AU665696B2 - Optical waveguide and method of fabricating the same - Google Patents

Optical waveguide and method of fabricating the same Download PDF

Info

Publication number
AU665696B2
AU665696B2 AU53144/94A AU5314494A AU665696B2 AU 665696 B2 AU665696 B2 AU 665696B2 AU 53144/94 A AU53144/94 A AU 53144/94A AU 5314494 A AU5314494 A AU 5314494A AU 665696 B2 AU665696 B2 AU 665696B2
Authority
AU
Australia
Prior art keywords
optical waveguide
fabricating
cladding layer
gas
waveguide according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU53144/94A
Other languages
English (en)
Other versions
AU5314494A (en
Inventor
Haruhiko Aikawa
Chisai Hirose
Shinji Ishikawa
Hiroo Kanamori
Takashi Kogo
Masahide Saito
Akira Urano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5169259A external-priority patent/JPH06265743A/ja
Priority claimed from JP5188346A external-priority patent/JPH0743541A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of AU5314494A publication Critical patent/AU5314494A/en
Application granted granted Critical
Publication of AU665696B2 publication Critical patent/AU665696B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C13/00—Fibre or filament compositions
    • C03C13/04—Fibre optics, e.g. core and clad fibre compositions
    • C03C13/045—Silica-containing oxide glass compositions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optical Integrated Circuits (AREA)
AU53144/94A 1993-01-14 1994-01-13 Optical waveguide and method of fabricating the same Ceased AU665696B2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP507393 1993-01-14
JP5-5073 1993-01-14
JP5-188346 1993-01-29
JP5169259A JPH06265743A (ja) 1993-01-14 1993-07-08 光導波路の作製方法
JP5-169259 1993-07-08
JP5188346A JPH0743541A (ja) 1993-07-29 1993-07-29 光導波路の作製方法

Publications (2)

Publication Number Publication Date
AU5314494A AU5314494A (en) 1994-07-21
AU665696B2 true AU665696B2 (en) 1996-01-11

Family

ID=27276579

Family Applications (1)

Application Number Title Priority Date Filing Date
AU53144/94A Ceased AU665696B2 (en) 1993-01-14 1994-01-13 Optical waveguide and method of fabricating the same

Country Status (8)

Country Link
US (1) US5551966A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0607884B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR0180921B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1088522C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU (1) AU665696B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA2113379A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69417932T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (2) TW263566B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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Publication number Priority date Publication date Assignee Title
JPH0854528A (ja) * 1994-08-10 1996-02-27 Furukawa Electric Co Ltd:The 光導波路の製造方法
GB2312525A (en) * 1996-04-24 1997-10-29 Northern Telecom Ltd Providing cladding on planar optical waveguide by heating to flow
GB2314346A (en) * 1996-06-22 1997-12-24 Northern Telecom Ltd Rapid thermal annealing
US6952504B2 (en) * 2001-12-21 2005-10-04 Neophotonics Corporation Three dimensional engineering of planar optical structures
US7384680B2 (en) 1997-07-21 2008-06-10 Nanogram Corporation Nanoparticle-based power coatings and corresponding structures
US6788866B2 (en) 2001-08-17 2004-09-07 Nanogram Corporation Layer materials and planar optical devices
WO2002032588A1 (en) * 2000-10-17 2002-04-25 Neophotonics Corporation Coating formation by reactive deposition
US7575784B1 (en) 2000-10-17 2009-08-18 Nanogram Corporation Coating formation by reactive deposition
US6919054B2 (en) * 2002-04-10 2005-07-19 Neophotonics Corporation Reactant nozzles within flowing reactors
WO2002044765A2 (en) 2000-10-26 2002-06-06 Nanogram Corporation Multilayered optical structures
US5930439A (en) * 1997-10-01 1999-07-27 Northern Telecom Limited Planar optical waveguide
DE19831719A1 (de) * 1998-07-15 2000-01-20 Alcatel Sa Verfahren zur Herstellung planarer Wellenleiterstrukturen sowie Wellenleiterstruktur
GB2346452A (en) * 1999-02-05 2000-08-09 Univ Glasgow Waveguides
WO2001038243A1 (en) * 1999-11-24 2001-05-31 Corning Incorporated Method for radially consolidating a porous optical fiber preform
JP3551895B2 (ja) * 2000-01-12 2004-08-11 住友電気工業株式会社 石英系光導波路及びその製造方法
JP2001281487A (ja) * 2000-03-30 2001-10-10 Furukawa Electric Co Ltd:The 光導波路装置およびその製造方法
US6947651B2 (en) 2001-05-10 2005-09-20 Georgia Tech Research Corporation Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof
US6917511B1 (en) 2001-08-14 2005-07-12 Neophotonics Corporation Reactive deposition for the formation of chip capacitors
US8865271B2 (en) * 2003-06-06 2014-10-21 Neophotonics Corporation High rate deposition for the formation of high quality optical coatings
US7521097B2 (en) * 2003-06-06 2009-04-21 Nanogram Corporation Reactive deposition for electrochemical cell production
US7491431B2 (en) * 2004-12-20 2009-02-17 Nanogram Corporation Dense coating formation by reactive deposition
WO2008156631A2 (en) * 2007-06-15 2008-12-24 Nanogram Corporation Reactive flow deposition and synthesis of inorganic foils
US20090233088A1 (en) * 2008-03-13 2009-09-17 Lewis Mark A In situ nano-particle matrix loading of metal oxide coatings via combustion deposition
DE102010063176A1 (de) * 2010-12-15 2012-06-21 Hilti Aktiengesellschaft Elektrisch betreibbares Bolzensetzgerät
JP5781303B2 (ja) * 2010-12-31 2015-09-16 株式会社Sumco シリカガラスルツボ製造方法およびシリカガラスルツボ製造装置
CN108646345B (zh) * 2018-05-16 2020-04-14 德州尧鼎光电科技有限公司 一种深紫外平面光波导制作方法
CN108427159B (zh) * 2018-05-16 2020-04-14 德州尧鼎光电科技有限公司 一种深紫外平面光波导

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2066805A (en) * 1979-12-17 1981-07-15 Nippon Telegraph & Telephone Glass waveguide for optical circuit and fabrication method thereof
US5179614A (en) * 1990-09-20 1993-01-12 Sumitomo Electric Industries, Ltd. Quartz optical waveguide and method for producing the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3823945A (en) * 1971-07-02 1974-07-16 Peripheral Syst Corp Controlled transport of a flexible medium
JPS5781213A (en) * 1980-11-11 1982-05-21 Nippon Telegr & Teleph Corp <Ntt> Production of thin film for optical waveguide
JPS58105111A (ja) * 1981-12-18 1983-06-22 Nippon Telegr & Teleph Corp <Ntt> ガラス光導波膜の製造方法および製造装置
US4494968A (en) * 1983-10-03 1985-01-22 Corning Glass Works Method of forming laminated single polarization fiber
CA1284921C (en) * 1984-02-27 1991-06-18 Hiroyuki Suda Method, apparatus and burner for fabricating an optical fiber preform
GB8515814D0 (en) * 1985-06-21 1985-07-24 British Telecomm Fabrication of optical waveguides
JP2599488B2 (ja) * 1990-02-26 1997-04-09 日本電信電話株式会社 光導波回路の特性調整方法およびその方法に使われる光導波回路
US5198008A (en) * 1990-11-09 1993-03-30 National Semiconductor Corporation Method of fabricating an optical interconnect structure
US5141549A (en) * 1991-05-17 1992-08-25 The Charles Stark Draper Laboratories Method of fabricating rare earth doped planar optical waveguide for integrated optical circuit
US5194079A (en) * 1991-09-17 1993-03-16 The Charles Stark Draper Laboratory, Inc. Method of forming an optical channel waveguide by thermal diffusion
US5196041A (en) * 1991-09-17 1993-03-23 The Charles Stark Draper Laboratory, Inc. Method of forming an optical channel waveguide by gettering

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2066805A (en) * 1979-12-17 1981-07-15 Nippon Telegraph & Telephone Glass waveguide for optical circuit and fabrication method thereof
US5179614A (en) * 1990-09-20 1993-01-12 Sumitomo Electric Industries, Ltd. Quartz optical waveguide and method for producing the same

Also Published As

Publication number Publication date
DE69417932T2 (de) 1999-09-30
EP0607884B1 (en) 1999-04-21
CA2113379A1 (en) 1994-07-15
KR0180921B1 (ko) 1999-05-15
DE69417932D1 (de) 1999-05-27
EP0607884A1 (en) 1994-07-27
TW263566B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-11-21
TW243500B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-03-21
US5551966A (en) 1996-09-03
AU5314494A (en) 1994-07-21
CN1092178A (zh) 1994-09-14
CN1088522C (zh) 2002-07-31

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Date Code Title Description
MK14 Patent ceased section 143(a) (annual fees not paid) or expired