AU602143B2 - Compound semiconductor device - Google Patents

Compound semiconductor device Download PDF

Info

Publication number
AU602143B2
AU602143B2 AU72653/87A AU7265387A AU602143B2 AU 602143 B2 AU602143 B2 AU 602143B2 AU 72653/87 A AU72653/87 A AU 72653/87A AU 7265387 A AU7265387 A AU 7265387A AU 602143 B2 AU602143 B2 AU 602143B2
Authority
AU
Australia
Prior art keywords
compound semiconductor
type
film layers
semiconductor thin
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU72653/87A
Other languages
English (en)
Other versions
AU7265387A (en
Inventor
Yuichi Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of AU7265387A publication Critical patent/AU7265387A/en
Application granted granted Critical
Publication of AU602143B2 publication Critical patent/AU602143B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/473—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT
    • H10D30/4732—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/815—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
    • H10D62/8161—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices
    • H10D62/8162—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation
    • H10D62/8164—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation comprising only semiconductor materials 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
AU72653/87A 1986-04-30 1987-05-08 Compound semiconductor device Ceased AU602143B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61099928A JPS62256478A (ja) 1986-04-30 1986-04-30 化合物半導体装置
JP61-99928 1986-04-30

Publications (2)

Publication Number Publication Date
AU7265387A AU7265387A (en) 1987-11-05
AU602143B2 true AU602143B2 (en) 1990-10-04

Family

ID=14260410

Family Applications (1)

Application Number Title Priority Date Filing Date
AU72653/87A Ceased AU602143B2 (en) 1986-04-30 1987-05-08 Compound semiconductor device

Country Status (6)

Country Link
US (1) US4894691A (enrdf_load_stackoverflow)
EP (1) EP0243953B1 (enrdf_load_stackoverflow)
JP (1) JPS62256478A (enrdf_load_stackoverflow)
AU (1) AU602143B2 (enrdf_load_stackoverflow)
CA (1) CA1277440C (enrdf_load_stackoverflow)
DE (1) DE3783507T2 (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227644A (en) * 1989-07-06 1993-07-13 Nec Corporation Heterojunction field effect transistor with improve carrier density and mobility
US5633512A (en) * 1990-05-23 1997-05-27 Canon Kabushiki Kaisha Semiconductor device for varying the mobility of electrons by light irradiation
JP2919581B2 (ja) * 1990-08-31 1999-07-12 三洋電機株式会社 速度変調トランジスタ
GB2248966A (en) * 1990-10-19 1992-04-22 Philips Electronic Associated Field effect semiconductor devices
JP2786327B2 (ja) * 1990-10-25 1998-08-13 三菱電機株式会社 ヘテロ接合電界効果トランジスタ
EP0533568A1 (en) * 1991-09-17 1993-03-24 Sumitomo Electric Industries, Ltd. Superconducting thin film formed of oxide superconductor material, superconducting device utilizing the superconducting thin film and method for manufacturing thereof
US5274246A (en) * 1992-05-04 1993-12-28 The United States Of America As Represented By The Secretary Of The Air Force Optical modulation and switching with enhanced third order nonlinearity multiple quantum well effects
NZ286025A (en) * 1995-03-01 1997-04-24 Colgate Palmolive Co Laundry detergent concentrates; contains nonionic surfactant and water insoluble oil with a hydrophilic polar group, converts to liquid crystal phase dispersion on dilution
JP3141838B2 (ja) * 1998-03-12 2001-03-07 日本電気株式会社 電界効果トランジスタ
US6878576B1 (en) * 2003-06-26 2005-04-12 Rj Mears, Llc Method for making semiconductor device including band-engineered superlattice
US6897472B2 (en) * 2003-06-26 2005-05-24 Rj Mears, Llc Semiconductor device including MOSFET having band-engineered superlattice
TWI404209B (zh) * 2009-12-31 2013-08-01 Univ Nat Chiao Tung 高電子遷移率電晶體及其製作方法
US8690134B1 (en) 2012-06-06 2014-04-08 Ben J. Saam Equipment support rack assembly
KR20150038217A (ko) * 2012-07-24 2015-04-08 스미또모 가가꾸 가부시키가이샤 반도체 기판, 반도체 기판의 제조 방법 및 복합 기판의 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU405136B2 (en) * 1966-08-16 1968-02-22 Improvements in or relating to semiconductor devices
EP0186460A2 (en) * 1984-12-22 1986-07-02 Fujitsu Limited Semiconductor photodetector
AU593086B2 (en) * 1986-04-05 1990-02-01 Sumitomo Electric Industries, Ltd. Compound semiconductor device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4194935A (en) * 1978-04-24 1980-03-25 Bell Telephone Laboratories, Incorporated Method of making high mobility multilayered heterojunction devices employing modulated doping
JPS58178572A (ja) * 1982-04-14 1983-10-19 Hiroyuki Sakaki 移動度変調形電界効果トランジスタ
US4797716A (en) * 1984-04-04 1989-01-10 The United States Of America As Represented By The United States Department Of Energy Field-effect transistor having a superlattice channel and high carrier velocities at high applied fields
US4697197A (en) * 1985-10-11 1987-09-29 Rca Corp. Transistor having a superlattice

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU405136B2 (en) * 1966-08-16 1968-02-22 Improvements in or relating to semiconductor devices
EP0186460A2 (en) * 1984-12-22 1986-07-02 Fujitsu Limited Semiconductor photodetector
AU593086B2 (en) * 1986-04-05 1990-02-01 Sumitomo Electric Industries, Ltd. Compound semiconductor device

Also Published As

Publication number Publication date
EP0243953A3 (en) 1990-04-25
EP0243953A2 (en) 1987-11-04
AU7265387A (en) 1987-11-05
DE3783507T2 (de) 1993-07-29
DE3783507D1 (de) 1993-02-25
JPH0354854B2 (enrdf_load_stackoverflow) 1991-08-21
JPS62256478A (ja) 1987-11-09
CA1277440C (en) 1990-12-04
EP0243953B1 (en) 1993-01-13
US4894691A (en) 1990-01-16

Similar Documents

Publication Publication Date Title
AU602143B2 (en) Compound semiconductor device
US5285087A (en) Heterojunction field effect transistor
Ploog et al. Fundamental studies and device application of δ-doping in GaAs Layers and in AlxGa1− xAs/GaAs heterostructures
Ploog Delta-(-) doping in MBE-grown GaAs: concept and device application
US4772925A (en) High speed switching field effect transistor
US5298441A (en) Method of making high transconductance heterostructure field effect transistor
US4797716A (en) Field-effect transistor having a superlattice channel and high carrier velocities at high applied fields
JPH02292832A (ja) 共鳴トンネリング半導体デバイス
KR920006434B1 (ko) 공진 터널링 장벽구조장치
US4371884A (en) InAs-GaSb Tunnel diode
US4600932A (en) Enhanced mobility buried channel transistor structure
Luo et al. p-channel modulation-doped field-effect transistors based on AlSb/sub 0.9/As/sub 0.1//GaSb
JPH0312769B2 (enrdf_load_stackoverflow)
US5497012A (en) Unipolar band minima devices
US4689646A (en) Depletion mode two-dimensional electron gas field effect transistor and the method for manufacturing the same
Yamaga Epitaxial ZnS MπS blue light emitting diode fabricated on n+-GaAs by low-pressure metalorganic vapor phase epitaxy
JPS6052060A (ja) 電界効果トランジスタ
US4823171A (en) Compound semiconductor device
Bolognesi et al. InAs channel heterostructure‐field effect transistors with InAs/AlSb short‐period superlattice barriers
JPH0654786B2 (ja) ヘテロ接合半導体デバイス
US5081512A (en) Electronic devices
JPH0620142B2 (ja) 半導体装置
Bolognesi et al. Gate metallurgy effects in InAs/AlSb HFETs: Preliminary results and demonstration of surface fermi level shifts
Feuer et al. InGaAs/InAlAs heterostructure diodes for application to high-speed semiconductor-gated FET's
EP0146962A2 (en) Semiconductor device having hetero-structure