ATE34781T1 - Anlage zum regenerieren einer ammoniakalischen aetzloesung. - Google Patents

Anlage zum regenerieren einer ammoniakalischen aetzloesung.

Info

Publication number
ATE34781T1
ATE34781T1 AT83111152T AT83111152T ATE34781T1 AT E34781 T1 ATE34781 T1 AT E34781T1 AT 83111152 T AT83111152 T AT 83111152T AT 83111152 T AT83111152 T AT 83111152T AT E34781 T1 ATE34781 T1 AT E34781T1
Authority
AT
Austria
Prior art keywords
oxygen
etching solution
line
etching
chamber
Prior art date
Application number
AT83111152T
Other languages
English (en)
Inventor
Wolfgang Faul
Leander Fuerst
Walter Holzer
Bertel Prof Dr Kastening
Original Assignee
Kernforschungsanlage Juelich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich filed Critical Kernforschungsanlage Juelich
Application granted granted Critical
Publication of ATE34781T1 publication Critical patent/ATE34781T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
AT83111152T 1983-04-13 1983-11-08 Anlage zum regenerieren einer ammoniakalischen aetzloesung. ATE34781T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3313293 1983-04-13
EP83111152A EP0122963B1 (de) 1983-04-13 1983-11-08 Anlage zum Regenerieren einer ammoniakalischen Ätzlösung

Publications (1)

Publication Number Publication Date
ATE34781T1 true ATE34781T1 (de) 1988-06-15

Family

ID=6196226

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83111152T ATE34781T1 (de) 1983-04-13 1983-11-08 Anlage zum regenerieren einer ammoniakalischen aetzloesung.

Country Status (4)

Country Link
EP (1) EP0122963B1 (de)
JP (1) JPS6013083A (de)
AT (1) ATE34781T1 (de)
DE (1) DE3376853D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449164A1 (fr) * 1979-02-14 1980-09-12 Sogreah Bloc artificiel pour structures maritimes et fluviales
DE3345050A1 (de) * 1983-12-13 1985-06-20 Walter 7758 Meersburg Holzer Verfahren zum umweltfreundlichen aetzen von leiterplatten und vorrichtung zur ausuebung des arbeitsverfahrens
EP0393270A1 (de) * 1989-04-21 1990-10-24 Ming-Hsing Lee Ätzverfahren für Kupfer mit ammoniakalischen Ätzlösungen und Verfahren zur Auffrischung der verbrauchten Lösung
US5085730A (en) * 1990-11-16 1992-02-04 Macdermid, Incorporated Process for regenerating ammoniacal chloride etchants
US5248398A (en) * 1990-11-16 1993-09-28 Macdermid, Incorporated Process for direct electrolytic regeneration of chloride-based ammoniacal copper etchant bath
JP5711856B2 (ja) * 2011-10-08 2015-05-07 ヘルクレ、クリストフHERKLE, Christoph 銅の電解エッチングを行うエッチング装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2008766B2 (de) * 1970-02-23 1971-07-29 Licentia Patent Verwaltungs GmbH, 6000 Frankfurt Verfahren zum regenerieren einer kupferhaltigen aetzloesung insbesondere fuer die herstellung von gedruckten schaltungen
US3705061A (en) * 1971-03-19 1972-12-05 Southern California Chem Co In Continuous redox process for dissolving copper
DE2216269A1 (de) * 1972-04-05 1973-10-18 Hoellmueller Maschbau H Verfahren zum aetzen von kupfer und kupferlegierungen
US3785950A (en) * 1972-05-19 1974-01-15 E Newton Regeneration of spent etchant
DE2641905C2 (de) * 1976-09-17 1986-03-20 Geb. Bakulina Galina Aleksandrovna Batova Verfahren zur Regenerierung verbrauchter Ätzlösungen
DE3031567A1 (de) * 1980-08-21 1982-04-29 Elochem Ätztechnik GmbH, 7758 Meersburg Verfahren zum regenerieren einer ammoniakalischen aetzloesung

Also Published As

Publication number Publication date
DE3376853D1 (en) 1988-07-07
EP0122963B1 (de) 1988-06-01
EP0122963A1 (de) 1984-10-31
JPS6013083A (ja) 1985-01-23
JPH0429745B2 (de) 1992-05-19

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