AU4067799A - Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma - Google Patents

Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma

Info

Publication number
AU4067799A
AU4067799A AU40677/99A AU4067799A AU4067799A AU 4067799 A AU4067799 A AU 4067799A AU 40677/99 A AU40677/99 A AU 40677/99A AU 4067799 A AU4067799 A AU 4067799A AU 4067799 A AU4067799 A AU 4067799A
Authority
AU
Australia
Prior art keywords
workpieces
glow discharge
discharge plasma
uniform glow
remote exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU40677/99A
Inventor
J. Reece Roth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tennessee Research Foundation
Original Assignee
University of Tennessee Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tennessee Research Foundation filed Critical University of Tennessee Research Foundation
Publication of AU4067799A publication Critical patent/AU4067799A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00—Testing
    • H05H2240/10—Testing at atmospheric pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00—Testing
    • H05H2240/20—Non-thermal plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
AU40677/99A 1998-01-08 1999-01-08 Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma Abandoned AU4067799A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US7077998P 1998-01-08 1998-01-08
US60070779 1998-01-08
US8264598P 1998-04-22 1998-04-22
US60082645 1998-04-22
PCT/US1999/000480 WO1999040758A2 (en) 1998-01-08 1999-01-08 Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma

Publications (1)

Publication Number Publication Date
AU4067799A true AU4067799A (en) 1999-08-23

Family

ID=26751496

Family Applications (1)

Application Number Title Priority Date Filing Date
AU40677/99A Abandoned AU4067799A (en) 1998-01-08 1999-01-08 Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma

Country Status (2)

Country Link
AU (1) AU4067799A (en)
WO (1) WO1999040758A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0211354D0 (en) 2002-05-17 2002-06-26 Surface Innovations Ltd Atomisation of a precursor into an excitation medium for coating a remote substrate
GB0212848D0 (en) 2002-06-01 2002-07-17 Surface Innovations Ltd Introduction of liquid/solid slurry into an exciting medium
CN103187235B (en) * 2011-12-31 2016-04-20 北京北方微电子基地设备工艺研究中心有限责任公司 The discharge assembly of substrate processing apparatus, chamber device and PECVD device
EP4368236A1 (en) * 2022-11-11 2024-05-15 Cambridge Enterprise Limited Iontophoretic drug delivery device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0063273B1 (en) * 1981-04-02 1986-02-12 The Perkin-Elmer Corporation Discharge system for plasma processing
US4381965A (en) * 1982-01-06 1983-05-03 Drytek, Inc. Multi-planar electrode plasma etching
JP2589599B2 (en) * 1989-11-30 1997-03-12 住友精密工業株式会社 Blow-out type surface treatment device
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
JP2741745B2 (en) * 1995-03-24 1998-04-22 工業技術院長 Semiconductor electrode forming method and apparatus
US5779991A (en) * 1996-11-12 1998-07-14 Eastern Digital Inc. Apparatus for destroying hazardous compounds in a gas stream

Also Published As

Publication number Publication date
WO1999040758A9 (en) 1999-10-21
WO1999040758A3 (en) 2000-01-06
WO1999040758A2 (en) 1999-08-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase