EE9600178A - Mitmekihiline piesoelektriline deformeeritav bimorfne peegel - Google Patents

Mitmekihiline piesoelektriline deformeeritav bimorfne peegel

Info

Publication number
EE9600178A
EE9600178A EE9600178A EE9600178A EE9600178A EE 9600178 A EE9600178 A EE 9600178A EE 9600178 A EE9600178 A EE 9600178A EE 9600178 A EE9600178 A EE 9600178A EE 9600178 A EE9600178 A EE 9600178A
Authority
EE
Estonia
Prior art keywords
multilayer piezoelectric
bimorph mirror
piezoelectric deformable
deformable bimorph
mirror
Prior art date
Application number
EE9600178A
Other languages
English (en)
Inventor
Gennadievich Safronov Andrei
Original Assignee
Yalestown Corporation N.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yalestown Corporation N.V. filed Critical Yalestown Corporation N.V.
Publication of EE9600178A publication Critical patent/EE9600178A/et

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
EE9600178A 1996-02-12 1996-03-06 Mitmekihiline piesoelektriline deformeeritav bimorfne peegel EE9600178A (et)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU9696102312A RU2068191C1 (ru) 1996-02-12 1996-02-12 Многослойное пьезоэлектрическое деформируемое биморфное зеркало
PCT/RU1996/000053 WO1996018919A1 (en) 1996-02-12 1996-03-06 Multiple layer piezoelectric deformable bimorphic mirror

Publications (1)

Publication Number Publication Date
EE9600178A true EE9600178A (et) 1997-08-15

Family

ID=20176622

Family Applications (1)

Application Number Title Priority Date Filing Date
EE9600178A EE9600178A (et) 1996-02-12 1996-03-06 Mitmekihiline piesoelektriline deformeeritav bimorfne peegel

Country Status (14)

Country Link
EP (1) EP0743541A4 (et)
JP (1) JPH10511188A (et)
KR (1) KR970706512A (et)
CN (1) CN1145667A (et)
CA (1) CA2185320A1 (et)
EE (1) EE9600178A (et)
HU (1) HUP9602396A2 (et)
LT (1) LT96116A (et)
LV (1) LV11713B (et)
MD (1) MD960318A (et)
PL (1) PL322716A1 (et)
RU (1) RU2068191C1 (et)
SI (1) SI9620001A (et)
WO (1) WO1996018919A1 (et)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1014142B1 (en) * 1996-11-13 2002-09-25 Seiko Epson Corporation Method of producing light modulation device and projector
JP3695494B2 (ja) 1996-11-13 2005-09-14 セイコーエプソン株式会社 光変調デバイス、その製造方法および表示装置
GB2321114B (en) 1997-01-10 2001-02-21 Lasor Ltd An optical modulator
US6874897B2 (en) * 2000-01-27 2005-04-05 Aoptix Technologies, Inc. Deformable curvature mirror with unipolar-wiring
US20030006417A1 (en) * 2001-07-03 2003-01-09 Motorola, Inc. Structure and method for fabricating semiconductor srtuctures and devices utilizing the formation of a compliant substrate for materials used to form the same and piezoelectric structures having controllable optical surfaces
AU2003294125A1 (en) 2002-12-23 2004-07-14 Bae Systems Plc Deformable mirror
EP1576407A2 (en) 2002-12-23 2005-09-21 BAE Systems PLC Deformable-mirror cooling
WO2004057398A1 (en) 2002-12-23 2004-07-08 Bae Systems Plc Deformable-mirror holder
FR2866122B1 (fr) * 2004-02-06 2006-05-19 Europ De Systemes Optiques Soc Miroir bimorphe.
DE102007038872A1 (de) 2007-08-16 2009-02-26 Seereal Technologies S.A. Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht
DE102008049647B4 (de) 2008-09-30 2011-11-24 Technische Universität Dresden Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements
AU2010252752A1 (en) * 2009-05-29 2011-12-01 Bae Systems Plc Self-deformable mirrors and the support thereof
EP2258656A1 (en) * 2009-05-29 2010-12-08 BAE Systems PLC Self-Deformable Mirrors and the Support Thereof
CN102147524A (zh) * 2010-02-10 2011-08-10 中国科学院大连化学物理研究所 一种可变曲率反射镜装置
DE102010028111B4 (de) 2010-04-22 2016-01-21 Technische Universität Dresden Mikromechanisches Element
WO2013158805A1 (en) * 2012-04-17 2013-10-24 California Institute Of Technology Thin film bi-material lattice structures and methods of making the same
CN103383092B (zh) * 2013-07-31 2017-04-12 广东金达照明科技股份有限公司 一种动态多彩灯具
RU2636255C2 (ru) * 2016-04-14 2017-11-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Пьезоактюатор изгибного типа
CN108627972A (zh) * 2018-04-20 2018-10-09 中国人民解放军国防科技大学 悬臂式横向压电驱动变形镜及其装配方法
RU2741035C1 (ru) * 2020-07-21 2021-01-22 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" Лазерная оптическая головка
CN113219649B (zh) * 2021-04-30 2022-11-22 哈尔滨芯明天科技有限公司 一种航天应用的高可靠压电偏摆镜
WO2024185886A1 (ja) * 2023-03-09 2024-09-12 国立大学法人東海国立大学機構 ミラー装置、光学装置およびレーザー核融合炉

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3904274A (en) * 1973-08-27 1975-09-09 Itek Corp Monolithic piezoelectric wavefront phase modulator
US4257686A (en) * 1978-12-14 1981-03-24 Itek Corporation Multiple layer piezoelectric wavefront modulator
FR2453423A1 (fr) * 1979-04-04 1980-10-31 Quantel Sa Element optique epais a courbure variable
FR2530830B1 (et) * 1982-07-22 1985-01-25 Onera (Off Nat Aerospatiale)
US4969726A (en) * 1985-06-03 1990-11-13 Northrop Corporation Ring laser gyro path-length-control mechanism
US4915492A (en) * 1989-02-06 1990-04-10 Toth Theodor A Mirror transducer assembly with selected thermal compensation

Also Published As

Publication number Publication date
PL322716A1 (en) 1998-02-16
CN1145667A (zh) 1997-03-19
KR970706512A (ko) 1997-11-03
HU9602396D0 (en) 1996-11-28
JPH10511188A (ja) 1998-10-27
RU2068191C1 (ru) 1996-10-20
LV11713B (en) 1997-08-20
WO1996018919A1 (en) 1996-06-20
LT96116A (en) 1997-02-25
SI9620001A (en) 1997-08-31
HUP9602396A2 (en) 1997-11-28
EP0743541A4 (en) 1997-03-12
EP0743541A1 (en) 1996-11-20
LV11713A (lv) 1997-02-20
MD960318A (ro) 1997-07-31
CA2185320A1 (en) 1996-06-20

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