ATE35323T1 - Photolithographie. - Google Patents
Photolithographie.Info
- Publication number
- ATE35323T1 ATE35323T1 AT85304189T AT85304189T ATE35323T1 AT E35323 T1 ATE35323 T1 AT E35323T1 AT 85304189 T AT85304189 T AT 85304189T AT 85304189 T AT85304189 T AT 85304189T AT E35323 T1 ATE35323 T1 AT E35323T1
- Authority
- AT
- Austria
- Prior art keywords
- optical radiation
- substrate
- photolithography
- absorptive
- selecting
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/76—Photosensitive materials characterised by the base or auxiliary layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/76—Photosensitive materials characterised by the base or auxiliary layers
- G03C1/825—Photosensitive materials characterised by the base or auxiliary layers characterised by antireflection means or visible-light filtering means, e.g. antihalation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/001—Phase modulating patterns, e.g. refractive index patterns
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
- G03F7/2006—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light using coherent light; using polarised light
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
- G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Weting (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Developing Agents For Electrophotography (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB848414954A GB8414954D0 (en) | 1984-06-12 | 1984-06-12 | Photolithography |
EP85304189A EP0168179B1 (de) | 1984-06-12 | 1985-06-12 | Photolithographie |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE35323T1 true ATE35323T1 (de) | 1988-07-15 |
Family
ID=10562306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT85304189T ATE35323T1 (de) | 1984-06-12 | 1985-06-12 | Photolithographie. |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0168179B1 (de) |
JP (1) | JPS61502426A (de) |
AT (1) | ATE35323T1 (de) |
DE (1) | DE3563481D1 (de) |
GB (1) | GB8414954D0 (de) |
WO (1) | WO1986000151A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3750709T2 (de) * | 1986-06-03 | 1995-03-16 | Cubital Ltd | Gerät zur Entwicklung dreidimensionaler Modelle. |
US5287435A (en) * | 1987-06-02 | 1994-02-15 | Cubital Ltd. | Three dimensional modeling |
IL109511A (en) * | 1987-12-23 | 1996-10-16 | Cubital Ltd | Three-dimensional modelling apparatus |
US4973318A (en) * | 1988-02-10 | 1990-11-27 | D.C.P. Af 1988 A/S | Disposable syringe |
GB2234605A (en) * | 1989-07-31 | 1991-02-06 | British Telecomm | A holographic element |
JPH0424601A (ja) * | 1990-05-18 | 1992-01-28 | Sharp Corp | 回折素子の製造方法 |
GB9013854D0 (en) * | 1990-06-21 | 1990-08-15 | British Telecomm | A holographic element |
TW466472B (en) * | 1997-02-24 | 2001-12-01 | Seiko Epson Corp | Original board for manufacturing optical disk stampers, optical disk stamper manufacturing method, and optical disk |
EP1364367A2 (de) * | 2001-02-27 | 2003-11-26 | TDK Corporation | Verfahren zur herstellung einer photoresisten matrize für ein optisches informationsmedium, und verfahren zur herstellung einer druckplatte für ein optisches informationsmedium |
CN102020787A (zh) * | 2010-11-17 | 2011-04-20 | 李玲 | 一种光吸收剂及其制成的滤光玻璃及其制备滤光玻璃的方法 |
CN103425302A (zh) * | 2012-05-16 | 2013-12-04 | 宸鸿科技(厦门)有限公司 | 触控面板及其制作方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2391127A (en) * | 1942-02-17 | 1945-12-18 | Eastman Kodak Co | Antihalation coatings |
US4367911A (en) * | 1980-07-14 | 1983-01-11 | Hughes Aircraft Company | Method and assembly for holographic exposure |
US4402571A (en) * | 1981-02-17 | 1983-09-06 | Polaroid Corporation | Method for producing a surface relief pattern |
-
1984
- 1984-06-12 GB GB848414954A patent/GB8414954D0/en active Pending
-
1985
- 1985-06-12 JP JP60502746A patent/JPS61502426A/ja active Pending
- 1985-06-12 WO PCT/GB1985/000261 patent/WO1986000151A1/en unknown
- 1985-06-12 AT AT85304189T patent/ATE35323T1/de not_active IP Right Cessation
- 1985-06-12 EP EP85304189A patent/EP0168179B1/de not_active Expired
- 1985-06-12 DE DE8585304189T patent/DE3563481D1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0168179B1 (de) | 1988-06-22 |
JPS61502426A (ja) | 1986-10-23 |
DE3563481D1 (en) | 1988-07-28 |
WO1986000151A1 (en) | 1986-01-03 |
GB8414954D0 (en) | 1984-07-18 |
EP0168179A1 (de) | 1986-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |