DE3772561D1 - Verfahren zur empfindlichkeitserhoehung eines leckdetektors. - Google Patents

Verfahren zur empfindlichkeitserhoehung eines leckdetektors.

Info

Publication number
DE3772561D1
DE3772561D1 DE8888900615T DE3772561T DE3772561D1 DE 3772561 D1 DE3772561 D1 DE 3772561D1 DE 8888900615 T DE8888900615 T DE 8888900615T DE 3772561 T DE3772561 T DE 3772561T DE 3772561 D1 DE3772561 D1 DE 3772561D1
Authority
DE
Germany
Prior art keywords
sensitivity
increasing
leak detector
leak
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE8888900615T
Other languages
English (en)
Inventor
E Berquist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Martin Marietta Corp
Original Assignee
Martin Marietta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25481190&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3772561(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Martin Marietta Corp filed Critical Martin Marietta Corp
Application granted granted Critical
Publication of DE3772561D1 publication Critical patent/DE3772561D1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE8888900615T 1986-12-19 1987-10-22 Verfahren zur empfindlichkeitserhoehung eines leckdetektors. Revoked DE3772561D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/944,321 US4785666A (en) 1986-12-19 1986-12-19 Method of increasing the sensitivity of a leak detector in the probe mode
PCT/US1987/002706 WO1988004774A1 (en) 1986-12-19 1987-10-22 A method of increasing the sensitivity of a leak detector in the probe mode

Publications (1)

Publication Number Publication Date
DE3772561D1 true DE3772561D1 (de) 1991-10-02

Family

ID=25481190

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888900615T Revoked DE3772561D1 (de) 1986-12-19 1987-10-22 Verfahren zur empfindlichkeitserhoehung eines leckdetektors.

Country Status (6)

Country Link
US (1) US4785666A (de)
EP (1) EP0294455B1 (de)
JP (1) JPH01501570A (de)
KR (1) KR890700224A (de)
DE (1) DE3772561D1 (de)
WO (1) WO1988004774A1 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
US4893497A (en) * 1988-09-12 1990-01-16 Philip Danielson Leak detection system
US5027905A (en) * 1989-07-26 1991-07-02 Cousineau Ronald L Fire sprinkler control apparatus
US5425832A (en) * 1990-10-05 1995-06-20 Bridgestone Corporation Surface treatment of fluoropolymer members and preparation of composite products therefrom
JP2500488B2 (ja) * 1991-02-08 1996-05-29 ヤマハ株式会社 漏洩試験方法及び漏洩試験装置
US5301537A (en) * 1991-05-31 1994-04-12 W. C. Wood Company Limited Method for detecting halocarbon refrigerant leaks by usage of a continually heated mass spectrometer
WO1993005859A1 (en) * 1991-09-19 1993-04-01 The United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services Miniature cryosorption vacuum pump
US5317900A (en) * 1992-10-02 1994-06-07 The Lyle E. & Barbara L. Bergquist Trust Ultrasensitive helium leak detector for large systems
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5767391A (en) * 1996-11-25 1998-06-16 Taiwan Semiconductor Manufacturing Company, Ltd Leakage detect tool for vacuum bellows
US6330821B1 (en) 2000-02-14 2001-12-18 The Goodyear Tire & Rubber Company Method of detecting expansion vessel leakage
US6626027B1 (en) * 2001-06-12 2003-09-30 Intertech Development Company Method and apparatus for detecting a gas leak using nuclear magnetic resonance
KR100549946B1 (ko) * 2003-10-20 2006-02-07 삼성전자주식회사 반도체 제조설비의 진공누설 검출장치
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US7266993B2 (en) * 2004-06-04 2007-09-11 Air Logic Power Systems, Inc. Container leak detection apparatus and method
US7299681B2 (en) * 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
JP5368705B2 (ja) * 2004-12-07 2013-12-18 フラウンホーファー・ゲゼルシャフト・ツール・フェルデルング・デア・アンゲヴァンテン・フォルシュング・エー・ファウ 真空カプセル化したデバイスのリークレート測定方法
DE102005009713A1 (de) * 2005-03-03 2006-09-07 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102005043494A1 (de) 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102006056215A1 (de) * 2006-11-29 2008-06-05 Inficon Gmbh Schnüffellecksuchgerät
CN101595305B (zh) * 2007-01-17 2013-02-13 布鲁克机械公司 没有压力爆发的高容量低温泵
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
US8615360B2 (en) * 2009-10-30 2013-12-24 Telenav, Inc. Navigation system with single selection mileage single capture mechanism and method of operation thereof
DE102009059824A1 (de) 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
US8812179B1 (en) * 2010-10-05 2014-08-19 The Boeing Company Ammonia detection
TWI639769B (zh) 2011-02-09 2018-11-01 布魯克機械公司 低溫泵及用於低溫泵之第二階段陣列
WO2012142402A1 (en) * 2011-04-14 2012-10-18 Cincinnati Test Systems, Inc. Leak testing device and method
KR20180081633A (ko) * 2012-03-13 2018-07-16 엠케이에스 인스트루먼츠, 인코포레이티드 Ａｒｔ ｍｓ트랩 내의 미량 가스 농축법
KR102072802B1 (ko) * 2012-12-05 2020-02-04 삼성디스플레이 주식회사 버터플라이 밸브 및 버터플라이 밸브의 누설 확인 방법
US9410876B2 (en) * 2013-01-04 2016-08-09 The Trustees Of Princeton University System and method for the determination of mixture averaged molecular weight of complex mixtures
WO2015017395A1 (en) * 2013-07-30 2015-02-05 Board Of Regents, The University Of Texas System Sample transfer to high vacuum transition flow
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
US20160090976A1 (en) * 2014-09-30 2016-03-31 Honeywell International Inc. Systems and methods for a dual purpose getter container
US10481036B2 (en) * 2015-04-29 2019-11-19 Medeng Research Institute Ltd. Pipeline leak detection system
US10005033B2 (en) * 2015-04-29 2018-06-26 Pacific Environment Technologies, LLC Isotopic enrichment of helium-3 through glass
US9976929B2 (en) * 2015-10-20 2018-05-22 Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R.O.C. Apparatus for verifying the integrity of the confinement boundary of a spent nuclear fuel dry storage canister in operation
EP3208591A1 (de) 2016-02-17 2017-08-23 Inficon GmbH Vakuumglockensonde und verfahren zur leckerkennung
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
EP3877737B1 (de) * 2018-11-27 2022-10-19 West Pharmaceutical Services, Inc. System und verfahren zur prüfung der dichtigkeit eines verschlossenen behälters bei kryogenen temperaturen

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3091114A (en) * 1959-12-17 1963-05-28 Air Reduction Method and apparatus for testing sealed packages for leaks
US3246505A (en) * 1963-09-09 1966-04-19 Boeing Co Leak detection method and apparatus
US3416359A (en) * 1966-07-01 1968-12-17 Texas Instruments Inc Method and apparatus for testing hermetically sealed transistor devices
US3504528A (en) * 1968-04-09 1970-04-07 Us Army Fluid pressure leak detector system for closed containers and the like
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US3578758A (en) * 1969-05-07 1971-05-18 Nasa Orifice gross leak tester
US3645127A (en) * 1970-01-12 1972-02-29 Veeco Instr Remote leak detection
US3646804A (en) * 1970-01-21 1972-03-07 Electronic Communications Gross leak detector and method
US3672207A (en) * 1971-01-04 1972-06-27 North American Rockwell Apparatus for verifying hermeticity of small electronic assemblies
US3762212A (en) * 1971-07-15 1973-10-02 Advanced Technologies Inc Leak testing apparatus and methods
US3824839A (en) * 1971-09-24 1974-07-23 Varian Associates Leak detecting system and method for passing a measured sample of gas to a leak detector
US3738158A (en) * 1972-04-06 1973-06-12 Us Air Force Gross leak vacuum and pressure chamber assembly
US3888111A (en) * 1973-11-21 1975-06-10 Gen Motors Corp Sealed beam headlamp unit leak detection system
US3968675A (en) * 1974-06-07 1976-07-13 Varian Associates Method and apparatus for preparing a mass spectrometer leak detector system for operation
US4158960A (en) * 1978-05-04 1979-06-26 The United States Of America As Represented By The Secretary Of The Army Microcircuit fine leak test apparatus
US4154092A (en) * 1978-05-04 1979-05-15 The United States Of America As Represented By The Secretary Of The Army Pneumatic gross leak detector
FR2452699A1 (fr) * 1979-03-28 1980-10-24 Cit Alcatel Dispositif de reniflage pour detecteur de fuites a helium a spectrometre de masse
FR2475728A1 (fr) * 1980-02-11 1981-08-14 Cit Alcatel Detecteur de fuites a helium
JPS56126733A (en) * 1980-03-10 1981-10-05 Nippon Sanso Kk Detecting method for leakage of helium
US4356721A (en) * 1980-12-19 1982-11-02 The United States Of America As Represented By The Secretary Of The Army Glass lead seal test apparatus
US4459844A (en) * 1982-06-17 1984-07-17 Smith & Denison Gas separation chamber and portable leak detection system
GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
US4492110A (en) * 1983-06-01 1985-01-08 Martin Marietta Corporation Ultra sensitive noble gas leak detector
JPS6066127A (ja) * 1983-09-20 1985-04-16 Tokuda Seisakusho Ltd ヘリウム漏洩試験装置
US4593530A (en) * 1984-04-10 1986-06-10 Air Products And Chemicals, Inc. Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump
US4577465A (en) * 1984-05-11 1986-03-25 Helix Technology Corporation Oil free vacuum system
US4583394A (en) * 1984-08-07 1986-04-22 Japan Atomic Energy Research Institute Device and method for leak location
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe

Also Published As

Publication number Publication date
KR890700224A (ko) 1989-03-10
WO1988004774A1 (en) 1988-06-30
EP0294455B1 (de) 1991-08-28
JPH01501570A (ja) 1989-06-01
EP0294455A1 (de) 1988-12-14
US4785666A (en) 1988-11-22

Similar Documents

Publication Publication Date Title
DE3772561D1 (de) Verfahren zur empfindlichkeitserhoehung eines leckdetektors.
DE68905678D1 (de) Verfahren zur feststellung von verduennten teilen der inneren oder der aeusseren oberflaeche eines rohres.
DE58905293D1 (de) Verfahren zur auswertung eines sensorsignals.
DE3669271D1 (de) Verfahren zur entseuchung des bodens.
FI881782A0 (fi) Menetelmä mittavirheiden havaitsemiseksi
ATA333384A (de) Vorrichtung zur festlegung eines katheters
DE3483651D1 (de) Verfahren zur lokalisierung von gegenstaenden eines sachregisters.
DE3481547D1 (de) Verfahren zur kalibrierung eines reflektometers.
ES490788A0 (es) Un metodo de determinacion de la presencia de un enzima en un analizado
DE3783050T2 (de) Geraet zur erkennung eines synchronsignals.
DE3751940D1 (de) Verfahren zur Messung des Zustandes von Fluiden
DE3280123D1 (de) Geraet und verfahren zur mustererkennung.
DE3586901T2 (de) Zeitvielfachvermittlungsanlage zur durchfuehrung eines rueckschleiftests.
DE59007777D1 (de) Verfahren zur messfehlerkorrektur eines heissfilm-luftmassenmessers.
DE69011655T2 (de) Schaltung und Verfahren zur Normierung eines Detektorausgangs.
DE3887784D1 (de) Verfahren zur Prüfung eines Netzwerkaufbaus.
DE3669050D1 (de) Verfahren zum kalibrieren eines auswuchtgeraets.
DE68913581T2 (de) Verfahren zur Erkennung der Kontur eines Strahlenfelds.
DE3766419D1 (de) Verfahren zum gewinnen eines phasendifferenzsignals.
DE68902255T2 (de) Verfahren zur bestimmung der kontur eines bestrahlungsfelds.
DE59103053D1 (de) Verfahren zur einstellung eines funktionsmasses.
DE69014264D1 (de) Leckaufspürverfahren.
DE59000550D1 (de) Verfahren zur ermittlung der geschwindigkeit eines fahrzeugs.
DE3682045D1 (de) Verfahren zur messung der zeitverzoegerung eines kabels.
DE3871168D1 (de) Verfahren zur messung von biomasse.

Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation