ATE50974T1 - Herstellung von optischen wellenleitern. - Google Patents
Herstellung von optischen wellenleitern.Info
- Publication number
- ATE50974T1 ATE50974T1 AT86304714T AT86304714T ATE50974T1 AT E50974 T1 ATE50974 T1 AT E50974T1 AT 86304714 T AT86304714 T AT 86304714T AT 86304714 T AT86304714 T AT 86304714T AT E50974 T1 ATE50974 T1 AT E50974T1
- Authority
- AT
- Austria
- Prior art keywords
- asg
- optical waveguides
- manufacture
- reaction
- layers
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858515814A GB8515814D0 (en) | 1985-06-21 | 1985-06-21 | Fabrication of optical waveguides |
EP86304714A EP0206764B1 (de) | 1985-06-21 | 1986-06-19 | Herstellung von optischen Wellenleitern |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE50974T1 true ATE50974T1 (de) | 1990-03-15 |
Family
ID=10581165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT86304714T ATE50974T1 (de) | 1985-06-21 | 1986-06-19 | Herstellung von optischen wellenleitern. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4946251A (de) |
EP (1) | EP0206764B1 (de) |
JP (1) | JP2594046B2 (de) |
AT (1) | ATE50974T1 (de) |
AU (1) | AU590886B2 (de) |
DE (1) | DE3669494D1 (de) |
GB (1) | GB8515814D0 (de) |
WO (1) | WO1986007588A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4904616A (en) * | 1988-07-25 | 1990-02-27 | Air Products And Chemicals, Inc. | Method of depositing arsine, antimony and phosphine substitutes |
US4988640A (en) * | 1988-07-25 | 1991-01-29 | Air Products And Chemicals, Inc. | Method of doping and implanting using arsine, antimony, and phosphine substitutes |
US5124278A (en) * | 1990-09-21 | 1992-06-23 | Air Products And Chemicals, Inc. | Amino replacements for arsine, antimony and phosphine |
TW243500B (de) * | 1993-01-14 | 1995-03-21 | Sumitomo Electric Industries | |
JP2739806B2 (ja) * | 1993-06-08 | 1998-04-15 | 日本電気株式会社 | 光導波路の製造方法 |
FR2727768B1 (fr) * | 1994-12-05 | 1997-01-10 | Alcatel Nv | Procede pour former une couche de silice a eliminer ulterieurement et procede pour rapporter un composant en optique integree |
JP3270353B2 (ja) * | 1997-03-05 | 2002-04-02 | 日本電気株式会社 | 光導波路の製造方法 |
US5852687A (en) * | 1997-07-09 | 1998-12-22 | Trw Inc. | Integrated optical time delay unit |
JP2001281487A (ja) * | 2000-03-30 | 2001-10-10 | Furukawa Electric Co Ltd:The | 光導波路装置およびその製造方法 |
AUPR178200A0 (en) * | 2000-11-29 | 2000-12-21 | Redfern Integrated Optics Pty Ltd | Silica-based optical device fabrication |
US7569463B2 (en) | 2006-03-08 | 2009-08-04 | Applied Materials, Inc. | Method of thermal processing structures formed on a substrate |
JP5558006B2 (ja) * | 2006-03-08 | 2014-07-23 | アプライド マテリアルズ インコーポレイテッド | 基板に形成された熱処理構造用の方法および装置 |
US7548364B2 (en) | 2006-07-31 | 2009-06-16 | Applied Materials, Inc. | Ultra-fast beam dithering with surface acoustic wave modulator |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4067641A (en) * | 1974-01-18 | 1978-01-10 | Texas Instruments Incorporated | Waveguide for integrated optical circuits |
US3957342A (en) * | 1974-07-29 | 1976-05-18 | The Post Office | Sodium borosilicate glasses for dielectric optical waveguides |
JPS5145543A (en) * | 1974-10-17 | 1976-04-19 | Nippon Telegraph & Telephone | Hikaridoharo oyobi sonoseizohoho |
GB1546828A (en) * | 1976-07-01 | 1979-05-31 | Secr Defence | Infra red transmitting glass member |
AU520414B2 (en) * | 1977-06-07 | 1982-01-28 | International Standard Electric Corp. | Optical fibres |
US4355454A (en) * | 1979-09-05 | 1982-10-26 | Texas Instruments Incorporated | Coating device with As2 -O3 -SiO2 |
NL8006410A (nl) * | 1980-11-25 | 1982-06-16 | Philips Nv | Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze. |
FR2534034B1 (fr) * | 1982-10-05 | 1986-02-28 | Lyonnaise Transmiss Optiques | Guide d'ondes lumineuses, et procedes de fabrication de celui-ci |
US4585299A (en) * | 1983-07-19 | 1986-04-29 | Fairchild Semiconductor Corporation | Process for fabricating optical wave-guiding components and components made by the process |
US4666247A (en) * | 1985-02-08 | 1987-05-19 | American Telephone And Telegraph Company, At&T Bell Laboratories | Multiconstituent optical fiber |
-
1985
- 1985-06-21 GB GB858515814A patent/GB8515814D0/en active Pending
-
1986
- 1986-06-18 AU AU58974/86A patent/AU590886B2/en not_active Ceased
- 1986-06-19 EP EP86304714A patent/EP0206764B1/de not_active Expired - Lifetime
- 1986-06-19 AT AT86304714T patent/ATE50974T1/de not_active IP Right Cessation
- 1986-06-19 WO PCT/GB1986/000357 patent/WO1986007588A1/en unknown
- 1986-06-19 JP JP61503549A patent/JP2594046B2/ja not_active Expired - Lifetime
- 1986-06-19 DE DE8686304714T patent/DE3669494D1/de not_active Expired - Fee Related
-
1989
- 1989-09-05 US US07/403,069 patent/US4946251A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AU5897486A (en) | 1986-12-24 |
WO1986007588A1 (en) | 1986-12-31 |
EP0206764B1 (de) | 1990-03-14 |
US4946251A (en) | 1990-08-07 |
GB8515814D0 (en) | 1985-07-24 |
JP2594046B2 (ja) | 1997-03-26 |
DE3669494D1 (de) | 1990-04-19 |
AU590886B2 (en) | 1989-11-23 |
EP0206764A1 (de) | 1986-12-30 |
JPS63500272A (ja) | 1988-01-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |