 3M Innovative Properties Company | Anti-microbial articles and methods of using same |
| TWI769988B (zh) | 2015-10-07 | 2022-07-11 | 美商3M新設資產公司 | 拋光墊與系統及其製造與使用方法 |
| EP3373985B1 (en) | 2015-11-13 | 2021-03-17 | 3M Innovative Properties Company | Anti-microbial articles and methods of using same |
| EP3373984B1 (en) | 2015-11-13 | 2020-12-23 | 3M Innovative Properties Company | Anti-microbial articles and methods of using same |
| WO2017193369A1 (en) * | 2016-05-13 | 2017-11-16 | 3M Innovative Properties Company | Thermally stable siloxane-based protection film |
| CN106542494B (zh) * | 2016-09-26 | 2017-12-26 | 西北工业大学 | 一种用于制备多层不等高微纳结构的方法 |
| CN106549074A (zh) * | 2016-12-08 | 2017-03-29 | 上海空间电源研究所 | 一种用于临近空间环境的薄硅太阳电池组件及其制备方法 |
| WO2018208574A1 (en) * | 2017-05-10 | 2018-11-15 | 3M Innovative Properties Company | Fluoropolymer articles and related methods |
| EP3732733A1 (en) | 2017-12-29 | 2020-11-04 | 3M Innovative Properties Company | Anti-reflective surface structures |
| US12038592B2 (en) | 2018-01-05 | 2024-07-16 | 3M Innovative Properties Company | Stray light absorbing film |
| EP3759190B1 (en) | 2018-02-28 | 2025-03-26 | 3M Innovative Properties Company | Adhesives comprising polymerized units of secondary hexyl (meth)acrylates |
| US12099222B2 (en) | 2018-08-23 | 2024-09-24 | 3M Innovative Properties Company | Photochromic articles |
| JP7541975B2 (ja) | 2018-08-31 | 2024-08-29 | スリーエム イノベイティブ プロパティズ カンパニー | ナノ構造化表面及び相互貫入層を含む物品及びその製造方法 |
| EP3966276A1 (en) | 2019-05-08 | 2022-03-16 | 3M Innovative Properties Company | Nanostructured article |
| DE112019007446T5 (de) * | 2019-06-11 | 2022-03-03 | Nalux Co., Ltd. | Verfahren zur herstellung eines kunststoffelements, das mit feineroberflächenrauigkeit bereitgestellt ist |
| CN110329985B (zh) * | 2019-06-18 | 2022-02-15 | 长沙新材料产业研究院有限公司 | 一种金刚石表面复杂结构及其制备方法 |
| WO2021152479A1 (en) * | 2020-01-29 | 2021-08-05 | 3M Innovative Properties Company | Nanostructured article |
| WO2022090901A1 (en) | 2020-10-30 | 2022-05-05 | 3M Innovative Properties Company | Ultraviolet c (uv-c) light reflector including fluoropolymer films |
| EP4284176A1 (en) | 2021-01-28 | 2023-12-06 | 3M Innovative Properties Company | Antimicrobial compositions and articles and related methods |
| CN114171641B (zh) * | 2021-11-30 | 2024-05-31 | 北京燕东微电子科技有限公司 | 氧化钒薄膜的刻蚀方法与半导体器件的制造方法 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4340276A (en) | 1978-11-01 | 1982-07-20 | Minnesota Mining And Manufacturing Company | Method of producing a microstructured surface and the article produced thereby |
| DK152140B (da) | 1979-02-16 | 1988-02-01 | Kuesters Eduard Maschf | Fremgangsmaade og apparat til moenstring af en fremfoert varebane |
| GB2064987B (en) | 1979-11-14 | 1983-11-30 | Toray Industries | Process for producing transparent shaped article having enhanced anti-reflective effect |
| JPS6294955A (ja) * | 1985-10-21 | 1987-05-01 | Nec Corp | 素子分離方法 |
| US5888594A (en) | 1996-11-05 | 1999-03-30 | Minnesota Mining And Manufacturing Company | Process for depositing a carbon-rich coating on a moving substrate |
| US6534409B1 (en) | 1996-12-04 | 2003-03-18 | Micron Technology, Inc. | Silicon oxide co-deposition/etching process |
| US6593247B1 (en) | 1998-02-11 | 2003-07-15 | Applied Materials, Inc. | Method of depositing low k films using an oxidizing plasma |
| US6582823B1 (en) | 1999-04-30 | 2003-06-24 | North Carolina State University | Wear-resistant polymeric articles and methods of making the same |
| WO2000074932A1 (en) | 1999-06-03 | 2000-12-14 | The Penn State Research Foundation | Deposited thin film void-column network materials |
| JP2004500481A (ja) * | 1999-06-03 | 2004-01-08 | ザ ペン ステイト リサーチ ファンデーション | 堆積薄膜ボイド・柱状体網目構造物 |
| JP3691689B2 (ja) * | 1999-08-03 | 2005-09-07 | 住友精密工業株式会社 | エッチング表面の親水性化方法 |
| US6391788B1 (en) * | 2000-02-25 | 2002-05-21 | Applied Materials, Inc. | Two etchant etch method |
| US6919119B2 (en) | 2000-05-30 | 2005-07-19 | The Penn State Research Foundation | Electronic and opto-electronic devices fabricated from nanostructured high surface to volume ratio thin films |
| WO2002025714A1 (en) * | 2000-09-20 | 2002-03-28 | Infineon Technologies Sc300 Gmbh & Co. Kg | A process for dry-etching a semiconductor wafer surface |
| US7956525B2 (en) * | 2003-05-16 | 2011-06-07 | Nanomix, Inc. | Flexible nanostructure electronic devices |
| US6726979B2 (en) | 2002-02-26 | 2004-04-27 | Saint-Gobain Performance Plastics Corporation | Protective glazing laminate |
| US7074723B2 (en) * | 2002-08-02 | 2006-07-11 | Applied Materials, Inc. | Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system |
| DE10241708B4 (de) | 2002-09-09 | 2005-09-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Reduzierung der Grenzflächenreflexion von Kunststoffsubstraten sowie derart modifiziertes Substrat und dessen Verwendung |
| KR101154215B1 (ko) | 2004-08-18 | 2012-06-18 | 다우 코닝 코포레이션 | ＳｉＯＣ：Ｈ 피복된 기판 및 이의 제조방법 |
| CN100593015C (zh) * | 2005-12-09 | 2010-03-03 | 中国科学院物理研究所 | 一种表面纳米锥阵列及其制作方法 |
| DE102006017716A1 (de) | 2006-04-15 | 2007-10-18 | Forschungszentrum Jülich GmbH | Vorrichtung zur Messung biomedizinischer Daten eines Probanden und Verfahren zur Stimulation des Probanden mit in Echtzeit verarbeiteten Daten |
| KR101615787B1 (ko) * | 2008-12-30 | 2016-04-26 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 나노구조화 표면의 제조 방법 |
| EP2566681B1 (en) * | 2010-05-03 | 2018-09-26 | 3M Innovative Properties Company | Method of making a nanostructure |
| CN102653390A (zh) * | 2012-04-18 | 2012-09-05 | 北京大学 | 使用混合气体刻蚀制备纳米森林结构的方法 |
-
2014
- 2014-07-23 EP EP14829850.8A patent/EP3024777B1/en active Active
- 2014-07-23 JP JP2016529853A patent/JP6505693B2/ja active Active
- 2014-07-23 CN CN201480042006.3A patent/CN105431376B/zh active Active
- 2014-07-23 BR BR112016001710A patent/BR112016001710A2/pt not_active IP Right Cessation
- 2014-07-23 WO PCT/US2014/047782 patent/WO2015013387A1/en not_active Ceased
- 2014-07-23 KR KR1020217039500A patent/KR20210151999A/ko not_active Ceased
- 2014-07-23 SG SG11201600606TA patent/SG11201600606TA/en unknown
- 2014-07-23 SG SG10201704677QA patent/SG10201704677QA/en unknown
- 2014-07-23 KR KR1020167004660A patent/KR20160037961A/ko not_active Ceased
-
2016
- 2016-11-17 US US15/354,086 patent/US10119190B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| SG10201704677QA (en) | 2017-07-28 |
| WO2015013387A1 (en) | 2015-01-29 |
| JP6505693B2 (ja) | 2019-04-24 |
| SG11201600606TA (en) | 2016-02-26 |
| KR20160037961A (ko) | 2016-04-06 |
| CN105431376B (zh) | 2018-08-31 |
| KR20210151999A (ko) | 2021-12-14 |
| EP3024777A1 (en) | 2016-06-01 |
| JP2016532576A (ja) | 2016-10-20 |
| US20170067150A1 (en) | 2017-03-09 |
| CN105431376A (zh) | 2016-03-23 |
| EP3024777B1 (en) | 2024-05-15 |
| EP3024777A4 (en) | 2017-01-11 |
| US10119190B2 (en) | 2018-11-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] | ||
| B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2472 DE 22-05-2018 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |