EA201290598A1 - Устройство и способ для покрытия подложки - Google Patents
Устройство и способ для покрытия подложкиInfo
- Publication number
- EA201290598A1 EA201290598A1 EA201290598A EA201290598A EA201290598A1 EA 201290598 A1 EA201290598 A1 EA 201290598A1 EA 201290598 A EA201290598 A EA 201290598A EA 201290598 A EA201290598 A EA 201290598A EA 201290598 A1 EA201290598 A1 EA 201290598A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- substrate
- jet
- covering substrates
- sputtering chamber
- aerosol jet
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/0075—Nozzle arrangements in gas streams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
- B05B14/30—Arrangements for collecting, re-using or eliminating excess spraying material comprising enclosures close to, or in contact with, the object to be sprayed and surrounding or confining the discharged spray or jet but not the object to be sprayed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0204—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to the edges of essentially flat articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0408—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing two or more liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
- B05B7/0853—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with one single gas jet and several jets constituted by a liquid or a mixture containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/1686—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed involving vaporisation of the material to be sprayed or of an atomising-fluid-generating product
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
- C03C2218/112—Deposition methods from solutions or suspensions by spraying
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Изобретение относится к устройству (1) и способу создания жидкой пленки из одного или более жидких прекурсоров на поверхности (4) подложки (3) с целью создания покрытия, которое выполнено таким образом, чтобы аэрозольная струя (13) была направлена на поверхность (4) подложки (3) в напылительной камере (21). Согласно изобретению устройство содержит гомогенизирующее сопло (17) для получения, по существу, гомогенной аэрозольной струи (13) в направлении поверхности (4) подложки (3) до введения струи в напылительную камеру (21).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20100005U FI9160U1 (fi) | 2010-01-04 | 2010-01-04 | Pinnoituslaite |
PCT/FI2010/051096 WO2011080397A1 (en) | 2010-01-04 | 2010-12-29 | Apparatus and method for coating substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
EA201290598A1 true EA201290598A1 (ru) | 2012-12-28 |
EA023127B1 EA023127B1 (ru) | 2016-04-29 |
Family
ID=41620929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EA201290598A EA023127B1 (ru) | 2010-01-04 | 2010-12-29 | Устройство и способ для покрытия подложки |
Country Status (7)
Country | Link |
---|---|
US (1) | US9327299B2 (ru) |
EP (1) | EP2521621A4 (ru) |
CN (1) | CN102695564B (ru) |
AU (1) | AU2010338150B2 (ru) |
EA (1) | EA023127B1 (ru) |
FI (1) | FI9160U1 (ru) |
WO (1) | WO2011080397A1 (ru) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10458017B2 (en) | 2012-11-05 | 2019-10-29 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Film-forming apparatus to form a film on a substrate |
KR102054367B1 (ko) * | 2013-05-06 | 2019-12-11 | 삼성디스플레이 주식회사 | 유체 도포 장치 |
MX2014013233A (es) * | 2014-10-30 | 2016-05-02 | Ct Investig Materiales Avanzados Sc | Tobera de inyeccion de aerosoles y su metodo de utilizacion para depositar diferentes recubrimientos mediante deposito quimico de vapor asistido por aerosol. |
KR20180074668A (ko) | 2015-08-21 | 2018-07-03 | 코닝 인코포레이티드 | 유리 가공 방법 및 장치 |
WO2017144782A1 (en) * | 2016-02-26 | 2017-08-31 | Beneq Oy | Improved aerosol coating device and method |
CN110293039A (zh) * | 2019-05-17 | 2019-10-01 | 陕西飞机工业(集团)有限公司 | 一种漆膜双面试片制备方法、装置及喷涂平台 |
CN111350694B (zh) * | 2020-03-13 | 2021-02-19 | 浙江上风高科专风实业有限公司 | 一种叶尖弯曲的减耗风机叶片的加工方法 |
PT3885052T (pt) * | 2020-03-24 | 2023-01-30 | Akzenta Paneele Profile Gmbh | Revestimento do bordo de um painel com um meio de revestimento |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4504526A (en) | 1983-09-26 | 1985-03-12 | Libbey-Owens-Ford Company | Apparatus and method for producing a laminar flow of constant velocity fluid along a substrate |
US4871105A (en) | 1988-04-06 | 1989-10-03 | American Telephone And Telegraph Company, At&T Bell Laboratories | Method and apparatus for applying flux to a substrate |
JPH0390579A (ja) * | 1989-08-31 | 1991-04-16 | Taiyo Yuden Co Ltd | 薄膜形成装置 |
US5166000A (en) * | 1991-10-10 | 1992-11-24 | Nanofilm Corporation | Method of applying thin films of amphiphilic molecules to substrates |
GB9300400D0 (en) | 1993-01-11 | 1993-03-03 | Glaverbel | A device and method for forming a coating by pyrolysis |
US6433154B1 (en) * | 1997-06-12 | 2002-08-13 | Bristol-Myers Squibb Company | Functional receptor/kinase chimera in yeast cells |
CN2669993Y (zh) * | 2003-12-24 | 2005-01-12 | 宝山钢铁股份有限公司 | 气液复合平面射流喷射嘴 |
DE102005005151A1 (de) | 2005-02-04 | 2006-08-10 | Hennecke Gmbh | Verfahren und Vorrichtung zur Herstellung von Polyurethan-Blockschaum |
EP1757370B8 (en) | 2005-08-24 | 2012-03-14 | Brother Kogyo Kabushiki Kaisha | Film forming apparatus and jetting nozzle |
ES2340533T3 (es) * | 2007-04-02 | 2010-06-04 | Nitto Europe N.V | Protector de liberacion. |
FI121990B (fi) * | 2007-12-20 | 2011-07-15 | Beneq Oy | Laite sumun ja hiukkasten tuottamiseksi |
-
2010
- 2010-01-04 FI FI20100005U patent/FI9160U1/fi not_active IP Right Cessation
- 2010-12-29 EA EA201290598A patent/EA023127B1/ru not_active IP Right Cessation
- 2010-12-29 CN CN201080060514.6A patent/CN102695564B/zh not_active Expired - Fee Related
- 2010-12-29 EP EP10840643.0A patent/EP2521621A4/en not_active Withdrawn
- 2010-12-29 US US13/516,481 patent/US9327299B2/en active Active
- 2010-12-29 AU AU2010338150A patent/AU2010338150B2/en not_active Ceased
- 2010-12-29 WO PCT/FI2010/051096 patent/WO2011080397A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
AU2010338150B2 (en) | 2014-01-23 |
US20120258251A1 (en) | 2012-10-11 |
FIU20100005U0 (fi) | 2010-01-04 |
EP2521621A1 (en) | 2012-11-14 |
WO2011080397A1 (en) | 2011-07-07 |
US9327299B2 (en) | 2016-05-03 |
CN102695564B (zh) | 2015-11-25 |
EA023127B1 (ru) | 2016-04-29 |
FI9160U1 (fi) | 2011-04-14 |
CN102695564A (zh) | 2012-09-26 |
EP2521621A4 (en) | 2014-08-27 |
AU2010338150A1 (en) | 2012-07-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): AM AZ BY KZ KG MD TJ TM |
|
PC4A | Registration of transfer of a eurasian patent by assignment |