ATE552717T1 - Leiterplatte, prozess zu ihrer herstellung und stromversorgungsmodul - Google Patents

Leiterplatte, prozess zu ihrer herstellung und stromversorgungsmodul

Info

Publication number
ATE552717T1
ATE552717T1 AT03723156T AT03723156T ATE552717T1 AT E552717 T1 ATE552717 T1 AT E552717T1 AT 03723156 T AT03723156 T AT 03723156T AT 03723156 T AT03723156 T AT 03723156T AT E552717 T1 ATE552717 T1 AT E552717T1
Authority
AT
Austria
Prior art keywords
circuit board
production
grain diameter
power supply
crystal grain
Prior art date
Application number
AT03723156T
Other languages
English (en)
Inventor
Toshiyuki Nagase
Yoshiyuki Nagatomo
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Application granted granted Critical
Publication of ATE552717T1 publication Critical patent/ATE552717T1/de

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12007Component of composite having metal continuous phase interengaged with nonmetal continuous phase
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576Boride, carbide or nitride component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Ceramic Products (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Emergency Protection Circuit Devices (AREA)
AT03723156T 2002-04-19 2003-04-21 Leiterplatte, prozess zu ihrer herstellung und stromversorgungsmodul ATE552717T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002118359 2002-04-19
JP2003088129 2003-03-27
PCT/JP2003/005054 WO2003090277A1 (en) 2002-04-19 2003-04-21 Circuit board, process for producing the same and power module

Publications (1)

Publication Number Publication Date
ATE552717T1 true ATE552717T1 (de) 2012-04-15

Family

ID=29253612

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03723156T ATE552717T1 (de) 2002-04-19 2003-04-21 Leiterplatte, prozess zu ihrer herstellung und stromversorgungsmodul

Country Status (7)

Country Link
US (1) US7128979B2 (de)
EP (1) EP1498946B1 (de)
JP (1) JP4241397B2 (de)
CN (1) CN100364078C (de)
AT (1) ATE552717T1 (de)
AU (1) AU2003235329A1 (de)
WO (1) WO2003090277A1 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4206915B2 (ja) * 2002-12-27 2009-01-14 三菱マテリアル株式会社 パワーモジュール用基板
EP1518847B1 (de) 2003-09-29 2013-08-28 Dowa Metaltech Co., Ltd. Aluminium-Keramik-Verbundsubstrat und Verfahren zu seiner Herstellung
KR20110124372A (ko) * 2004-04-05 2011-11-16 미쓰비시 마테리알 가부시키가이샤 Al/AlN 접합체, 전력 모듈용 기판 및 전력 모듈, 그리고 Al/AlN 접합체의 제조 방법
JP2006100770A (ja) * 2004-09-01 2006-04-13 Toyota Industries Corp 回路基板のベース板の製造方法及び回路基板のベース板並びにベース板を用いた回路基板
US7749430B2 (en) 2005-01-20 2010-07-06 A.L.M.T. Corp. Member for semiconductor device and production method thereof
EP1926142A1 (de) * 2005-09-15 2008-05-28 Mitsubishi Materials Corporation Isolierende leiterplatte und isolierende leiterplatte mit kühlkörper-abschnitt
WO2007105361A1 (ja) 2006-03-08 2007-09-20 Kabushiki Kaisha Toshiba 電子部品モジュール
US8198540B2 (en) 2006-06-06 2012-06-12 Mitsubishi Materials Corporation Power element mounting substrate, method of manufacturing the same, power element mounting unit, method of manufacturing the same, and power module
JP4910789B2 (ja) * 2006-06-06 2012-04-04 三菱マテリアル株式会社 パワー素子搭載用基板およびパワー素子搭載用基板の製造方法並びにパワーモジュール
CN101449374B (zh) * 2006-06-08 2011-11-09 国际商业机器公司 高热传导性柔软片及其制造方法
CN101140915B (zh) * 2006-09-08 2011-03-23 聚鼎科技股份有限公司 散热衬底
JP4629016B2 (ja) 2006-10-27 2011-02-09 三菱マテリアル株式会社 ヒートシンク付パワーモジュール用基板およびヒートシンク付パワーモジュール用基板の製造方法並びにパワーモジュール
JP4998100B2 (ja) * 2007-06-11 2012-08-15 三菱マテリアル株式会社 パワーモジュール用基板及びパワーモジュール
JP4747315B2 (ja) * 2007-11-19 2011-08-17 三菱マテリアル株式会社 パワーモジュール用基板及びパワーモジュール
JP4798171B2 (ja) * 2008-05-16 2011-10-19 三菱マテリアル株式会社 パワーモジュール用基板、パワーモジュール及びパワーモジュール用基板の製造方法
JP4807378B2 (ja) * 2008-05-16 2011-11-02 三菱マテリアル株式会社 パワーモジュール用基板、パワーモジュール及びパワーモジュール用基板の製造方法
WO2009139472A1 (ja) 2008-05-16 2009-11-19 三菱マテリアル株式会社 パワーモジュール用基板、パワーモジュール、及びパワーモジュール用基板の製造方法
KR20110033117A (ko) * 2008-06-06 2011-03-30 미쓰비시 마테리알 가부시키가이샤 파워 모듈용 기판, 파워 모듈, 및 파워 모듈용 기판의 제조 방법
JP5359943B2 (ja) * 2009-03-31 2013-12-04 三菱マテリアル株式会社 パワーモジュール用基板、パワーモジュール及びパワーモジュール用基板の製造方法
JP5675610B2 (ja) * 2009-07-24 2015-02-25 株式会社東芝 窒化珪素製絶縁シートおよびそれを用いた半導体モジュール構造体
JP5493762B2 (ja) * 2009-11-20 2014-05-14 三菱マテリアル株式会社 ヒートシンク付パワーモジュール用基板の製造方法
JP5614127B2 (ja) * 2010-06-28 2014-10-29 三菱マテリアル株式会社 パワーモジュール用基板及びその製造方法
CN102593009B (zh) * 2011-01-11 2016-02-17 三菱综合材料株式会社 电源模块用基板的制造方法、电源模块用基板和电源模块
US8896125B2 (en) * 2011-07-05 2014-11-25 Sony Corporation Semiconductor device, fabrication method for a semiconductor device and electronic apparatus
JP6062429B2 (ja) 2011-07-15 2017-01-18 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 半導体デバイスを支持基板に接合する方法
JP5699882B2 (ja) * 2011-09-22 2015-04-15 三菱マテリアル株式会社 パワーモジュール用基板、パワーモジュール用基板の製造方法、ヒートシンク付パワーモジュール用基板及びパワーモジュール
US9624137B2 (en) * 2011-11-30 2017-04-18 Component Re-Engineering Company, Inc. Low temperature method for hermetically joining non-diffusing ceramic materials
US20130189022A1 (en) * 2011-11-30 2013-07-25 Component Re-Engineering Company, Inc. Hermetically Joined Plate And Shaft Devices
JP5947104B2 (ja) * 2012-05-18 2016-07-06 昭和電工株式会社 電子素子搭載用基板
US8969733B1 (en) 2013-09-30 2015-03-03 Anaren, Inc. High power RF circuit
CN103739208B (zh) * 2013-12-17 2016-05-18 佛山市粤峤陶瓷技术创新服务中心 一种具有导电玻璃层的微晶玻璃陶瓷复合板的制造方法
US20150195951A1 (en) * 2014-01-06 2015-07-09 Ge Aviation Systems Llc Cooled electronic assembly and cooling device
JP6264129B2 (ja) * 2014-03-24 2018-01-24 三菱マテリアル株式会社 パワーモジュール用基板及びその製造方法
US10573577B2 (en) 2014-06-30 2020-02-25 Mitsubishi Materials Corporation Method for producing ceramic-aluminum bonded body, method for producing power module substrate, ceramic-aluminum bonded body, and power module substrate
JP2016108636A (ja) * 2014-12-10 2016-06-20 昭和電工株式会社 モジュール基板用クラッド板及びモジュール基板
KR102301536B1 (ko) * 2015-03-10 2021-09-14 삼성전자주식회사 고해상도 전자 현미경 이미지로부터 결정을 분석하는 방법 및 그 시스템
DE102015108668B4 (de) 2015-06-02 2018-07-26 Rogers Germany Gmbh Verfahren zur Herstellung eines Verbundmaterials
US20170113297A1 (en) * 2015-10-27 2017-04-27 Hutchinson Technology Incorporated Metallizing polymers, ceramics and composites for attachment structures
JP6656657B2 (ja) 2015-11-06 2020-03-04 三菱マテリアル株式会社 セラミックス/アルミニウム接合体、パワーモジュール用基板、及び、パワーモジュール
CN109417059B (zh) * 2016-06-16 2022-04-26 三菱电机株式会社 半导体安装用散热底板及其制造方法
FR3061989B1 (fr) * 2017-01-18 2020-02-14 Safran Procede de fabrication d'un module electronique de puissance par fabrication additive, substrat et module associes
US20180153951A1 (en) * 2016-12-05 2018-06-07 Mead Johnson Nutrition Company Methods for Inducing Adipocyte Browning, Improving Metabolic Flexibility, and Reducing Detrimental White Adipocyte Tissue Deposition and Dysfunction
WO2018180965A1 (ja) * 2017-03-30 2018-10-04 株式会社 東芝 セラミックス銅回路基板およびそれを用いた半導体装置
US10292316B2 (en) * 2017-09-08 2019-05-14 Hamilton Sundstrand Corporation Power module with integrated liquid cooling
DE102017128308B4 (de) 2017-11-29 2020-04-23 Rogers Germany Gmbh Verfahren zur Herstellung eines Metall-Keramik-Substrats
WO2020044594A1 (ja) * 2018-08-28 2020-03-05 三菱マテリアル株式会社 銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、及び、絶縁回路基板の製造方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0767003B2 (ja) 1988-07-22 1995-07-19 日立電線株式会社 銅・有機絶縁膜配線板の製造方法
JP2590255B2 (ja) 1989-03-07 1997-03-12 株式会社神戸製鋼所 セラミックスとの接合性の良い銅材
JP2725390B2 (ja) 1989-07-28 1998-03-11 日立電線株式会社 銅配線セラミック基板および製造方法
JP2508848B2 (ja) 1989-07-28 1996-06-19 日立電線株式会社 銅配線セラミック基板の製造方法
JP2658435B2 (ja) 1989-10-09 1997-09-30 三菱マテリアル株式会社 半導体装置用軽量基板
DE69034139T2 (de) * 1989-10-09 2004-11-25 Mitsubishi Materials Corp. Keramiksubstrat zur Herstellung elektrischer oder elektronischer Schaltungen
DE69127927T2 (de) 1990-05-02 1998-06-04 Mitsubishi Materials Corp Keramisches Substrat verwendet für eine elektrische oder elektronische Schaltung
JP3326749B2 (ja) * 1990-12-26 2002-09-24 日本製箔株式会社 印刷回路用アルミニウム合金箔、及びその製造方法
US5213877A (en) * 1991-05-02 1993-05-25 Mitsubishi Materials Corporation Ceramic substrate used for fabricating electric or electronic circuit
JP3180622B2 (ja) 1995-06-09 2001-06-25 三菱マテリアル株式会社 パワーモジュール用基板及びその製造方法
JPH09315875A (ja) * 1996-05-29 1997-12-09 Dowa Mining Co Ltd アルミニウム−セラミックス複合基板及びその製造方法
WO1998008256A1 (en) 1996-08-20 1998-02-26 Kabushiki Kaisha Toshiba Silicon nitride circuit board and semiconductor module
US6033787A (en) * 1996-08-22 2000-03-07 Mitsubishi Materials Corporation Ceramic circuit board with heat sink
JP3180677B2 (ja) * 1996-08-22 2001-06-25 三菱マテリアル株式会社 ヒートシンク付セラミック回路基板
JPH11317482A (ja) 1997-12-25 1999-11-16 Furukawa Electric Co Ltd:The ヒートシンク
TW378267B (en) 1997-12-25 2000-01-01 Furukawa Electric Co Ltd Heat sink
JP3933287B2 (ja) 1998-01-30 2007-06-20 電気化学工業株式会社 ヒートシンク付き回路基板
JP2000077583A (ja) 1998-09-03 2000-03-14 Sumitomo Metal Electronics Devices Inc 電子部品用パッケージおよびその製造方法
JP3864282B2 (ja) * 1998-09-22 2006-12-27 三菱マテリアル株式会社 パワーモジュール用基板及びその製造方法並びにこの基板を用いた半導体装置
JP2001148451A (ja) * 1999-03-24 2001-05-29 Mitsubishi Materials Corp パワーモジュール用基板
JP2000340912A (ja) 1999-05-27 2000-12-08 Kyocera Corp セラミック回路基板
JP4049487B2 (ja) * 1999-08-16 2008-02-20 電気化学工業株式会社 回路基板の製造方法
JP2001168250A (ja) * 1999-12-10 2001-06-22 Sumitomo Electric Ind Ltd 半導体用絶縁基板およびそれを用いた半導体装置並びに該基板の製造方法
JP2002098454A (ja) * 2000-07-21 2002-04-05 Mitsubishi Materials Corp 液冷ヒートシンク及びその製造方法
US7019975B2 (en) * 2000-08-09 2006-03-28 Mitsubishi Materials Corporation Power module and power module with heat sink
JP2002129313A (ja) 2000-10-20 2002-05-09 Nikko Materials Co Ltd パーティクル発生の少ない高純度銅スパッタリングターゲット
JP4434545B2 (ja) * 2001-03-01 2010-03-17 Dowaホールディングス株式会社 半導体実装用絶縁基板及びパワーモジュール
EP1239515B1 (de) * 2001-03-08 2019-01-02 ALSTOM Transport Technologies Substrat für elektronische Leistungsschaltung und elektronisches Leistungsmodul mit diesem

Also Published As

Publication number Publication date
EP1498946B1 (de) 2012-04-04
CN1647267A (zh) 2005-07-27
CN100364078C (zh) 2008-01-23
EP1498946A1 (de) 2005-01-19
JPWO2003090277A1 (ja) 2005-09-02
EP1498946A4 (de) 2009-06-03
AU2003235329A1 (en) 2003-11-03
US20050214518A1 (en) 2005-09-29
WO2003090277A1 (en) 2003-10-30
JP4241397B2 (ja) 2009-03-18
US7128979B2 (en) 2006-10-31

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