ATE438463T1 - Aufbringen eines beschichtungsmaterials auf ein substrat - Google Patents
Aufbringen eines beschichtungsmaterials auf ein substratInfo
- Publication number
- ATE438463T1 ATE438463T1 AT03756068T AT03756068T ATE438463T1 AT E438463 T1 ATE438463 T1 AT E438463T1 AT 03756068 T AT03756068 T AT 03756068T AT 03756068 T AT03756068 T AT 03756068T AT E438463 T1 ATE438463 T1 AT E438463T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- coating
- applying
- coating material
- exciting medium
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0212848.6A GB0212848D0 (en) | 2002-06-01 | 2002-06-01 | Introduction of liquid/solid slurry into an exciting medium |
PCT/GB2003/002377 WO2003101621A2 (en) | 2002-06-01 | 2003-05-30 | Application of a coating forming material onto at least one substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE438463T1 true ATE438463T1 (de) | 2009-08-15 |
Family
ID=9937972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03756068T ATE438463T1 (de) | 2002-06-01 | 2003-05-30 | Aufbringen eines beschichtungsmaterials auf ein substrat |
Country Status (7)
Country | Link |
---|---|
US (1) | US8029872B2 (de) |
EP (1) | EP1509332B2 (de) |
AT (1) | ATE438463T1 (de) |
AU (1) | AU2003246887A1 (de) |
DE (1) | DE60328680D1 (de) |
GB (1) | GB0212848D0 (de) |
WO (1) | WO2003101621A2 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2413944B (en) * | 2004-05-14 | 2006-08-16 | Reckitt Benckiser | Method for forming an active material containing coating on a substrate |
GB0504384D0 (en) * | 2005-03-03 | 2005-04-06 | Univ Durham | Method for producing a composite coating |
GB0505367D0 (en) | 2005-03-16 | 2005-04-20 | Combining Co The Ltd | A method for producing a grafted polymer coating |
GB0506051D0 (en) * | 2005-03-24 | 2005-04-27 | Univ Durham | A method for producing an aldehyde functionalised surface |
GB0507612D0 (en) | 2005-04-15 | 2005-05-25 | Univ Durham | A method for producing a thiol functionalised surface |
GB2434368B (en) | 2006-01-20 | 2010-08-25 | P2I Ltd | Plasma coated laboratory consumables |
GB2434369B (en) | 2006-01-20 | 2010-08-25 | P2I Ltd | Plasma coated electrical or electronic devices |
KR100766771B1 (ko) | 2006-06-05 | 2007-10-12 | 주식회사 케이씨텍 | 초음파 장치를 구비한 플라즈마 장치 및 그 표면처리 방법 |
ITMI20070350A1 (it) * | 2007-02-23 | 2008-08-24 | Univ Milano Bicocca | Metodo di lavorazine a plasma atmosferico per il trattamento dei materiali |
JP5425547B2 (ja) * | 2008-07-31 | 2014-02-26 | キヤノンアネルバ株式会社 | 基板処理装置、及び磁気記録媒体の製造方法 |
US20130108804A1 (en) | 2010-07-21 | 2013-05-02 | Francoise Massines | Plasma treatment of substrates |
US20140042130A1 (en) | 2011-04-27 | 2014-02-13 | Pierre Descamps | Plasma Treatment of Substrates |
WO2012150459A2 (en) | 2011-05-05 | 2012-11-08 | Surface Innovations Limited | Product |
GB201112404D0 (en) | 2011-07-19 | 2011-08-31 | Surface Innovations Ltd | Method |
US8852693B2 (en) | 2011-05-19 | 2014-10-07 | Liquipel Ip Llc | Coated electronic devices and associated methods |
EP2532716A1 (de) | 2011-06-10 | 2012-12-12 | Eppendorf AG | Substrat mit hydrophobe Gruppen abstoßenden Oberflächeneigenschaften und Verfahren zu dessen Herstellung |
GB201112447D0 (en) | 2011-07-20 | 2011-08-31 | Surface Innovations Ltd | Method |
US20140248444A1 (en) | 2011-11-09 | 2014-09-04 | Centre National De La Recherche Scientifique | Plasma Treatment Of Substrates |
DE102013222199A1 (de) * | 2013-10-31 | 2015-04-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Nieder- und Mitteldruck-Plasmaverfahren zur Oberflächenbeschichtung mittels Percursorzuführung ohne Trägergas |
PL3080352T3 (pl) | 2013-12-13 | 2021-02-08 | The North Face Apparel Corporation | Obróbki plazmowe do barwienia wyrobów włókienniczych |
GB201403558D0 (en) | 2014-02-28 | 2014-04-16 | P2I Ltd | Coating |
EP2985043A1 (de) | 2014-08-14 | 2016-02-17 | Institut d'Investigació Biomèdica de Bellvitge (IDIBELL) | Verfahren zur Herstellung eines medizinischen Geräts und hieraus hergestelltes Gerät |
EP3308613B1 (de) | 2015-06-09 | 2020-08-05 | P2i Ltd | Verfahren zur herstellung einer beschichtung auf einer elektronischen oder elektrischen vorrichtung |
EP3307832A1 (de) | 2015-06-09 | 2018-04-18 | P2i Ltd | Beschichtung |
TW201710411A (zh) | 2015-06-09 | 2017-03-16 | P2I有限公司 | 塗層 |
US11679412B2 (en) | 2016-06-13 | 2023-06-20 | Gvd Corporation | Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles |
US20170358445A1 (en) | 2016-06-13 | 2017-12-14 | Gvd Corporation | Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles |
GB2579871B (en) | 2019-02-22 | 2021-07-14 | P2I Ltd | Coatings |
US11898248B2 (en) | 2019-12-18 | 2024-02-13 | Jiangsu Favored Nanotechnology Co., Ltd. | Coating apparatus and coating method |
CN113774363A (zh) | 2020-06-09 | 2021-12-10 | 江苏菲沃泰纳米科技股份有限公司 | 镀膜设备及其镀膜方法 |
CN113285049B (zh) * | 2021-05-27 | 2022-05-06 | 电子科技大学 | 一种超声喷涂制备三氧化钨高光提取效率oled外光提取层的方法 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4629604A (en) * | 1983-03-21 | 1986-12-16 | Donald Spector | Multi-aroma cartridge player |
DE3574997D1 (de) * | 1984-03-03 | 1990-02-01 | Stc Plc | Pulsierendes plasmaverfahren. |
US4603030A (en) * | 1984-09-20 | 1986-07-29 | Mccarthy Robert E | Scent-Emitting Systems |
JPS61213221A (ja) † | 1985-03-19 | 1986-09-22 | Japan Synthetic Rubber Co Ltd | プラズマ重合膜の製法 |
DE3618630A1 (de) * | 1986-06-03 | 1987-12-10 | Gerhard Hestermann | Verfahren und vorrichtung fuer das beschichten mit kunststoffpulver |
US4952024A (en) * | 1986-08-29 | 1990-08-28 | Gale Thomas S | Three-dimensional sight and sound reproduction apparatus for individual use |
FR2653633B1 (fr) * | 1989-10-19 | 1991-12-20 | Commissariat Energie Atomique | Dispositif de traitement chimique assiste par un plasma de diffusion. |
US5185132A (en) | 1989-12-07 | 1993-02-09 | Research Development Corporation Of Japan | Atomspheric plasma reaction method and apparatus therefor |
US5260105A (en) * | 1990-04-17 | 1993-11-09 | Alfred University | Aerosol-plasma deposition of films for electrochemical cells |
US5366770A (en) * | 1990-04-17 | 1994-11-22 | Xingwu Wang | Aerosol-plasma deposition of films for electronic cells |
US5609921A (en) * | 1994-08-26 | 1997-03-11 | Universite De Sherbrooke | Suspension plasma spray |
US5591409A (en) * | 1995-08-15 | 1997-01-07 | Watkins; Carl J. | Providing aromas |
US5876753A (en) | 1996-04-16 | 1999-03-02 | Board Of Regents, The University Of Texas System | Molecular tailoring of surfaces |
US6329024B1 (en) † | 1996-04-16 | 2001-12-11 | Board Of Regents, The University Of Texas System | Method for depositing a coating comprising pulsed plasma polymerization of a macrocycle |
FR2750622B1 (fr) * | 1996-07-02 | 1998-09-25 | Air Liquide | Procede de traitement de surface par voie seche et dispositif pour la mise en oeuvre d'un tel procede |
US6001426A (en) | 1996-07-25 | 1999-12-14 | Utron Inc. | High velocity pulsed wire-arc spray |
WO1998010116A1 (en) | 1996-09-05 | 1998-03-12 | Talison Research | Ultrasonic nozzle feed for plasma deposited film networks |
US6244575B1 (en) * | 1996-10-02 | 2001-06-12 | Micron Technology, Inc. | Method and apparatus for vaporizing liquid precursors and system for using same |
ATE316593T1 (de) * | 1997-06-14 | 2006-02-15 | Secr Defence | Oberflächenbehandlung |
AU744202B2 (en) † | 1997-08-08 | 2002-02-21 | Board Of Regents | Non-fouling, wettable coated devices |
FR2767124B1 (fr) | 1997-08-11 | 1999-10-08 | Yves Brenon | Dispositif de stockage de futs |
US6012647A (en) * | 1997-12-01 | 2000-01-11 | 3M Innovative Properties Company | Apparatus and method of atomizing and vaporizing |
WO1999040758A2 (en) | 1998-01-08 | 1999-08-12 | The University Of Tennessee Research Corporation | Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma |
JP4151862B2 (ja) * | 1998-02-26 | 2008-09-17 | キヤノンアネルバ株式会社 | Cvd装置 |
GB9816077D0 (en) † | 1998-07-24 | 1998-09-23 | Secr Defence | Surface coatings |
DE60025914T2 (de) * | 1999-03-12 | 2006-10-19 | Microscent, LLC., Menlo Park | Methoden und vorrichtung zur lokalen zufuhr von parfümierten aerosolen |
US6287643B1 (en) * | 1999-09-30 | 2001-09-11 | Novellus Systems, Inc. | Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor |
US6427623B2 (en) * | 2000-06-23 | 2002-08-06 | Anelva Corporation | Chemical vapor deposition system |
PT1326718E (pt) * | 2000-10-04 | 2004-04-30 | Dow Corning Ireland Ltd | Metodo e aparelho para formar um revestimento |
GB0211354D0 (en) | 2002-05-17 | 2002-06-26 | Surface Innovations Ltd | Atomisation of a precursor into an excitation medium for coating a remote substrate |
-
2002
- 2002-06-01 GB GBGB0212848.6A patent/GB0212848D0/en not_active Ceased
-
2003
- 2003-05-30 AT AT03756068T patent/ATE438463T1/de not_active IP Right Cessation
- 2003-05-30 EP EP03756068A patent/EP1509332B2/de not_active Expired - Lifetime
- 2003-05-30 AU AU2003246887A patent/AU2003246887A1/en not_active Abandoned
- 2003-05-30 US US10/516,448 patent/US8029872B2/en not_active Expired - Fee Related
- 2003-05-30 DE DE60328680T patent/DE60328680D1/de not_active Expired - Lifetime
- 2003-05-30 WO PCT/GB2003/002377 patent/WO2003101621A2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU2003246887A1 (en) | 2003-12-19 |
GB0212848D0 (en) | 2002-07-17 |
EP1509332B2 (de) | 2013-04-03 |
EP1509332A2 (de) | 2005-03-02 |
WO2003101621A2 (en) | 2003-12-11 |
US20050227018A1 (en) | 2005-10-13 |
AU2003246887A8 (en) | 2003-12-19 |
EP1509332B1 (de) | 2009-08-05 |
DE60328680D1 (de) | 2009-09-17 |
WO2003101621A3 (en) | 2004-03-04 |
US8029872B2 (en) | 2011-10-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |