ATE70369T1 - Verfahren zur herstellung eines kontaktes auf einem diamant. - Google Patents
Verfahren zur herstellung eines kontaktes auf einem diamant.Info
- Publication number
- ATE70369T1 ATE70369T1 AT87305451T AT87305451T ATE70369T1 AT E70369 T1 ATE70369 T1 AT E70369T1 AT 87305451 T AT87305451 T AT 87305451T AT 87305451 T AT87305451 T AT 87305451T AT E70369 T1 ATE70369 T1 AT E70369T1
- Authority
- AT
- Austria
- Prior art keywords
- diamond
- conductive regions
- detector
- contacts
- radiation
- Prior art date
Links
- 229910003460 diamond Inorganic materials 0.000 title abstract 4
- 239000010432 diamond Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 230000005855 radiation Effects 0.000 abstract 2
- 239000004593 Epoxy Substances 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- -1 carbon ions Chemical class 0.000 abstract 1
- 239000000969 carrier Substances 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 239000003973 paint Substances 0.000 abstract 1
- 230000005298 paramagnetic effect Effects 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/26—Measuring radiation intensity with resistance detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
- H01L21/0425—Making electrodes
- H01L21/043—Ohmic electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Life Sciences & Earth Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Molecular Biology (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Measurement Of Radiation (AREA)
- Carbon And Carbon Compounds (AREA)
- Light Receiving Elements (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ZA864614 | 1986-06-20 | ||
| EP87305451A EP0250252B1 (de) | 1986-06-20 | 1987-06-19 | Verfahren zur Herstellung eines Kontaktes auf einem Diamant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE70369T1 true ATE70369T1 (de) | 1991-12-15 |
Family
ID=25578457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT87305451T ATE70369T1 (de) | 1986-06-20 | 1987-06-19 | Verfahren zur herstellung eines kontaktes auf einem diamant. |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4833328A (de) |
| EP (1) | EP0250252B1 (de) |
| JP (1) | JPS6345582A (de) |
| KR (1) | KR950009929B1 (de) |
| AT (1) | ATE70369T1 (de) |
| DE (1) | DE3775121D1 (de) |
| ZA (1) | ZA874362B (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL81537A (en) * | 1986-02-24 | 1991-05-12 | De Beers Ind Diamond | Method and synthetic diamond detector for detection of nuclear radiation |
| EP0314458B1 (de) * | 1987-10-27 | 1993-05-12 | De Beers Industrial Diamond Division (Proprietary) Limited | Diamant-Strahlungsdetektor |
| EP0384084B1 (de) * | 1988-12-28 | 1993-06-16 | De Beers Industrial Diamond Division (Proprietary) Limited | Diamant-Szintillationsdetektor |
| GB8902443D0 (en) * | 1989-02-03 | 1989-03-22 | Jones Barbara L | Radiation detector |
| CA2021020A1 (en) * | 1989-07-13 | 1991-01-14 | Johan Frans Prins | Diamond diode structure |
| US5079425A (en) * | 1990-01-10 | 1992-01-07 | Sumitomo Electric Industries, Ltd. | Radiation detecting element |
| JP2836790B2 (ja) * | 1991-01-08 | 1998-12-14 | 株式会社神戸製鋼所 | ダイヤモンド薄膜へのオーミック電極形成方法 |
| US5334306A (en) * | 1991-12-11 | 1994-08-02 | At&T Bell Laboratories | Metallized paths on diamond surfaces |
| CN1036157C (zh) * | 1993-03-02 | 1997-10-15 | 德比尔斯工业钻石部门有限公司 | 监测电离辐射的装置 |
| CA2281972C (en) * | 1993-07-20 | 2000-10-17 | Saint-Gobain/Norton Industrial Ceramics Corporation | Cvd diamond radiation detector |
| ZA946002B (en) * | 1993-08-12 | 1995-03-14 | De Beers Ind Diamond | Detecting ionising radiation |
| IL124592A (en) | 1997-05-23 | 2002-07-25 | Gersan Ets | Method of marking a gemstone or diamond |
| GB9710738D0 (en) * | 1997-05-23 | 1997-07-16 | Gersan Ets | Diamond marking |
| JP6634646B2 (ja) * | 2015-09-14 | 2020-01-22 | 学校法人早稲田大学 | グラファイト積層ダイヤモンド基板及びその製造方法、並びに半導体装置及びその製造方法 |
| EP4001970A1 (de) * | 2020-11-24 | 2022-05-25 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Strahlungsdetektor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3383567A (en) * | 1965-09-15 | 1968-05-14 | Ion Physics Corp | Solid state translating device comprising irradiation implanted conductivity ions |
| FR1601100A (de) * | 1967-03-29 | 1970-08-10 | ||
| US3824680A (en) * | 1968-03-28 | 1974-07-23 | Levina Fizichesky I I Lebedeva | Nuclear radiation detector and method of manufacturing same |
| US4609520A (en) * | 1984-01-30 | 1986-09-02 | The United States Of America As Represented By The Secretary Of The Army | Protection of radiation detectors from fast neutron damage |
-
1987
- 1987-06-17 ZA ZA874362A patent/ZA874362B/xx unknown
- 1987-06-18 JP JP62150333A patent/JPS6345582A/ja active Granted
- 1987-06-19 DE DE8787305451T patent/DE3775121D1/de not_active Expired - Lifetime
- 1987-06-19 AT AT87305451T patent/ATE70369T1/de not_active IP Right Cessation
- 1987-06-19 EP EP87305451A patent/EP0250252B1/de not_active Expired - Lifetime
- 1987-06-20 KR KR87006257A patent/KR950009929B1/ko not_active IP Right Cessation
- 1987-06-22 US US07/065,311 patent/US4833328A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6345582A (ja) | 1988-02-26 |
| DE3775121D1 (de) | 1992-01-23 |
| EP0250252A1 (de) | 1987-12-23 |
| KR880000800A (ko) | 1988-03-29 |
| KR950009929B1 (en) | 1995-09-01 |
| ZA874362B (en) | 1988-02-24 |
| EP0250252B1 (de) | 1991-12-11 |
| US4833328A (en) | 1989-05-23 |
| JPH0531951B2 (de) | 1993-05-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification | ||
| REN | Ceased due to non-payment of the annual fee |