ATE406593T1 - Massen-siliziumspiegel mit schwenkgliedern darunter - Google Patents
Massen-siliziumspiegel mit schwenkgliedern darunterInfo
- Publication number
- ATE406593T1 ATE406593T1 AT03756196T AT03756196T ATE406593T1 AT E406593 T1 ATE406593 T1 AT E406593T1 AT 03756196 T AT03756196 T AT 03756196T AT 03756196 T AT03756196 T AT 03756196T AT E406593 T1 ATE406593 T1 AT E406593T1
- Authority
- AT
- Austria
- Prior art keywords
- bulk
- mems
- hinges
- micromachining techniques
- bulk element
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/159,153 US6695457B2 (en) | 2001-06-02 | 2002-05-31 | Bulk silicon mirrors with hinges underneath |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE406593T1 true ATE406593T1 (de) | 2008-09-15 |
Family
ID=29709658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03756196T ATE406593T1 (de) | 2002-05-31 | 2003-05-21 | Massen-siliziumspiegel mit schwenkgliedern darunter |
Country Status (10)
Country | Link |
---|---|
US (2) | US6695457B2 (de) |
EP (1) | EP1509802B1 (de) |
JP (1) | JP4484057B2 (de) |
CN (1) | CN100498407C (de) |
AT (1) | ATE406593T1 (de) |
AU (1) | AU2003243303A1 (de) |
CA (1) | CA2487819C (de) |
DE (1) | DE60323226D1 (de) |
ES (1) | ES2314239T3 (de) |
WO (1) | WO2003102631A2 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7381630B2 (en) | 2001-01-02 | 2008-06-03 | The Charles Stark Draper Laboratory, Inc. | Method for integrating MEMS device and interposer |
US7209274B2 (en) | 2001-06-02 | 2007-04-24 | Capella Photonics, Inc. | High fill-factor bulk silicon mirrors |
JP3558066B2 (ja) * | 2002-02-19 | 2004-08-25 | ソニー株式会社 | Mems素子とその製造方法、光変調素子、glvデバイスとその製造方法、及びレーザディスプレイ |
US20030234994A1 (en) * | 2002-06-19 | 2003-12-25 | Pan Shaoher X. | Reflective spatial light modulator |
US6992810B2 (en) * | 2002-06-19 | 2006-01-31 | Miradia Inc. | High fill ratio reflective spatial light modulator with hidden hinge |
US7034984B2 (en) * | 2002-06-19 | 2006-04-25 | Miradia Inc. | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
US20040069742A1 (en) * | 2002-06-19 | 2004-04-15 | Pan Shaoher X. | Fabrication of a reflective spatial light modulator |
JP3793125B2 (ja) * | 2002-07-18 | 2006-07-05 | 富士通株式会社 | デバイスチップの製造方法 |
US6850354B2 (en) * | 2002-09-30 | 2005-02-01 | Lucent Technologies Inc. | Monolithic MEMS device for optical switches |
US6924581B2 (en) * | 2002-09-30 | 2005-08-02 | Lucent Technologies Inc. | Split spring providing multiple electrical leads for MEMS devices |
US6859300B2 (en) * | 2002-09-30 | 2005-02-22 | Lucent Technologies Inc. | Monolithic two-axis MEMS device for optical switches |
US7483198B2 (en) * | 2003-02-12 | 2009-01-27 | Texas Instruments Incorporated | Micromirror device and method for making the same |
US7026695B2 (en) * | 2003-11-19 | 2006-04-11 | Miradia Inc. | Method and apparatus to reduce parasitic forces in electro-mechanical systems |
JP4856631B2 (ja) | 2004-05-29 | 2012-01-18 | ポラティス リミテッド | 光学的スイッチ |
US7042619B1 (en) * | 2004-06-18 | 2006-05-09 | Miradia Inc. | Mirror structure with single crystal silicon cross-member |
US7068417B2 (en) * | 2004-07-28 | 2006-06-27 | Miradia Inc. | Method and apparatus for a reflective spatial light modulator with a flexible pedestal |
US7193492B2 (en) * | 2004-09-29 | 2007-03-20 | Lucent Technologies Inc. | Monolithic MEMS device having a balanced cantilever plate |
US7352927B2 (en) | 2005-04-11 | 2008-04-01 | Capella Photonics | Optical add-drop multiplexer architecture with reduced effect of mirror edge diffraction |
US7346234B2 (en) * | 2005-04-11 | 2008-03-18 | Capella Photonics | Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based multi-axes rotation |
US7756368B2 (en) * | 2005-04-11 | 2010-07-13 | Capella Photonics, Inc. | Flex spectrum WSS |
US7362930B2 (en) * | 2005-04-11 | 2008-04-22 | Capella Photonics | Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based rotation about multiple non-orthogonal axes |
US7539371B2 (en) | 2005-04-11 | 2009-05-26 | Capella Photonics, Inc. | Optical apparatus with reduced effect of mirror edge diffraction |
US7190508B2 (en) | 2005-06-15 | 2007-03-13 | Miradia Inc. | Method and structure of patterning landing pad structures for spatial light modulators |
US7184195B2 (en) | 2005-06-15 | 2007-02-27 | Miradia Inc. | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator |
US7567756B2 (en) * | 2005-08-03 | 2009-07-28 | Capella Photonics | Method of automatic adjustment of dither amplitude of MEMS mirror arrays |
US7382513B2 (en) * | 2005-10-13 | 2008-06-03 | Miradia Inc. | Spatial light modulator with multi-layer landing structures |
US7500713B2 (en) | 2006-02-27 | 2009-03-10 | Wabash National, L.P. | Interlocking joint for a wall or door of a trailer |
TWI312530B (en) * | 2006-07-24 | 2009-07-21 | Touch Micro System Tech | Method of fabricating a hinge |
CN101121498B (zh) * | 2006-08-07 | 2011-01-26 | 探微科技股份有限公司 | 制作微扭转轴的方法 |
JP4983281B2 (ja) * | 2007-02-06 | 2012-07-25 | セイコーエプソン株式会社 | アクチュエータ、光スキャナ、および画像形成装置 |
US7574079B1 (en) | 2007-10-05 | 2009-08-11 | Tremaine Brian P | Exogenous tone dither rejection in optical switching |
US8094352B2 (en) | 2008-05-13 | 2012-01-10 | Texas Instruments Incorporated | Mirror assembly with recessed mirror |
EP2211223A1 (de) * | 2009-01-23 | 2010-07-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Erzeugung einer kippbaren Spiegelstruktur und eine Mikrospiegelvorrichtung |
JP5619875B2 (ja) | 2009-05-08 | 2014-11-05 | ジンテス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 拡張型骨インプラント |
WO2014113489A1 (en) | 2013-01-15 | 2014-07-24 | Hanqing Jiang | Origami enabled manufacturing systems and methods |
US9005458B2 (en) * | 2013-02-26 | 2015-04-14 | Micron Technology, Inc. | Photonic device structure and method of manufacture |
WO2014168658A1 (en) * | 2013-04-09 | 2014-10-16 | Fusao Ishii | Mirror device with flat and smooth mirror surface without protrusion or dip |
WO2015100414A1 (en) | 2013-12-27 | 2015-07-02 | Arizona Board Of Regents On Behalf Of Arizona State University | Deformable origami batteries |
EP3092290B1 (de) * | 2014-01-10 | 2019-09-04 | The Lubrizol Corporation | Methode zum schmieren eines verbrennungsmotors |
US10418664B2 (en) | 2014-09-26 | 2019-09-17 | Arizona Board Of Regents On Behalf Of Arizona State University | Stretchable batteries |
CN107431059B (zh) | 2015-01-02 | 2020-03-17 | 亚利桑那州立大学董事会 | 用于可变形电子装置的阿基米德螺线设计 |
US10502991B2 (en) | 2015-02-05 | 2019-12-10 | The Arizona Board Of Regents On Behalf Of Arizona State University | Origami displays and methods for their manufacture |
US10390698B2 (en) | 2016-06-16 | 2019-08-27 | Arizona Board Of Regents On Behalf Of Arizona State University | Conductive and stretchable polymer composite |
US20210111537A1 (en) * | 2019-10-15 | 2021-04-15 | Texas Instruments Incorporated | Mems-based phase spatial light modulating architecture |
US20220227621A1 (en) * | 2021-01-20 | 2022-07-21 | Calient Technologies, Inc. | Mems mirror arrays with reduced crosstalk and methods of manufacture |
WO2023069638A1 (en) * | 2021-10-20 | 2023-04-27 | The George Washington University | Systems and methods for nanoscale axial localization and super resolution axial imaging with height-controlled mirror |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4360182A (en) * | 1980-06-25 | 1982-11-23 | The United States Of America As Represented By The Secretary Of The Navy | High-agility reflector support and drive system |
DE68909075T2 (de) * | 1988-03-16 | 1994-04-07 | Texas Instruments Inc | Spatialer Lichtmodulator mit Anwendungsverfahren. |
US5239361A (en) * | 1991-10-25 | 1993-08-24 | Nicolet Instrument Corporation | Dynamic mirror alignment device for the interferometer of an infrared spectrometer |
US5673139A (en) * | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
US5696619A (en) * | 1995-02-27 | 1997-12-09 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
US5629794A (en) * | 1995-05-31 | 1997-05-13 | Texas Instruments Incorporated | Spatial light modulator having an analog beam for steering light |
US5661591A (en) * | 1995-09-29 | 1997-08-26 | Texas Instruments Incorporated | Optical switch having an analog beam for steering light |
KR100208000B1 (ko) * | 1996-09-16 | 1999-07-15 | 윤종용 | 레이저 스캐닝 유니트 |
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
US5995688A (en) * | 1998-06-01 | 1999-11-30 | Lucent Technologies, Inc. | Micro-opto-electromechanical devices and method therefor |
JP3065611B1 (ja) * | 1999-05-28 | 2000-07-17 | 三菱電機株式会社 | マイクロミラ―装置およびその製造方法 |
US6292600B1 (en) * | 1999-06-07 | 2001-09-18 | At&T Corp. | Angular-precision enhancement in free-space micromachined optical switches |
JP3910333B2 (ja) * | 2000-03-03 | 2007-04-25 | 富士通株式会社 | ガルバノマイクロミラーとその製造方法 |
US6275325B1 (en) * | 2000-04-07 | 2001-08-14 | Microsoft Corporation | Thermally activated microelectromechanical systems actuator |
US6585383B2 (en) * | 2000-05-18 | 2003-07-01 | Calient Networks, Inc. | Micromachined apparatus for improved reflection of light |
WO2001094253A2 (en) | 2000-06-02 | 2001-12-13 | Calient Networks, Inc. | Bulk silicon structures with thin film flexible elements |
US6600851B2 (en) * | 2001-01-05 | 2003-07-29 | Agere Systems Inc. | Electrostatically actuated micro-electro-mechanical system (MEMS) device |
US6480320B2 (en) * | 2001-02-07 | 2002-11-12 | Transparent Optical, Inc. | Microelectromechanical mirror and mirror array |
-
2002
- 2002-05-31 US US10/159,153 patent/US6695457B2/en not_active Expired - Lifetime
-
2003
- 2003-05-21 AU AU2003243303A patent/AU2003243303A1/en not_active Abandoned
- 2003-05-21 CA CA002487819A patent/CA2487819C/en not_active Expired - Lifetime
- 2003-05-21 WO PCT/US2003/016278 patent/WO2003102631A2/en active Application Filing
- 2003-05-21 ES ES03756196T patent/ES2314239T3/es not_active Expired - Lifetime
- 2003-05-21 AT AT03756196T patent/ATE406593T1/de active
- 2003-05-21 EP EP03756196A patent/EP1509802B1/de not_active Expired - Lifetime
- 2003-05-21 CN CNB038184141A patent/CN100498407C/zh not_active Expired - Lifetime
- 2003-05-21 JP JP2004509458A patent/JP4484057B2/ja not_active Expired - Fee Related
- 2003-05-21 DE DE60323226T patent/DE60323226D1/de not_active Expired - Lifetime
- 2003-11-18 US US10/716,841 patent/US6820988B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ES2314239T3 (es) | 2009-03-16 |
CA2487819C (en) | 2009-12-08 |
EP1509802B1 (de) | 2008-08-27 |
US6695457B2 (en) | 2004-02-24 |
WO2003102631A3 (en) | 2004-04-29 |
US6820988B2 (en) | 2004-11-23 |
JP4484057B2 (ja) | 2010-06-16 |
WO2003102631A2 (en) | 2003-12-11 |
EP1509802A2 (de) | 2005-03-02 |
DE60323226D1 (de) | 2008-10-09 |
CA2487819A1 (en) | 2003-12-11 |
EP1509802A4 (de) | 2006-02-01 |
CN1672081A (zh) | 2005-09-21 |
JP2005528638A (ja) | 2005-09-22 |
CN100498407C (zh) | 2009-06-10 |
US20040100706A1 (en) | 2004-05-27 |
US20040017625A1 (en) | 2004-01-29 |
AU2003243303A8 (en) | 2003-12-19 |
AU2003243303A1 (en) | 2003-12-19 |
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Legal Events
Date | Code | Title | Description |
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UEP | Publication of translation of european patent specification |
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