ATE376891T1 - Beschichtung einer polymerschicht unter verwendung von niederdruckgepulstem plasma in einer plasmakammer mit einem grossen volumen - Google Patents

Beschichtung einer polymerschicht unter verwendung von niederdruckgepulstem plasma in einer plasmakammer mit einem grossen volumen

Info

Publication number
ATE376891T1
ATE376891T1 AT05736036T AT05736036T ATE376891T1 AT E376891 T1 ATE376891 T1 AT E376891T1 AT 05736036 T AT05736036 T AT 05736036T AT 05736036 T AT05736036 T AT 05736036T AT E376891 T1 ATE376891 T1 AT E376891T1
Authority
AT
Austria
Prior art keywords
coating
low pressure
polymer layer
large volume
plasma
Prior art date
Application number
AT05736036T
Other languages
English (en)
Inventor
Stephen Richard Coulson
Ian Burnett
John Henry Sambell
Original Assignee
Secr Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32117905&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE376891(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Secr Defence filed Critical Secr Defence
Application granted granted Critical
Publication of ATE376891T1 publication Critical patent/ATE376891T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/34—Polymerisation in gaseous state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F114/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F114/18—Monomers containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/52—Polymerisation initiated by wave energy or particle radiation by electric discharge, e.g. voltolisation
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/16—Chemical modification with polymerisable compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2506/00—Halogenated polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2506/00—Halogenated polymers
    • B05D2506/10—Fluorinated polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Polymerisation Methods In General (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Paints Or Removers (AREA)
  • Wrappers (AREA)
  • Materials For Medical Uses (AREA)
AT05736036T 2004-03-18 2005-03-18 Beschichtung einer polymerschicht unter verwendung von niederdruckgepulstem plasma in einer plasmakammer mit einem grossen volumen ATE376891T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0406049.7A GB0406049D0 (en) 2004-03-18 2004-03-18 Surface coatings

Publications (1)

Publication Number Publication Date
ATE376891T1 true ATE376891T1 (de) 2007-11-15

Family

ID=32117905

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05736036T ATE376891T1 (de) 2004-03-18 2005-03-18 Beschichtung einer polymerschicht unter verwendung von niederdruckgepulstem plasma in einer plasmakammer mit einem grossen volumen

Country Status (15)

Country Link
US (2) US8389070B2 (de)
EP (1) EP1729894B1 (de)
JP (1) JP4931795B2 (de)
KR (1) KR101053043B1 (de)
CN (1) CN1946488B (de)
AT (1) ATE376891T1 (de)
AU (1) AU2005224155B2 (de)
CA (1) CA2559946C (de)
DE (1) DE602005003113T2 (de)
ES (1) ES2293568T3 (de)
GB (2) GB0406049D0 (de)
MX (1) MXPA06010611A (de)
NZ (1) NZ550498A (de)
PL (1) PL1729894T3 (de)
WO (1) WO2005089961A1 (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9712338D0 (en) 1997-06-14 1997-08-13 Secr Defence Surface coatings
US9050455B2 (en) 2004-10-21 2015-06-09 Medtronic, Inc. Transverse tripole neurostimulation methods, kits and systems
GB2434379A (en) * 2006-01-20 2007-07-25 P2I Ltd Coated fabrics
AU2007206781B2 (en) 2006-01-20 2010-12-09 P2I Ltd Novel products
GB2434368B (en) * 2006-01-20 2010-08-25 P2I Ltd Plasma coated laboratory consumables
GB2434369B (en) 2006-01-20 2010-08-25 P2I Ltd Plasma coated electrical or electronic devices
GB2438195A (en) * 2006-05-20 2007-11-21 P2I Ltd Coated ink jet nozzle plate
GB0621520D0 (en) * 2006-10-28 2006-12-06 P2I Ltd Novel products
GB2443322B (en) * 2006-10-28 2010-09-08 P2I Ltd Plasma coated microfabricated device or component thereof
DE102006060932A1 (de) * 2006-12-20 2008-07-03 Carl Freudenberg Kg Temperaturstabile plasmabehandelte Gebilde und Verfahren zu deren Herstellung
GB0713830D0 (en) 2007-07-17 2007-08-29 P2I Ltd Novel products method
GB0713821D0 (en) 2007-07-17 2007-08-29 P2I Ltd A plasma deposition apparatus
AU2008277499B2 (en) * 2007-07-17 2012-05-31 P2I Ltd. Method for liquid proofing an item by plasma graft polymerisation
GB0721202D0 (en) * 2007-10-30 2007-12-05 P2I Ltd Novel method
GB2454242A (en) * 2007-11-02 2009-05-06 P2I Ltd Plasma coating
FR2923494B1 (fr) * 2007-11-09 2010-01-15 Hutchinson Membranes imper-respirantes et leur procede de fabrication
GB0802687D0 (en) * 2008-02-14 2008-03-19 P2I Ltd Vapour delivery system
US20100167965A1 (en) * 2008-12-26 2010-07-01 Bp Corporation North America Inc. Amphiphobic Proppant
GB2475685A (en) 2009-11-25 2011-06-01 P2I Ltd Plasma polymerization for coating wool
GB201000538D0 (en) 2010-01-14 2010-03-03 P2I Ltd Liquid repellent surfaces
EP2457670B1 (de) * 2010-11-30 2017-06-21 Oticon A/S Verfahren und Vorrichtung zur plasmainduzierten Beschichtung bei niedrigem Druck
KR101294784B1 (ko) * 2011-01-11 2013-08-08 한국기계연구원 연속 섬유 및 ｆａｂｒｉｃ용 상온·상압 연속 플라즈마 처리 장치 및 이를 이용한 플라즈마 처리 방법
US8852693B2 (en) 2011-05-19 2014-10-07 Liquipel Ip Llc Coated electronic devices and associated methods
EP2532716A1 (de) 2011-06-10 2012-12-12 Eppendorf AG Substrat mit hydrophobe Gruppen abstoßenden Oberflächeneigenschaften und Verfahren zu dessen Herstellung
GB201112369D0 (en) 2011-07-19 2011-08-31 Surface Innovations Ltd Polymeric structure
GB201112516D0 (en) 2011-07-21 2011-08-31 P2I Ltd Surface coatings
GB201113610D0 (en) 2011-08-08 2011-09-21 Surface Innovations Ltd Product and method
GB2510213A (en) * 2012-08-13 2014-07-30 Europlasma Nv Forming a protective polymer coating on a component
CN102797166B (zh) * 2012-09-05 2014-01-22 上海华峰超纤材料股份有限公司 拒水拒油超细纤维合成革及其制备方法
GB201403558D0 (en) 2014-02-28 2014-04-16 P2I Ltd Coating
GB2535969A (en) * 2014-09-19 2016-09-07 P2I Ltd Solid Phase Synthesis and Products Obtained thereby
JP2017538459A (ja) * 2014-10-16 2017-12-28 ユーロプラズマ エンヴェー 履き心地が改善された履物製品の製造方法及びこの方法により製造された履物製品
PL3308613T3 (pl) 2015-06-09 2020-11-16 P2I Ltd Sposób tworzenia powłoki na urządzeniu elektronicznym lub elektrycznym
KR20180018675A (ko) 2015-06-09 2018-02-21 피2아이 리미티드 코팅
AU2016275277A1 (en) 2015-06-09 2018-02-01 P2I Ltd Coating
US11419220B2 (en) 2015-09-24 2022-08-16 Europlasma Nv Polymer coatings and methods for depositing polymer coatings
CN105648770B (zh) * 2016-03-25 2018-04-13 广州拜费尔空气净化材料有限公司 一种超疏水表面的制备方法
CN105949836B (zh) * 2016-05-13 2017-06-16 无锡荣坚五金工具有限公司 一种栅控等离子体引发气相聚合表面涂层的装置及方法
US11154903B2 (en) 2016-05-13 2021-10-26 Jiangsu Favored Nanotechnology Co., Ltd. Apparatus and method for surface coating by means of grid control and plasma-initiated gas-phase polymerization
CN106563619A (zh) * 2016-10-14 2017-04-19 上海稷以科技有限公司 在物体表面形成保护层的方法及表面形成有保护层的产品
CN107058981B (zh) * 2017-01-23 2018-09-21 江苏菲沃泰纳米科技有限公司 一种低粘附、耐蚀涂层的制备方法
CN106958012A (zh) * 2017-05-21 2017-07-18 无锡荣坚五金工具有限公司 一种基材运动式等离子体放电制备纳米涂层的设备及方法
CN109675770A (zh) * 2017-10-18 2019-04-26 上海稷以科技有限公司 在物体表面形成保护层的方法及表面形成有保护层的产品
CN109675776A (zh) * 2017-10-18 2019-04-26 上海稷以科技有限公司 在物体表面形成保护层的方法及表面形成有保护层的产品
CN109679490A (zh) * 2017-10-18 2019-04-26 上海稷以科技有限公司 在物体表面形成保护层的方法及表面形成有保护层的产品
CN107740262A (zh) * 2017-11-09 2018-02-27 青岛大学 一种疏水织物及其制备方法
WO2019106334A1 (en) 2017-11-28 2019-06-06 P2I Ltd Electrical or electronic device with a screen having an air vent
DE102018120269A1 (de) 2018-08-21 2020-02-27 Relyon Plasma Gmbh Anordnung und Verfahren zur Behandlung von Objekten
CN109267040B (zh) * 2018-10-24 2020-03-31 江苏菲沃泰纳米科技有限公司 一种丙烯酰胺纳米涂层及其制备方法
FI129579B (en) * 2019-06-28 2022-05-13 Beneq Oy Precursor source arrangement and atomic layer growth equipment

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3102103A (en) 1957-08-09 1963-08-27 Minnesota Mining & Mfg Perfluoroalkyl acrylate polymers and process of producing a latex thereof
GB1102903A (en) 1964-02-24 1968-02-14 Daikin Ind Ltd Fluoro alkyl-containing compounds and water- and oil-repellent compositions containing them
GB1106071A (en) 1964-04-11 1968-03-13 Wilkinson Sword Ltd Improvements in or relating to the treatment of cutting edges
GB1209512A (en) 1968-08-26 1970-10-21 Commissariat Energie Atomique Method and apparatus for analysing an amplitude spectrum
JPS5250739A (en) 1975-10-20 1977-04-23 Nasa Antireflection coating for plastic lens
DE2900200A1 (de) 1979-01-04 1980-07-17 Bosch Gmbh Robert Messonde mit schutzschicht und verfahren zur herstellung einer schutzschicht auf einer messonde
US4382985A (en) 1980-10-11 1983-05-10 Daikin Kogyo Co., Ltd. Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
JPS57119906A (en) 1981-01-19 1982-07-26 Daikin Ind Ltd Formation of smooth film on substrate
GB2105729B (en) 1981-09-15 1985-06-12 Itt Ind Ltd Surface processing of a substrate material
JPS59128281A (ja) 1982-12-29 1984-07-24 信越化学工業株式会社 炭化けい素被覆物の製造方法
JPS60119784A (ja) 1983-12-01 1985-06-27 Kanegafuchi Chem Ind Co Ltd 絶縁金属基板の製法およびそれに用いる装置
SU1158634A1 (ru) 1983-02-02 1985-05-30 Ивановский научно-исследовательский экспериментально-конструкторский машиностроительный институт Способ водо- и маслоотталкивающей отделки текстильных материалов
JPS59222340A (ja) 1983-05-31 1984-12-14 大日本印刷株式会社 積層体
DE3326376A1 (de) 1983-07-22 1985-01-31 Siemens AG, 1000 Berlin und 8000 München Verfahren zum erzeugen von glimmpolymerisat-schichten
US4824753A (en) 1986-04-30 1989-04-25 Minolta Camera Kabushiki Kaisha Carrier coated with plasma-polymerized film and apparatus for preparing same
EP0264913B1 (de) 1986-10-20 1994-06-22 Hitachi, Ltd. Plasmabearbeitungsgerät
EP0393271A1 (de) 1987-08-08 1990-10-24 The Standard Oil Company Dünnschichtüberzüge aus Fluorpolymer und Verfahren zu ihrer Herstellung durch Plasmapolymerisation
US4827870A (en) * 1987-10-05 1989-05-09 Honeywell Inc. Apparatus for applying multilayer optical interference coating on complex curved substrates
JPH0657911B2 (ja) 1988-08-24 1994-08-03 和歌山県 繊維の難燃加工法
US5246782A (en) 1990-12-10 1993-09-21 The Dow Chemical Company Laminates of polymers having perfluorocyclobutane rings and polymers containing perfluorocyclobutane rings
US5035917A (en) 1989-06-22 1991-07-30 Siemens Aktiengesellschaft Method of preparing layers of vinylidene fluoride polymers and vinylidene fluoride/trifluoroethylene copolymers on a substrate
JP2990608B2 (ja) 1989-12-13 1999-12-13 株式会社ブリヂストン 表面処理方法
JP2897055B2 (ja) 1990-03-14 1999-05-31 株式会社ブリヂストン ゴム系複合材料の製造方法
US5244730A (en) 1991-04-30 1993-09-14 International Business Machines Corporation Plasma deposition of fluorocarbon
US5314541A (en) * 1991-05-28 1994-05-24 Tokyo Electron Limited Reduced pressure processing system and reduced pressure processing method
US5773098A (en) 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body
DE59209786D1 (de) 1991-09-20 2000-02-03 Balzers Hochvakuum Verfahren zur Schutzbeschichtung von Substraten sowie Beschichtungsanlage
US5328576A (en) 1992-04-06 1994-07-12 Plasma Plus Gas plasma treatment for water and oil proofing of fabrics and paper
IL110454A (en) 1993-08-07 1997-07-13 Akzo Nobel Nv Process for plasma treatment of antiballistically effective materials
DE4445427C2 (de) 1994-12-20 1997-04-30 Schott Glaswerke Plasma-CVD-Verfahren zur Herstellung einer Gradientenschicht
US5662773A (en) 1995-01-19 1997-09-02 Eastman Chemical Company Process for preparation of cellulose acetate filters for use in paper making
US5750823A (en) * 1995-07-10 1998-05-12 R.F. Environmental Systems, Inc. Process and device for destruction of halohydrocarbons
GB9519824D0 (en) 1995-09-29 1995-11-29 Secr Defence Fibre reactive polymers
US6663713B1 (en) * 1996-01-08 2003-12-16 Applied Materials Inc. Method and apparatus for forming a thin polymer layer on an integrated circuit structure
US5876753A (en) 1996-04-16 1999-03-02 Board Of Regents, The University Of Texas System Molecular tailoring of surfaces
US6329024B1 (en) 1996-04-16 2001-12-11 Board Of Regents, The University Of Texas System Method for depositing a coating comprising pulsed plasma polymerization of a macrocycle
US5888591A (en) 1996-05-06 1999-03-30 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
CN1190545C (zh) * 1997-06-14 2005-02-23 英国国防部 表面涂层
US6594158B2 (en) 1997-06-23 2003-07-15 University Of Central Florida AC/DC converter with power factor correction (PFC)
AU744202B2 (en) 1997-08-08 2002-02-21 Board Of Regents Non-fouling, wettable coated devices
GB9812457D0 (en) * 1998-06-10 1998-08-05 Secr Defence Surface coatings
GB9816077D0 (en) * 1998-07-24 1998-09-23 Secr Defence Surface coatings
DE19835883A1 (de) * 1998-08-07 2000-02-17 Siemens Ag Herstellungsverfahren für einen elektrischen Isolator
ES2220446T3 (es) 1999-03-18 2004-12-16 Akzo Nobel Coatings International B.V. Composicion de revestimiento para sustratos metalicos.
CN1261233C (zh) 2000-10-04 2006-06-28 陶氏康宁爱尔兰有限公司 形成涂层的方法和设备
EP1390421A1 (de) 2001-05-23 2004-02-25 NKT Research & Innovation A/S Plasmapolymerisationsverfahren von substituierten benzolen, dadurch hergestelltes polymermaterial und sein verwendung
AU2003226956A1 (en) 2002-04-25 2003-11-10 Nkt Research And Innovation A/S Method and apparatus for plasma deposition of chemically reactive groups on substrates chemically reactive substrates obtainable by the method and use thereof
US7186385B2 (en) * 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
WO2004088710A2 (en) 2003-04-02 2004-10-14 Nkt Research & Innovation A/S Method and apparatus for gas plasma treatment with controlled extent of gas plasma, and use thereof

Also Published As

Publication number Publication date
US8389070B2 (en) 2013-03-05
DE602005003113D1 (de) 2007-12-13
EP1729894A1 (de) 2006-12-13
CN1946488B (zh) 2010-12-08
NZ550498A (en) 2010-07-30
GB2427407A (en) 2006-12-27
GB0406049D0 (en) 2004-04-21
WO2005089961A9 (en) 2006-10-05
US20130136871A1 (en) 2013-05-30
CA2559946C (en) 2011-11-15
US20080260965A1 (en) 2008-10-23
ES2293568T3 (es) 2008-03-16
GB2427407B (en) 2008-05-21
CN1946488A (zh) 2007-04-11
GB0618471D0 (en) 2006-11-08
JP2007529308A (ja) 2007-10-25
AU2005224155B2 (en) 2008-04-03
KR20070041673A (ko) 2007-04-19
DE602005003113T2 (de) 2008-05-29
PL1729894T3 (pl) 2008-03-31
KR101053043B1 (ko) 2011-08-01
AU2005224155A1 (en) 2005-09-29
CA2559946A1 (en) 2005-09-29
JP4931795B2 (ja) 2012-05-16
MXPA06010611A (es) 2006-12-19
WO2005089961A1 (en) 2005-09-29
EP1729894B1 (de) 2007-10-31

Similar Documents

Publication Publication Date Title
ATE376891T1 (de) Beschichtung einer polymerschicht unter verwendung von niederdruckgepulstem plasma in einer plasmakammer mit einem grossen volumen
DK2727658T3 (en) Method of coating a surface with a water and oil repellent polymer layer
DE60303011D1 (de) Verfahren zur herstellung von stark haftenden beschichtungen
WO2007061579A3 (en) Chamber components with polymer coatings and methods of manufacture
JP2008240156A (ja) プラズマｃｖｄ法
TW201311365A (zh) 表面塗層
WO2007047475A3 (en) Methods of forming multilayer articles by surface treatment applications
DE602007004404D1 (de) Verfahren und Vorrichtung zur Regulierung der Stromversorgung eines Magnetrons und Anlage zur Behandlung von thermoplastischen Behältern, bei dem diese zum Einsatz kommen
KR102183755B1 (ko) 저압 플라즈마 공정용 연속 전력 모드의 개선된 플라즈마 생성 방법
GB2437476A (en) A Method for producing a grafted polymer coating and substrates formed in accordance with the method
WO2004001809A8 (en) Method for energy-assisted atomic layer deposition and removal
DE60322347D1 (de) Chemische dampfphasenabscheidung auf einem substrat mittels eines korona-plasmas
TW200632057A (en) Process for the production of strongly adherent coatings
ATE507579T1 (de) Verfahren zur atomschichtabscheidung
EP1447459A3 (de) Verfahren und Vorrichtung zur Herstellung von dünnen Beschichtungen
EP0896035A3 (de) Gegen Verschmutzung resistente, benetzbare Beschichtungen
WO2006092614A3 (en) Method and apparatus for producing a coating on a substrate
WO2005021832A3 (en) Method and appartus for depositing materials with tunable properties
JP2023533325A (ja) 透明耐摩耗性フィルム層、プラスチックの表面改質方法及び製品
ATE403763T1 (de) Verfahren zur abscheidung von silizium
WO2005049228A3 (en) Glow discharge-generated chemical vapor deposition
US20150065001A1 (en) Surface coatings
SG10201809520SA (en) Silacyclic compounds and methods for depositing silicon-containing films using same
TW200513545A (en) Method and device for depositing single component or multicomponent layers and series of layers using non-continuous injection of liquid and dissolved starting material by a multi-channel injection unit
BE1011927A3 (nl) Plasmamethode voor de afzetting van deklagen.

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties