KR890700224A - 탐침방식에 있어서 누출검출기의 감도를 증가시키는 방법 - Google Patents

탐침방식에 있어서 누출검출기의 감도를 증가시키는 방법

Info

Publication number
KR890700224A
KR890700224A KR1019880701018A KR880701018A KR890700224A KR 890700224 A KR890700224 A KR 890700224A KR 1019880701018 A KR1019880701018 A KR 1019880701018A KR 880701018 A KR880701018 A KR 880701018A KR 890700224 A KR890700224 A KR 890700224A
Authority
KR
South Korea
Prior art keywords
sensitivity
increase
leak detector
probe method
probe
Prior art date
Application number
KR1019880701018A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25481190&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR890700224(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed filed Critical
Publication of KR890700224A publication Critical patent/KR890700224A/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
KR1019880701018A 1986-12-19 1988-08-19 탐침방식에 있어서 누출검출기의 감도를 증가시키는 방법 KR890700224A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/944,321 US4785666A (en) 1986-12-19 1986-12-19 Method of increasing the sensitivity of a leak detector in the probe mode
PCT/US1987/002706 WO1988004774A1 (en) 1986-12-19 1987-10-22 A method of increasing the sensitivity of a leak detector in the probe mode

Publications (1)

Publication Number Publication Date
KR890700224A true KR890700224A (ko) 1989-03-10

Family

ID=25481190

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880701018A KR890700224A (ko) 1986-12-19 1988-08-19 탐침방식에 있어서 누출검출기의 감도를 증가시키는 방법

Country Status (6)

Country Link
US (1) US4785666A (ko)
EP (1) EP0294455B1 (ko)
JP (1) JPH01501570A (ko)
KR (1) KR890700224A (ko)
DE (1) DE3772561D1 (ko)
WO (1) WO1988004774A1 (ko)

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EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
US4893497A (en) * 1988-09-12 1990-01-16 Philip Danielson Leak detection system
US5027905A (en) * 1989-07-26 1991-07-02 Cousineau Ronald L Fire sprinkler control apparatus
US5425832A (en) * 1990-10-05 1995-06-20 Bridgestone Corporation Surface treatment of fluoropolymer members and preparation of composite products therefrom
JP2500488B2 (ja) * 1991-02-08 1996-05-29 ヤマハ株式会社 漏洩試験方法及び漏洩試験装置
US5301537A (en) * 1991-05-31 1994-04-12 W. C. Wood Company Limited Method for detecting halocarbon refrigerant leaks by usage of a continually heated mass spectrometer
WO1993005859A1 (en) * 1991-09-19 1993-04-01 The United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services Miniature cryosorption vacuum pump
US5317900A (en) * 1992-10-02 1994-06-07 The Lyle E. & Barbara L. Bergquist Trust Ultrasensitive helium leak detector for large systems
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5767391A (en) * 1996-11-25 1998-06-16 Taiwan Semiconductor Manufacturing Company, Ltd Leakage detect tool for vacuum bellows
US6330821B1 (en) 2000-02-14 2001-12-18 The Goodyear Tire & Rubber Company Method of detecting expansion vessel leakage
US6626027B1 (en) * 2001-06-12 2003-09-30 Intertech Development Company Method and apparatus for detecting a gas leak using nuclear magnetic resonance
KR100549946B1 (ko) * 2003-10-20 2006-02-07 삼성전자주식회사 반도체 제조설비의 진공누설 검출장치
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US7266993B2 (en) * 2004-06-04 2007-09-11 Air Logic Power Systems, Inc. Container leak detection apparatus and method
US7299681B2 (en) * 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
ATE541196T1 (de) * 2004-12-07 2012-01-15 Fraunhofer Ges Forschung Verfahren zum testen der leckgeschwindigkeit von in vakuum eingekapselten einrichtungen
DE102005009713A1 (de) * 2005-03-03 2006-09-07 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102005043494A1 (de) 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102006056215A1 (de) * 2006-11-29 2008-06-05 Inficon Gmbh Schnüffellecksuchgerät
US10760562B2 (en) * 2007-01-17 2020-09-01 Edwards Vacuum Llc Pressure burst free high capacity cryopump
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
US8615360B2 (en) * 2009-10-30 2013-12-24 Telenav, Inc. Navigation system with single selection mileage single capture mechanism and method of operation thereof
DE102009059824A1 (de) 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
US8812179B1 (en) * 2010-10-05 2014-08-19 The Boeing Company Ammonia detection
WO2012109304A2 (en) 2011-02-09 2012-08-16 Brooks Automation, Inc. Cryopump
US8997553B2 (en) * 2011-04-14 2015-04-07 Cincinnati Test Systems, Inc. Leak testing device and method
EP2825875B1 (en) * 2012-03-13 2019-05-08 MKS Instruments, Inc. Trace gas concentration in art ms traps
KR102072802B1 (ko) * 2012-12-05 2020-02-04 삼성디스플레이 주식회사 버터플라이 밸브 및 버터플라이 밸브의 누설 확인 방법
US9410876B2 (en) * 2013-01-04 2016-08-09 The Trustees Of Princeton University System and method for the determination of mixture averaged molecular weight of complex mixtures
WO2015017395A1 (en) * 2013-07-30 2015-02-05 Board Of Regents, The University Of Texas System Sample transfer to high vacuum transition flow
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
US20160090976A1 (en) * 2014-09-30 2016-03-31 Honeywell International Inc. Systems and methods for a dual purpose getter container
US10005033B2 (en) * 2015-04-29 2018-06-26 Pacific Environment Technologies, LLC Isotopic enrichment of helium-3 through glass
US10481036B2 (en) * 2015-04-29 2019-11-19 Medeng Research Institute Ltd. Pipeline leak detection system
US9976929B2 (en) * 2015-10-20 2018-05-22 Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R.O.C. Apparatus for verifying the integrity of the confinement boundary of a spent nuclear fuel dry storage canister in operation
EP3208591A1 (en) * 2016-02-17 2017-08-23 Inficon GmbH Vacuum bell probe and method for leak detection
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
EP3877737B1 (en) * 2018-11-27 2022-10-19 West Pharmaceutical Services, Inc. System and method for testing closure integrity of a sealed container at cryogenic temperatures

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US3246505A (en) * 1963-09-09 1966-04-19 Boeing Co Leak detection method and apparatus
US3416359A (en) * 1966-07-01 1968-12-17 Texas Instruments Inc Method and apparatus for testing hermetically sealed transistor devices
US3504528A (en) * 1968-04-09 1970-04-07 Us Army Fluid pressure leak detector system for closed containers and the like
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US3578758A (en) * 1969-05-07 1971-05-18 Nasa Orifice gross leak tester
US3645127A (en) * 1970-01-12 1972-02-29 Veeco Instr Remote leak detection
US3646804A (en) * 1970-01-21 1972-03-07 Electronic Communications Gross leak detector and method
US3672207A (en) * 1971-01-04 1972-06-27 North American Rockwell Apparatus for verifying hermeticity of small electronic assemblies
US3762212A (en) * 1971-07-15 1973-10-02 Advanced Technologies Inc Leak testing apparatus and methods
US3824839A (en) * 1971-09-24 1974-07-23 Varian Associates Leak detecting system and method for passing a measured sample of gas to a leak detector
US3738158A (en) * 1972-04-06 1973-06-12 Us Air Force Gross leak vacuum and pressure chamber assembly
US3888111A (en) * 1973-11-21 1975-06-10 Gen Motors Corp Sealed beam headlamp unit leak detection system
US3968675A (en) * 1974-06-07 1976-07-13 Varian Associates Method and apparatus for preparing a mass spectrometer leak detector system for operation
US4158960A (en) * 1978-05-04 1979-06-26 The United States Of America As Represented By The Secretary Of The Army Microcircuit fine leak test apparatus
US4154092A (en) * 1978-05-04 1979-05-15 The United States Of America As Represented By The Secretary Of The Army Pneumatic gross leak detector
FR2452699A1 (fr) * 1979-03-28 1980-10-24 Cit Alcatel Dispositif de reniflage pour detecteur de fuites a helium a spectrometre de masse
FR2475728A1 (fr) * 1980-02-11 1981-08-14 Cit Alcatel Detecteur de fuites a helium
JPS56126733A (en) * 1980-03-10 1981-10-05 Nippon Sanso Kk Detecting method for leakage of helium
US4356721A (en) * 1980-12-19 1982-11-02 The United States Of America As Represented By The Secretary Of The Army Glass lead seal test apparatus
US4459844A (en) * 1982-06-17 1984-07-17 Smith & Denison Gas separation chamber and portable leak detection system
GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
US4492110A (en) * 1983-06-01 1985-01-08 Martin Marietta Corporation Ultra sensitive noble gas leak detector
JPS6066127A (ja) * 1983-09-20 1985-04-16 Tokuda Seisakusho Ltd ヘリウム漏洩試験装置
US4593530A (en) * 1984-04-10 1986-06-10 Air Products And Chemicals, Inc. Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump
US4577465A (en) * 1984-05-11 1986-03-25 Helix Technology Corporation Oil free vacuum system
US4583394A (en) * 1984-08-07 1986-04-22 Japan Atomic Energy Research Institute Device and method for leak location
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe

Also Published As

Publication number Publication date
EP0294455B1 (en) 1991-08-28
DE3772561D1 (de) 1991-10-02
US4785666A (en) 1988-11-22
WO1988004774A1 (en) 1988-06-30
EP0294455A1 (en) 1988-12-14
JPH01501570A (ja) 1989-06-01

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