AU2001255865A1 - Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus - Google Patents

Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus

Info

Publication number
AU2001255865A1
AU2001255865A1 AU2001255865A AU5586501A AU2001255865A1 AU 2001255865 A1 AU2001255865 A1 AU 2001255865A1 AU 2001255865 A AU2001255865 A AU 2001255865A AU 5586501 A AU5586501 A AU 5586501A AU 2001255865 A1 AU2001255865 A1 AU 2001255865A1
Authority
AU
Australia
Prior art keywords
bank
selecting
desired channel
channel utilizing
vibrating micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001255865A
Other languages
English (en)
Inventor
Clark T. C. Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan
Original Assignee
University of Michigan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Michigan filed Critical University of Michigan
Publication of AU2001255865A1 publication Critical patent/AU2001255865A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Transceivers (AREA)
  • Transmitters (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Amplifiers (AREA)
  • Networks Using Active Elements (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Filters And Equalizers (AREA)
AU2001255865A 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus Abandoned AU2001255865A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60/199,063 2000-04-20
PCT/US2001/040562 WO2001082476A2 (fr) 2000-04-20 2001-04-20 Procede et appareil pour selectionner au moins un canal desire en utilisant une banque d'un appareil micromecanique vibratoire

Publications (1)

Publication Number Publication Date
AU2001255865A1 true AU2001255865A1 (en) 2001-11-07

Family

ID=22736053

Family Applications (6)

Application Number Title Priority Date Filing Date
AU2001255866A Abandoned AU2001255866A1 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
AU2001255865A Abandoned AU2001255865A1 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
AU2001257612A Abandoned AU2001257612A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
AU2001255867A Abandoned AU2001255867A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator
AU2001261036A Abandoned AU2001261036A1 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
AU2001255868A Abandoned AU2001255868A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU2001255866A Abandoned AU2001255866A1 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices

Family Applications After (4)

Application Number Title Priority Date Filing Date
AU2001257612A Abandoned AU2001257612A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
AU2001255867A Abandoned AU2001255867A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals utilizing a vibrating micromechanicalresonator
AU2001261036A Abandoned AU2001261036A1 (en) 2000-04-20 2001-04-20 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
AU2001255868A Abandoned AU2001255868A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus

Country Status (5)

Country Link
EP (4) EP1285491A2 (fr)
JP (4) JP2003532322A (fr)
AU (6) AU2001255866A1 (fr)
CA (4) CA2406176A1 (fr)
WO (6) WO2001082478A2 (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4176450B2 (ja) 2002-02-13 2008-11-05 松下電器産業株式会社 微小機械振動フィルタ
JP4075503B2 (ja) 2002-07-30 2008-04-16 ソニー株式会社 マイクロマシンおよびその製造方法
JP4121502B2 (ja) * 2002-10-03 2008-07-23 シャープ株式会社 マイクロ共振装置、マイクロフィルタ装置、マイクロ発振器および無線通信機器
DE10252828B4 (de) * 2002-11-13 2018-07-05 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements
EP1432119A1 (fr) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH Oscillateur à résonance série de qualité supérieure
JP4575075B2 (ja) * 2003-08-12 2010-11-04 パナソニック株式会社 電気機械フィルタ、これを用いた電気回路および電気機器
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
TWI291450B (en) * 2003-09-19 2007-12-21 Sony Corp Resonator for micro-electro-mechanical system, (MEMS), its driving method and frequency filter
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A0 (fi) 2004-02-03 2004-02-03 Nokia Oyj Viitevärähtelijän taajuuden vakauttaminen
JP2005311567A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP2005311568A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP4586404B2 (ja) * 2004-04-28 2010-11-24 ソニー株式会社 フィルタ装置及び送受信機
JP4470606B2 (ja) 2004-06-18 2010-06-02 ソニー株式会社 高周波素子、並びに通信装置
JP4608984B2 (ja) * 2004-07-21 2011-01-12 ソニー株式会社 微小共振器およびその製造方法、ならびに電子機器
JP2006041911A (ja) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Ｍｅｍｓフィルタ装置およびその製造方法
JP4604730B2 (ja) * 2005-01-20 2011-01-05 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4635619B2 (ja) * 2005-01-20 2011-02-23 ソニー株式会社 微小共振器及び通信装置
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4645227B2 (ja) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 振動子構造体及びその製造方法
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (ja) 2005-11-28 2007-06-14 Sony Corp 微小電気機械デバイス
JP2007174438A (ja) 2005-12-23 2007-07-05 Toshiba Corp フィルタ回路及びフィルタを備えた無線通信システム
JP4930769B2 (ja) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 発振器
JP2008211420A (ja) * 2007-02-26 2008-09-11 Seiko Instruments Inc 発振器
JP5122888B2 (ja) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 発振子、発振子の製造方法、及び発振器
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
EP2291910B1 (fr) 2008-06-18 2011-11-09 Nxp B.V. Resonateur mems pour filter et melanger
FR2939581B1 (fr) * 2008-12-09 2010-11-26 Commissariat Energie Atomique Reseau de resonateurs couples, filtre passe-bande et oscillateur.
FR2942681B1 (fr) * 2009-02-27 2011-05-13 Commissariat Energie Atomique Dispositif resonant micrometrique ou nanometrique a transistors
WO2010150821A1 (fr) * 2009-06-25 2010-12-29 三洋電機株式会社 Résonateur
CN103905009A (zh) 2012-12-27 2014-07-02 精工爱普生株式会社 振子、振荡器、电子设备、移动体和振子的制造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994014240A1 (fr) * 1992-12-11 1994-06-23 The Regents Of The University Of California Processeurs de signal a elements microelectromecaniques
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
US6049702A (en) * 1997-12-04 2000-04-11 Rockwell Science Center, Llc Integrated passive transceiver section
FI106894B (fi) * 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita

Also Published As

Publication number Publication date
WO2001082475A3 (fr) 2002-02-21
WO2001082475A2 (fr) 2001-11-01
AU2001255867A1 (en) 2001-11-07
EP1285491A2 (fr) 2003-02-26
EP1275201A2 (fr) 2003-01-15
JP2003532320A (ja) 2003-10-28
WO2001082476A3 (fr) 2002-08-15
AU2001255868A1 (en) 2001-11-07
AU2001261036A1 (en) 2001-11-07
CA2406543A1 (fr) 2001-11-01
JP2004515089A (ja) 2004-05-20
EP1290788A2 (fr) 2003-03-12
WO2001082477A2 (fr) 2001-11-01
WO2001082467A2 (fr) 2001-11-01
AU2001257612A1 (en) 2001-11-07
WO2001082467A3 (fr) 2002-04-11
WO2001082477A3 (fr) 2002-04-11
WO2001082479A2 (fr) 2001-11-01
WO2001082479A3 (fr) 2002-04-11
WO2001082478A3 (fr) 2002-04-11
EP1277277A2 (fr) 2003-01-22
CA2406518A1 (fr) 2001-11-01
CA2406176A1 (fr) 2001-11-01
JP2003532323A (ja) 2003-10-28
AU2001255866A1 (en) 2001-11-07
WO2001082476A2 (fr) 2001-11-01
CA2406223A1 (fr) 2001-11-01
WO2001082478A2 (fr) 2001-11-01
JP2003532322A (ja) 2003-10-28

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