ATE545149T1 - Kompaktvorrichtung - Google Patents

Kompaktvorrichtung

Info

Publication number
ATE545149T1
ATE545149T1 AT00311168T AT00311168T ATE545149T1 AT E545149 T1 ATE545149 T1 AT E545149T1 AT 00311168 T AT00311168 T AT 00311168T AT 00311168 T AT00311168 T AT 00311168T AT E545149 T1 ATE545149 T1 AT E545149T1
Authority
AT
Austria
Prior art keywords
equipment
sections
skid
processing tool
semiconductor processing
Prior art date
Application number
AT00311168T
Other languages
English (en)
Inventor
Graeme Huntley
Kate Wilson
Original Assignee
Edwards Vacuum Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Vacuum Inc filed Critical Edwards Vacuum Inc
Application granted granted Critical
Publication of ATE545149T1 publication Critical patent/ATE545149T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/6855—Vehicle
    • Y10T137/6881—Automotive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/7043—Guards and shields
    • Y10T137/7062—Valve guards
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Handcart (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Braking Arrangements (AREA)
  • Centrifugal Separators (AREA)
  • Multiple-Way Valves (AREA)
AT00311168T 1999-12-16 2000-12-14 Kompaktvorrichtung ATE545149T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/464,184 US6397883B1 (en) 1999-12-16 1999-12-16 Equipment skid

Publications (1)

Publication Number Publication Date
ATE545149T1 true ATE545149T1 (de) 2012-02-15

Family

ID=23842888

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00311168T ATE545149T1 (de) 1999-12-16 2000-12-14 Kompaktvorrichtung

Country Status (7)

Country Link
US (1) US6397883B1 (de)
EP (1) EP1109204B1 (de)
JP (1) JP4987186B2 (de)
KR (1) KR100379145B1 (de)
AT (1) ATE545149T1 (de)
SG (1) SG89362A1 (de)
TW (1) TW466566B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077159B1 (en) * 1998-12-23 2006-07-18 Applied Materials, Inc. Processing apparatus having integrated pumping system
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US7392825B2 (en) * 2005-07-15 2008-07-01 Edwards Vaccum, Inc. Arrangement for tool equipment
US7441986B2 (en) * 2006-01-30 2008-10-28 Vince Rottinghaus Ground heating device
US20070187521A1 (en) * 2006-02-15 2007-08-16 Wawak Ryszard J Modular heat distribution unit for hydronic heating systems
JP2008172160A (ja) * 2007-01-15 2008-07-24 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
US9075408B2 (en) * 2009-11-16 2015-07-07 Applied Materials, Inc. Energy savings and global gas emissions monitoring and display
RU121904U1 (ru) * 2012-06-18 2012-11-10 Рационал Энерги Зюстеме Гмбх Система котельного оборудования, а также составные и конструктивные элементы такой системы
US9207270B2 (en) * 2012-08-31 2015-12-08 Elwha Llc Method and apparatus for measuring negawatt usage of an appliance
US10072673B2 (en) * 2014-08-04 2018-09-11 Powerex-Iwata Air Technology, Inc. Compressor system
GB201718752D0 (en) * 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems
CN108679310B (zh) * 2018-06-26 2024-07-16 湖北郢都水利水电建设有限公司 一种快速施工的泵站出水钢管轨道支架装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091840A (en) * 1976-06-11 1978-05-30 Daniel Valve Company Flow distributing system
US4989632A (en) * 1989-11-15 1991-02-05 Bahm, Inc. Apparatus for use in an automated liquid combination and transport system
JP2922440B2 (ja) * 1994-02-21 1999-07-26 松下電器産業株式会社 空圧機器の大気開放方法
JPH1097962A (ja) * 1996-09-19 1998-04-14 Tokyo Electron Ltd 処理装置及び処理システム
US6312525B1 (en) 1997-07-11 2001-11-06 Applied Materials, Inc. Modular architecture for semiconductor wafer fabrication equipment
US6083321A (en) * 1997-07-11 2000-07-04 Applied Materials, Inc. Fluid delivery system and method
US5915414A (en) * 1997-09-04 1999-06-29 Lsi Logic Corporation Standardized gas isolation box (GIB) installation
US6102068A (en) * 1997-09-23 2000-08-15 Hewlett-Packard Company Selector valve assembly
JP3678563B2 (ja) * 1997-11-19 2005-08-03 大日本スクリーン製造株式会社 基板処理装置
TW484170B (en) * 1999-11-30 2002-04-21 Applied Materials Inc Integrated modular processing platform

Also Published As

Publication number Publication date
JP2001244160A (ja) 2001-09-07
EP1109204A2 (de) 2001-06-20
KR100379145B1 (ko) 2003-04-08
EP1109204A3 (de) 2005-11-16
US6397883B1 (en) 2002-06-04
EP1109204B1 (de) 2012-02-08
SG89362A1 (en) 2002-06-18
JP4987186B2 (ja) 2012-07-25
TW466566B (en) 2001-12-01
KR20010062392A (ko) 2001-07-07

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