ATE364897T1 - Spannungsungleichförmigkeits- kompensationsverfahren für einen hochfrequenz- plasmareaktor zur behandlung rechteckiger grossflächiger substrate - Google Patents

Spannungsungleichförmigkeits- kompensationsverfahren für einen hochfrequenz- plasmareaktor zur behandlung rechteckiger grossflächiger substrate

Info

Publication number
ATE364897T1
ATE364897T1 AT04761903T AT04761903T ATE364897T1 AT E364897 T1 ATE364897 T1 AT E364897T1 AT 04761903 T AT04761903 T AT 04761903T AT 04761903 T AT04761903 T AT 04761903T AT E364897 T1 ATE364897 T1 AT E364897T1
Authority
AT
Austria
Prior art keywords
treatment
compensation method
plasma reactor
frequency plasma
area substrates
Prior art date
Application number
AT04761903T
Other languages
English (en)
Inventor
Jacques Schmitt
Laurent Sansonnens
Mustapha Elyaakoubi
Michael Irzyk
Original Assignee
Oc Oerlikon Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oc Oerlikon Balzers Ag filed Critical Oc Oerlikon Balzers Ag
Application granted granted Critical
Publication of ATE364897T1 publication Critical patent/ATE364897T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
AT04761903T 2003-09-10 2004-09-08 Spannungsungleichförmigkeits- kompensationsverfahren für einen hochfrequenz- plasmareaktor zur behandlung rechteckiger grossflächiger substrate ATE364897T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50177203P 2003-09-10 2003-09-10
US54395504P 2004-02-12 2004-02-12

Publications (1)

Publication Number Publication Date
ATE364897T1 true ATE364897T1 (de) 2007-07-15

Family

ID=34278752

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04761903T ATE364897T1 (de) 2003-09-10 2004-09-08 Spannungsungleichförmigkeits- kompensationsverfahren für einen hochfrequenz- plasmareaktor zur behandlung rechteckiger grossflächiger substrate

Country Status (10)

Country Link
US (3) US7487740B2 (de)
EP (1) EP1665323B1 (de)
JP (1) JP4710020B2 (de)
KR (1) KR101202151B1 (de)
CN (1) CN1879189B (de)
AT (1) ATE364897T1 (de)
DE (1) DE602004007017T2 (de)
ES (1) ES2287755T3 (de)
TW (1) TWI346145B (de)
WO (1) WO2005024891A2 (de)

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Also Published As

Publication number Publication date
US7687117B2 (en) 2010-03-30
US20050066898A1 (en) 2005-03-31
JP4710020B2 (ja) 2011-06-29
US20090155489A1 (en) 2009-06-18
KR101202151B1 (ko) 2012-11-15
US7487740B2 (en) 2009-02-10
US8056504B2 (en) 2011-11-15
EP1665323A2 (de) 2006-06-07
DE602004007017T2 (de) 2008-02-07
ES2287755T3 (es) 2007-12-16
WO2005024891A2 (en) 2005-03-17
DE602004007017D1 (de) 2007-07-26
CN1879189A (zh) 2006-12-13
EP1665323B1 (de) 2007-06-13
US20100139863A1 (en) 2010-06-10
TW200523388A (en) 2005-07-16
CN1879189B (zh) 2011-01-19
JP2007505450A (ja) 2007-03-08
KR20060080205A (ko) 2006-07-07
TWI346145B (en) 2011-08-01
WO2005024891A3 (en) 2005-06-09

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