ATE497145T1 - Compensation von messfehlern aufgrund dynamischer deformationen in einer koordinatenmessmaschine - Google Patents

Compensation von messfehlern aufgrund dynamischer deformationen in einer koordinatenmessmaschine

Info

Publication number
ATE497145T1
ATE497145T1 AT07859192T AT07859192T ATE497145T1 AT E497145 T1 ATE497145 T1 AT E497145T1 AT 07859192 T AT07859192 T AT 07859192T AT 07859192 T AT07859192 T AT 07859192T AT E497145 T1 ATE497145 T1 AT E497145T1
Authority
AT
Austria
Prior art keywords
mobile
dynamic deformations
compensation
displacement
errors due
Prior art date
Application number
AT07859192T
Other languages
English (en)
Inventor
Michele Verdi
Giampiero Guasco
Domenico Russo
Original Assignee
Hexagon Metrology Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38922702&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE497145(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hexagon Metrology Spa filed Critical Hexagon Metrology Spa
Application granted granted Critical
Publication of ATE497145T1 publication Critical patent/ATE497145T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Numerical Control (AREA)
  • Control Of Position Or Direction (AREA)
AT07859192T 2007-06-28 2007-12-27 Compensation von messfehlern aufgrund dynamischer deformationen in einer koordinatenmessmaschine ATE497145T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/IT2007/000465 WO2009001385A1 (en) 2007-06-28 2007-06-28 Method for determining dynamic errors in a measuring machine
PCT/IB2007/004109 WO2009001165A1 (en) 2007-06-28 2007-12-27 Compensation of measurement errors due to dynamic deformations in a coordinate measuring machine

Publications (1)

Publication Number Publication Date
ATE497145T1 true ATE497145T1 (de) 2011-02-15

Family

ID=38922702

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07859192T ATE497145T1 (de) 2007-06-28 2007-12-27 Compensation von messfehlern aufgrund dynamischer deformationen in einer koordinatenmessmaschine

Country Status (12)

Country Link
US (2) US20110060542A1 (de)
EP (2) EP2160565A1 (de)
JP (1) JP5331802B2 (de)
KR (1) KR101464148B1 (de)
CN (2) CN101821582B (de)
AT (1) ATE497145T1 (de)
BR (1) BRPI0721773B1 (de)
DE (1) DE602007012317D1 (de)
ES (1) ES2359801T5 (de)
PL (1) PL2167912T5 (de)
TW (2) TWI468643B (de)
WO (2) WO2009001385A1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006031580A1 (de) 2006-07-03 2008-01-17 Faro Technologies, Inc., Lake Mary Verfahren und Vorrichtung zum dreidimensionalen Erfassen eines Raumbereichs
US10028753B2 (en) 2008-09-26 2018-07-24 Relievant Medsystems, Inc. Spine treatment kits
JP5688022B2 (ja) 2008-09-26 2015-03-25 リリーバント メドシステムズ、インコーポレイテッド 骨の内部を通って器具を誘導するためのシステムおよび方法
EP2219010A1 (de) * 2009-02-11 2010-08-18 Leica Geosystems AG Koordinatenmessmaschine und Verfahren zum Kompensieren von Fehlern in einer Koordinatenmessmaschine
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
DE102009015920B4 (de) 2009-03-25 2014-11-20 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
TWI460567B (zh) * 2009-04-24 2014-11-11 Hon Hai Prec Ind Co Ltd 誤差補正方法及採用該誤差補正方法之工件測量方法
US8089036B2 (en) * 2009-04-30 2012-01-03 Omnivision Technologies, Inc. Image sensor with global shutter and in pixel storage transistor
EP2270425A1 (de) * 2009-07-03 2011-01-05 Leica Geosystems AG Koordinatenmessmaschine und Verfahren zum Kompensieren von Fehlern in einer Koordinatenmessmaschine
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
DE102009057101A1 (de) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
US8630314B2 (en) 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
GB2489651B (en) 2010-01-20 2015-01-28 Faro Tech Inc Coordinate measurement machines with removable accessories
US9009000B2 (en) 2010-01-20 2015-04-14 Faro Technologies, Inc. Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8284407B2 (en) 2010-01-20 2012-10-09 Faro Technologies, Inc. Coordinate measuring machine having an illuminated probe end and method of operation
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
DE102010020925B4 (de) 2010-05-10 2014-02-27 Faro Technologies, Inc. Verfahren zum optischen Abtasten und Vermessen einer Umgebung
CN103003713B (zh) 2010-09-08 2015-04-01 法罗技术股份有限公司 具有投影器的激光扫描器或激光跟踪器
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
DE102010052503B4 (de) 2010-11-26 2012-06-21 Wenzel Scantec Gmbh Verfahren zur Steuerung eines Koordinatenmessgeräts sowie Koordinatenmessgerät
ES2435919T3 (es) * 2010-12-30 2013-12-26 Hexagon Metrology S.P.A. Máquina de medición de coordenadas
EP2505956A1 (de) * 2011-03-29 2012-10-03 Hexagon Technology Center GmbH Koordinatenmessmaschine
CN102288143A (zh) * 2011-04-28 2011-12-21 昆山双虎电子科技有限公司 高通过性三坐标测量装置
PL2543955T3 (pl) 2011-07-06 2016-06-30 Hexagon Metrology Spa Sposób kalibracji modelu matematycznego współrzędnościowej maszyny pomiarowej, w celu kompensowania błędów dynamicznych spowodowanych odkształceniem
EP2557390B1 (de) * 2011-08-12 2019-05-22 Hexagon Metrology S.p.A. Messmaschine mit einem Betonblock mit der Funktion eines Fundaments oder eines Maschinenbetts sowie Verfahren zur Kompensation der Messfehler infolge von Deformationen des Blocks
JP5795955B2 (ja) * 2011-12-12 2015-10-14 鹿島建設株式会社 光学式変位計測装置の計測誤差補正装置および補正方法
DE102012100609A1 (de) 2012-01-25 2013-07-25 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102012012197B4 (de) 2012-05-02 2016-10-13 Wenzel Präzision GmbH Koordinatenmessgerät sowie Verfahren zum Betreiben eines Koordinatenmessgeräts
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
DE102012109481A1 (de) 2012-10-05 2014-04-10 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
CN103808251B (zh) * 2014-02-14 2015-07-08 哈尔滨工业大学 航空发动机转子装配方法与装置
ES2993431T3 (en) * 2015-06-15 2024-12-30 Hpt Sinergy Srl Cartesian numerically controlled machine tool for high-precision machining
CN105511402B (zh) * 2015-12-01 2020-01-14 西安交通大学 一种重型机床床身变形自动监测与报警装置
DE102015122844A1 (de) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D-Messvorrichtung mit Batteriepack
CN105509678A (zh) * 2016-02-18 2016-04-20 苏州莱测检测科技有限公司 一种坐标测量机
WO2018193227A1 (en) * 2017-04-19 2018-10-25 Renishaw Plc Bearing arrangement
WO2019209762A1 (en) * 2018-04-23 2019-10-31 Board Of Regents Of The University Of Nebraska Nanofiber microspheres and methods of use thereof
BE1026848B1 (nl) 2018-12-07 2020-07-09 Atlas Copco Airpower Nv Gasnetwerk en werkwijze voor het detecteren van lekken in een gasnetwerk onder druk of onder vacuüm
BE1026849B1 (nl) * 2018-12-07 2020-07-09 Atlas Copco Airpower Nv Gasnetwerk en werkwijze voor het simultaan detecteren van lekken en obstructies in een gasnetwerk onder druk of onder vacuüm
CN109539986A (zh) * 2018-12-31 2019-03-29 为度科创检测技术(苏州)有限公司 三坐标测量机的坐标测量系统
CN120800289B (zh) * 2025-09-16 2025-11-25 西安爱德华测量设备股份有限公司 三坐标系统校准方法

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3794814A (en) * 1973-02-15 1974-02-26 Atomic Energy Commission Continuous dynamic error monitoring device for numerically controlled machines
FR2406831A1 (fr) * 1977-10-21 1979-05-18 Thomson Csf Systeme de poursuite d'une cible mobile
GB2045437B (en) * 1979-03-30 1984-02-08 Renishaw Electrical Ltd Coordinate measuring machine
US4453085A (en) * 1981-05-11 1984-06-05 Diffracto Ltd. Electro-optical systems for control of robots, manipulator arms and co-ordinate measuring machines
US4445376A (en) * 1982-03-12 1984-05-01 Technion Research And Development Foundation Ltd. Apparatus and method for measuring specific force and angular rate
DE3334460A1 (de) * 1983-09-23 1985-04-11 Fa. Carl Zeiss, 7920 Heidenheim Mehrkoordinaten-messmaschine
DE3729161A1 (de) * 1986-04-25 1989-03-09 Forsch Steuerungstechnik Der W Verfahren und vorrichtung zur positionskorrektur von industrieroboterarmen
DE3634023A1 (de) * 1986-10-07 1988-04-21 Bodenseewerk Geraetetech Integriertes, redundantes referenzsystem fuer die flugregelung und zur erzeugung von kurs- und lageinformationen
US4945501A (en) * 1987-01-20 1990-07-31 The Warner & Swasey Company Method for determining position within the measuring volume of a coordinate measuring machine and the like and system therefor
GB8705301D0 (en) * 1987-03-06 1987-04-08 Renishaw Plc Calibration of machines
US4939678A (en) * 1987-11-19 1990-07-03 Brown & Sharpe Manufacturing Company Method for calibration of coordinate measuring machine
DE3833680A1 (de) * 1988-10-04 1990-04-05 Zeiss Carl Fa Schutzeinrichtung fuer langgestreckte maschinenteile
US5042162A (en) * 1989-02-10 1991-08-27 Brown & Sharpe Manufacturing Company Coordinate measuring machine with vibration dampening system
US4998051A (en) * 1989-03-23 1991-03-05 Matsushita Electric Industrial Co., Ltd. Adaptive control system
DE3936465C2 (de) 1989-11-02 1998-09-10 Zeiss Carl Fa Koordinatenmeßgerät
JPH05240654A (ja) * 1992-02-28 1993-09-17 Japan Aviation Electron Ind Ltd 慣性航法装置
JPH06313710A (ja) * 1993-04-28 1994-11-08 Hitachi Plant Eng & Constr Co Ltd 3次元空間座標計測機のアーム延長装置
DE59510796D1 (de) * 1994-05-27 2003-10-23 Zeiss Carl Koordinatenmessung an Werkstücken mit einer Korrektur des durch die Messkraft abhängigen Biegeverhaltens des Koordinatenmessgerätes
DE4436507A1 (de) * 1994-10-13 1996-04-18 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
DE59510879D1 (de) * 1994-05-27 2004-04-29 Zeiss Carl Koordinatenmessung an Werkstücken mit Korrekturen von Beschleunigungen
US5610864A (en) * 1994-12-23 1997-03-11 Micron Technology, Inc. Burst EDO memory device with maximized write cycle timing
JP3531882B2 (ja) * 1995-03-08 2004-05-31 株式会社ミツトヨ 三次元測定機の測定誤差補正装置
US5832416A (en) * 1995-09-01 1998-11-03 Brown & Sharpe Manufacturing Company Calibration system for coordinate measuring machine
US5892679A (en) * 1996-09-13 1999-04-06 Honeywell-Measurex Corporation Method and system for controlling a multiple input/output process with minimum latency using a pseudo inverse constant
KR100271854B1 (ko) * 1996-11-29 2000-11-15 선우중호 다축기계의 3차원입체오차측정방법
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6850806B2 (en) * 1999-04-16 2005-02-01 Siemens Energy & Automation, Inc. Method and apparatus for determining calibration options in a motion control system
DE10006753A1 (de) * 2000-02-15 2001-08-16 Zeiss Carl Dreh-Schwenkeinrichtung für den Tastkopf eines Koordinatenmeßgerätes
DE50106760D1 (de) * 2000-05-23 2005-08-25 Zeiss Ind Messtechnik Gmbh Korrekturverfahren für Koordinatenmessgeräte
US6865499B2 (en) * 2001-04-26 2005-03-08 Siemens Energy & Automation, Inc. Method and apparatus for tuning compensation parameters in a motion control system associated with a mechanical member
GB0205332D0 (en) * 2002-03-06 2002-04-17 Renishaw Plc Dynamic artefact comparison
DE10214490B4 (de) * 2002-03-26 2010-12-02 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Korrektur von Führungsfehlern bei einem Koordinatenmeßgerät
GB0215478D0 (en) * 2002-07-04 2002-08-14 Renishaw Plc Method of scanning a calibrating system
GB0228371D0 (en) * 2002-12-05 2003-01-08 Leland E C E Workpiece inspection method
US6944542B1 (en) * 2003-03-12 2005-09-13 Trimble Navigation, Ltd. Position determination system for movable objects or personnel
CA2522097C (en) 2003-04-28 2012-09-25 Stephen James Crampton Cmm arm with exoskeleton
US7054773B2 (en) * 2003-05-30 2006-05-30 Agilent Technologies, Inc. Dynamic model-based compensated tuning of a tunable device
JP2005037305A (ja) * 2003-07-17 2005-02-10 Sanyo Denki Co Ltd レゾルバの検出位置補正方法及び装置
GB0326532D0 (en) * 2003-11-13 2003-12-17 Renishaw Plc Method of error compensation
CN1253285C (zh) * 2004-02-27 2006-04-26 哈尔滨工业大学 微机械零件三维加工装置
GB0417536D0 (en) * 2004-08-06 2004-09-08 Renishaw Plc The use of surface measurement probes
DE102005003322B3 (de) * 2005-01-18 2006-08-03 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen einer Raumkoordinate eines Messpunktes an einem Messobjekt sowie entsprechendes Koordinatenmessgerät
GB2425840A (en) * 2005-04-13 2006-11-08 Renishaw Plc Error correction of workpiece measurements
DE102005028788A1 (de) * 2005-06-16 2006-12-21 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen von Korrekturwerten zum Korrigieren von Positionsmessfehlern bei einer Maschine mit zumindest einer translatorischen Bewegungssache
TW200702101A (en) * 2005-07-13 2007-01-16 Wei-Tai Lei Method and device to measure the dynamic errors of rotary axes in five-axis CNC machine tools
GB0608235D0 (en) * 2006-04-26 2006-06-07 Renishaw Plc Differential calibration
EP2042829B2 (de) * 2007-09-26 2017-08-09 Hexagon Metrology AB Modulare Kalibrierung
DE102007051054A1 (de) * 2007-10-19 2009-04-30 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Korrigieren der Messwerte eines Koordinatenmessgeräts und Koordinatenmessgerät

Also Published As

Publication number Publication date
WO2009001385A8 (en) 2009-05-28
BRPI0721773A2 (pt) 2014-02-11
TW200912249A (en) 2009-03-16
EP2167912B2 (de) 2014-06-04
KR101464148B1 (ko) 2014-11-21
US8908194B2 (en) 2014-12-09
TWI468643B (zh) 2015-01-11
EP2167912B1 (de) 2011-01-26
US20110060542A1 (en) 2011-03-10
EP2160565A1 (de) 2010-03-10
TWI475185B (zh) 2015-03-01
EP2167912A1 (de) 2010-03-31
WO2009001385A1 (en) 2008-12-31
WO2009001165A1 (en) 2008-12-31
PL2167912T3 (pl) 2011-06-30
CN101821582A (zh) 2010-09-01
BRPI0721773B1 (pt) 2018-11-21
ES2359801T5 (es) 2014-08-13
JP2010531451A (ja) 2010-09-24
CN101784863B (zh) 2012-02-22
US20110102808A1 (en) 2011-05-05
KR20100050493A (ko) 2010-05-13
DE602007012317D1 (de) 2011-03-10
JP5331802B2 (ja) 2013-10-30
CN101784863A (zh) 2010-07-21
CN101821582B (zh) 2013-04-17
ES2359801T3 (es) 2011-05-27
TW200912242A (en) 2009-03-16
PL2167912T5 (pl) 2014-12-31

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