AU2001283434A1 - Combination horizontal and vertical thermal actuator - Google Patents

Combination horizontal and vertical thermal actuator

Info

Publication number
AU2001283434A1
AU2001283434A1 AU2001283434A AU8343401A AU2001283434A1 AU 2001283434 A1 AU2001283434 A1 AU 2001283434A1 AU 2001283434 A AU2001283434 A AU 2001283434A AU 8343401 A AU8343401 A AU 8343401A AU 2001283434 A1 AU2001283434 A1 AU 2001283434A1
Authority
AU
Australia
Prior art keywords
thermal actuator
vertical thermal
combination horizontal
horizontal
combination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001283434A
Inventor
Douglas P. Goetz
Kathy L. Hagen
Mike E. Hamerly
Robert G. Smith
Silva K. Theiss
Billy L. Weaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of AU2001283434A1 publication Critical patent/AU2001283434A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/01—Details
AU2001283434A 2000-09-12 2001-08-17 Combination horizontal and vertical thermal actuator Abandoned AU2001283434A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/659,282 2000-09-12
US09/659,282 US6483419B1 (en) 2000-09-12 2000-09-12 Combination horizontal and vertical thermal actuator
PCT/US2001/025786 WO2002023565A2 (en) 2000-09-12 2001-08-17 Combination horizontal and vertical thermal actuator

Publications (1)

Publication Number Publication Date
AU2001283434A1 true AU2001283434A1 (en) 2002-03-26

Family

ID=24644792

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001283434A Abandoned AU2001283434A1 (en) 2000-09-12 2001-08-17 Combination horizontal and vertical thermal actuator

Country Status (9)

Country Link
US (2) US6483419B1 (en)
EP (1) EP1346383A2 (en)
JP (1) JP2004509368A (en)
KR (1) KR20030067666A (en)
AU (1) AU2001283434A1 (en)
CA (1) CA2422040A1 (en)
IL (1) IL154620A0 (en)
TW (1) TW502003B (en)
WO (1) WO2002023565A2 (en)

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US8093971B2 (en) * 2008-12-22 2012-01-10 General Electric Company Micro-electromechanical system switch
CN101905851A (en) * 2010-08-05 2010-12-08 上海交通大学 Electro-thermal micro-actuator based on combined action of alumina film and polymer
CN107628587B (en) * 2017-09-21 2019-07-23 中国传媒大学 A kind of multistage electrothermal drive MEMS actuator and its manufacturing method
US10332687B2 (en) 2017-10-23 2019-06-25 Blackberry Limited Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof
US10497774B2 (en) 2017-10-23 2019-12-03 Blackberry Limited Small-gap coplanar tunable capacitors and methods for manufacturing thereof
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11043444B2 (en) 2018-08-10 2021-06-22 Frore Systems Inc. Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices
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US11510341B2 (en) * 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
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EP4222379A1 (en) 2020-10-02 2023-08-09 Frore Systems Inc. Active heat sink

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Also Published As

Publication number Publication date
JP2004509368A (en) 2004-03-25
WO2002023565A2 (en) 2002-03-21
CA2422040A1 (en) 2002-03-21
US20030038703A1 (en) 2003-02-27
WO2002023565A3 (en) 2003-07-10
US6483419B1 (en) 2002-11-19
IL154620A0 (en) 2003-09-17
TW502003B (en) 2002-09-11
EP1346383A2 (en) 2003-09-24
KR20030067666A (en) 2003-08-14

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