AU2001283434A1 - Combination horizontal and vertical thermal actuator - Google Patents

Combination horizontal and vertical thermal actuator

Info

Publication number
AU2001283434A1
AU2001283434A1 AU2001283434A AU8343401A AU2001283434A1 AU 2001283434 A1 AU2001283434 A1 AU 2001283434A1 AU 2001283434 A AU2001283434 A AU 2001283434A AU 8343401 A AU8343401 A AU 8343401A AU 2001283434 A1 AU2001283434 A1 AU 2001283434A1
Authority
AU
Australia
Prior art keywords
thermal actuator
vertical thermal
combination horizontal
horizontal
combination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001283434A
Inventor
Douglas P. Goetz
Kathy L. Hagen
Mike E. Hamerly
Robert G. Smith
Silva K. Theiss
Billy L. Weaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of AU2001283434A1 publication Critical patent/AU2001283434A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/01—Details

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Position Or Direction (AREA)
  • Micromachines (AREA)
AU2001283434A 2000-09-12 2001-08-17 Combination horizontal and vertical thermal actuator Abandoned AU2001283434A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/659,282 2000-09-12
US09/659,282 US6483419B1 (en) 2000-09-12 2000-09-12 Combination horizontal and vertical thermal actuator
PCT/US2001/025786 WO2002023565A2 (en) 2000-09-12 2001-08-17 Combination horizontal and vertical thermal actuator

Publications (1)

Publication Number Publication Date
AU2001283434A1 true AU2001283434A1 (en) 2002-03-26

Family

ID=24644792

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001283434A Abandoned AU2001283434A1 (en) 2000-09-12 2001-08-17 Combination horizontal and vertical thermal actuator

Country Status (9)

Country Link
US (2) US6483419B1 (en)
EP (1) EP1346383A2 (en)
JP (1) JP2004509368A (en)
KR (1) KR20030067666A (en)
AU (1) AU2001283434A1 (en)
CA (1) CA2422040A1 (en)
IL (1) IL154620A0 (en)
TW (1) TW502003B (en)
WO (1) WO2002023565A2 (en)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6483419B1 (en) * 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US6708491B1 (en) * 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6679055B1 (en) * 2002-01-31 2004-01-20 Zyvex Corporation Electrothermal quadmorph microactuator
US20030201654A1 (en) * 2002-04-26 2003-10-30 Ellis Matthew D. Microgripper having linearly actuated grasping mechanisms
US20030200748A1 (en) * 2002-04-30 2003-10-30 Adc Telecommunications, Inc. Thermally-activated actuator
TW593125B (en) * 2002-08-09 2004-06-21 Ind Tech Res Inst MEMS type differential actuator
US6685303B1 (en) * 2002-08-14 2004-02-03 Eastman Kodak Company Thermal actuator with reduced temperature extreme and method of operating same
US6691513B1 (en) * 2002-08-16 2004-02-17 Pc Lens Corporation System and method for providing an improved electrothermal actuator for a micro-electro-mechanical device
KR100499273B1 (en) * 2002-10-21 2005-07-01 한국전자통신연구원 Silicon optical bench for packaging optical switch device, optical switch package and method for fabricating the silicon optical bench
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
WO2004066326A2 (en) * 2003-01-17 2004-08-05 The Regents Of The University Of California Electro-thermally actuated lateral contact microrelay and associated manufacturing process
JP2006522946A (en) * 2003-04-08 2006-10-05 ブッカム・テクノロジー・ピーエルシー Thermal actuator
US7036312B2 (en) * 2003-04-22 2006-05-02 Simpler Networks, Inc. MEMS actuators
US7096568B1 (en) 2003-07-10 2006-08-29 Zyvex Corporation Method of manufacturing a microcomponent assembly
US7025619B2 (en) * 2004-02-13 2006-04-11 Zyvex Corporation Sockets for microassembly
US6956219B2 (en) * 2004-03-12 2005-10-18 Zyvex Corporation MEMS based charged particle deflector design
US7081630B2 (en) * 2004-03-12 2006-07-25 Zyvex Corporation Compact microcolumn for automated assembly
FR2868591B1 (en) * 2004-04-06 2006-06-09 Commissariat Energie Atomique MICROCOMMUTER WITH LOW ACTUATION VOLTAGE AND LOW CONSUMPTION
US20060055499A1 (en) * 2004-09-16 2006-03-16 Bolle Cristian A Fuse arrangement
EP1866235B1 (en) * 2005-03-18 2011-09-21 Réseaux MEMS Mems actuators and switches
US20060245028A1 (en) * 2005-04-15 2006-11-02 Sriram Ramamoorthi Light modulator device
US7314382B2 (en) 2005-05-18 2008-01-01 Zyvex Labs, Llc Apparatus and methods of manufacturing and assembling microscale and nanoscale components and assemblies
KR100633101B1 (en) 2005-07-27 2006-10-12 삼성전자주식회사 Rf mems switch with unsymmetrical spring rigidity
US7548145B2 (en) * 2006-01-19 2009-06-16 Innovative Micro Technology Hysteretic MEMS thermal device and method of manufacture
GB0610392D0 (en) * 2006-05-25 2006-07-05 Univ Durham Electro-mechanical actuator and apparatus incorporating such device
US7605377B2 (en) * 2006-10-17 2009-10-20 Zyvex Corporation On-chip reflectron and ion optics
US20090033454A1 (en) * 2007-08-01 2009-02-05 Simpler Networks Inc. MEMS actuators with even stress distribution
US7733200B2 (en) * 2007-09-29 2010-06-08 Alcatel-Lucent Usa Inc. MEMS actuator
DE102008011175B4 (en) * 2008-02-26 2010-05-12 Nb Technologies Gmbh Micromechanical actuator and method for its production
KR100954544B1 (en) 2008-06-27 2010-04-22 한국산업기술대학교산학협력단 Apparatus for thermally actuated wavelength tunable light source
EP2168908A1 (en) * 2008-09-30 2010-03-31 Alcatel Lucent Micromechanical thermal actuator
US8093971B2 (en) * 2008-12-22 2012-01-10 General Electric Company Micro-electromechanical system switch
CN101905851A (en) * 2010-08-05 2010-12-08 上海交通大学 Electro-thermal micro-actuator based on combined action of alumina film and polymer
CN107628587B (en) * 2017-09-21 2019-07-23 中国传媒大学 A kind of multistage electrothermal drive MEMS actuator and its manufacturing method
US10497774B2 (en) 2017-10-23 2019-12-03 Blackberry Limited Small-gap coplanar tunable capacitors and methods for manufacturing thereof
US10332687B2 (en) 2017-10-23 2019-06-25 Blackberry Limited Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11710678B2 (en) 2018-08-10 2023-07-25 Frore Systems Inc. Combined architecture for cooling devices
US12089374B2 (en) 2018-08-10 2024-09-10 Frore Systems Inc. MEMS-based active cooling systems
US11802554B2 (en) 2019-10-30 2023-10-31 Frore Systems Inc. MEMS-based airflow system having a vibrating fan element arrangement
US11510341B2 (en) * 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US12033917B2 (en) 2019-12-17 2024-07-09 Frore Systems Inc. Airflow control in active cooling systems
WO2021126791A1 (en) 2019-12-17 2021-06-24 Frore Systems Inc. Mems-based cooling systems for closed and open devices
WO2022072286A1 (en) 2020-10-02 2022-04-07 Frore Systems Inc. Active heat sink

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423401A (en) * 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
US4688885A (en) 1985-05-28 1987-08-25 American Telephone And Telegraph Company, At&T Bell Laboratories Lightwave component package
CA1262304A (en) 1985-06-28 1989-10-17 John Charles Goodwin Laser-fiber positioner
GB8707854D0 (en) 1987-04-02 1987-05-07 British Telecomm Radiation deflector assembly
DE3809597A1 (en) 1988-03-22 1989-10-05 Fraunhofer Ges Forschung MICROMECHANICAL ACTUATOR
DE3844669A1 (en) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Micromechanical device
US5206557A (en) 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
US5351412A (en) 1991-06-11 1994-10-04 International Business Machines Corporation Micro positioning device
US5401983A (en) 1992-04-08 1995-03-28 Georgia Tech Research Corporation Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
DE69333551T2 (en) 1993-02-04 2005-06-23 Cornell Research Foundation, Inc. Single mask process for making microstructures, single crystal fabrication process
JPH0741207B2 (en) 1993-02-18 1995-05-10 インターナショナル・ビジネス・マシーンズ・コーポレイション Micro actuator
US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5446811A (en) 1994-03-14 1995-08-29 Hewlett-Packard Company Thermally actuated optical fiber switch
US5685062A (en) 1994-07-05 1997-11-11 Ford Motor Company Self-assembly fabrication method for planar micro-motor
FR2725038B1 (en) * 1994-09-27 1996-11-15 Dassault Automatismes BIDIRECTIONAL INTEGRATED OPTICAL SWITCH FOR SWITCHING THE LIGHT BEAM OF AN OPTICAL FIBER
EP0713117B1 (en) 1994-10-31 1999-09-08 Texas Instruments Incorporated Improvements in or relating to micromechanical devices
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
SE9501547D0 (en) 1995-04-27 1995-04-27 Pharmacia Ab Micromachined structures actuated by hinges and use thereof
US5602955A (en) 1995-06-07 1997-02-11 Mcdonnell Douglas Corporation Microactuator for precisely aligning an optical fiber and an associated fabrication method
US5962949A (en) * 1996-12-16 1999-10-05 Mcnc Microelectromechanical positioning apparatus
US5994816A (en) * 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US5912094A (en) 1997-05-15 1999-06-15 Lucent Technologies, Inc. Method and apparatus for making a micro device
AUPO794797A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A device (MEMS07)
US5960132A (en) 1997-09-09 1999-09-28 At&T Corp. Fiber-optic free-space micromachined matrix switches
US5963367A (en) * 1997-09-23 1999-10-05 Lucent Technologies, Inc. Micromechanical xyz stage for use with optical elements
US5994159A (en) 1997-12-22 1999-11-30 Lucent Technologies, Inc. Self-assemblying micro-mechanical device
US5995688A (en) 1998-06-01 1999-11-30 Lucent Technologies, Inc. Micro-opto-electromechanical devices and method therefor
US5959376A (en) 1998-09-10 1999-09-28 Sandia Corporation Microelectromechanical reciprocating-tooth indexing apparatus
US6101371A (en) 1998-09-12 2000-08-08 Lucent Technologies, Inc. Article comprising an inductor
US6014240A (en) 1998-12-01 2000-01-11 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
US6070656A (en) 1998-12-09 2000-06-06 The Aerospace Corporation Microelectronic substrate active thermal cooling wick
US6236300B1 (en) * 1999-03-26 2001-05-22 R. Sjhon Minners Bistable micro-switch and method of manufacturing the same
US6211598B1 (en) * 1999-09-13 2001-04-03 Jds Uniphase Inc. In-plane MEMS thermal actuator and associated fabrication methods
US6275325B1 (en) 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
US6483419B1 (en) * 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US6531947B1 (en) * 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending
US6708491B1 (en) * 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6438954B1 (en) * 2001-04-27 2002-08-27 3M Innovative Properties Company Multi-directional thermal actuator

Also Published As

Publication number Publication date
US20030038703A1 (en) 2003-02-27
CA2422040A1 (en) 2002-03-21
JP2004509368A (en) 2004-03-25
US6483419B1 (en) 2002-11-19
WO2002023565A2 (en) 2002-03-21
EP1346383A2 (en) 2003-09-24
IL154620A0 (en) 2003-09-17
TW502003B (en) 2002-09-11
KR20030067666A (en) 2003-08-14
WO2002023565A3 (en) 2003-07-10

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