ITRM20010243A1 - Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel - Google Patents

Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel

Info

Publication number
ITRM20010243A1
ITRM20010243A1 IT2001RM000243A ITRM20010243A ITRM20010243A1 IT RM20010243 A1 ITRM20010243 A1 IT RM20010243A1 IT 2001RM000243 A IT2001RM000243 A IT 2001RM000243A IT RM20010243 A ITRM20010243 A IT RM20010243A IT RM20010243 A1 ITRM20010243 A1 IT RM20010243A1
Authority
IT
Italy
Prior art keywords
transducers
electro
acoustic
rel
procedure
Prior art date
Application number
IT2001RM000243A
Other languages
English (en)
Inventor
Vittorio Foglietti
Daniele Memmi
Elena Cianci
Giosue Caliano
Massimo Pappalardo
Original Assignee
Consiglio Nazionale Ricerche
Esaote Spa
Univ Degli Studi Roma Tre
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consiglio Nazionale Ricerche, Esaote Spa, Univ Degli Studi Roma Tre filed Critical Consiglio Nazionale Ricerche
Priority to IT2001RM000243A priority Critical patent/ITRM20010243A1/it
Publication of ITRM20010243A0 publication Critical patent/ITRM20010243A0/it
Priority to AU2002304303A priority patent/AU2002304303A1/en
Priority to US10/476,254 priority patent/US7074634B2/en
Priority to DE60238331T priority patent/DE60238331D1/de
Priority to AT02733233T priority patent/ATE488969T1/de
Priority to PCT/IT2002/000308 priority patent/WO2002091796A2/en
Priority to EP02733233A priority patent/EP1421823B1/en
Publication of ITRM20010243A1 publication Critical patent/ITRM20010243A1/it

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Pressure Sensors (AREA)
  • Measuring Volume Flow (AREA)
IT2001RM000243A 2001-05-09 2001-05-09 Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel ITRM20010243A1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IT2001RM000243A ITRM20010243A1 (it) 2001-05-09 2001-05-09 Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
AU2002304303A AU2002304303A1 (en) 2001-05-09 2002-05-09 Surface micromachined process for manufacturing electroacoustic transducers
US10/476,254 US7074634B2 (en) 2001-05-09 2002-05-09 Surface micromachining process for manufacturing electro-acoustic transducers, particularly ultrasonic transducers, obtained transducers and intermediate products
DE60238331T DE60238331D1 (de) 2001-05-09 2002-05-09 Oberflächen-mikrobearbeitungsverfahren zur herstellung akustischer wandler
AT02733233T ATE488969T1 (de) 2001-05-09 2002-05-09 Oberflächen-mikrobearbeitungsverfahren zur herstellung akustischer wandler
PCT/IT2002/000308 WO2002091796A2 (en) 2001-05-09 2002-05-09 Surface micromachined process for manufacturing electroacoustic transducers
EP02733233A EP1421823B1 (en) 2001-05-09 2002-05-09 Surface micromachined process for manufacturing electroacoustic transducers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2001RM000243A ITRM20010243A1 (it) 2001-05-09 2001-05-09 Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel

Publications (2)

Publication Number Publication Date
ITRM20010243A0 ITRM20010243A0 (it) 2001-05-09
ITRM20010243A1 true ITRM20010243A1 (it) 2002-11-11

Family

ID=11455515

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2001RM000243A ITRM20010243A1 (it) 2001-05-09 2001-05-09 Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel

Country Status (7)

Country Link
US (1) US7074634B2 (it)
EP (1) EP1421823B1 (it)
AT (1) ATE488969T1 (it)
AU (1) AU2002304303A1 (it)
DE (1) DE60238331D1 (it)
IT (1) ITRM20010243A1 (it)
WO (1) WO2002091796A2 (it)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050121734A1 (en) * 2003-11-07 2005-06-09 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
JP2007528153A (ja) * 2004-02-06 2007-10-04 ジョージア テック リサーチ コーポレイション Ｃｍｕｔデバイス及び製造方法
WO2005084267A2 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Harmonic cmut devices and fabrication methods
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
ITRM20050093A1 (it) * 2005-03-04 2006-09-05 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato.
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
TWI395258B (zh) * 2005-11-11 2013-05-01 Semiconductor Energy Lab 微結構以及微機電系統的製造方法
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
ITRM20060238A1 (it) * 2006-05-03 2007-11-04 Esaote Spa Trasduttore ultracustico capacitivo multipiano
EP1944070A1 (en) * 2007-01-12 2008-07-16 Esaote S.p.A. Bidimensional ultrasonic array for volumetric imaging
US7412892B1 (en) 2007-06-06 2008-08-19 Measurement Specialties, Inc. Method of making pressure transducer and apparatus
US8034702B2 (en) 2007-08-16 2011-10-11 Micron Technology, Inc. Methods of forming through substrate interconnects
US20090183350A1 (en) * 2008-01-17 2009-07-23 Wetsco, Inc. Method for Ultrasound Probe Repair
EP2145696A1 (en) 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
JP5436013B2 (ja) * 2009-04-10 2014-03-05 キヤノン株式会社 機械電気変化素子
US8531919B2 (en) * 2009-09-21 2013-09-10 The Hong Kong Polytechnic University Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
US8541853B1 (en) 2012-03-22 2013-09-24 Texas Instruments Incorporated High frequency CMUT
LT6821B (lt) 2019-08-14 2021-05-25 Kauno technologijos universitetas Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
EP0518112B1 (en) * 1991-05-24 1997-04-02 Sumitomo Electric Industries, Ltd. A process for fabricating micromachines
US5894452A (en) 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5619476A (en) 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
US5982709A (en) 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
GB9815992D0 (en) * 1998-07-23 1998-09-23 Secr Defence Improvements in and relating to microchemical devices
US6271620B1 (en) * 1999-05-20 2001-08-07 Sen Corporation Acoustic transducer and method of making the same
US6096656A (en) * 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride

Also Published As

Publication number Publication date
WO2002091796A3 (en) 2004-02-19
WO2002091796A2 (en) 2002-11-14
US7074634B2 (en) 2006-07-11
EP1421823A2 (en) 2004-05-26
US20040180466A1 (en) 2004-09-16
DE60238331D1 (de) 2010-12-30
AU2002304303A1 (en) 2002-11-18
EP1421823B1 (en) 2010-11-17
ITRM20010243A0 (it) 2001-05-09
ATE488969T1 (de) 2010-12-15

Similar Documents

Publication Publication Date Title
ITRM20010243A1 (it) Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
TW200623930A (en) Capacitive vibration sensor, microphone, acoustic transducer, and manufacturing method thereof
KR100931575B1 (ko) Ｍｅｍｓ를 이용한 압전 소자 마이크로 스피커 및 그 제조방법
EP1997347B1 (en) Mems device
US4885781A (en) Frequency-selective sound transducer
WO2003000337A3 (en) Piezocomposite ultrasound array and integrated circuit assembly
ATE405130T1 (de) Mems digitaler akustischer wandler mit fehlerunterdrückung
EP1602331A4 (en) ULTRASOUND PROBE
ATE471768T1 (de) Oberflächen-mikromechanisches verfahren zur herstellung von mikrozerspanten kapazitiven ultraakustischen messwertgebern
KR100977826B1 (ko) 멤스 마이크로폰 및 그 제조 방법
WO2016180262A1 (zh) Mems麦克风
KR101761819B1 (ko) 초음파 변환기 및 그 제조 방법
CN110099344A (zh) 一种mems结构
CN111174951A (zh) 一种压电式传感器及其制备方法
CA2379177A1 (en) Impedance matching transducers
EP1154497A3 (en) Piezoelectric/electrostrictive film type device
DE60315286D1 (de) Gruppe von membran-ultraschallwandlern
CN101746707A (zh) 电容式微加工超声传感器
CN110113702A (zh) 一种mems结构的制造方法
CN209627695U (zh) 一种mems结构
US7239712B1 (en) Inductor-based MEMS microphone
AU2002352166A1 (en) Ultrasound transducer for application in extreme climatic conditions
JP2005020411A (ja) シリコンマイクの作製方法
CN103313801A (zh) 压电振动部件
CN219384782U (zh) 一种mems结构