ATE317128T1 - Vertikal ausgeglichener prüfkopfmanipulator - Google Patents

Vertikal ausgeglichener prüfkopfmanipulator

Info

Publication number
ATE317128T1
ATE317128T1 AT01914580T AT01914580T ATE317128T1 AT E317128 T1 ATE317128 T1 AT E317128T1 AT 01914580 T AT01914580 T AT 01914580T AT 01914580 T AT01914580 T AT 01914580T AT E317128 T1 ATE317128 T1 AT E317128T1
Authority
AT
Austria
Prior art keywords
test head
vertical support
main arm
vernier movement
head manipulator
Prior art date
Application number
AT01914580T
Other languages
English (en)
Inventor
Alyn R Holt
Brian R Moore
Henri M Akouka
Original Assignee
Intest Ip Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Ip Corp filed Critical Intest Ip Corp
Application granted granted Critical
Publication of ATE317128T1 publication Critical patent/ATE317128T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56016—Apparatus features
AT01914580T 2000-03-01 2001-03-01 Vertikal ausgeglichener prüfkopfmanipulator ATE317128T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18619600P 2000-03-01 2000-03-01

Publications (1)

Publication Number Publication Date
ATE317128T1 true ATE317128T1 (de) 2006-02-15

Family

ID=22684009

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01914580T ATE317128T1 (de) 2000-03-01 2001-03-01 Vertikal ausgeglichener prüfkopfmanipulator

Country Status (11)

Country Link
US (1) US7554321B2 (de)
EP (2) EP1259829B1 (de)
JP (1) JP2003525433A (de)
KR (1) KR20020082862A (de)
CN (1) CN100495040C (de)
AT (1) ATE317128T1 (de)
AU (1) AU2001239949A1 (de)
DE (2) DE60144498D1 (de)
MY (2) MY144519A (de)
TW (1) TWI222911B (de)
WO (1) WO2001064389A2 (de)

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DE60220729T2 (de) * 2002-10-02 2008-02-14 Intest Corp. Testkopfpositionierungsvorrichtung
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
CN101685136B (zh) * 2003-08-06 2013-06-05 英特斯特公司 测试头定位系统
CN100429757C (zh) * 2004-03-25 2008-10-29 东京毅力科创株式会社 重物转动装置
JP4793809B2 (ja) * 2004-09-02 2011-10-12 東京エレクトロン株式会社 重量物の旋回機構
US8607935B2 (en) 2005-12-20 2013-12-17 Intuitive Surgical Operations, Inc. Guide systems for laminated spring assemblies
WO2008085463A1 (en) * 2006-12-29 2008-07-17 In Test Corporation Test head positioning system and method
TWI439709B (zh) * 2006-12-29 2014-06-01 Intest Corp 用於使負載沿平移軸線平移之操縱器與負載定位系統
WO2008103328A1 (en) * 2007-02-23 2008-08-28 Intest Corporation Test head manipulator
US7750657B2 (en) * 2007-03-15 2010-07-06 Applied Materials Inc. Polishing head testing with movable pedestal
JP5221118B2 (ja) * 2007-12-14 2013-06-26 東京エレクトロン株式会社 検査装置
CN101846589B (zh) * 2009-03-24 2013-06-05 京元电子股份有限公司 翻转测试模块及其测试系统
US8981807B2 (en) * 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
SG10201605656TA (en) 2011-07-12 2016-08-30 Intest Corp Method and apparatus for docking a test head with a peripheral
US8935952B2 (en) * 2012-06-27 2015-01-20 International Business Machines Corporation Dynamic rack cabinet stability testing
CN102735387B (zh) * 2012-07-16 2014-08-06 台州市计量技术研究院 静态扭矩精密测试装置及利用上述装置测试扭矩的方法
CN103629913B (zh) * 2012-08-16 2015-04-08 上海华虹宏力半导体制造有限公司 公转式旋转干燥机垂直重心调节装置
JP5953215B2 (ja) * 2012-12-07 2016-07-20 三鷹光器株式会社 医療用バランシングスタンドの自動バランス調整構造
US10239645B2 (en) 2013-02-13 2019-03-26 Lantech.Com, Llc Packaging material profiling for containment force-based wrapping
US10227152B2 (en) 2014-01-14 2019-03-12 Lantech.Com, Llc Dynamic adjustment of wrap force parameter responsive to monitored wrap force and/or for film break reduction
US10435191B2 (en) 2014-10-07 2019-10-08 Lantech.Com, Llc Projecting containment force for load wrapping apparatus
EP3280646B1 (de) 2015-04-10 2021-06-02 Lantech.com, LLC Dehnfolienverpackungsmaschine zur unterstützung von eindämmungsvorgängen in der obersten schicht
EP3353062B1 (de) 2015-09-25 2020-08-26 Lantech.Com LLC Stretchverpackungsmaschine mit automatischer lastprofilierung und das entsprechende verfahren
KR102221204B1 (ko) * 2016-10-10 2021-03-03 레이드-애쉬맨 매뉴팩추어링 인코포레이티드 매니퓰레이터
TWI658271B (zh) * 2017-08-25 2019-05-01 鴻勁精密股份有限公司 Electronic component crimping unit and test equipment for its application
EP3684698B1 (de) 2017-09-22 2023-11-15 Lantech.com, LLC Umwicklungsprofile eines lastenumwicklers mit kontrollierten umwicklungszyklusunterbrechungen
CN110303487B (zh) * 2018-05-17 2023-06-20 青岛理工大学 一种用于管材搬运的机械手装置
CN109856554A (zh) * 2019-04-22 2019-06-07 星云智能装备（昆山）有限公司 一种自动对插机构及电池包测试装置
CN110251197A (zh) * 2019-07-05 2019-09-20 四川大学 一种脊柱钻孔手术辅助装置
EP4028327A4 (de) 2019-09-09 2024-01-03 Lantech Com Llc Dehnfolienumwicklungsmaschine mit ausgabegeschwindigkeitssteuerung auf der grundlage der gemessenen geschwindigkeit des ausgegebenen verpackungsmaterials und vorhergesagter lastgeometrie
WO2021055193A1 (en) 2019-09-19 2021-03-25 Lantech.Com, Llc Packaging material grading and/or factory profiles
CN114325325B (zh) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 用于测试集成电路产品的装置

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US5352946A (en) * 1993-02-04 1994-10-04 Megamation Incorporated Linear motor suspension system
US5600258A (en) * 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
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KR960019641A (ko) * 1994-11-24 1996-06-17 오우라 히로시 테스트·헤드 접속 장치를 장비한 반도체 시험 장치
EP0811167B1 (de) 1995-02-23 2001-09-05 Aesop Inc. Manipulator für einen testkopf einer automatischen testanlage
US5603677A (en) * 1995-03-28 1997-02-18 Sollo; Robert E. Weight assisted rehabilitation system
US5608334A (en) 1995-04-20 1997-03-04 Intest Corporation Device testing system with cable pivot and method of installation
JPH08324913A (ja) * 1995-06-06 1996-12-10 Hitachi Ltd エレベーター装置
US5606262A (en) * 1995-06-07 1997-02-25 Teradyne, Inc. Manipulator for automatic test equipment test head
JP3266509B2 (ja) * 1996-05-09 2002-03-18 東京エレクトロン株式会社 重量物旋回装置及び検査装置
US6023173A (en) * 1997-04-30 2000-02-08 Credence Systems Corporation Manipulator with expanded range of motion
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US6271658B1 (en) * 1998-10-19 2001-08-07 St Assembly Test Services Pte, Ltd. Universal Docking System
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US6837125B1 (en) * 1999-07-14 2005-01-04 Teradyne, Inc. Automatic test manipulator with support internal to test head
US6396257B1 (en) * 2000-04-26 2002-05-28 Credence Systems Corporation Test head manipulator for semiconductor tester with manual assist for vertical test head movement
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Also Published As

Publication number Publication date
DE60144498D1 (de) 2011-06-01
CN100495040C (zh) 2009-06-03
EP1259829B1 (de) 2006-02-01
MY138984A (en) 2009-08-28
JP2003525433A (ja) 2003-08-26
US7554321B2 (en) 2009-06-30
EP1650573B1 (de) 2011-04-20
EP1259829A2 (de) 2002-11-27
AU2001239949A1 (en) 2001-09-12
MY144519A (en) 2011-09-30
DE60117003T2 (de) 2006-11-30
DE60117003D1 (de) 2006-04-13
WO2001064389A3 (en) 2002-09-06
CN1408065A (zh) 2003-04-02
EP1650573A3 (de) 2006-07-19
WO2001064389A2 (en) 2001-09-07
US20040051517A1 (en) 2004-03-18
KR20020082862A (ko) 2002-10-31
TWI222911B (en) 2004-11-01
EP1650573A2 (de) 2006-04-26

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