ATE381773T1 - Endpunktbestimmung in zeitmultiplex-ätzprozessen - Google Patents

Endpunktbestimmung in zeitmultiplex-ätzprozessen

Info

Publication number
ATE381773T1
ATE381773T1 AT04708207T AT04708207T ATE381773T1 AT E381773 T1 ATE381773 T1 AT E381773T1 AT 04708207 T AT04708207 T AT 04708207T AT 04708207 T AT04708207 T AT 04708207T AT E381773 T1 ATE381773 T1 AT E381773T1
Authority
AT
Austria
Prior art keywords
time division
division multiplexed
etching processes
time multiplex
endpoint determination
Prior art date
Application number
AT04708207T
Other languages
English (en)
Inventor
Russell Westerman
David Johnson
Original Assignee
Unaxis Usa Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Usa Inc filed Critical Unaxis Usa Inc
Application granted granted Critical
Publication of ATE381773T1 publication Critical patent/ATE381773T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32963—End-point detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
  • Television Systems (AREA)
  • Time-Division Multiplex Systems (AREA)
AT04708207T 2003-02-14 2004-02-04 Endpunktbestimmung in zeitmultiplex-ätzprozessen ATE381773T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44759403P 2003-02-14 2003-02-14
US10/770,839 US6982175B2 (en) 2003-02-14 2004-02-02 End point detection in time division multiplexed etch processes

Publications (1)

Publication Number Publication Date
ATE381773T1 true ATE381773T1 (de) 2008-01-15

Family

ID=32912269

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04708207T ATE381773T1 (de) 2003-02-14 2004-02-04 Endpunktbestimmung in zeitmultiplex-ätzprozessen

Country Status (7)

Country Link
US (1) US6982175B2 (de)
EP (1) EP1593141B1 (de)
JP (1) JP4724795B2 (de)
CN (1) CN1739185B (de)
AT (1) ATE381773T1 (de)
DE (1) DE602004010786T2 (de)
WO (1) WO2004075255A2 (de)

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Also Published As

Publication number Publication date
DE602004010786D1 (de) 2008-01-31
EP1593141B1 (de) 2007-12-19
US20040175913A1 (en) 2004-09-09
DE602004010786T2 (de) 2008-12-04
CN1739185B (zh) 2010-11-03
US6982175B2 (en) 2006-01-03
WO2004075255A2 (en) 2004-09-02
EP1593141A2 (de) 2005-11-09
JP2006518913A (ja) 2006-08-17
WO2004075255A3 (en) 2004-11-04
JP4724795B2 (ja) 2011-07-13
CN1739185A (zh) 2006-02-22

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