AU2002236687A1 - Thermal convection accelerometer with closed-loop heater control - Google Patents

Thermal convection accelerometer with closed-loop heater control

Info

Publication number
AU2002236687A1
AU2002236687A1 AU2002236687A AU3668702A AU2002236687A1 AU 2002236687 A1 AU2002236687 A1 AU 2002236687A1 AU 2002236687 A AU2002236687 A AU 2002236687A AU 3668702 A AU3668702 A AU 3668702A AU 2002236687 A1 AU2002236687 A1 AU 2002236687A1
Authority
AU
Australia
Prior art keywords
closed
heater control
thermal convection
loop heater
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002236687A
Other languages
English (en)
Inventor
Adrian Paul Brokaw
Alexander Dribinsky
Albert M. Leung
Gregory P. Pucci
Michael E. Rebeschini
Yang Zhao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analog Devices Inc
Memsic Inc
Original Assignee
Analog Devices Inc
Memsic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc, Memsic Inc filed Critical Analog Devices Inc
Publication of AU2002236687A1 publication Critical patent/AU2002236687A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/006—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses
    • G01P15/008—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses by using thermal pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Volume Flow (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
AU2002236687A 2000-11-03 2001-10-24 Thermal convection accelerometer with closed-loop heater control Abandoned AU2002236687A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/705,996 US6795752B1 (en) 2000-11-03 2000-11-03 Thermal convection accelerometer with closed-loop heater control
US09/705,996 2000-11-03
PCT/US2001/051364 WO2002041007A2 (en) 2000-11-03 2001-10-24 Thermal convection accelerometer with closed-loop heater control

Publications (1)

Publication Number Publication Date
AU2002236687A1 true AU2002236687A1 (en) 2002-05-27

Family

ID=24835785

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002236687A Abandoned AU2002236687A1 (en) 2000-11-03 2001-10-24 Thermal convection accelerometer with closed-loop heater control

Country Status (4)

Country Link
US (1) US6795752B1 (ja)
JP (1) JP4252305B2 (ja)
AU (1) AU2002236687A1 (ja)
WO (1) WO2002041007A2 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7392703B2 (en) * 2004-06-09 2008-07-01 Memsic, Inc. Z-axis thermal accelerometer
US7305881B2 (en) * 2004-06-09 2007-12-11 Memsic, Inc. Method and circuitry for thermal accelerometer signal conditioning
US20060179940A1 (en) * 2005-02-11 2006-08-17 Finemems Inc. Ultra-small Profile, Low Cost Chip Scale Accelerometers of Two and Three Axes Based on Wafer Level Packaging
FR2885700B1 (fr) * 2005-05-13 2007-08-17 Sagem Defense Securite Accelerometre thermique a detection et contre-reaction multiplexees
JP2007076614A (ja) * 2005-09-16 2007-03-29 Denso Corp 車両用盗難防止装置
KR100725458B1 (ko) * 2005-12-23 2007-06-07 삼성전자주식회사 온도 보상 셀프 리프레시 신호를 공유하는 멀티 칩 패키지
US7461535B2 (en) * 2006-03-01 2008-12-09 Memsic, Inc. Multi-temperature programming for accelerometer
US7460008B2 (en) * 2006-05-19 2008-12-02 Fennelly James P Programmable temperature compensated tilt switch and method of operation
JP4955334B2 (ja) * 2006-08-03 2012-06-20 ローム株式会社 加速度センサ
US7813851B2 (en) * 2007-02-21 2010-10-12 Autoliv Asp, Inc. Sensing misalignment detection and estimation system
US7856879B2 (en) * 2007-12-11 2010-12-28 Memsic, Inc. Heater controller having improved start-up for thermal sensor
GB2457683A (en) * 2008-02-21 2009-08-26 Toumaz Technology Ltd A CMOS operational amplifier with chopper stabilization and a switched output
US8011226B2 (en) * 2008-08-26 2011-09-06 Memsic, Inc. Leakage detection method using micromachined-thermal-convection accelerometer
US8596864B2 (en) * 2008-11-18 2013-12-03 Toshiba America Electronic Components, Inc. Digital output temperature sensor and method of temperature sensing
WO2012172528A1 (en) 2011-06-17 2012-12-20 Universidade Do Minho 3 axis polymeric accelerometer and method of production
TWI456201B (zh) 2011-11-29 2014-10-11 Univ Chung Hua 無線式熱氣泡式加速儀及其製備方法
JP6194562B2 (ja) * 2013-07-26 2017-09-13 Ｎｅｃプラットフォームズ株式会社 検出回路、温度センサおよび検出方法
JP2020500049A (ja) * 2016-10-20 2020-01-09 ヘルスアップ エスピー．ゼット オー．オー．Ｈｅａｌｔｈｕｐ Ｓｐ． Ｚ Ｏ．Ｏ． 携帯型肺活量計
US10139124B2 (en) * 2017-01-13 2018-11-27 Lennox Industries Inc. Method and apparatus for system diagnostics using accelerometers
EP4012383B1 (en) 2018-10-30 2023-12-20 Sciosense B.V. Electro-thermal based device and method for operating a heater
US11067322B2 (en) 2019-01-30 2021-07-20 Lennox Industries Inc. Method and apparatus for preventing component malfunction using accelerometers
CN112748256A (zh) * 2019-10-29 2021-05-04 美新半导体（无锡）有限公司 一种热交换式加速度计及其加热控制方法

Family Cites Families (22)

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Publication number Priority date Publication date Assignee Title
US2455394A (en) 1943-06-29 1948-12-07 Sperry Corp Accelerometer
US2440189A (en) 1945-04-13 1948-04-20 Rca Corp Convection current responsive instrument
US4478077A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4651564A (en) 1982-09-30 1987-03-24 Honeywell Inc. Semiconductor device
US4542650A (en) 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
US4637253A (en) 1984-05-22 1987-01-20 Kabushiki Kaisha Toshiba Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
US4595884A (en) * 1984-10-19 1986-06-17 Tobar, Inc. Transducer amplifier and method
US5229709A (en) * 1990-06-29 1993-07-20 U.S. Philips Corp. Integrated circuit with temperature compensation
US5339285A (en) * 1993-04-12 1994-08-16 The United States Of America As Represented By The Secretary Of The Navy Monolithic low noise preamplifier for piezoelectric sensors
JP3332283B2 (ja) * 1994-03-24 2002-10-07 本田技研工業株式会社 多軸加速度センサ
US5719333A (en) * 1994-01-20 1998-02-17 Honda Giken Kogyo Kabushiki Kaisha Acceleration sensor
JP3345695B2 (ja) * 1994-02-23 2002-11-18 本田技研工業株式会社 加速度センサ
JPH0868677A (ja) * 1994-06-21 1996-03-12 Ricoh Co Ltd 感熱式流速測定装置
US5581034A (en) 1995-01-13 1996-12-03 Remec, Inc. Convective accelerometer and inclinometer
FR2732467B1 (fr) 1995-02-10 1999-09-17 Bosch Gmbh Robert Capteur d'acceleration et procede de fabrication d'un tel capteur
JPH09306637A (ja) * 1996-05-10 1997-11-28 Ricoh Co Ltd ヒータ制御装置
US6182509B1 (en) * 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
US5861775A (en) * 1997-01-16 1999-01-19 Ford Global Technologies, Inc. Signal conditioning circuit for low amplitude, high common mode voltage input signals
WO2004090556A1 (ja) * 1997-11-11 2004-10-21 Makoto Ishida シリコン集積化加速度センサ
JP2000065850A (ja) * 1998-08-26 2000-03-03 Nissan Motor Co Ltd 熱型加速度センサ
US6171880B1 (en) 1999-06-14 2001-01-09 The United States Of America As Represented By The Secretary Of Commerce Method of manufacture of convective accelerometers
US6281751B1 (en) * 1999-08-16 2001-08-28 Cirrus Logic, Inc. Frequency compensation for single-ended class AB operational amplifiers with fully-differential input stages

Also Published As

Publication number Publication date
WO2002041007A2 (en) 2002-05-23
JP4252305B2 (ja) 2009-04-08
WO2002041007A3 (en) 2002-08-01
JP2004514140A (ja) 2004-05-13
US6795752B1 (en) 2004-09-21

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