ATE523612T1 - Verfahren zur herstellung einer funktionsschicht - Google Patents

Verfahren zur herstellung einer funktionsschicht

Info

Publication number
ATE523612T1
ATE523612T1 AT09001303T AT09001303T ATE523612T1 AT E523612 T1 ATE523612 T1 AT E523612T1 AT 09001303 T AT09001303 T AT 09001303T AT 09001303 T AT09001303 T AT 09001303T AT E523612 T1 ATE523612 T1 AT E523612T1
Authority
AT
Austria
Prior art keywords
film
organic film
producing
functional layer
functional
Prior art date
Application number
AT09001303T
Other languages
English (en)
Inventor
Masami Nakagame
Hiroyuki Nishida
Norihiro Kadota
Jun Fujinawa
Daisuke Onodera
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Application granted granted Critical
Publication of ATE523612T1 publication Critical patent/ATE523612T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/067—Curing or cross-linking the coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50—Multilayers
    • B05D7/52—Two layers
    • B05D7/54—No clear coat specified

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
AT09001303T 2008-01-31 2009-01-30 Verfahren zur herstellung einer funktionsschicht ATE523612T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008020386A JP5255856B2 (ja) 2008-01-31 2008-01-31 機能性フィルムの製造方法

Publications (1)

Publication Number Publication Date
ATE523612T1 true ATE523612T1 (de) 2011-09-15

Family

ID=40651649

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09001303T ATE523612T1 (de) 2008-01-31 2009-01-30 Verfahren zur herstellung einer funktionsschicht

Country Status (4)

Country Link
US (1) US8980374B2 (de)
EP (1) EP2085497B1 (de)
JP (1) JP5255856B2 (de)
AT (1) ATE523612T1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5081712B2 (ja) * 2008-05-02 2012-11-28 富士フイルム株式会社 成膜装置
JP5216724B2 (ja) * 2009-09-01 2013-06-19 富士フイルム株式会社 ガスバリアフィルムおよびデバイス
EP2292339A1 (de) * 2009-09-07 2011-03-09 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Beschichtungsverfahren und Beschichtungsvorrichtung
EP2508646A1 (de) * 2011-04-05 2012-10-10 Bayer Material Science AG "Rolle zu Rolle" -Verfahren zum kontinuierlichen Abscheiden von mehrschichtigen Beschichtungen
JP5709696B2 (ja) 2011-08-31 2015-04-30 富士フイルム株式会社 機能性フィルムの製造方法および機能性フィルム
US9777365B2 (en) 2011-11-29 2017-10-03 Itn Energy Systems, Inc. Multi-zone modular coater
JP6045265B2 (ja) * 2012-09-18 2016-12-14 リンテック株式会社 イオン注入装置
JP6431749B2 (ja) * 2014-11-14 2018-11-28 富士フイルム株式会社 機能性積層フィルム
CN104353584A (zh) * 2014-11-19 2015-02-18 京东方科技集团股份有限公司 一种涂布装置及涂布方法
EP3034182A1 (de) * 2014-12-17 2016-06-22 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Beschichtungssystem und Beschichtungsverfahren
US20190099775A1 (en) * 2017-01-05 2019-04-04 Ulvac, Inc. Roll-to-Roll Deposition Apparatus and Roll-to-Roll Deposition Method
EP3851210B1 (de) * 2020-01-14 2025-12-24 Jesús Francisco Barberan Latorre Beschichtungsrolle
WO2021185444A1 (en) * 2020-03-18 2021-09-23 Applied Materials, Inc. Vacuum processing system for a flexible substrate, method of depositing a layer stack on a flexible substrate, and layer system

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE513714A (de) 1951-08-23 1900-01-01
US4842893A (en) 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5032461A (en) 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US4954371A (en) 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
CH683776A5 (de) * 1991-12-05 1994-05-13 Alusuisse Lonza Services Ag Beschichten einer Substratfläche mit einer Permeationssperre.
EP0758482B1 (de) * 1993-10-04 2003-03-05 3M Innovative Properties Company Vernetztes acrylatbeschichtungsmaterial zur herstellung von kondensatordielektrika und sauerstoffbarrieren
US6083628A (en) * 1994-11-04 2000-07-04 Sigma Laboratories Of Arizona, Inc. Hybrid polymer film
JP3198501B2 (ja) * 1997-03-31 2001-08-13 凸版印刷株式会社 バリアー性積層体及びその製造方法
JP2000323273A (ja) 1999-05-07 2000-11-24 Dainippon Printing Co Ltd エレクトロルミネッセンス素子
JP2001353805A (ja) * 2000-06-14 2001-12-25 Toppan Printing Co Ltd ガスバリア材およびその製造方法
JP4677692B2 (ja) * 2000-11-10 2011-04-27 凸版印刷株式会社 透明ガスバリア材およびその製造方法
JP4747425B2 (ja) 2001-03-13 2011-08-17 凸版印刷株式会社 透明ガスバリア性積層フィルム
US7157117B2 (en) * 2002-06-26 2007-01-02 Sigma Laboratories Of Arizona, Llc Functionalization of porous materials by vacuum deposition of polymers
JP4402864B2 (ja) 2002-06-27 2010-01-20 富士フイルム株式会社 ガスバリア性フィルム
JP2004042425A (ja) * 2002-07-11 2004-02-12 Toray Ind Inc 蒸着フイルム、及びその製造方法
US7015640B2 (en) 2002-09-11 2006-03-21 General Electric Company Diffusion barrier coatings having graded compositions and devices incorporating the same
US20060159844A1 (en) * 2005-01-18 2006-07-20 Fuji Photo Film Co., Ltd. Process and apparatus for producing magnetic recording medium
US8323801B2 (en) * 2006-01-18 2012-12-04 E I Du Pont De Nemours And Company Process for forming a durable low emissivity moisture vapor permeable metallized sheet including a protective metal oxide layer

Also Published As

Publication number Publication date
US20090196997A1 (en) 2009-08-06
JP5255856B2 (ja) 2013-08-07
US8980374B2 (en) 2015-03-17
EP2085497A1 (de) 2009-08-05
JP2009179855A (ja) 2009-08-13
EP2085497B1 (de) 2011-09-07

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