BE797454A - Procede de fabrication de couches minces de tantale et couches obtenues - Google Patents

Procede de fabrication de couches minces de tantale et couches obtenues

Info

Publication number
BE797454A
BE797454A BE129374A BE129374A BE797454A BE 797454 A BE797454 A BE 797454A BE 129374 A BE129374 A BE 129374A BE 129374 A BE129374 A BE 129374A BE 797454 A BE797454 A BE 797454A
Authority
BE
Belgium
Prior art keywords
layers
tantalum
manufacturing thin
thin layers
layers obtained
Prior art date
Application number
BE129374A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BE797454A publication Critical patent/BE797454A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/25—Metals
    • C03C2217/263—Metals other than noble metals, Cu or Hg
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
BE129374A 1972-03-28 1973-03-28 Procede de fabrication de couches minces de tantale et couches obtenues BE797454A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2215151A DE2215151C3 (de) 1972-03-28 1972-03-28 Verfahren zum Herstellen von dünnen Schichten aus Tantal

Publications (1)

Publication Number Publication Date
BE797454A true BE797454A (fr) 1973-07-16

Family

ID=5840438

Family Applications (1)

Application Number Title Priority Date Filing Date
BE129374A BE797454A (fr) 1972-03-28 1973-03-28 Procede de fabrication de couches minces de tantale et couches obtenues

Country Status (10)

Country Link
US (1) US3878079A (fr)
JP (1) JPS498425A (fr)
BE (1) BE797454A (fr)
CA (1) CA1014518A (fr)
CH (1) CH582754A5 (fr)
DE (1) DE2215151C3 (fr)
FR (1) FR2177708B1 (fr)
GB (1) GB1400371A (fr)
IT (1) IT983627B (fr)
NL (1) NL7304329A (fr)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5654207A (en) * 1903-02-03 1997-08-05 Sharp Kabushiki Kaisha Method of making two-terminal nonlinear device and liquid crystal apparatus including the same
CA1014889A (fr) * 1974-12-06 1977-08-02 Bell-Northern Research Ltd. Pellicules minces a dielectrique pulverise
US4006073A (en) * 1975-04-03 1977-02-01 The United States Of America As Represented By The United States Energy Research And Development Administration Thin film deposition by electric and magnetic crossed-field diode sputtering
US4025410A (en) * 1975-08-25 1977-05-24 Western Electric Company, Inc. Sputtering apparatus and methods using a magnetic field
US4036708A (en) * 1976-05-13 1977-07-19 Bell Telephone Laboratories, Incorporated Technique for nucleating b.c.c. tantalum films on insulating substrates
US4647361A (en) * 1985-09-03 1987-03-03 International Business Machines Corporation Sputtering apparatus
JPS6285062A (ja) * 1985-10-09 1987-04-18 ユニチカ株式会社 長繊維からなるウエブの製造方法
US5506037A (en) * 1989-12-09 1996-04-09 Saint Gobain Vitrage International Heat-reflecting and/or electrically heatable laminated glass pane
DE3940748A1 (de) * 1989-12-09 1991-06-13 Ver Glaswerke Gmbh Elektrisch beheizbare autoglasscheibe aus verbundglas
FR2657343B1 (fr) * 1990-01-19 1993-01-29 Saint Gobain Vitrage Int Couche mince pour vitrage de protection solaire.
JPH03248568A (ja) * 1990-02-27 1991-11-06 Fuji Xerox Co Ltd 薄膜半導体装置
JPH0819516B2 (ja) * 1990-10-26 1996-02-28 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 薄膜状のアルファＴａを形成するための方法および構造
US5221449A (en) * 1990-10-26 1993-06-22 International Business Machines Corporation Method of making Alpha-Ta thin films
US5281554A (en) * 1991-02-08 1994-01-25 Sharp Kabushiki Kaisha Method for producing a semiconductor device having a tantalum thin film
JP2741814B2 (ja) * 1991-12-26 1998-04-22 シャープ株式会社 タンタル金属薄膜の製造方法
US6355146B1 (en) * 1996-04-03 2002-03-12 The Regents Of The University Of California Sputtering process and apparatus for coating powders
US6139699A (en) * 1997-05-27 2000-10-31 Applied Materials, Inc. Sputtering methods for depositing stress tunable tantalum and tantalum nitride films
US6911124B2 (en) * 1998-09-24 2005-06-28 Applied Materials, Inc. Method of depositing a TaN seed layer
US20050272254A1 (en) * 1997-11-26 2005-12-08 Applied Materials, Inc. Method of depositing low resistivity barrier layers for copper interconnects
US7253109B2 (en) * 1997-11-26 2007-08-07 Applied Materials, Inc. Method of depositing a tantalum nitride/tantalum diffusion barrier layer system
TW520551B (en) 1998-09-24 2003-02-11 Applied Materials Inc Method for fabricating ultra-low resistivity tantalum films
US6348113B1 (en) 1998-11-25 2002-02-19 Cabot Corporation High purity tantalum, products containing the same, and methods of making the same
JP3402313B2 (ja) * 2000-07-05 2003-05-06 株式会社村田製作所 弾性表面波装置の製造方法
DK174876B1 (da) * 2001-02-26 2004-01-12 Danfoss As Implantat og implantatoverflademodificeringsproces
US7214295B2 (en) 2001-04-09 2007-05-08 Vishay Dale Electronics, Inc. Method for tantalum pentoxide moisture barrier in film resistors
WO2003008660A1 (fr) * 2001-07-19 2003-01-30 Trikon Holdings Limited Depot d'une couche de tantale
US6926390B2 (en) * 2003-02-05 2005-08-09 Hewlett-Packard Development Company, L.P. Method of forming mixed-phase compressive tantalum thin films using nitrogen residual gas, thin films and fluid ejection devices including same
US6893116B2 (en) 2003-04-29 2005-05-17 Hewlett-Packard Development Company, L.P. Fluid ejection device with compressive alpha-tantalum layer
US6955835B2 (en) * 2003-04-30 2005-10-18 Hewlett-Packard Development Company, L.P. Method for forming compressive alpha-tantalum on substrates and devices including the same
JP3646723B2 (ja) * 2003-08-12 2005-05-11 セイコーエプソン株式会社 半導体装置の製造方法
EP1730072A2 (fr) * 2004-03-24 2006-12-13 H.C. Starck Inc. Procedes de formation de films de tantale alpha et beta a nouvelles microstructures modulees
JPWO2011010655A1 (ja) * 2009-07-21 2013-01-07 株式会社アルバック αタンタルからなる被膜の成膜方法、及びその被膜
CN110499493B (zh) * 2019-08-30 2021-08-31 西安工程大学 一种制备可抑制杀菌活性的Ta2O5@Ag双相微纳结构的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3258413A (en) * 1961-12-20 1966-06-28 Bell Telephone Labor Inc Method for the fabrication of tantalum film resistors
US3395089A (en) * 1964-12-14 1968-07-30 Bell Telephone Labor Inc Method of depositing films of controlled specific resistivity and temperature coefficient of resistance using cathode sputtering

Also Published As

Publication number Publication date
JPS498425A (fr) 1974-01-25
DE2215151A1 (de) 1973-10-04
CA1014518A (en) 1977-07-26
GB1400371A (en) 1975-07-16
NL7304329A (fr) 1973-10-02
IT983627B (it) 1974-11-11
CH582754A5 (fr) 1976-12-15
US3878079A (en) 1975-04-15
FR2177708B1 (fr) 1975-01-03
FR2177708A1 (fr) 1973-11-09
DE2215151B2 (de) 1978-09-28
DE2215151C3 (de) 1979-05-23

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