ATE535023T1 - Verfahren zur herstellung von polysiliziumfilmen - Google Patents
Verfahren zur herstellung von polysiliziumfilmenInfo
- Publication number
- ATE535023T1 ATE535023T1 AT05739553T AT05739553T ATE535023T1 AT E535023 T1 ATE535023 T1 AT E535023T1 AT 05739553 T AT05739553 T AT 05739553T AT 05739553 T AT05739553 T AT 05739553T AT E535023 T1 ATE535023 T1 AT E535023T1
- Authority
- AT
- Austria
- Prior art keywords
- polycrystalline silicon
- support
- relief
- polysilicon film
- face
- Prior art date
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 229920005591 polysilicon Polymers 0.000 title 1
- 238000000034 method Methods 0.000 abstract 2
- 230000000295 complement effect Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000004049 embossing Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0450680A FR2868598B1 (fr) | 2004-04-05 | 2004-04-05 | Procede de fabrication de plaques de silicium polycristallin |
PCT/FR2005/050175 WO2005101527A1 (fr) | 2004-04-05 | 2005-03-18 | Procede de fabrication de plaques de silicium polycristallin |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE535023T1 true ATE535023T1 (de) | 2011-12-15 |
Family
ID=34945043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05739553T ATE535023T1 (de) | 2004-04-05 | 2005-03-18 | Verfahren zur herstellung von polysiliziumfilmen |
Country Status (9)
Country | Link |
---|---|
US (1) | US8506704B2 (de) |
EP (1) | EP1735843B1 (de) |
JP (1) | JP2007531994A (de) |
CN (1) | CN1965415B (de) |
AT (1) | ATE535023T1 (de) |
AU (1) | AU2005234193B2 (de) |
ES (1) | ES2377938T3 (de) |
FR (1) | FR2868598B1 (de) |
WO (1) | WO2005101527A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2935838B1 (fr) * | 2008-09-05 | 2012-11-23 | Commissariat Energie Atomique | Procede de preparation d'une couche mince auto-supportee de silicium cristallise |
CN102560630A (zh) * | 2012-01-12 | 2012-07-11 | 徐州协鑫光电科技有限公司 | 导模法同步生长多条晶体的热场及方法 |
FR3040536A1 (fr) | 2015-08-24 | 2017-03-03 | St Microelectronics Sa | Capteur d'image a diaphotie spectrale et optique reduite |
CN108305913A (zh) * | 2018-01-25 | 2018-07-20 | 山东大学 | 硅晶太阳电池微细加工制绒装置及方法 |
CN113815304B (zh) * | 2020-06-19 | 2023-08-29 | 陈竹 | 基于丝网印刷技术的同步对花板材、板材同步对花系统及方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2386359A1 (fr) * | 1977-04-07 | 1978-11-03 | Labo Electronique Physique | Procede de depot par immersion en continu, dispositif et produits obtenus |
FR2516708A1 (fr) * | 1981-11-13 | 1983-05-20 | Comp Generale Electricite | Procede de fabrication de silicium polycristallin pour photopiles solaires |
US5639300A (en) * | 1987-12-07 | 1997-06-17 | Massachusetts Institute Of Technology | Epitaxy with reusable template |
US5248621A (en) * | 1990-10-23 | 1993-09-28 | Canon Kabushiki Kaisha | Method for producing solar cell devices of crystalline material |
JPH05235391A (ja) * | 1991-03-07 | 1993-09-10 | Mitsubishi Electric Corp | 薄膜太陽電池及びその製造方法並びに半導体装置の製造方法 |
US5306646A (en) * | 1992-12-23 | 1994-04-26 | Martin Marietta Energy Systems, Inc. | Method for producing textured substrates for thin-film photovoltaic cells |
JP3754815B2 (ja) * | 1997-02-19 | 2006-03-15 | キヤノン株式会社 | 光起電力素子、光電変換素子、光起電力素子の製造方法及び光電変換素子の製造方法 |
JP4111669B2 (ja) * | 1999-11-30 | 2008-07-02 | シャープ株式会社 | シート製造方法、シートおよび太陽電池 |
-
2004
- 2004-04-05 FR FR0450680A patent/FR2868598B1/fr not_active Expired - Fee Related
-
2005
- 2005-03-18 AT AT05739553T patent/ATE535023T1/de active
- 2005-03-18 US US10/594,652 patent/US8506704B2/en not_active Expired - Fee Related
- 2005-03-18 EP EP05739553A patent/EP1735843B1/de not_active Not-in-force
- 2005-03-18 WO PCT/FR2005/050175 patent/WO2005101527A1/fr active Application Filing
- 2005-03-18 CN CN200580018375XA patent/CN1965415B/zh not_active Expired - Fee Related
- 2005-03-18 AU AU2005234193A patent/AU2005234193B2/en not_active Ceased
- 2005-03-18 JP JP2007505602A patent/JP2007531994A/ja active Pending
- 2005-03-18 ES ES05739553T patent/ES2377938T3/es active Active
Also Published As
Publication number | Publication date |
---|---|
CN1965415A (zh) | 2007-05-16 |
FR2868598B1 (fr) | 2006-06-09 |
JP2007531994A (ja) | 2007-11-08 |
AU2005234193B2 (en) | 2011-04-21 |
EP1735843B1 (de) | 2011-11-23 |
FR2868598A1 (fr) | 2005-10-07 |
CN1965415B (zh) | 2011-07-20 |
EP1735843A1 (de) | 2006-12-27 |
ES2377938T3 (es) | 2012-04-03 |
US8506704B2 (en) | 2013-08-13 |
AU2005234193A1 (en) | 2005-10-27 |
US20070193503A1 (en) | 2007-08-23 |
WO2005101527A1 (fr) | 2005-10-27 |
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