ATE50974T1 - Herstellung von optischen wellenleitern. - Google Patents

Herstellung von optischen wellenleitern.

Info

Publication number
ATE50974T1
ATE50974T1 AT86304714T AT86304714T ATE50974T1 AT E50974 T1 ATE50974 T1 AT E50974T1 AT 86304714 T AT86304714 T AT 86304714T AT 86304714 T AT86304714 T AT 86304714T AT E50974 T1 ATE50974 T1 AT E50974T1
Authority
AT
Austria
Prior art keywords
asg
optical waveguides
manufacture
reaction
layers
Prior art date
Application number
AT86304714T
Other languages
English (en)
Inventor
Gareth Wayne Berkley Ashwell
Benjamin James Ainsley
Original Assignee
British Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Telecomm filed Critical British Telecomm
Application granted granted Critical
Publication of ATE50974T1 publication Critical patent/ATE50974T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
AT86304714T 1985-06-21 1986-06-19 Herstellung von optischen wellenleitern. ATE50974T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB858515814A GB8515814D0 (en) 1985-06-21 1985-06-21 Fabrication of optical waveguides
EP86304714A EP0206764B1 (de) 1985-06-21 1986-06-19 Herstellung von optischen Wellenleitern

Publications (1)

Publication Number Publication Date
ATE50974T1 true ATE50974T1 (de) 1990-03-15

Family

ID=10581165

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86304714T ATE50974T1 (de) 1985-06-21 1986-06-19 Herstellung von optischen wellenleitern.

Country Status (8)

Country Link
US (1) US4946251A (de)
EP (1) EP0206764B1 (de)
JP (1) JP2594046B2 (de)
AT (1) ATE50974T1 (de)
AU (1) AU590886B2 (de)
DE (1) DE3669494D1 (de)
GB (1) GB8515814D0 (de)
WO (1) WO1986007588A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4904616A (en) * 1988-07-25 1990-02-27 Air Products And Chemicals, Inc. Method of depositing arsine, antimony and phosphine substitutes
US4988640A (en) * 1988-07-25 1991-01-29 Air Products And Chemicals, Inc. Method of doping and implanting using arsine, antimony, and phosphine substitutes
US5124278A (en) * 1990-09-21 1992-06-23 Air Products And Chemicals, Inc. Amino replacements for arsine, antimony and phosphine
TW243500B (de) * 1993-01-14 1995-03-21 Sumitomo Electric Industries
JP2739806B2 (ja) * 1993-06-08 1998-04-15 日本電気株式会社 光導波路の製造方法
FR2727768B1 (fr) * 1994-12-05 1997-01-10 Alcatel Nv Procede pour former une couche de silice a eliminer ulterieurement et procede pour rapporter un composant en optique integree
JP3270353B2 (ja) * 1997-03-05 2002-04-02 日本電気株式会社 光導波路の製造方法
US5852687A (en) * 1997-07-09 1998-12-22 Trw Inc. Integrated optical time delay unit
JP2001281487A (ja) * 2000-03-30 2001-10-10 Furukawa Electric Co Ltd:The 光導波路装置およびその製造方法
AUPR178200A0 (en) * 2000-11-29 2000-12-21 Redfern Integrated Optics Pty Ltd Silica-based optical device fabrication
US7569463B2 (en) 2006-03-08 2009-08-04 Applied Materials, Inc. Method of thermal processing structures formed on a substrate
JP5558006B2 (ja) * 2006-03-08 2014-07-23 アプライド マテリアルズ インコーポレイテッド 基板に形成された熱処理構造用の方法および装置
US7548364B2 (en) 2006-07-31 2009-06-16 Applied Materials, Inc. Ultra-fast beam dithering with surface acoustic wave modulator

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4067641A (en) * 1974-01-18 1978-01-10 Texas Instruments Incorporated Waveguide for integrated optical circuits
US3957342A (en) * 1974-07-29 1976-05-18 The Post Office Sodium borosilicate glasses for dielectric optical waveguides
JPS5145543A (en) * 1974-10-17 1976-04-19 Nippon Telegraph & Telephone Hikaridoharo oyobi sonoseizohoho
GB1546828A (en) * 1976-07-01 1979-05-31 Secr Defence Infra red transmitting glass member
AU520414B2 (en) * 1977-06-07 1982-01-28 International Standard Electric Corp. Optical fibres
US4355454A (en) * 1979-09-05 1982-10-26 Texas Instruments Incorporated Coating device with As2 -O3 -SiO2
NL8006410A (nl) * 1980-11-25 1982-06-16 Philips Nv Werkwijze voor de vervaardiging van geintegreerde optische golfgeleider circuits en circuits verkregen met deze werkwijze.
FR2534034B1 (fr) * 1982-10-05 1986-02-28 Lyonnaise Transmiss Optiques Guide d'ondes lumineuses, et procedes de fabrication de celui-ci
US4585299A (en) * 1983-07-19 1986-04-29 Fairchild Semiconductor Corporation Process for fabricating optical wave-guiding components and components made by the process
US4666247A (en) * 1985-02-08 1987-05-19 American Telephone And Telegraph Company, At&T Bell Laboratories Multiconstituent optical fiber

Also Published As

Publication number Publication date
AU5897486A (en) 1986-12-24
WO1986007588A1 (en) 1986-12-31
EP0206764B1 (de) 1990-03-14
US4946251A (en) 1990-08-07
GB8515814D0 (en) 1985-07-24
JP2594046B2 (ja) 1997-03-26
DE3669494D1 (de) 1990-04-19
AU590886B2 (en) 1989-11-23
EP0206764A1 (de) 1986-12-30
JPS63500272A (ja) 1988-01-28

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee