ATE545158T1 - Vorrichtung zur herstellung eines photovoltaischen elements mit stabilisierter effizienz - Google Patents

Vorrichtung zur herstellung eines photovoltaischen elements mit stabilisierter effizienz

Info

Publication number
ATE545158T1
ATE545158T1 AT09179651T AT09179651T ATE545158T1 AT E545158 T1 ATE545158 T1 AT E545158T1 AT 09179651 T AT09179651 T AT 09179651T AT 09179651 T AT09179651 T AT 09179651T AT E545158 T1 ATE545158 T1 AT E545158T1
Authority
AT
Austria
Prior art keywords
photovoltaic element
silicon substrate
treatment step
efficiency
stabilisation
Prior art date
Application number
AT09179651T
Other languages
English (en)
Inventor
Axel Herguth
Martin Kaes
Giso Hahn
Ihor Melnyk
Gunnar Schubert
Original Assignee
Univ Konstanz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Konstanz filed Critical Univ Konstanz
Application granted granted Critical
Publication of ATE545158T1 publication Critical patent/ATE545158T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/128Annealing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/121The active layers comprising only Group IV materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
AT09179651T 2006-03-21 2007-03-21 Vorrichtung zur herstellung eines photovoltaischen elements mit stabilisierter effizienz ATE545158T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006012920A DE102006012920B3 (de) 2006-03-21 2006-03-21 Verfahren zum Herstellen eines Photovoltaikelements mit stabilisiertem Wirkungsgrad

Publications (1)

Publication Number Publication Date
ATE545158T1 true ATE545158T1 (de) 2012-02-15

Family

ID=38169429

Family Applications (2)

Application Number Title Priority Date Filing Date
AT07723459T ATE453211T1 (de) 2006-03-21 2007-03-21 Verfahren zur herstellung eines photovoltaischen elements mit stabilem wirkungsgrad
AT09179651T ATE545158T1 (de) 2006-03-21 2007-03-21 Vorrichtung zur herstellung eines photovoltaischen elements mit stabilisierter effizienz

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT07723459T ATE453211T1 (de) 2006-03-21 2007-03-21 Verfahren zur herstellung eines photovoltaischen elements mit stabilem wirkungsgrad

Country Status (9)

Country Link
US (2) US8263176B2 (de)
EP (2) EP2164114B1 (de)
CN (1) CN101405875B (de)
AT (2) ATE453211T1 (de)
DE (2) DE102006012920B3 (de)
ES (2) ES2338822T3 (de)
PT (1) PT1997157E (de)
TW (1) TWI495132B (de)
WO (1) WO2007107351A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009025998A1 (de) * 2009-06-18 2010-12-30 Q-Cells Se Wirkungsgradstabilisierungsverfahren für Solarzellen
FR2949607B1 (fr) 2009-09-03 2011-10-21 Commissariat Energie Atomique Procede de traitement de cellules photovoltaiques contre la diminution du rendement lors de l'eclairement
DE102009059300B4 (de) * 2009-12-23 2019-11-28 Solarworld Industries Gmbh Photovoltaikzellen-Transport- und -Regenerationsbehälter
US8940556B2 (en) * 2010-03-01 2015-01-27 First Solar, Inc Electrical bias methods and apparatus for photovoltaic device manufacture
US9202964B2 (en) * 2010-03-01 2015-12-01 First Solar, Inc. System and method for photovoltaic device temperature control while conditioning a photovoltaic device
US20120211079A1 (en) 2011-02-23 2012-08-23 International Business Machines Corporation Silicon photovoltaic element and fabrication method
WO2012167104A1 (en) 2011-06-03 2012-12-06 Memc Singapore Pte, Ltd. Processes for suppressing minority carrier lifetime degradation in silicon wafers
TWI594447B (zh) * 2011-06-03 2017-08-01 Memc新加坡有限公司 在矽晶圓中抑制少數載子壽命衰減之製程及包括硼之矽晶圓
FR2977079B1 (fr) * 2011-06-27 2013-07-26 Commissariat Energie Atomique Procede de traitement de cellules photovoltaiques a heterojonction pour ameliorer et stabiliser leur rendement
JP5901755B2 (ja) * 2011-06-28 2016-04-13 サン−ゴバン グラス フランスSaint−Gobain Glass France 薄膜ソーラーモジュールの定格出力を迅速に安定させるための方法
DE102011056843A1 (de) * 2011-12-21 2013-06-27 Centrotherm Photovoltaics Ag Verfahren zur Stabilisierung eines Wirkungsgrades von Siliziumsolarzellen
US9190556B2 (en) 2012-05-21 2015-11-17 Newsouth Innovations Pty Limited Advanced hydrogenation of silicon solar cells
FR2995728B1 (fr) * 2012-09-14 2014-10-24 Commissariat Energie Atomique Dispositif et procede de restauration des cellules solaires a base de silicium avec transducteur ultrason
FR2995727B1 (fr) 2012-09-14 2014-10-24 Commissariat Energie Atomique Dispositif et procede de restauration de cellules photovoltaiques a base de silicium
CN102969405A (zh) * 2012-12-12 2013-03-13 泰通(泰州)工业有限公司 一种高效浅结太阳能电池的扩散工艺
KR101807381B1 (ko) 2013-06-26 2018-01-10 우니페르시테트 콘스탄츠 안정화된 효율을 가지는 광기전력 소자를 생산하기 위한 방법 및 디바이스
CN105493296B (zh) * 2013-07-26 2019-02-05 新南创新私人有限公司 硅中的热处理
DE102013113123B4 (de) * 2013-11-27 2021-11-18 Hanwha Q Cells Gmbh Solarzellenherstellungsverfahren
CN103762275B (zh) * 2014-01-17 2017-01-18 苏州阿特斯阳光电力科技有限公司 一种晶体硅太阳能电池片的衰减方法及衰减装置
DE102014106292A1 (de) * 2014-05-06 2015-11-12 Hanwha Q Cells Gmbh Solarzellen-Behandlungsverfahren, Solarmodul-Behandlungsverfahren, Solarmodul-Herstellungsverfahren und Behandlungsvorrichtung
KR101569415B1 (ko) * 2014-06-09 2015-11-16 엘지전자 주식회사 태양 전지의 제조 방법
US20160005915A1 (en) 2014-07-03 2016-01-07 Sino-American Silicon Products Inc. Method and apparatus for inhibiting light-induced degradation of photovoltaic device
TWI513028B (zh) * 2014-08-15 2015-12-11 Motech Ind Inc 處理裝置
US9780252B2 (en) * 2014-10-17 2017-10-03 Tp Solar, Inc. Method and apparatus for reduction of solar cell LID
FR3028669B1 (fr) 2014-11-14 2018-03-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de restauration de cellules solaires photovoltaiques a base de silicium
SG10201908439WA (en) * 2015-03-13 2019-10-30 Newsouth Innovations Pty Ltd A method for processing silicon material
US10443941B2 (en) 2015-05-20 2019-10-15 Illinois Tool Works Inc. Light annealing in a cooling chamber of a firing furnace
DE102015108880A1 (de) 2015-06-04 2016-12-08 Hanwha Q.CELLS GmbH Vorrichtung und Verfahren zur Temperatursteuerung von gestapelten Photovaltaikzellen
DE102015114298A1 (de) 2015-08-27 2017-03-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Stabilisieren einer photovoltaischen Silizium-Solarzelle
DE102015219087A1 (de) 2015-10-02 2017-04-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Stabilisierung der Konversionseffizienz von Siliziumsolarzellen
KR102293471B1 (ko) 2015-12-30 2021-08-24 현대에너지솔루션(주) 라미네이션 장치
CN107393971A (zh) * 2016-05-16 2017-11-24 昱晶能源科技股份有限公司 回复太阳能电池模块的效率的方法及其可携式装置
TW201818560A (zh) * 2016-06-06 2018-05-16 新南革新股份有限公司 矽材料之加工方法
WO2018009974A1 (en) * 2016-07-12 2018-01-18 Newsouth Innovations Pty Limited A method for manufacturing a photovoltaic device
CN107068806B (zh) * 2017-04-19 2018-10-19 常州时创能源科技有限公司 消除多晶硅电池片内部金属复合体的方法
CN108306612B (zh) 2017-12-20 2019-11-26 华为技术有限公司 一种光伏电站中的光伏组件衰减修复方法和装置
DE102018001057B4 (de) * 2018-02-07 2025-12-04 Ce Cell Engineering Gmbh Verfahren zur Verbesserung des ohmschen Kontaktverhaltens zwischen einem Kontaktgitter und einer Emitterschicht einer Siliziumsolarzelle
CN109004061B (zh) * 2018-06-28 2023-07-18 华南理工大学 晶硅光伏太阳能电池电注入退火测试装置及方法
US12009451B2 (en) 2018-07-30 2024-06-11 mPower Technology, Inc. In-situ rapid annealing and operation of solar cells for extreme environment applications
DE102019102227A1 (de) 2019-01-29 2019-11-14 Universität Konstanz Vorrichtung zum Messen einer Strahlungsintensität insbesondere in einem Durchlaufofen
CN111129211B (zh) * 2019-12-05 2021-11-16 广东爱旭科技有限公司 一种改善perc太阳能电池载流子衰减的方法及设备
DE102021132240A1 (de) 2021-12-08 2023-06-15 Hanwha Q Cells Gmbh Anlage zur Stabilisierung und/oder Verbesserung eines Wirkungsgrads einer Solarzelle und Verfahren zur Stabilisierung und/oder Verbesserung eines Wirkungsgrads einer Solarzelle

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2850612A (en) * 1953-10-29 1958-09-02 Gen Electric Electric baking and broiling ovens
US3597281A (en) * 1969-05-02 1971-08-03 Nasa Recovery of radiation damaged solar cells through thermanl annealing
US4494302A (en) * 1981-03-23 1985-01-22 Hughes Aircraft Company Accelerated annealing of gallium arsenide solar cells
US5528071A (en) * 1990-01-18 1996-06-18 Russell; Jimmie L. P-I-N photodiode with transparent conductor n+layer
US5327005A (en) * 1991-12-18 1994-07-05 Santa Barbara Research Center Striped contact IR detector
US6313398B1 (en) * 1999-06-24 2001-11-06 Shin-Etsu Chemical Co., Ltd. Ga-doped multi-crytsalline silicon, Ga-doped multi-crystalline silicon wafer and method for producing the same
AU2001245916A1 (en) 2000-03-22 2001-10-03 Aegis Semiconductor A semitransparent optical detector with a transparent conductor and method of making
JP3640609B2 (ja) * 2000-10-16 2005-04-20 アルプス電気株式会社 プラズマ処理装置,プラズマ処理システムおよびこれらの性能確認システム,検査方法
US7153722B2 (en) * 2003-06-06 2006-12-26 Canon Kabushiki Kaisha Method and apparatus for manufacturing photovoltaic device

Also Published As

Publication number Publication date
EP2164114A1 (de) 2010-03-17
US20100243036A1 (en) 2010-09-30
DE102006012920B3 (de) 2008-01-24
ES2338822T3 (es) 2010-05-12
CN101405875B (zh) 2010-07-28
US20110162716A1 (en) 2011-07-07
PT1997157E (pt) 2010-03-29
WO2007107351A1 (en) 2007-09-27
ES2381979T9 (es) 2012-07-04
DE602007003963D1 (de) 2010-02-04
ATE453211T1 (de) 2010-01-15
ES2381979T3 (es) 2012-06-04
EP1997157B1 (de) 2009-12-23
CN101405875A (zh) 2009-04-08
EP1997157A1 (de) 2008-12-03
TWI495132B (zh) 2015-08-01
US8263176B2 (en) 2012-09-11
TW200814347A (en) 2008-03-16
EP2164114B1 (de) 2012-02-08

Similar Documents

Publication Publication Date Title
ATE545158T1 (de) Vorrichtung zur herstellung eines photovoltaischen elements mit stabilisierter effizienz
Wu et al. Epitaxy of vertical ZnO nanorod arrays on highly (001)-oriented ZnO seed monolayer by a hydrothermal route
WO2010062644A3 (en) Vertical group iii-v nanowires on si, heterostructures, flexible arrays and fabrication
WO2008040273A3 (de) Lokale heterostrukturkontakte
WO2007040749A3 (en) A method of forming a silicon oxynitride film with tensile stress
ATE512467T1 (de) Verfahren zur herstellung einer dünnschichtsiliziumsolarzelle
TWI263709B (en) Structure of strain relaxed thin Si/Ge epitaxial layer and fabricating method thereof
EP1403931A3 (de) Verfahren zum Aufwachsen einer Dünnschicht aus Silizium, Herstellungsverfahren einer Solarzelle, Halbleitersubstrat und Solarzelle
EP1798780A3 (de) Verfahren zur Herstellung eines Substrats mit Nanostrukturen, lichtemittierende Vorrichtung und Verfahren zu deren Herstellung
ATE548759T1 (de) Verfahren zur herstellung einer festkörperabbildungsvorrichtung
SG178974A1 (en) Semiconductor substrate, method for producing semiconductor substrate, substrate for semiconductor growth, method for producing substrate for semiconductor growth, semiconductor element, light-emitting element, display panel, electronic element, solar cell element, and electronic device
DE602005001449D1 (de) Elektrische energieerzeugungsmodule mit zweidimensionalem profil und herstellungsverfahren dafür
TW200802614A (en) A method of ultra-shallow junction formation using si film alloyed with carbon
Logeeswaran et al. Harvesting and transferring vertical pillar arrays of single-crystal semiconductor devices to arbitrary substrates
EP2112254A3 (de) Siliziumsubstrat und zugehöriges Herstellungsverfahren
TW200600620A (en) Semiconductor substrate and semiconductor device, and manufacturing methods thereof
ATE455366T1 (de) Verfahren zur herstellung eines halbleitersubstrats mit einer schichtstruktur von aktivierten dotierungsstoffen
WO2006137915A3 (en) Biologically inspired synthesis of thin films and materials
US20110303912A1 (en) Methods Of Manufacturing P-Type Zn Oxide Nanowires And Electronic Devices Including P-Type Zn Oxide Nanowires
Wang et al. Matrix-assisted energy conversion in nanostructured piezoelectric arrays
Li et al. Localized-state-dependent electroluminescence from ZnO/ZnS core–shell nanowires–GaN heterojunction
Yang et al. Fabrication of GaN-based flexible VLEDs with double-side light emitting
CN102305960A (zh) 一种电场诱导凸形界面二维光子晶体的制备工艺
Fang et al. Fabrication of patterned polymer nanowire arrays
US20120168710A1 (en) Growth and Transfer of Monolithic Horizontal Nanowire Superstructures onto Flexible Substrates