BR112014028715A2 - banho de chapeamento para deposição sem eletrodo de camadas de níquel - Google Patents

banho de chapeamento para deposição sem eletrodo de camadas de níquel

Info

Publication number
BR112014028715A2
BR112014028715A2 BR112014028715A BR112014028715A BR112014028715A2 BR 112014028715 A2 BR112014028715 A2 BR 112014028715A2 BR 112014028715 A BR112014028715 A BR 112014028715A BR 112014028715 A BR112014028715 A BR 112014028715A BR 112014028715 A2 BR112014028715 A2 BR 112014028715A2
Authority
BR
Brazil
Prior art keywords
plating bath
deposition plating
nickel electrode
free deposition
free
Prior art date
Application number
BR112014028715A
Other languages
English (en)
Other versions
BR112014028715B1 (pt
Inventor
Krause Carsten
Brunner Heiko
Bera Holger
Bejan Iulia
Picalek Jan
Rückbrod Sven
Original Assignee
Atotech Deutschland Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland Gmbh filed Critical Atotech Deutschland Gmbh
Publication of BR112014028715A2 publication Critical patent/BR112014028715A2/pt
Publication of BR112014028715B1 publication Critical patent/BR112014028715B1/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/48—Coating with alloys
    • C23C18/50—Coating with alloys with alloys based on iron, cobalt or nickel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H01L21/76849—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned on top of the main fill metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemically Coating (AREA)
  • Electroplating And Plating Baths Therefor (AREA)

Abstract

resumo patente de invenção: "banho de chapeamento para deposição sem eletrodo de camadas de níquel". a presente invenção refere-se às composições aquosas para banho de chapeamento para a deposição de níquel e ligas que utilizam novos agentes estabilizadores que possuem uma ligação tripla carbono-carbono e um grupo funcional para aumentar o desempenho do banho.
BR112014028715-5A 2012-06-04 2013-05-31 Banho de chapeamento para deposição sem eletrodo de camadas de níquel e seu método BR112014028715B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12170693.1 2012-06-04
EP20120170693 EP2671969A1 (en) 2012-06-04 2012-06-04 Plating bath for electroless deposition of nickel layers
PCT/EP2013/061280 WO2013182489A2 (en) 2012-06-04 2013-05-31 Plating bath for electroless deposition of nickel layers

Publications (2)

Publication Number Publication Date
BR112014028715A2 true BR112014028715A2 (pt) 2017-06-27
BR112014028715B1 BR112014028715B1 (pt) 2022-01-25

Family

ID=48626419

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014028715-5A BR112014028715B1 (pt) 2012-06-04 2013-05-31 Banho de chapeamento para deposição sem eletrodo de camadas de níquel e seu método

Country Status (11)

Country Link
US (1) US9175399B2 (pt)
EP (2) EP2671969A1 (pt)
JP (1) JP6161691B2 (pt)
KR (1) KR101930585B1 (pt)
CN (1) CN104321463B (pt)
BR (1) BR112014028715B1 (pt)
CA (1) CA2875317C (pt)
ES (1) ES2688547T3 (pt)
MY (1) MY168645A (pt)
TW (1) TWI560316B (pt)
WO (1) WO2013182489A2 (pt)

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US11685999B2 (en) * 2014-06-02 2023-06-27 Macdermid Acumen, Inc. Aqueous electroless nickel plating bath and method of using the same
US9708693B2 (en) 2014-06-03 2017-07-18 Macdermid Acumen, Inc. High phosphorus electroless nickel
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EP3026143A1 (en) * 2014-11-26 2016-06-01 ATOTECH Deutschland GmbH Plating bath and method for electroless deposition of nickel layers
EP3034650B1 (en) 2014-12-16 2017-06-21 ATOTECH Deutschland GmbH Plating bath compositions for electroless plating of metals and metal alloys
CN107429399B (zh) 2015-03-20 2020-02-07 埃托特克德国有限公司 用于硅基材的活化方法
KR20180022700A (ko) * 2015-06-30 2018-03-06 맥더미드 엔쏜 인코포레이티드 마이크로일렉트로닉스 내의 상호연결들의 코발트 충진
TWI707061B (zh) * 2015-11-27 2020-10-11 德商德國艾托特克公司 鈀之電鍍浴組合物及無電電鍍方法
CN105624656B (zh) * 2015-12-30 2018-05-01 大连大学 一种化学镀Ni-P/Ni-Mo-P-PTFE复合结构镀层及其制备方法
EP3190208B1 (en) * 2016-01-06 2018-09-12 ATOTECH Deutschland GmbH Electroless nickel plating baths comprising aminonitriles and a method for deposition of nickel and nickel alloys
KR102428185B1 (ko) 2016-05-04 2022-08-01 아토테크 도이칠란트 게엠베하 운트 콤파니 카게 기판의 표면 상에 대한 금속 또는 금속 합금의 활성화를 포함하는 이의 전착 방법
US10577692B2 (en) * 2017-01-05 2020-03-03 International Business Machines Corporation Pretreatment of iron-based substrates for electroless plating
CN107313034A (zh) * 2017-06-27 2017-11-03 佛山科学技术学院 一种高磷化学镀镍钴锰磷合金溶液及其制备方法
CN107475699A (zh) * 2017-08-28 2017-12-15 中石化炼化工程（集团）股份有限公司 气液分配器的防腐涂层、制备方法及其应用
EP3456870A1 (en) * 2017-09-13 2019-03-20 ATOTECH Deutschland GmbH A bath and method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy
KR102036334B1 (ko) * 2017-09-20 2019-10-25 한국기계연구원 무전해 도금액 및 무전해 도금 방법
KR102036329B1 (ko) * 2017-09-20 2019-10-25 한국기계연구원 무전해 도금액, 무전해 도금 방법 및 이를 이용하여 형성된 도금층
KR101932963B1 (ko) * 2018-02-20 2018-12-27 한국기계연구원 촉매-프리 무전해도금용 조성물 및 이를 이용한 무전해도금 방법
JP2021515110A (ja) * 2018-02-26 2021-06-17 グラフェン リーダーズ カナダ （ジーアールシー） インコーポレイテッド 炭素系材料によるオブジェクトの無電解めっき
CN108607586B (zh) * 2018-04-28 2021-02-05 重庆长安汽车股份有限公司 一种镍磷化物、其制备方法及电解水制氢的方法
ES2882690T3 (es) * 2018-11-06 2021-12-02 Atotech Deutschland Gmbh Disolución de chapado con níquel no electrolítico
KR102250500B1 (ko) * 2019-03-18 2021-05-12 (주)엠에스씨 자동차 lds 전장 부품용 무전해 중성-중온 니켈도금액
CN110079794A (zh) * 2019-05-08 2019-08-02 深圳市长裕环保有限公司 一种纳米易焊高硬耐磨防腐装饰合金催化液及其制备方法
DE102019112883A1 (de) * 2019-05-16 2020-11-19 Pac Tech - Packaging Technologies Gmbh Beschichtungsbad zur stromlosen Beschichtung eines Substrats
US20230178430A1 (en) * 2020-05-08 2023-06-08 Lam Research Corporation Electroplating cobalt, nickel, and alloys thereof
LT6899B (lt) * 2020-08-27 2022-04-11 Valstybinis mokslinių tyrimų institutas Fizinių ir technologijos mokslų centras Vario paviršiaus cheminio nikeliavimo būdas, nenaudojant aktyvavimo paladžiu
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Also Published As

Publication number Publication date
EP2855732A2 (en) 2015-04-08
TWI560316B (en) 2016-12-01
JP2015524024A (ja) 2015-08-20
CA2875317C (en) 2020-03-31
CN104321463A (zh) 2015-01-28
EP2855732B1 (en) 2018-07-18
MY168645A (en) 2018-11-27
CN104321463B (zh) 2016-12-28
CA2875317A1 (en) 2013-12-12
JP6161691B2 (ja) 2017-07-12
ES2688547T3 (es) 2018-11-05
BR112014028715B1 (pt) 2022-01-25
WO2013182489A2 (en) 2013-12-12
US20150110965A1 (en) 2015-04-23
US9175399B2 (en) 2015-11-03
EP2671969A1 (en) 2013-12-11
KR20150024317A (ko) 2015-03-06
TW201406992A (zh) 2014-02-16
WO2013182489A3 (en) 2014-07-17
KR101930585B1 (ko) 2018-12-18

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B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06I Publication of requirement cancelled [chapter 6.9 patent gazette]

Free format text: ANULADA A PUBLICACAO CODIGO 6.6.1 NA RPI NO 2462 DE 13/03/2018 POR TER SIDO INDEVIDA.

B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B06G Technical and formal requirements: other requirements [chapter 6.7 patent gazette]
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 31/05/2013, OBSERVADAS AS CONDICOES LEGAIS.