ATE382150T1 - Verfahren und vorrichtung für die submikrometerabbildung und -sondierung auf sondenstationen - Google Patents

Verfahren und vorrichtung für die submikrometerabbildung und -sondierung auf sondenstationen

Info

Publication number
ATE382150T1
ATE382150T1 AT00948604T AT00948604T ATE382150T1 AT E382150 T1 ATE382150 T1 AT E382150T1 AT 00948604 T AT00948604 T AT 00948604T AT 00948604 T AT00948604 T AT 00948604T AT E382150 T1 ATE382150 T1 AT E382150T1
Authority
AT
Austria
Prior art keywords
dut
positioning unit
probe
attached
cantilever
Prior art date
Application number
AT00948604T
Other languages
English (en)
Inventor
Greg Bridges
Douglas Thomson
Original Assignee
Suss Microtec Test Sys Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26840752&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE382150(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Suss Microtec Test Sys Gmbh filed Critical Suss Microtec Test Sys Gmbh
Application granted granted Critical
Publication of ATE382150T1 publication Critical patent/ATE382150T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/724—Devices having flexible or movable element
    • Y10S977/732—Nanocantilever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/901—Manufacture, treatment, or detection of nanostructure having step or means utilizing electromagnetic property, e.g. optical, x-ray, electron beamm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953—Detector using nanostructure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT00948604T 1999-07-09 2000-07-06 Verfahren und vorrichtung für die submikrometerabbildung und -sondierung auf sondenstationen ATE382150T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14318299P 1999-07-09 1999-07-09
US09/610,668 US6377066B1 (en) 1999-07-09 2000-07-05 Method and apparatus for sub-micron imaging and probing on probe station

Publications (1)

Publication Number Publication Date
ATE382150T1 true ATE382150T1 (de) 2008-01-15

Family

ID=26840752

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00948604T ATE382150T1 (de) 1999-07-09 2000-07-06 Verfahren und vorrichtung für die submikrometerabbildung und -sondierung auf sondenstationen

Country Status (6)

Country Link
US (1) US6377066B1 (de)
EP (1) EP1436636B1 (de)
AT (1) ATE382150T1 (de)
AU (1) AU6207900A (de)
DE (1) DE60037604T2 (de)
WO (1) WO2001004653A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6819125B1 (en) * 2003-07-23 2004-11-16 Micron Technology, Inc. Method and apparatus for integrated circuit failure analysis
US7463042B2 (en) * 2005-06-30 2008-12-09 Northrop Grumman Corporation Connector probing system
CN104316856B (zh) * 2014-10-29 2017-06-23 上海华力微电子有限公司 背面探测式光子辐射显微镜装置及测试方法
CN105467175A (zh) * 2015-12-10 2016-04-06 苏州世纪福智能装备股份有限公司 一种角度可调测试机

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4544889A (en) * 1983-09-12 1985-10-01 International Business Machines Corporation Robot precision probe positioner with guidance optics
US4992728A (en) * 1989-12-21 1991-02-12 International Business Machines Corporation Electrical probe incorporating scanning proximity microscope
US5214389A (en) * 1992-01-06 1993-05-25 Motorola, Inc. Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position
US5513518A (en) 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5983712A (en) * 1994-05-19 1999-11-16 Molecular Imaging Corporation Microscope for compliance measurement
US6091248A (en) 1994-08-29 2000-07-18 Imec Vzw Method for measuring the electrical potential in a semiconductor element
JP2853585B2 (ja) * 1994-11-18 1999-02-03 株式会社島津製作所 走査型プローブ顕微鏡
US5959458A (en) 1996-11-08 1999-09-28 Schlumberger Technologies, Inc. Method and apparatus for measuring electrical waveforms using atomic force microscopy
US5959447A (en) 1997-10-24 1999-09-28 Micron Force Instruments, Inc. Non-contact measurement of electrical waveforms on the surface of a sample using time domain gating

Also Published As

Publication number Publication date
US6377066B1 (en) 2002-04-23
EP1436636A1 (de) 2004-07-14
WO2001004653A1 (en) 2001-01-18
EP1436636A4 (de) 2005-04-27
WO2001004653A8 (en) 2001-03-29
EP1436636B1 (de) 2007-12-26
DE60037604D1 (de) 2008-02-07
WO2001004653A9 (en) 2002-05-02
AU6207900A (en) 2001-01-30
DE60037604T2 (de) 2008-12-11

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties