ATE488969T1 - Oberflächen-mikrobearbeitungsverfahren zur herstellung akustischer wandler - Google Patents

Oberflächen-mikrobearbeitungsverfahren zur herstellung akustischer wandler

Info

Publication number
ATE488969T1
ATE488969T1 AT02733233T AT02733233T ATE488969T1 AT E488969 T1 ATE488969 T1 AT E488969T1 AT 02733233 T AT02733233 T AT 02733233T AT 02733233 T AT02733233 T AT 02733233T AT E488969 T1 ATE488969 T1 AT E488969T1
Authority
AT
Austria
Prior art keywords
transducers
semiconductor substrate
electro
acoustic transducers
structural layer
Prior art date
Application number
AT02733233T
Other languages
English (en)
Inventor
V Foglietti
E Cianci
D Memmi
G Caliano
M Pappalardo
Original Assignee
Consiglio Nazionale Ricerche
Esaote Spa
Univ Degli Studi Roma Tre
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consiglio Nazionale Ricerche, Esaote Spa, Univ Degli Studi Roma Tre filed Critical Consiglio Nazionale Ricerche
Application granted granted Critical
Publication of ATE488969T1 publication Critical patent/ATE488969T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Measuring Volume Flow (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
AT02733233T 2001-05-09 2002-05-09 Oberflächen-mikrobearbeitungsverfahren zur herstellung akustischer wandler ATE488969T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT2001RM000243A ITRM20010243A1 (it) 2001-05-09 2001-05-09 Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
PCT/IT2002/000308 WO2002091796A2 (en) 2001-05-09 2002-05-09 Surface micromachined process for manufacturing electroacoustic transducers

Publications (1)

Publication Number Publication Date
ATE488969T1 true ATE488969T1 (de) 2010-12-15

Family

ID=11455515

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02733233T ATE488969T1 (de) 2001-05-09 2002-05-09 Oberflächen-mikrobearbeitungsverfahren zur herstellung akustischer wandler

Country Status (7)

Country Link
US (1) US7074634B2 (de)
EP (1) EP1421823B1 (de)
AT (1) ATE488969T1 (de)
AU (1) AU2002304303A1 (de)
DE (1) DE60238331D1 (de)
IT (1) ITRM20010243A1 (de)
WO (1) WO2002091796A2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050121734A1 (en) * 2003-11-07 2005-06-09 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US20050177045A1 (en) * 2004-02-06 2005-08-11 Georgia Tech Research Corporation cMUT devices and fabrication methods
WO2005084284A2 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cmut devices and fabrication methods
JP2007531357A (ja) * 2004-02-27 2007-11-01 ジョージア テック リサーチ コーポレイション ハーモニックｃｍｕｔ素子及び製造方法
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
ITRM20050093A1 (it) * 2005-03-04 2006-09-05 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato.
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
TWI395258B (zh) * 2005-11-11 2013-05-01 Semiconductor Energy Lab 微結構以及微機電系統的製造方法
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
ITRM20060238A1 (it) * 2006-05-03 2007-11-04 Esaote Spa Trasduttore ultracustico capacitivo multipiano
EP1944070A1 (de) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensionales Ultraschall-Array zur volumetrischen Bildgebung
US7412892B1 (en) 2007-06-06 2008-08-19 Measurement Specialties, Inc. Method of making pressure transducer and apparatus
US8034702B2 (en) 2007-08-16 2011-10-11 Micron Technology, Inc. Methods of forming through substrate interconnects
US20090183350A1 (en) * 2008-01-17 2009-07-23 Wetsco, Inc. Method for Ultrasound Probe Repair
EP2145696A1 (de) 2008-07-15 2010-01-20 UAB Minatech Kapazitiver mikrogefertigter Ultraschallwandler und Verfahren zu seiner Herstellung
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
JP5436013B2 (ja) * 2009-04-10 2014-03-05 キヤノン株式会社 機械電気変化素子
US8531919B2 (en) * 2009-09-21 2013-09-10 The Hong Kong Polytechnic University Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
US8541853B1 (en) 2012-03-22 2013-09-24 Texas Instruments Incorporated High frequency CMUT
WO2019226958A1 (en) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capacitive sensor
LT6821B (lt) 2019-08-14 2021-05-25 Kauno technologijos universitetas Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
EP0518112B1 (de) * 1991-05-24 1997-04-02 Sumitomo Electric Industries, Ltd. Verfahren zur Herstellung von Micromaschinen
US5894452A (en) 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5619476A (en) 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
US5982709A (en) 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
GB9815992D0 (en) * 1998-07-23 1998-09-23 Secr Defence Improvements in and relating to microchemical devices
US6271620B1 (en) * 1999-05-20 2001-08-07 Sen Corporation Acoustic transducer and method of making the same
US6096656A (en) * 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride

Also Published As

Publication number Publication date
US7074634B2 (en) 2006-07-11
WO2002091796A2 (en) 2002-11-14
EP1421823A2 (de) 2004-05-26
EP1421823B1 (de) 2010-11-17
WO2002091796A3 (en) 2004-02-19
ITRM20010243A0 (it) 2001-05-09
US20040180466A1 (en) 2004-09-16
DE60238331D1 (de) 2010-12-30
ITRM20010243A1 (it) 2002-11-11
AU2002304303A1 (en) 2002-11-18

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Legal Events

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