ATE485587T1 - Formierung tiefer und hohler bereiche und deren verwendung bei der herstellung eines optischen aufzeichnungsmediums - Google Patents
Formierung tiefer und hohler bereiche und deren verwendung bei der herstellung eines optischen aufzeichnungsmediumsInfo
- Publication number
- ATE485587T1 ATE485587T1 AT07870375T AT07870375T ATE485587T1 AT E485587 T1 ATE485587 T1 AT E485587T1 AT 07870375 T AT07870375 T AT 07870375T AT 07870375 T AT07870375 T AT 07870375T AT E485587 T1 ATE485587 T1 AT E485587T1
- Authority
- AT
- Austria
- Prior art keywords
- upper layer
- layer
- deep
- formation
- producing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0610736A FR2909797B1 (fr) | 2006-12-08 | 2006-12-08 | Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique |
PCT/FR2007/001988 WO2008074947A1 (fr) | 2006-12-08 | 2007-12-04 | Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE485587T1 true ATE485587T1 (de) | 2010-11-15 |
Family
ID=38293414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07870375T ATE485587T1 (de) | 2006-12-08 | 2007-12-04 | Formierung tiefer und hohler bereiche und deren verwendung bei der herstellung eines optischen aufzeichnungsmediums |
Country Status (7)
Country | Link |
---|---|
US (1) | US8263317B2 (de) |
EP (1) | EP2097899B1 (de) |
JP (1) | JP4927174B2 (de) |
AT (1) | ATE485587T1 (de) |
DE (1) | DE602007010035D1 (de) |
FR (1) | FR2909797B1 (de) |
WO (1) | WO2008074947A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8624217B2 (en) | 2010-06-25 | 2014-01-07 | International Business Machines Corporation | Planar phase-change memory cell with parallel electrical paths |
US8575008B2 (en) | 2010-08-31 | 2013-11-05 | International Business Machines Corporation | Post-fabrication self-aligned initialization of integrated devices |
JP5877705B2 (ja) * | 2011-12-27 | 2016-03-08 | 旭化成イーマテリアルズ株式会社 | 微細パターン構造体の製造方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52138101A (en) * | 1976-05-14 | 1977-11-18 | Hitachi Ltd | Formation of a concavo-convex image |
JPS615454A (ja) * | 1984-06-20 | 1986-01-11 | Toshiba Corp | 音盤,記録盤の複製方法 |
JPH0651489A (ja) * | 1992-03-23 | 1994-02-25 | Dainippon Printing Co Ltd | ハーフトーン位相シフトフォトマスクの製造方法 |
JPH05323568A (ja) * | 1992-05-22 | 1993-12-07 | Fujitsu Ltd | 位相シフトマスクおよびその製造方法 |
JP2582996B2 (ja) * | 1992-06-12 | 1997-02-19 | インターナショナル・ビジネス・マシーンズ・コーポレイション | フォトマスクの製造方法 |
JPH06150391A (ja) * | 1992-11-05 | 1994-05-31 | Matsushita Electric Ind Co Ltd | 光ディスク原盤の作製方法 |
EP0596439A3 (de) * | 1992-11-05 | 1995-02-08 | Matsushita Electric Ind Co Ltd | Verfahren zur Erzeugung einer Originalplatte zum Herstellen von optischen Platten. |
KR100234292B1 (ko) * | 1997-10-08 | 1999-12-15 | 윤종용 | 광디스크 제작용 마스터 디스크 제조방법 |
DE19938072A1 (de) * | 1998-09-09 | 2000-03-16 | Siemens Ag | Verfahren zum selbstjustierenden Herstellen von zusätzlichen Strukturen auf Substraten mit vorhandenen ersten Strukturen |
JP4329208B2 (ja) * | 2000-03-02 | 2009-09-09 | ソニー株式会社 | 記録媒体の製造方法、記録媒体製造用原盤の製造方法、記録媒体の製造装置、および記録媒体製造用原盤の製造装置 |
EP1482494A3 (de) * | 2003-05-28 | 2007-08-29 | Matsushita Electric Industrial Co., Ltd. | Verfahren zur Herstellung eines Masters für optische Informationsaufzeichnungsmedien |
TW200504746A (en) * | 2003-06-23 | 2005-02-01 | Matsushita Electric Ind Co Ltd | Method for producing stamper for optical information recording medium |
EP1513144A2 (de) * | 2003-08-26 | 2005-03-09 | Matsushita Electric Industrial Co., Ltd. | Verfahren zur Herstellung einer Masterplatte eines Aufzeichnungsmediums, Verfahren zur Herstellung einer Matrize, Verfahren zur Herstellung eines Aufzeichnungsmediums, Masterplatte eines Aufzeichnungsmediums, Matrize eines Aufzeichnungsmediums, und Aufzeichnungsmedium |
DE602004021755D1 (de) * | 2003-09-01 | 2009-08-13 | Panasonic Corp | Verfahren zur Herstellung eines Prägestempels für optische Informationsmedien, Originalplatte eines solchen Prägestempels |
JP2005100526A (ja) * | 2003-09-25 | 2005-04-14 | Hitachi Ltd | デバイスの製造方法及び観察方法 |
KR101059492B1 (ko) * | 2003-12-01 | 2011-08-25 | 소니 가부시키가이샤 | 광 디스크용 원반의 제조 방법 및 광 디스크용 원반 |
MXPA06011774A (es) | 2004-04-15 | 2007-01-16 | Koninkl Philips Electronics Nv | Sustrato maestro optico con capa enmascarante y metodo para fabricar estructura en relieve de alta densidad. |
JP2005332452A (ja) * | 2004-05-18 | 2005-12-02 | Ricoh Co Ltd | 多値romディスク原盤の製造方法、製造装置及び多値romディスク |
JP2005343115A (ja) * | 2004-06-07 | 2005-12-15 | Nikon Corp | レジストパターン作成方法、電鋳作成方法及び型作成方法 |
WO2006045332A1 (en) * | 2004-10-27 | 2006-05-04 | Singulus Mastering B.V. | Mastering process with phase-change materials |
US20060110568A1 (en) * | 2004-11-23 | 2006-05-25 | Imation Corp. | Multi-layers optical data storage disk masters |
JP2008269720A (ja) * | 2007-04-23 | 2008-11-06 | Canon Inc | 透光性スタンパ、透光性スタンパの製造方法及び多層光記録媒体の製造方法 |
-
2006
- 2006-12-08 FR FR0610736A patent/FR2909797B1/fr not_active Expired - Fee Related
-
2007
- 2007-12-04 DE DE602007010035T patent/DE602007010035D1/de active Active
- 2007-12-04 EP EP07870375A patent/EP2097899B1/de not_active Not-in-force
- 2007-12-04 US US12/312,925 patent/US8263317B2/en not_active Expired - Fee Related
- 2007-12-04 JP JP2009539778A patent/JP4927174B2/ja not_active Expired - Fee Related
- 2007-12-04 AT AT07870375T patent/ATE485587T1/de not_active IP Right Cessation
- 2007-12-04 WO PCT/FR2007/001988 patent/WO2008074947A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
FR2909797B1 (fr) | 2009-02-13 |
EP2097899B1 (de) | 2010-10-20 |
JP2010511967A (ja) | 2010-04-15 |
US8263317B2 (en) | 2012-09-11 |
US20100059477A1 (en) | 2010-03-11 |
FR2909797A1 (fr) | 2008-06-13 |
JP4927174B2 (ja) | 2012-05-09 |
DE602007010035D1 (de) | 2010-12-02 |
WO2008074947A1 (fr) | 2008-06-26 |
EP2097899A1 (de) | 2009-09-09 |
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