MD960318A - Oglindă stratificată piezoelectrică deformabilă bimorfă - Google Patents
Oglindă stratificată piezoelectrică deformabilă bimorfăInfo
- Publication number
- MD960318A MD960318A MD96-0318A MD960318A MD960318A MD 960318 A MD960318 A MD 960318A MD 960318 A MD960318 A MD 960318A MD 960318 A MD960318 A MD 960318A
- Authority
- MD
- Moldova
- Prior art keywords
- cylinder
- reflecting surface
- multiple layer
- layer piezoelectric
- mirror
- Prior art date
Links
- 239000000565 sealant Substances 0.000 abstract 1
- 239000013598 vector Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/10—Mirrors with curved faces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
Abstract
Oglinda stratificată piezoelectrică deformabilă bimorfă pentru telescoapele astronomice, laserii industriali, sistemele de dirijare şi escortare conţine corpul (1) în formă de pahar cu capacul (2) şi suprafaţa reflectoare (3) pe partea exterioară a fundului paharului. Pe suprafaţa interioară a fundului în limita suprafeţei reflectoare (3) sunt fixate paralel cu suprafaţa interioară a fundului, cel puţin, două piezoplăci (4) cu electrozi neîntrerupţi (5) pe părţile opuse. Vectorii polarizării (6) ai plăcilor alăturate sunt orientaţi în direcţii opuse, iar electrozii lor omonimi sunt uniţi cu firele (7). Paharul reprezintă o piesă unică, iar partea de mijloc a fundului acestuia, înzestrată cu suprafaţa reflectoare (3), are grosimea mai mare în comparaţie cu partea periferică. Cavitatea corpului (1) poate fi umplută cu un ermetizator elastic (10).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU9696102312A RU2068191C1 (ru) | 1996-02-12 | 1996-02-12 | Многослойное пьезоэлектрическое деформируемое биморфное зеркало |
PCT/RU1996/000053 WO1996018919A1 (en) | 1996-02-12 | 1996-03-06 | Multiple layer piezoelectric deformable bimorphic mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
MD960318A true MD960318A (ro) | 1997-07-31 |
Family
ID=20176622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MD96-0318A MD960318A (ro) | 1996-02-12 | 1996-03-06 | Oglindă stratificată piezoelectrică deformabilă bimorfă |
Country Status (14)
Country | Link |
---|---|
EP (1) | EP0743541A4 (ro) |
JP (1) | JPH10511188A (ro) |
KR (1) | KR970706512A (ro) |
CN (1) | CN1145667A (ro) |
CA (1) | CA2185320A1 (ro) |
EE (1) | EE9600178A (ro) |
HU (1) | HUP9602396A2 (ro) |
LT (1) | LT96116A (ro) |
LV (1) | LV11713B (ro) |
MD (1) | MD960318A (ro) |
PL (1) | PL322716A1 (ro) |
RU (1) | RU2068191C1 (ro) |
SI (1) | SI9620001A (ro) |
WO (1) | WO1996018919A1 (ro) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3695494B2 (ja) | 1996-11-13 | 2005-09-14 | セイコーエプソン株式会社 | 光変調デバイス、その製造方法および表示装置 |
US6375329B1 (en) | 1996-11-13 | 2002-04-23 | Seiko Epson Corporation | Projector and method of manufacturing a light modulation device |
GB2321114B (en) * | 1997-01-10 | 2001-02-21 | Lasor Ltd | An optical modulator |
US6874897B2 (en) * | 2000-01-27 | 2005-04-05 | Aoptix Technologies, Inc. | Deformable curvature mirror with unipolar-wiring |
US20030006417A1 (en) * | 2001-07-03 | 2003-01-09 | Motorola, Inc. | Structure and method for fabricating semiconductor srtuctures and devices utilizing the formation of a compliant substrate for materials used to form the same and piezoelectric structures having controllable optical surfaces |
WO2004057406A2 (en) | 2002-12-23 | 2004-07-08 | Bae Systems Plc | Deformable-mirror cooling |
WO2004057398A1 (en) | 2002-12-23 | 2004-07-08 | Bae Systems Plc | Deformable-mirror holder |
AU2003294125A1 (en) | 2002-12-23 | 2004-07-14 | Bae Systems Plc | Deformable mirror |
FR2866122B1 (fr) * | 2004-02-06 | 2006-05-19 | Europ De Systemes Optiques Soc | Miroir bimorphe. |
DE102007038872A1 (de) | 2007-08-16 | 2009-02-26 | Seereal Technologies S.A. | Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht |
DE102008049647B4 (de) | 2008-09-30 | 2011-11-24 | Technische Universität Dresden | Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements |
EP2258656A1 (en) * | 2009-05-29 | 2010-12-08 | BAE Systems PLC | Self-Deformable Mirrors and the Support Thereof |
US20120075732A1 (en) * | 2009-05-29 | 2012-03-29 | Bae Systems Plc | Self-deformable mirrors and the support thereof |
CN102147524A (zh) * | 2010-02-10 | 2011-08-10 | 中国科学院大连化学物理研究所 | 一种可变曲率反射镜装置 |
DE102010028111B4 (de) | 2010-04-22 | 2016-01-21 | Technische Universität Dresden | Mikromechanisches Element |
US20130302633A1 (en) * | 2012-04-17 | 2013-11-14 | California Institute Of Technology | Thin film bi-material lattice structures and methods of making the same |
CN103383092B (zh) * | 2013-07-31 | 2017-04-12 | 广东金达照明科技股份有限公司 | 一种动态多彩灯具 |
RU2636255C2 (ru) * | 2016-04-14 | 2017-11-21 | федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" | Пьезоактюатор изгибного типа |
CN108627972A (zh) * | 2018-04-20 | 2018-10-09 | 中国人民解放军国防科技大学 | 悬臂式横向压电驱动变形镜及其装配方法 |
RU2741035C1 (ru) * | 2020-07-21 | 2021-01-22 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" | Лазерная оптическая головка |
CN113219649B (zh) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | 一种航天应用的高可靠压电偏摆镜 |
WO2024185886A1 (ja) * | 2023-03-09 | 2024-09-12 | 国立大学法人東海国立大学機構 | ミラー装置、光学装置およびレーザー核融合炉 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3904274A (en) * | 1973-08-27 | 1975-09-09 | Itek Corp | Monolithic piezoelectric wavefront phase modulator |
US4257686A (en) * | 1978-12-14 | 1981-03-24 | Itek Corporation | Multiple layer piezoelectric wavefront modulator |
FR2453423A1 (fr) * | 1979-04-04 | 1980-10-31 | Quantel Sa | Element optique epais a courbure variable |
FR2530830B1 (ro) * | 1982-07-22 | 1985-01-25 | Onera (Off Nat Aerospatiale) | |
US4969726A (en) * | 1985-06-03 | 1990-11-13 | Northrop Corporation | Ring laser gyro path-length-control mechanism |
US4915492A (en) * | 1989-02-06 | 1990-04-10 | Toth Theodor A | Mirror transducer assembly with selected thermal compensation |
-
1996
- 1996-02-12 RU RU9696102312A patent/RU2068191C1/ru active
- 1996-03-06 HU HU9602396A patent/HUP9602396A2/hu unknown
- 1996-03-06 SI SI9620001A patent/SI9620001A/sl unknown
- 1996-03-06 MD MD96-0318A patent/MD960318A/ro not_active Application Discontinuation
- 1996-03-06 PL PL96322716A patent/PL322716A1/xx unknown
- 1996-03-06 CN CN96190026A patent/CN1145667A/zh active Pending
- 1996-03-06 CA CA002185320A patent/CA2185320A1/en not_active Abandoned
- 1996-03-06 EE EE9600178A patent/EE9600178A/xx unknown
- 1996-03-06 WO PCT/RU1996/000053 patent/WO1996018919A1/ru not_active Application Discontinuation
- 1996-03-06 EP EP19960907806 patent/EP0743541A4/en not_active Withdrawn
- 1996-03-06 KR KR1019960705021A patent/KR970706512A/ko active IP Right Grant
- 1996-03-06 JP JP8518655A patent/JPH10511188A/ja active Pending
- 1996-07-26 LV LVP-96-316A patent/LV11713B/en unknown
- 1996-08-01 LT LT96-116A patent/LT96116A/lt unknown
Also Published As
Publication number | Publication date |
---|---|
LV11713B (en) | 1997-08-20 |
CA2185320A1 (en) | 1996-06-20 |
EE9600178A (et) | 1997-08-15 |
HU9602396D0 (en) | 1996-11-28 |
JPH10511188A (ja) | 1998-10-27 |
EP0743541A1 (en) | 1996-11-20 |
EP0743541A4 (en) | 1997-03-12 |
LV11713A (lv) | 1997-02-20 |
HUP9602396A2 (en) | 1997-11-28 |
WO1996018919A1 (en) | 1996-06-20 |
KR970706512A (ko) | 1997-11-03 |
SI9620001A (en) | 1997-08-31 |
CN1145667A (zh) | 1997-03-19 |
RU2068191C1 (ru) | 1996-10-20 |
PL322716A1 (en) | 1998-02-16 |
LT96116A (en) | 1997-02-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FA1A | Withdrawn application |
Free format text: 19990303 |