ATE58247T1 - Geraet und verfahren zur pruefung von halbleiterchips. - Google Patents

Geraet und verfahren zur pruefung von halbleiterchips.

Info

Publication number
ATE58247T1
ATE58247T1 AT86302565T AT86302565T ATE58247T1 AT E58247 T1 ATE58247 T1 AT E58247T1 AT 86302565 T AT86302565 T AT 86302565T AT 86302565 T AT86302565 T AT 86302565T AT E58247 T1 ATE58247 T1 AT E58247T1
Authority
AT
Austria
Prior art keywords
platform
wafer
test
carriage
translates
Prior art date
Application number
AT86302565T
Other languages
English (en)
Inventor
Chester Mallory
David Steven Perloff
Van Pham Hung
Sandor Droblisch
Original Assignee
Prometrix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prometrix Corp filed Critical Prometrix Corp
Application granted granted Critical
Publication of ATE58247T1 publication Critical patent/ATE58247T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
AT86302565T 1985-04-24 1986-04-07 Geraet und verfahren zur pruefung von halbleiterchips. ATE58247T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/726,498 US4755746A (en) 1985-04-24 1985-04-24 Apparatus and methods for semiconductor wafer testing
EP86302565A EP0201205B1 (de) 1985-04-24 1986-04-07 Gerät und Verfahren zur Prüfung von Halbleiterchips

Publications (1)

Publication Number Publication Date
ATE58247T1 true ATE58247T1 (de) 1990-11-15

Family

ID=24918861

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86302565T ATE58247T1 (de) 1985-04-24 1986-04-07 Geraet und verfahren zur pruefung von halbleiterchips.

Country Status (5)

Country Link
US (1) US4755746A (de)
EP (1) EP0201205B1 (de)
JP (1) JPS621241A (de)
AT (1) ATE58247T1 (de)
DE (1) DE3675429D1 (de)

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US4884027A (en) * 1988-10-27 1989-11-28 The United States Of America As Represented By The Secretary Of The Army Manual microcircuit die test system
US4901011A (en) * 1988-11-04 1990-02-13 Tokyo Electron Limited Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier
JP2856216B2 (ja) * 1989-06-09 1999-02-10 富士通株式会社 半導体ウエハに粘着テープを接着する方法
US5390131A (en) * 1992-04-06 1995-02-14 Hewlett-Packard Company Apparatus and method for displaying wafer test results in real time
US5237267A (en) * 1992-05-29 1993-08-17 Cascade Microtech, Inc. Wafer probe station having auxiliary chucks
US5260668A (en) * 1992-06-11 1993-11-09 Prometrix Corporation Semiconductor surface resistivity probe with semiconductor temperature control
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US5345170A (en) * 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5691648A (en) * 1992-11-10 1997-11-25 Cheng; David Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
US5479108A (en) * 1992-11-25 1995-12-26 David Cheng Method and apparatus for handling wafers
US5495178A (en) * 1992-11-10 1996-02-27 Cheng; David Method and apparatus for measuring film thickness
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US5642298A (en) * 1994-02-16 1997-06-24 Ade Corporation Wafer testing and self-calibration system
US5511005A (en) * 1994-02-16 1996-04-23 Ade Corporation Wafer handling and processing system
KR100270652B1 (ko) * 1995-09-04 2000-11-01 오우라 히로시 반도체디바이스반송처리장치
WO1997031255A1 (en) * 1996-02-26 1997-08-28 Ade Corporation Real time/off line applications testing system
US5631571A (en) * 1996-04-03 1997-05-20 The United States Of America As Represented By The Secretary Of The Air Force Infrared receiver wafer level probe testing
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US5963027A (en) * 1997-06-06 1999-10-05 Cascade Microtech, Inc. Probe station having environment control chambers with orthogonally flexible lateral wall assembly
US6002263A (en) * 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6034533A (en) 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
US6037797A (en) * 1997-07-11 2000-03-14 Semiconductor Diagnostics, Inc. Measurement of the interface trap charge in an oxide semiconductor layer interface
US6053688A (en) * 1997-08-25 2000-04-25 Cheng; David Method and apparatus for loading and unloading wafers from a wafer carrier
US6164894A (en) * 1997-11-04 2000-12-26 Cheng; David Method and apparatus for integrated wafer handling and testing
US6161294A (en) * 1998-03-23 2000-12-19 Sloan Technologies, Incorporated Overhead scanning profiler
US5992242A (en) * 1998-05-04 1999-11-30 Lsi Logic Corporation Silicon wafer or die strength test fixture using high pressure fluid
US6205652B1 (en) * 1998-06-02 2001-03-27 Tokyo Electron Limited Vacuum coupling system
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6202523B1 (en) 1998-11-10 2001-03-20 J. F. Berns Co., Inc. Air operated loading and unloading device
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6505138B1 (en) * 1999-10-28 2003-01-07 Credence Systems Corporation Function-based control interface for integrated circuit tester prober and handler devices
US6469495B1 (en) 2000-02-23 2002-10-22 Agilent Technologies, Inc. RF isolation test device accommodating multiple nest plates for testing different devices and providing variable testing options
US6377038B1 (en) * 2000-02-23 2002-04-23 Agilent Technologies, Inc. RF isolation test device having a box within a box configuration for RF sheilding reference to related applications
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6396257B1 (en) 2000-04-26 2002-05-28 Credence Systems Corporation Test head manipulator for semiconductor tester with manual assist for vertical test head movement
US6483336B1 (en) * 2000-05-03 2002-11-19 Cascade Microtech, Inc. Indexing rotatable chuck for a probe station
US6708132B1 (en) * 2000-06-02 2004-03-16 Interscience, Inc. Microsystems integrated testing and characterization system and method
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6441607B1 (en) * 2000-12-01 2002-08-27 N&K Technology, Inc. Apparatus for docking a floating test stage in a terrestrial base
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech, Inc., Beaverton, Oreg. Wafersonde
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
DE10211760A1 (de) * 2002-03-14 2003-10-02 Werth Messtechnik Gmbh Anordnung und Verfahren zum Messen von Geometrien bzw. Strukturen von im Wesentlichen zweidimensionalen Objekten mittels Bildverarbeitungssenorik
JP2005527823A (ja) * 2002-05-23 2005-09-15 カスケード マイクロテック インコーポレイテッド デバイスのテスト用プローブ
US7057404B2 (en) * 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
WO2006017078A2 (en) 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
KR100960496B1 (ko) * 2003-10-31 2010-06-01 엘지디스플레이 주식회사 액정표시소자의 러빙방법
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
WO2005065258A2 (en) 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7403028B2 (en) * 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7759955B2 (en) * 2007-12-21 2010-07-20 Infineon Technologies Ag Method and device for position detection using connection pads
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
DE102014205323B4 (de) * 2014-03-21 2016-07-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Charakterisierung eines Halbleiterwafers
JP6655925B2 (ja) * 2015-09-24 2020-03-04 東京エレクトロン株式会社 ステージ装置及びプローブ装置
CN107942236B (zh) * 2017-12-25 2024-05-24 南京栖霞科技产业发展有限公司 基于电机模拟的fct探针测试仪
TWI692049B (zh) * 2018-08-16 2020-04-21 江德明 晶圓表面檢測前處理裝置及應用其之晶圓表面檢測設備
CN111182779A (zh) * 2018-11-13 2020-05-19 昆山尚尼司电子科技有限公司 应用于贴片机的输料快拆结构与外设输料装置
CN111189852A (zh) * 2018-11-14 2020-05-22 长鑫存储技术有限公司 一种晶圆的刮伤及破片的分析方法及系统
TWM596345U (zh) * 2020-03-05 2020-06-01 晶元光電股份有限公司 氣體感測器的量測設備
CN112992749B (zh) * 2020-12-29 2024-03-15 深圳市旺弘科技有限公司 一种电源芯片制造用晶圆晶粒针刺检测装置及制造工艺
CN112863590B (zh) * 2021-01-26 2024-07-30 深圳市卓然电子有限公司 一种闪存芯片的测试装置
JP2022165301A (ja) * 2021-04-19 2022-10-31 東京エレクトロン株式会社 基板を搬送する装置、及び基板を搬送する方法
CN113211316B (zh) * 2021-05-24 2022-03-11 大连理工大学 一种用于半导体晶片自旋转磨削的无线检测平台及检测方法

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US4328553A (en) * 1976-12-07 1982-05-04 Computervision Corporation Method and apparatus for targetless wafer alignment
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JPS59134843A (ja) * 1983-01-21 1984-08-02 Hitachi Ltd マニユアルプロ−バ装置
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US4703252A (en) * 1985-02-22 1987-10-27 Prometrix Corporation Apparatus and methods for resistivity testing

Also Published As

Publication number Publication date
JPS621241A (ja) 1987-01-07
EP0201205B1 (de) 1990-11-07
DE3675429D1 (de) 1990-12-13
US4755746A (en) 1988-07-05
EP0201205A1 (de) 1986-11-12

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