ATE448567T1 - Mosfet-transistor und verfahren zu deren herstellung - Google Patents
Mosfet-transistor und verfahren zu deren herstellungInfo
- Publication number
- ATE448567T1 ATE448567T1 AT01000491T AT01000491T ATE448567T1 AT E448567 T1 ATE448567 T1 AT E448567T1 AT 01000491 T AT01000491 T AT 01000491T AT 01000491 T AT01000491 T AT 01000491T AT E448567 T1 ATE448567 T1 AT E448567T1
- Authority
- AT
- Austria
- Prior art keywords
- region
- transistor
- drain
- producing
- same
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66659—Lateral single gate silicon transistors with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23427700P | 2000-09-21 | 2000-09-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE448567T1 true ATE448567T1 (de) | 2009-11-15 |
Family
ID=22880690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01000491T ATE448567T1 (de) | 2000-09-21 | 2001-09-20 | Mosfet-transistor und verfahren zu deren herstellung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6660603B2 (de) |
EP (1) | EP1191577B1 (de) |
JP (1) | JP2002176175A (de) |
AT (1) | ATE448567T1 (de) |
DE (1) | DE60140415D1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6952039B1 (en) | 2002-03-12 | 2005-10-04 | National Semiconductor Corporation | ESD protection snapback structure for overvoltage self-protecting I/O cells |
US20040145066A1 (en) * | 2003-01-24 | 2004-07-29 | Swanson Leland S. | Laser alignment structure for integrated circuits |
US20040256692A1 (en) * | 2003-06-19 | 2004-12-23 | Keith Edmund Kunz | Composite analog power transistor and method for making the same |
US7498652B2 (en) | 2004-04-26 | 2009-03-03 | Texas Instruments Incorporated | Non-uniformly doped high voltage drain-extended transistor and method of manufacture thereof |
JP4836427B2 (ja) * | 2004-09-28 | 2011-12-14 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
US7157784B2 (en) * | 2005-01-31 | 2007-01-02 | Texas Instruments Incorporated | Drain extended MOS transistors with multiple capacitors and methods of fabrication |
US7592661B1 (en) | 2005-07-29 | 2009-09-22 | Cypress Semiconductor Corporation | CMOS embedded high voltage transistor |
DE102005048000B4 (de) * | 2005-10-06 | 2015-03-05 | Austriamicrosystems Ag | Verfahren zur Herstellung eines Transistors mit zuverlässiger Source-Dotierung |
US7344947B2 (en) * | 2006-03-10 | 2008-03-18 | Texas Instruments Incorporated | Methods of performance improvement of HVMOS devices |
JP2007317903A (ja) * | 2006-05-26 | 2007-12-06 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP4723443B2 (ja) * | 2006-09-13 | 2011-07-13 | Okiセミコンダクタ株式会社 | 半導体集積回路 |
US7859043B2 (en) * | 2008-02-25 | 2010-12-28 | Tower Semiconductor Ltd. | Three-terminal single poly NMOS non-volatile memory cell |
US7800156B2 (en) * | 2008-02-25 | 2010-09-21 | Tower Semiconductor Ltd. | Asymmetric single poly NMOS non-volatile memory cell |
US8344440B2 (en) | 2008-02-25 | 2013-01-01 | Tower Semiconductor Ltd. | Three-terminal single poly NMOS non-volatile memory cell with shorter program/erase times |
US8097930B2 (en) * | 2008-08-08 | 2012-01-17 | Infineon Technologies Ag | Semiconductor devices with trench isolations |
US8643090B2 (en) * | 2009-03-23 | 2014-02-04 | Infineon Technologies Ag | Semiconductor devices and methods for manufacturing a semiconductor device |
US7915129B2 (en) * | 2009-04-22 | 2011-03-29 | Polar Semiconductor, Inc. | Method of fabricating high-voltage metal oxide semiconductor transistor devices |
US8368127B2 (en) * | 2009-10-08 | 2013-02-05 | Globalfoundries Singapore Pte., Ltd. | Method of fabricating a silicon tunneling field effect transistor (TFET) with high drive current |
US8247280B2 (en) * | 2009-10-20 | 2012-08-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integration of low and high voltage CMOS devices |
US8598656B2 (en) * | 2010-03-08 | 2013-12-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus of forming ESD protection device |
WO2013069070A1 (ja) * | 2011-11-11 | 2013-05-16 | パイオニア株式会社 | 半導体装置およびこれを用いたアクティブマトリクス駆動回路 |
KR101899556B1 (ko) * | 2012-02-03 | 2018-10-04 | 에스케이하이닉스 시스템아이씨 주식회사 | Bcdmos 소자 및 그 제조방법 |
US9548377B2 (en) * | 2013-09-16 | 2017-01-17 | Texas Instruments Incorporated | Thermal treatment for reducing transistor performance variation in ferroelectric memories |
EP4024474A3 (de) * | 2014-06-18 | 2022-10-26 | INTEL Corporation | Strukturen mit erweitertem drain für hochspannungsfeldeffekttransistoren |
US10115720B2 (en) | 2016-04-15 | 2018-10-30 | Magnachip Semiconductor, Ltd. | Integrated semiconductor device and method for manufacturing the same |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047358A (en) * | 1989-03-17 | 1991-09-10 | Delco Electronics Corporation | Process for forming high and low voltage CMOS transistors on a single integrated circuit chip |
US5498554A (en) | 1994-04-08 | 1996-03-12 | Texas Instruments Incorporated | Method of making extended drain resurf lateral DMOS devices |
US5903032A (en) | 1994-05-13 | 1999-05-11 | Texas Instruments Incorporated | Power device integration for built-in ESD robustness |
US6071768A (en) | 1996-05-17 | 2000-06-06 | Texas Instruments Incorporated | Method of making an efficient NPN turn-on in a high voltage DENMOS transistor for ESD protection |
KR100263480B1 (ko) * | 1998-01-13 | 2000-09-01 | 김영환 | 이에스디 보호회로 및 그 제조방법 |
US6100125A (en) * | 1998-09-25 | 2000-08-08 | Fairchild Semiconductor Corp. | LDD structure for ESD protection and method of fabrication |
-
2001
- 2001-09-14 US US09/952,404 patent/US6660603B2/en not_active Expired - Lifetime
- 2001-09-20 JP JP2001286941A patent/JP2002176175A/ja not_active Abandoned
- 2001-09-20 AT AT01000491T patent/ATE448567T1/de not_active IP Right Cessation
- 2001-09-20 EP EP01000491A patent/EP1191577B1/de not_active Expired - Lifetime
- 2001-09-20 DE DE60140415T patent/DE60140415D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6660603B2 (en) | 2003-12-09 |
EP1191577A1 (de) | 2002-03-27 |
DE60140415D1 (de) | 2009-12-24 |
JP2002176175A (ja) | 2002-06-21 |
US20020055233A1 (en) | 2002-05-09 |
EP1191577B1 (de) | 2009-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |