ATE52636T1 - Verfahren zur herstellung integrierter schaltungen unter einbeziehung von schritten zum nachweis von getterstellen. - Google Patents
Verfahren zur herstellung integrierter schaltungen unter einbeziehung von schritten zum nachweis von getterstellen.Info
- Publication number
- ATE52636T1 ATE52636T1 AT85307851T AT85307851T ATE52636T1 AT E52636 T1 ATE52636 T1 AT E52636T1 AT 85307851 T AT85307851 T AT 85307851T AT 85307851 T AT85307851 T AT 85307851T AT E52636 T1 ATE52636 T1 AT E52636T1
- Authority
- AT
- Austria
- Prior art keywords
- fabrication
- integrated circuits
- processes
- circuits including
- detection steps
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000001514 detection method Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 239000004065 semiconductor Substances 0.000 abstract 3
- 239000013078 crystal Substances 0.000 abstract 1
- 230000005670 electromagnetic radiation Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
Landscapes
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Manufacturing & Machinery (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Recrystallisation Techniques (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/668,512 US4575922A (en) | 1984-11-05 | 1984-11-05 | Method of fabricating integrated circuits incorporating steps to detect presence of gettering sites |
EP85307851A EP0181737B1 (de) | 1984-11-05 | 1985-10-30 | Verfahren zur Herstellung integrierter Schaltungen unter Einbeziehung von Schritten zum Nachweis von Getterstellen |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE52636T1 true ATE52636T1 (de) | 1990-05-15 |
Family
ID=24682599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT85307851T ATE52636T1 (de) | 1984-11-05 | 1985-10-30 | Verfahren zur herstellung integrierter schaltungen unter einbeziehung von schritten zum nachweis von getterstellen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4575922A (de) |
EP (1) | EP0181737B1 (de) |
JP (1) | JPS61174728A (de) |
AT (1) | ATE52636T1 (de) |
DE (1) | DE3577622D1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2597976B2 (ja) * | 1985-03-27 | 1997-04-09 | 株式会社東芝 | 半導体装置及びその製造方法 |
US4777146A (en) * | 1987-02-24 | 1988-10-11 | American Telephone And Telegraph Company, At&T Bell Laboratories | Fabrication process involving semi-insulating material |
US4873555A (en) * | 1987-06-08 | 1989-10-10 | University Of Pittsburgh Of The Commonwealth System Of Higher Education | Intraband quantum well photodetector and associated method |
US5233191A (en) * | 1990-04-02 | 1993-08-03 | Hitachi, Ltd. | Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process |
US5463459A (en) | 1991-04-02 | 1995-10-31 | Hitachi, Ltd. | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process |
US5306345A (en) * | 1992-08-25 | 1994-04-26 | Particle Solutions | Deposition chamber for deposition of particles on semiconductor wafers |
US6907107B1 (en) | 1999-03-16 | 2005-06-14 | Qinetiq Limited | Method and apparatus for the analysis of material composition |
US7079975B1 (en) * | 2001-04-30 | 2006-07-18 | Advanced Micro Devices, Inc. | Scatterometry and acoustic based active control of thin film deposition process |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4021675A (en) * | 1973-02-20 | 1977-05-03 | Hughes Aircraft Company | System for controlling ion implantation dosage in electronic materials |
US4033787A (en) * | 1975-10-06 | 1977-07-05 | Honeywell Inc. | Fabrication of semiconductor devices utilizing ion implantation |
US3984680A (en) * | 1975-10-14 | 1976-10-05 | Massachusetts Institute Of Technology | Soft X-ray mask alignment system |
US4110625A (en) * | 1976-12-20 | 1978-08-29 | International Business Machines Corporation | Method and apparatus for monitoring the dose of ion implanted into a target by counting emitted X-rays |
US4332833A (en) * | 1980-02-29 | 1982-06-01 | Bell Telephone Laboratories, Incorporated | Method for optical monitoring in materials fabrication |
US4392893A (en) * | 1980-11-17 | 1983-07-12 | Texas Instruments Incorporated | Method for controlling characteristics of a semiconductor integrated by circuit X-ray bombardment |
-
1984
- 1984-11-05 US US06/668,512 patent/US4575922A/en not_active Expired - Fee Related
-
1985
- 1985-10-30 EP EP85307851A patent/EP0181737B1/de not_active Expired - Lifetime
- 1985-10-30 AT AT85307851T patent/ATE52636T1/de not_active IP Right Cessation
- 1985-10-30 DE DE8585307851T patent/DE3577622D1/de not_active Expired - Fee Related
- 1985-11-01 JP JP60246128A patent/JPS61174728A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
EP0181737A3 (en) | 1987-05-20 |
JPH0428140B2 (de) | 1992-05-13 |
US4575922A (en) | 1986-03-18 |
EP0181737B1 (de) | 1990-05-09 |
JPS61174728A (ja) | 1986-08-06 |
DE3577622D1 (de) | 1990-06-13 |
EP0181737A2 (de) | 1986-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |