ATE504028T1 - Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem - Google Patents

Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem

Info

Publication number
ATE504028T1
ATE504028T1 AT05804182T AT05804182T ATE504028T1 AT E504028 T1 ATE504028 T1 AT E504028T1 AT 05804182 T AT05804182 T AT 05804182T AT 05804182 T AT05804182 T AT 05804182T AT E504028 T1 ATE504028 T1 AT E504028T1
Authority
AT
Austria
Prior art keywords
chip
exposed
atomic clock
clock system
size device
Prior art date
Application number
AT05804182T
Other languages
English (en)
Inventor
Mark Mescher
Mathew Varghese
Marc Weinberg
Thomas Marinis
Joseph Soucy
Original Assignee
Draper Lab Charles S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Draper Lab Charles S filed Critical Draper Lab Charles S
Application granted granted Critical
Publication of ATE504028T1 publication Critical patent/ATE504028T1/de

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Electric Clocks (AREA)
AT05804182T 2004-07-13 2005-07-13 Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem ATE504028T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US58737104P 2004-07-13 2004-07-13
PCT/US2005/024879 WO2006017345A2 (en) 2004-07-13 2005-07-13 Apparatus for suspending a chip-scale device and atomic clock system

Publications (1)

Publication Number Publication Date
ATE504028T1 true ATE504028T1 (de) 2011-04-15

Family

ID=35839809

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05804182T ATE504028T1 (de) 2004-07-13 2005-07-13 Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem

Country Status (7)

Country Link
US (1) US7215213B2 (de)
EP (1) EP1779202B1 (de)
JP (1) JP4972550B2 (de)
KR (1) KR101348553B1 (de)
AT (1) ATE504028T1 (de)
DE (1) DE602005027217D1 (de)
WO (1) WO2006017345A2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005027217D1 (de) * 2004-07-13 2011-05-12 Draper Lab Charles S Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem
EP2288968B1 (de) * 2008-06-05 2013-04-10 Philips Intellectual Property & Standards GmbH Atomfrequenzerfassungsvorrichtung auf grundlage von selbstmischender interferenz
US8071019B2 (en) * 2008-10-31 2011-12-06 Honeywell International Inc. Methods for introduction of a reactive material into a vacuum chamber
JP5504851B2 (ja) * 2009-12-01 2014-05-28 セイコーエプソン株式会社 原子発振器及び製造方法
US8456249B2 (en) 2011-05-11 2013-06-04 Teledyne Scientific & Imaging, Llc. Micro-scale system to provide thermal isolation and electrical communication between substrates
US8624682B2 (en) 2011-06-13 2014-01-07 Honeywell International Inc. Vapor cell atomic clock physics package
JP6123977B2 (ja) 2012-02-07 2017-05-10 セイコーエプソン株式会社 原子発振器
JP2014053842A (ja) * 2012-09-10 2014-03-20 Seiko Epson Corp 量子干渉装置の製造方法、量子干渉装置、電子機器及び原子セルモジュール
JP5954540B2 (ja) * 2012-09-10 2016-07-20 セイコーエプソン株式会社 原子セルモジュール、量子干渉装置、電子機器及び原子セルの磁界制御方法
US9285249B2 (en) * 2012-10-04 2016-03-15 Honeywell International Inc. Atomic sensor physics package with metal frame
JP6119294B2 (ja) 2013-02-18 2017-04-26 セイコーエプソン株式会社 量子干渉装置、原子発振器および移動体
JP6119295B2 (ja) 2013-02-18 2017-04-26 セイコーエプソン株式会社 量子干渉装置、原子発振器および移動体
WO2015002684A2 (en) 2013-04-10 2015-01-08 Microsemi Frequency And Time Corporation Chip-scale atomic gyroscope
US9410885B2 (en) 2013-07-22 2016-08-09 Honeywell International Inc. Atomic sensor physics package having optically transparent panes and external wedges
JP2015142240A (ja) * 2014-01-28 2015-08-03 セイコーエプソン株式会社 量子干渉ユニット、量子干渉装置、原子発振器、電子機器および移動体
US10167189B2 (en) 2014-09-30 2019-01-01 Analog Devices, Inc. Stress isolation platform for MEMS devices
JP6476751B2 (ja) 2014-10-29 2019-03-06 セイコーエプソン株式会社 原子セルの製造方法、原子セル、量子干渉装置、原子発振器および電子機器
JP2017073623A (ja) 2015-10-06 2017-04-13 セイコーエプソン株式会社 原子発振器
CN108473302B (zh) 2016-01-28 2023-06-02 时立方股份有限公司 隔热平台系统及方法
JP6728850B2 (ja) 2016-03-25 2020-07-22 セイコーエプソン株式会社 量子干渉装置、原子発振器および電子機器
JP6728867B2 (ja) 2016-03-28 2020-07-22 セイコーエプソン株式会社 量子干渉装置、原子発振器、および電子機器
JP2017183377A (ja) 2016-03-29 2017-10-05 セイコーエプソン株式会社 量子干渉装置、原子発振器、電子機器および移動体
JP2017183869A (ja) * 2016-03-29 2017-10-05 セイコーエプソン株式会社 量子干渉装置、原子発振器、電子機器および移動体
CN107800431A (zh) 2016-09-07 2018-03-13 精工爱普生株式会社 发光元件模块、原子振荡器和电子设备
FR3061901B1 (fr) * 2017-01-19 2021-07-30 Tronics Microsystems Structure d'au moins un element microfabrique et procede de montage associe
US10509369B1 (en) 2018-04-05 2019-12-17 The Government Of The United States Of America As Represented By The Secretary Of The Air Force Method of manufacturing a vapor cell for alkaline-earth-like atoms inside an ultrahigh vacuum chamber
JP2020113616A (ja) * 2019-01-10 2020-07-27 国立研究開発法人情報通信研究機構 量子光学装置
JP7232510B2 (ja) * 2019-01-31 2023-03-03 国立研究開発法人情報通信研究機構 量子光学装置
KR102289703B1 (ko) * 2019-12-31 2021-08-17 한국과학기술원 칩 스케일 원자시계
US11417611B2 (en) 2020-02-25 2022-08-16 Analog Devices International Unlimited Company Devices and methods for reducing stress on circuit components
US11981560B2 (en) 2020-06-09 2024-05-14 Analog Devices, Inc. Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
KR102700643B1 (ko) * 2022-11-07 2024-08-29 한국과학기술원 칩스케일 원자 시계 및 그 제조 방법
KR102834046B1 (ko) * 2023-12-06 2025-07-15 한국과학기술원 칩스케일 원자 시계 및 그 제조 방법

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3450379A (en) * 1967-09-15 1969-06-17 Itek Corp Vibration isolation device
US3600951A (en) * 1969-03-12 1971-08-24 Us Navy Arrangement to measure and compensate for crystal orientation change
US3735952A (en) * 1970-02-13 1973-05-29 Mechanics Research Inc Los Ang Energy absorbing shock isolation stabilizing arrangement
BR8206879A (pt) * 1981-03-09 1983-03-01 Rosemount Inc Aparelho aperfeicoado para isolamento de vibracao
US4404459A (en) * 1981-10-19 1983-09-13 The Bendix Corporation Housing and mounting assembly providing a temperature stabilized environment for a microcircuit
FR2583584B1 (fr) * 1985-06-14 1987-09-18 Ecole Nale Sup Meca Microtechn Dispositif de support d'un resonateur piezoelectrique a l'interieur d'un boitier
US4839613A (en) * 1988-05-31 1989-06-13 Austron, Inc. Temperature compensation for a disciplined frequency standard
FR2638587B1 (fr) * 1988-10-28 1991-02-01 Ecole Nale Sup Meca Microtechn Dispositif demontable de support d'un resonateur piezoelectrique a l'interieur d'un boitier
US5041800A (en) * 1989-05-19 1991-08-20 Ppa Industries, Inc. Lower power oscillator with heated resonator (S), with dual mode or other temperature sensing, possibly with an insulative support structure disposed between the resonator (S) and a resonator enclosure
JP3448051B2 (ja) * 1990-03-31 2003-09-16 株式会社東芝 不揮発性半導体記憶装置
FR2688640B1 (fr) * 1992-03-16 1994-07-01 Tekelec Neuchatel Time Sa Etalon de frequence atomique.
US5517157A (en) * 1993-04-27 1996-05-14 Ball Corporation Evanescent-field interrogator for atomic frequency standards
US5406682A (en) * 1993-12-23 1995-04-18 Motorola, Inc. Method of compliantly mounting a piezoelectric device
DE4437145C2 (de) * 1994-10-18 1998-04-09 Koenig & Bauer Albert Ag Vorrichtung zum Beseitigen von Zahnspiel
US5652550A (en) * 1994-12-29 1997-07-29 The United States Of America As Represented By The Secretary Of The Army Method and apparatus for isolating an oscillator from external mechanical and thermal effects using aerogels
US5686779A (en) * 1995-03-01 1997-11-11 The United States Of America As Represented By The Secretary Of The Army High sensitivity temperature sensor and sensor array
US5595430A (en) * 1995-03-27 1997-01-21 Ford Motor Company Resilient retainer for vibration sensitive components
US5896000A (en) * 1996-02-09 1999-04-20 Vectron Laboratories, Inc. Mounting for reducing vibration-induced side bands
US5657340A (en) * 1996-04-19 1997-08-12 The Aerospace Corporation Rubidium atomic clock with fluorescence optical pumping and method using same
US5659270A (en) 1996-05-16 1997-08-19 Motorola, Inc. Apparatus and method for a temperature-controlled frequency source using a programmable IC
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
JP3012816B2 (ja) * 1996-10-22 2000-02-28 松下電子工業株式会社 樹脂封止型半導体装置およびその製造方法
RU2122278C1 (ru) * 1997-07-09 1998-11-20 Открытое акционерное общество "МОРИОН" Термостатированный кварцевый генератор и способ настройки его терморегулятора
US5886810A (en) * 1997-09-29 1999-03-23 Hinds Instruments, Inc. Mounting apparatus for an optical assembly of a photoelastic modulator
US5917272A (en) * 1998-06-11 1999-06-29 Vectron, Inc. Oven-heated crystal resonator and oscillator assembly
JP2990172B1 (ja) * 1998-08-17 1999-12-13 宮城日本電気株式会社 ルビジウム原子発振器
US6049256A (en) * 1998-09-10 2000-04-11 Cts Corporation Low profile ovenized oscillator packing having a high thermal conductivity substrate
ATE363030T1 (de) * 1999-02-23 2007-06-15 Matsushita Electric Works Ltd Mikroaktuator
US6311945B1 (en) * 1999-03-22 2001-11-06 Ted Pella, Inc. Passive vibration isolation device
US6388534B1 (en) * 1999-06-29 2002-05-14 Alfiero Balzano Laser controlled crystal and dielectric resonator oscillators
US6428713B1 (en) * 1999-10-01 2002-08-06 Delphi Technologies, Inc. MEMS sensor structure and microfabrication process therefor
JP2001284398A (ja) * 2000-03-29 2001-10-12 Toshiba Corp 半導体装置及びその製造方法
US6744805B2 (en) * 2000-04-05 2004-06-01 Nortel Networks Limited Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
US6326856B1 (en) * 2000-06-22 2001-12-04 Sivers Ima Ab YIG oscillator with resilient support structure
US6662655B2 (en) * 2000-10-31 2003-12-16 Honeywell International, Inc. Net zero isolator
US6426679B1 (en) * 2000-12-14 2002-07-30 Northrop Grumman Corporation Miniature, low power atomic frequency standard with improved rf frequency synthesizer
US20020113191A1 (en) * 2000-12-22 2002-08-22 Stephen Rolt Integrated MEMS stabiliser and shock absorbance mechanism
JP4547086B2 (ja) * 2000-12-25 2010-09-22 ルネサスエレクトロニクス株式会社 半導体装置
US6759913B2 (en) * 2001-06-29 2004-07-06 Cts Corporation Crystal resonator based oscillator formed by attaching two separate housings
US6806784B2 (en) * 2001-07-09 2004-10-19 The National Institute Of Standards And Technology Miniature frequency standard based on all-optical excitation and a micro-machined containment vessel
US6831522B2 (en) * 2001-07-09 2004-12-14 The United States Of America As Represented By The Secretary Of Commerce Method of minimizing the short-term frequency instability of laser-pumped atomic clocks
US6559728B1 (en) * 2001-12-19 2003-05-06 Cts Corporation Miniature ovenized crystal oscillator
US6608370B1 (en) * 2002-01-28 2003-08-19 Motorola, Inc. Semiconductor wafer having a thin die and tethers and methods of making the same
US6900702B2 (en) * 2002-08-14 2005-05-31 Honeywell International Inc. MEMS frequency standard for devices such as atomic clock
JP3755001B2 (ja) * 2002-08-30 2006-03-15 独立行政法人情報通信研究機構 原子発振取得装置及び原子時計
US7098744B2 (en) * 2002-12-18 2006-08-29 Hrl Laboratories, Llc Method and apparatus for generating two frequencies having a frequency separation equal to the atomic frequency of an atomic species
US7064835B2 (en) * 2003-09-02 2006-06-20 Symmetricom, Inc. Miniature gas cell with folded optics
JP2005135938A (ja) * 2003-10-28 2005-05-26 Renesas Technology Corp 半導体装置およびその製造方法
US7292111B2 (en) * 2004-04-26 2007-11-06 Northrop Grumman Corporation Middle layer of die structure that comprises a cavity that holds an alkali metal
DE602005027217D1 (de) * 2004-07-13 2011-05-12 Draper Lab Charles S Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem

Also Published As

Publication number Publication date
JP4972550B2 (ja) 2012-07-11
EP1779202A2 (de) 2007-05-02
DE602005027217D1 (de) 2011-05-12
KR20070054633A (ko) 2007-05-29
US20060051883A1 (en) 2006-03-09
EP1779202B1 (de) 2011-03-30
WO2006017345A3 (en) 2006-09-08
WO2006017345A2 (en) 2006-02-16
JP2008520958A (ja) 2008-06-19
KR101348553B1 (ko) 2014-01-07
US7215213B2 (en) 2007-05-08

Similar Documents

Publication Publication Date Title
ATE504028T1 (de) Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem
ATE484771T1 (de) Verfahren und vorrichtung zum ausbilden eines projektionsschirms oder eines projektionsvolumens
DE60307564D1 (de) Vorrichtung zum Bestrahlen mit geladenen Teilchen
DE50312152D1 (de) Verfahren und Vorrichtung zum Positionieren von zusammenzufügenden Bauteilen
ATE476802T1 (de) Synchronisationsvorrichtung und vorrichtung zum erzeugen eines synchronisationssignals
EP1781187A4 (de) Verfahren und gerät zur ablage von angepassten strukturen in körperlumen
DE50207526D1 (de) Verfahren und vorrichtung zum anfahren von emissionsfreien gasturbinenkraftwerken
DE602006004479D1 (de) Gefässversiegelungs- und trennungsinstrument mit rotierbarer Vorrichtung zum Versiegeln und Trennen
ATE509265T1 (de) Gerät zur sortierung und konzentration elektromagnetischer energie und vorrichtung mit mindestens einem derartigen gerät
DE60317470D1 (de) Vorrichtung zum einführen einer verschlusseinrichtung
EP1786530A4 (de) Systeme, verfahren und vorrichtung zur erleichterung des spielens mit einer spielvorrichtung gemäss einem vertrag
DE60121229D1 (de) Vorrichtung zum abdichten und teilen eines gefässes mit nichtleitendem endanschlag
ATE276518T1 (de) Vorrichtung mit einem werkzeughalter und einem abnehmbar befestigbaren werkzeug
DE60314782D1 (de) Vorrichtung zum generieren eines verschlüsseltes Programms
DE60326745D1 (de) Brennstoff behälter und diese enthaltende vorrichtung
DE602006005027D1 (de) Vorrichtung zur Abstützung und Einlassung von Röhre und Kabeln in einem Turbotriebwerk
DE602006008385D1 (de) Vorrichtung zur Verschlusskontrolle eines Strassendeckels
DE602005001631D1 (de) Vorrichtung zum Füllen und Verschliessen von Tuben
DE502004005576D1 (de) Vorrichtung zur Erzeugung eines Reduktionsmittel-Luft-Gemisches
ATE289528T1 (de) Verfahren und vorrichtung zum vermischen von gasen in einem geschlossenen reaktor
DE502004011466D1 (de) Vorrichtung zum Erzeugen und Projizieren von Lichtmarken
EP1956996A4 (de) Gerät in einer dentalumgebung und verfahren zur kontrolle einer zugehörigen vorrichtung
ATE428970T1 (de) Verfahren und system zur konfiguration von prozessor-integrierten vorrichtungen in einem mehrprozessorsystem
ATE553288T1 (de) Anordnung und verfahren zum entfernen von teilchen in einem gasstrom
DE602004023814D1 (de) Vorrichtung zum Einbringen und zur Festsetzung einer Anzeige in einem Fenster des Zifferblatt eines elektronischen tragbaren Gerät

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties