JP2007529308A - 大容積のプラズマチャンバにおいて低電力パルスプラズマを使用するポリマー層のコーティング - Google Patents
大容積のプラズマチャンバにおいて低電力パルスプラズマを使用するポリマー層のコーティング Download PDFInfo
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- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
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Abstract
Description
CH2=CH−R5 (II)
式中、R5は式(I)に関して前記定義のとおりである。
CH2=CR7C(O)O(CH2)nR5 (III)
式中、nおよびR5は式(I)に関連して定義されたとおりであり、R7は水素、C1−10アルキル、またはC1−10ハロアルキルである。特に、R7は水素またはC1−6アルキル、例えばメチルである。式(III)の化合物の具体例は、式(IV)の化合物であって、
(a)水およびイソプロピルアルコールの混合物を使用した耐水性汚染性、
(b)選択された、異なる表面張力の炭化水素液体による濡れに対する織物の耐性。
Claims (21)
- ポリマー物質を基体上に堆積させる方法であって、前記方法が、モノマー物質を気体状態においてプラズマ堆積チャンバ中に導入することと、前記チャンバ内でグロー放電に点火することと、パルス磁場として、0.001〜500w/m3の電力で、ポリマー層を基体の表面上に形成させるために十分な時間、電圧を加えることを含む、方法。
- チャンバ内のプラズマ領域が0.5m3以上の体積を有する、請求項1に記載の方法。
- 電力が0.001〜100w/m3で加えられる、請求項1または2に記載の方法。
- 電力が0.04〜100w/m3で加えられる、請求項3に記載の方法。
- モノマー物質が、任意にハロゲンにより置換されていてもよい炭素原子の鎖を含む不飽和有機化合物である、請求項1から4のいずれか一項に記載の方法。
- モノマー物質が式(I)の化合物であって、
請求項5に記載の方法。 - 式(I)の化合物が式(III)のアクリレートであって、
CH2=CR7C(O)O(CH2)nR5 (III)
式中、nおよびR5が請求項6において定義されたとおりであり、R7が水素またはC1−6アルキルである、請求項6に記載の方法。 - 式(III)のアクリレートが1H,1H,2H,2H−ヘプタデカフルオロデシルアクリレートである、請求項7に記載の方法。
- 気体状態のモノマー化合物がキャリアガスとの組み合わせにおいてチャンバに供給される、請求項1から8のいずれか一項に記載の方法。
- キャリアガスがヘリウムである、請求項9に記載の方法。
- 気体状物質が、1分あたり少なくとも1標準立方センチメートル(sccm)の速度でチャンバに供給される、請求項1から10のいずれか一項に記載の方法。
- チャンバ中の式(I)の化合物の蒸気が0.01〜300ミリバールの圧力に維持される、請求項1から11のいずれか一項に記載の方法。
- 電力が配列内でパルス化され、ここにおいて電力が20マイクロ秒の間オンになり、1000マイクロ秒乃至20000マイクロ秒の間オフになる、請求項1から12のいずれか一項に記載の方法。
- ガスが温度勾配に沿ってチャンバに供給される、請求項1から13のいずれか一項に記載の方法。
- 堆積プロセスの間、チャンバが加熱される、請求項1から14のいずれか一項に記載の方法。
- ポリマー物質を基体上に堆積させる装置であって、前記装置が、プラズマ堆積チャンバと、チャンバ内のプラズマを点火するように配列された少なくとも2つの電極と、モノマーガスをチャンバ中に供給するように配列されたポンプシステムと、チャンバ内のプラズマゾーン内で0.001〜500w/m3の電力でプラズマを生成させるように電極に供給された電力をパルス化するようにプログラムされた電力制御手段とを含む、装置。
- チャンバの加熱手段をさらに含む、請求項16に記載の装置。
- チャンバに連結されたモノマーの容器をさらに含む、請求項16または17に記載の装置。
- 加熱手段が、前記容器と前記チャンバ間に増大する温度勾配を形成するように配置される、請求項18に記載の装置。
- 実質的に図面に関連して前述の通りである、請求項16に記載の装置。
- 実質的に実施例に関連して前述の通りである、ポリマー物質を基体上に堆積させる方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0406049.7A GB0406049D0 (en) | 2004-03-18 | 2004-03-18 | Surface coatings |
GB0406049.7 | 2004-03-18 | ||
PCT/GB2005/001017 WO2005089961A1 (en) | 2004-03-18 | 2005-03-18 | Coating of a polymer layer using low power pulsed plasma in a plasma chamber of a large volume |
Publications (2)
Publication Number | Publication Date |
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JP2007529308A true JP2007529308A (ja) | 2007-10-25 |
JP4931795B2 JP4931795B2 (ja) | 2012-05-16 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007503409A Expired - Fee Related JP4931795B2 (ja) | 2004-03-18 | 2005-03-18 | 大容積のプラズマチャンバにおいて低電力パルスプラズマを使用するポリマー層のコーティング |
Country Status (15)
Country | Link |
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US (2) | US8389070B2 (ja) |
EP (1) | EP1729894B1 (ja) |
JP (1) | JP4931795B2 (ja) |
KR (1) | KR101053043B1 (ja) |
CN (1) | CN1946488B (ja) |
AT (1) | ATE376891T1 (ja) |
AU (1) | AU2005224155B2 (ja) |
CA (1) | CA2559946C (ja) |
DE (1) | DE602005003113T2 (ja) |
ES (1) | ES2293568T3 (ja) |
GB (2) | GB0406049D0 (ja) |
MX (1) | MXPA06010611A (ja) |
NZ (1) | NZ550498A (ja) |
PL (1) | PL1729894T3 (ja) |
WO (1) | WO2005089961A1 (ja) |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010508162A (ja) * | 2006-10-28 | 2010-03-18 | ピーツーアイ リミティド | 新規製品 |
JP2010514111A (ja) * | 2006-12-20 | 2010-04-30 | カール・フロイデンベルク・カーゲー | プラズマ処理された熱安定性の構造体及びその製造 |
US8852693B2 (en) | 2011-05-19 | 2014-10-07 | Liquipel Ip Llc | Coated electronic devices and associated methods |
CN105648770A (zh) * | 2016-03-25 | 2016-06-08 | 广州拜费尔空气净化材料有限公司 | 一种超疏水表面的制备方法 |
Also Published As
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GB2427407A (en) | 2006-12-27 |
GB0406049D0 (en) | 2004-04-21 |
MXPA06010611A (es) | 2006-12-19 |
KR20070041673A (ko) | 2007-04-19 |
EP1729894A1 (en) | 2006-12-13 |
WO2005089961A1 (en) | 2005-09-29 |
NZ550498A (en) | 2010-07-30 |
AU2005224155A1 (en) | 2005-09-29 |
DE602005003113D1 (de) | 2007-12-13 |
JP4931795B2 (ja) | 2012-05-16 |
US20080260965A1 (en) | 2008-10-23 |
ES2293568T3 (es) | 2008-03-16 |
GB2427407B (en) | 2008-05-21 |
CN1946488B (zh) | 2010-12-08 |
DE602005003113T2 (de) | 2008-05-29 |
CA2559946C (en) | 2011-11-15 |
PL1729894T3 (pl) | 2008-03-31 |
US20130136871A1 (en) | 2013-05-30 |
US8389070B2 (en) | 2013-03-05 |
CA2559946A1 (en) | 2005-09-29 |
GB0618471D0 (en) | 2006-11-08 |
WO2005089961A9 (en) | 2006-10-05 |
CN1946488A (zh) | 2007-04-11 |
EP1729894B1 (en) | 2007-10-31 |
ATE376891T1 (de) | 2007-11-15 |
KR101053043B1 (ko) | 2011-08-01 |
AU2005224155B2 (en) | 2008-04-03 |
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