AU2001288586A1 - Direct acting vertical thermal actuator with controlled bending - Google Patents

Direct acting vertical thermal actuator with controlled bending

Info

Publication number
AU2001288586A1
AU2001288586A1 AU2001288586A AU8858601A AU2001288586A1 AU 2001288586 A1 AU2001288586 A1 AU 2001288586A1 AU 2001288586 A AU2001288586 A AU 2001288586A AU 8858601 A AU8858601 A AU 8858601A AU 2001288586 A1 AU2001288586 A1 AU 2001288586A1
Authority
AU
Australia
Prior art keywords
thermal actuator
direct acting
vertical thermal
controlled bending
acting vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001288586A
Inventor
Douglas P. Goetz
Kathy L. Hagen
Michael E Hamerly
Robert G. Smith
Silva K. Theiss
Billy L. Weaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of AU2001288586A1 publication Critical patent/AU2001288586A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
AU2001288586A 2000-09-12 2001-08-30 Direct acting vertical thermal actuator with controlled bending Abandoned AU2001288586A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/659,798 US6531947B1 (en) 2000-09-12 2000-09-12 Direct acting vertical thermal actuator with controlled bending
US09/659,798 2000-09-12
PCT/US2001/027144 WO2002022493A2 (en) 2000-09-12 2001-08-30 Direct acting vertical thermal actuator with controlled bending

Publications (1)

Publication Number Publication Date
AU2001288586A1 true AU2001288586A1 (en) 2002-03-26

Family

ID=24646886

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001288586A Abandoned AU2001288586A1 (en) 2000-09-12 2001-08-30 Direct acting vertical thermal actuator with controlled bending

Country Status (9)

Country Link
US (2) US6531947B1 (en)
EP (1) EP1317397A2 (en)
JP (1) JP2004508953A (en)
KR (1) KR20030067665A (en)
AU (1) AU2001288586A1 (en)
CA (1) CA2419137A1 (en)
IL (1) IL154411A0 (en)
TW (1) TW520340B (en)
WO (1) WO2002022493A2 (en)

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Also Published As

Publication number Publication date
WO2002022493A3 (en) 2002-08-01
US20030137389A1 (en) 2003-07-24
WO2002022493A8 (en) 2003-11-20
IL154411A0 (en) 2003-09-17
TW520340B (en) 2003-02-11
WO2002022493A2 (en) 2002-03-21
CA2419137A1 (en) 2002-03-21
JP2004508953A (en) 2004-03-25
KR20030067665A (en) 2003-08-14
EP1317397A2 (en) 2003-06-11
US6531947B1 (en) 2003-03-11

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