DE60323226D1 - Massen-siliziumspiegel mit schwenkgliedern darunter - Google Patents

Massen-siliziumspiegel mit schwenkgliedern darunter

Info

Publication number
DE60323226D1
DE60323226D1 DE60323226T DE60323226T DE60323226D1 DE 60323226 D1 DE60323226 D1 DE 60323226D1 DE 60323226 T DE60323226 T DE 60323226T DE 60323226 T DE60323226 T DE 60323226T DE 60323226 D1 DE60323226 D1 DE 60323226D1
Authority
DE
Germany
Prior art keywords
bulk
mems
hinges
micromachining techniques
bulk element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60323226T
Other languages
English (en)
Inventor
Drieenhuizen Bert P Van
Jeffrey P Wilde
Nelson Kuan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Capella Photonics Inc
Original Assignee
Capella Photonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Capella Photonics Inc filed Critical Capella Photonics Inc
Application granted granted Critical
Publication of DE60323226D1 publication Critical patent/DE60323226D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Particle Accelerators (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE60323226T 2002-05-31 2003-05-21 Massen-siliziumspiegel mit schwenkgliedern darunter Expired - Lifetime DE60323226D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/159,153 US6695457B2 (en) 2001-06-02 2002-05-31 Bulk silicon mirrors with hinges underneath
PCT/US2003/016278 WO2003102631A2 (en) 2002-05-31 2003-05-21 Bulk silicon mirrors with hinges underneath

Publications (1)

Publication Number Publication Date
DE60323226D1 true DE60323226D1 (de) 2008-10-09

Family

ID=29709658

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60323226T Expired - Lifetime DE60323226D1 (de) 2002-05-31 2003-05-21 Massen-siliziumspiegel mit schwenkgliedern darunter

Country Status (10)

Country Link
US (2) US6695457B2 (de)
EP (1) EP1509802B1 (de)
JP (1) JP4484057B2 (de)
CN (1) CN100498407C (de)
AT (1) ATE406593T1 (de)
AU (1) AU2003243303A1 (de)
CA (1) CA2487819C (de)
DE (1) DE60323226D1 (de)
ES (1) ES2314239T3 (de)
WO (1) WO2003102631A2 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7381630B2 (en) * 2001-01-02 2008-06-03 The Charles Stark Draper Laboratory, Inc. Method for integrating MEMS device and interposer
US7209274B2 (en) 2001-06-02 2007-04-24 Capella Photonics, Inc. High fill-factor bulk silicon mirrors
JP3558066B2 (ja) * 2002-02-19 2004-08-25 ソニー株式会社 Ｍｅｍｓ素子とその製造方法、光変調素子、ｇｌｖデバイスとその製造方法、及びレーザディスプレイ
US7034984B2 (en) * 2002-06-19 2006-04-25 Miradia Inc. Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
US20040069742A1 (en) * 2002-06-19 2004-04-15 Pan Shaoher X. Fabrication of a reflective spatial light modulator
US20030234994A1 (en) * 2002-06-19 2003-12-25 Pan Shaoher X. Reflective spatial light modulator
US6992810B2 (en) * 2002-06-19 2006-01-31 Miradia Inc. High fill ratio reflective spatial light modulator with hidden hinge
JP3793125B2 (ja) * 2002-07-18 2006-07-05 富士通株式会社 デバイスチップの製造方法
US6859300B2 (en) * 2002-09-30 2005-02-22 Lucent Technologies Inc. Monolithic two-axis MEMS device for optical switches
US6924581B2 (en) * 2002-09-30 2005-08-02 Lucent Technologies Inc. Split spring providing multiple electrical leads for MEMS devices
US6850354B2 (en) * 2002-09-30 2005-02-01 Lucent Technologies Inc. Monolithic MEMS device for optical switches
US7483198B2 (en) * 2003-02-12 2009-01-27 Texas Instruments Incorporated Micromirror device and method for making the same
US7026695B2 (en) * 2003-11-19 2006-04-11 Miradia Inc. Method and apparatus to reduce parasitic forces in electro-mechanical systems
ES2398687T3 (es) * 2004-05-29 2013-03-21 Polatis Ltd Conmutadores ópticos selectivos en longitud de onda
US7042619B1 (en) * 2004-06-18 2006-05-09 Miradia Inc. Mirror structure with single crystal silicon cross-member
US7068417B2 (en) * 2004-07-28 2006-06-27 Miradia Inc. Method and apparatus for a reflective spatial light modulator with a flexible pedestal
US7193492B2 (en) * 2004-09-29 2007-03-20 Lucent Technologies Inc. Monolithic MEMS device having a balanced cantilever plate
US7756368B2 (en) * 2005-04-11 2010-07-13 Capella Photonics, Inc. Flex spectrum WSS
US7346234B2 (en) * 2005-04-11 2008-03-18 Capella Photonics Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based multi-axes rotation
US7362930B2 (en) * 2005-04-11 2008-04-22 Capella Photonics Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based rotation about multiple non-orthogonal axes
US7539371B2 (en) 2005-04-11 2009-05-26 Capella Photonics, Inc. Optical apparatus with reduced effect of mirror edge diffraction
US7352927B2 (en) 2005-04-11 2008-04-01 Capella Photonics Optical add-drop multiplexer architecture with reduced effect of mirror edge diffraction
US7190508B2 (en) 2005-06-15 2007-03-13 Miradia Inc. Method and structure of patterning landing pad structures for spatial light modulators
US7184195B2 (en) 2005-06-15 2007-02-27 Miradia Inc. Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
US7567756B2 (en) * 2005-08-03 2009-07-28 Capella Photonics Method of automatic adjustment of dither amplitude of MEMS mirror arrays
US7382513B2 (en) * 2005-10-13 2008-06-03 Miradia Inc. Spatial light modulator with multi-layer landing structures
US7500713B2 (en) 2006-02-27 2009-03-10 Wabash National, L.P. Interlocking joint for a wall or door of a trailer
TWI312530B (en) * 2006-07-24 2009-07-21 Touch Micro System Tech Method of fabricating a hinge
CN101121498B (zh) * 2006-08-07 2011-01-26 探微科技股份有限公司 制作微扭转轴的方法
JP4983281B2 (ja) * 2007-02-06 2012-07-25 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
US7574079B1 (en) 2007-10-05 2009-08-11 Tremaine Brian P Exogenous tone dither rejection in optical switching
US8094352B2 (en) 2008-05-13 2012-01-10 Texas Instruments Incorporated Mirror assembly with recessed mirror
EP2211223A1 (de) * 2009-01-23 2010-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Erzeugung einer kippbaren Spiegelstruktur und eine Mikrospiegelvorrichtung
JP5619875B2 (ja) 2009-05-08 2014-11-05 ジンテス ゲゼルシャフト ミット ベシュレンクテル ハフツング 拡張型骨インプラント
US9706646B2 (en) 2013-01-15 2017-07-11 Arizona Board of Regenst acting for and on behalf of Arizona State University Origami enabled manufacturing systems and methods
US9005458B2 (en) * 2013-02-26 2015-04-14 Micron Technology, Inc. Photonic device structure and method of manufacture
WO2014168658A1 (en) * 2013-04-09 2014-10-16 Fusao Ishii Mirror device with flat and smooth mirror surface without protrusion or dip
WO2015100414A1 (en) 2013-12-27 2015-07-02 Arizona Board Of Regents On Behalf Of Arizona State University Deformable origami batteries
US20160326453A1 (en) * 2014-01-10 2016-11-10 The Lubrizol Corporation Method of lubricating an internal combustion engine
WO2016049444A1 (en) 2014-09-26 2016-03-31 Arizona Board Of Regents On Behalf Of Arizona State University Stretchable batteries
CN107431059B (zh) 2015-01-02 2020-03-17 亚利桑那州立大学董事会 用于可变形电子装置的阿基米德螺线设计
US10502991B2 (en) 2015-02-05 2019-12-10 The Arizona Board Of Regents On Behalf Of Arizona State University Origami displays and methods for their manufacture
US10390698B2 (en) 2016-06-16 2019-08-27 Arizona Board Of Regents On Behalf Of Arizona State University Conductive and stretchable polymer composite
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture
US12103843B2 (en) * 2021-01-20 2024-10-01 Calient.Ai Inc. MEMS mirror arrays with reduced crosstalk
WO2023069638A1 (en) * 2021-10-20 2023-04-27 The George Washington University Systems and methods for nanoscale axial localization and super resolution axial imaging with height-controlled mirror

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4360182A (en) * 1980-06-25 1982-11-23 The United States Of America As Represented By The Secretary Of The Navy High-agility reflector support and drive system
EP0332953B1 (de) * 1988-03-16 1993-09-15 Texas Instruments Incorporated Spatialer Lichtmodulator mit Anwendungsverfahren
US5239361A (en) * 1991-10-25 1993-08-24 Nicolet Instrument Corporation Dynamic mirror alignment device for the interferometer of an infrared spectrometer
US5673139A (en) * 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5696619A (en) * 1995-02-27 1997-12-09 Texas Instruments Incorporated Micromechanical device having an improved beam
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
KR100208000B1 (ko) * 1996-09-16 1999-07-15 윤종용 레이저 스캐닝 유니트
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US5995688A (en) * 1998-06-01 1999-11-30 Lucent Technologies, Inc. Micro-opto-electromechanical devices and method therefor
JP3065611B1 (ja) * 1999-05-28 2000-07-17 三菱電機株式会社 マイクロミラ―装置およびその製造方法
US6292600B1 (en) * 1999-06-07 2001-09-18 At&T Corp. Angular-precision enhancement in free-space micromachined optical switches
JP3910333B2 (ja) * 2000-03-03 2007-04-25 富士通株式会社 ガルバノマイクロミラーとその製造方法
US6275325B1 (en) * 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
US6585383B2 (en) * 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
WO2001094253A2 (en) 2000-06-02 2001-12-13 Calient Networks, Inc. Bulk silicon structures with thin film flexible elements
US6600851B2 (en) * 2001-01-05 2003-07-29 Agere Systems Inc. Electrostatically actuated micro-electro-mechanical system (MEMS) device
US6480320B2 (en) * 2001-02-07 2002-11-12 Transparent Optical, Inc. Microelectromechanical mirror and mirror array

Also Published As

Publication number Publication date
US6820988B2 (en) 2004-11-23
US20040100706A1 (en) 2004-05-27
CA2487819A1 (en) 2003-12-11
US20040017625A1 (en) 2004-01-29
AU2003243303A8 (en) 2003-12-19
WO2003102631A3 (en) 2004-04-29
ES2314239T3 (es) 2009-03-16
EP1509802A4 (de) 2006-02-01
WO2003102631A2 (en) 2003-12-11
EP1509802A2 (de) 2005-03-02
JP4484057B2 (ja) 2010-06-16
CN100498407C (zh) 2009-06-10
ATE406593T1 (de) 2008-09-15
EP1509802B1 (de) 2008-08-27
AU2003243303A1 (en) 2003-12-19
CN1672081A (zh) 2005-09-21
US6695457B2 (en) 2004-02-24
JP2005528638A (ja) 2005-09-22
CA2487819C (en) 2009-12-08

Similar Documents

Publication Publication Date Title
DE60323226D1 (de) Massen-siliziumspiegel mit schwenkgliedern darunter
US8537446B2 (en) Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications
SG151326A1 (en) Single-crystal-silicon 3d micromirror
Greywall et al. Crystalline silicon tilting mirrors for optical cross-connect switches
US20080094677A1 (en) Actuator, optical scanner and image forming apparatus
KR20070090148A (ko) 카메라 모듈
JP3759598B2 (ja) アクチュエータ
EP1403678A3 (de) Vorrichtung zum Halten einer Kamera hinter einem Fernglas
US20050264131A1 (en) Rotary-type comb-drive actuator and variable optical attenuator using the same
Gu-Stoppel et al. A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10
Tsai et al. Gimbal-less MEMS two-axis optical scanner array with high fill-factor
JP2002538512A (ja) 接触感知入力部および振動源を備えたマイクロ・メカニカル・フラット・パネル・ディスプレイ
EP1698922A3 (de) Farbloser abstimmbarer Dispersionskompensator mit planarer Lichtwellenschaltung und deformierbarem Spiegel
AU2002257270A1 (en) Preferred crystal orientation optical elements from cubic materials
Brunne et al. A tunable piezoelectric Fresnel mirror for high-speed lineshaping
DE60215223D1 (de) Satellitengestütztes optisches beobachtungsinstrument mit zwei teleskopen
Tani et al. A combination of fast resonant mode and slow static deflection of SOI-PZT actuators for MEMS image projection display
DE60012082D1 (de) Leichte integrierte optische Bank und miniaturisierter Lasersender unter Verwendung derselben
US9897801B2 (en) Multi-hinge mirror assembly
WO2003081337A3 (de) Vorrichtung zur manipulation der winkellage eines gegenstands gegenüber einer festen struktur
JP2006053396A (ja) 駆動機構、および該機構を備えたマイクロミラー装置
WO2004095111A2 (en) Oscillating mirror having a plurality of eigenmodes
JP2003177335A (ja) 適応光学（ａｄａｐｔｉｖｅｏｐｔｉｃｓ）を用いて光学信号波面の歪みを補正する方法および装置
AU2003238149A1 (en) Confocal optical scanning device
Zhang et al. InGaN/GaN micro mirror with electrostatic comb drive actuation integrated on a patterned silicon-on-insulator wafer

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: CAPELLA PHOTONICS INC., SAN JOSE, CALIF., US

8364 No opposition during term of opposition