ATE317128T1 - Vertikal ausgeglichener prüfkopfmanipulator - Google Patents

Vertikal ausgeglichener prüfkopfmanipulator

Info

Publication number
ATE317128T1
ATE317128T1 AT01914580T AT01914580T ATE317128T1 AT E317128 T1 ATE317128 T1 AT E317128T1 AT 01914580 T AT01914580 T AT 01914580T AT 01914580 T AT01914580 T AT 01914580T AT E317128 T1 ATE317128 T1 AT E317128T1
Authority
AT
Austria
Prior art keywords
test head
vertical support
main arm
vernier movement
head manipulator
Prior art date
Application number
AT01914580T
Other languages
English (en)
Inventor
Alyn R Holt
Brian R Moore
Henri M Akouka
Original Assignee
Intest Ip Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Ip Corp filed Critical Intest Ip Corp
Application granted granted Critical
Publication of ATE317128T1 publication Critical patent/ATE317128T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56016—Apparatus features

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Vehicle Body Suspensions (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AT01914580T 2000-03-01 2001-03-01 Vertikal ausgeglichener prüfkopfmanipulator ATE317128T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18619600P 2000-03-01 2000-03-01

Publications (1)

Publication Number Publication Date
ATE317128T1 true ATE317128T1 (de) 2006-02-15

Family

ID=22684009

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01914580T ATE317128T1 (de) 2000-03-01 2001-03-01 Vertikal ausgeglichener prüfkopfmanipulator

Country Status (11)

Country Link
US (1) US7554321B2 (de)
EP (2) EP1259829B1 (de)
JP (1) JP2003525433A (de)
KR (1) KR20020082862A (de)
CN (1) CN100495040C (de)
AT (1) ATE317128T1 (de)
AU (1) AU2001239949A1 (de)
DE (2) DE60117003T2 (de)
MY (2) MY144519A (de)
TW (1) TWI222911B (de)
WO (1) WO2001064389A2 (de)

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US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
EP1673636A2 (de) * 2003-08-06 2006-06-28 inTEST Corporation Testkopf-positionierungssystem
CN100429757C (zh) * 2004-03-25 2008-10-29 东京毅力科创株式会社 重物转动装置
CN100582800C (zh) * 2004-09-02 2010-01-20 东京毅力科创株式会社 重物翻转设备
JP4793809B2 (ja) * 2004-09-02 2011-10-12 東京エレクトロン株式会社 重量物の旋回機構
US8607935B2 (en) 2005-12-20 2013-12-17 Intuitive Surgical Operations, Inc. Guide systems for laminated spring assemblies
TWI490513B (zh) 2006-12-29 2015-07-01 Intest Corp 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法
US8350584B2 (en) * 2006-12-29 2013-01-08 Intest Corporation Test head positioning system and method
CN101720269B (zh) * 2007-02-23 2014-04-16 英泰斯特股份有限公司 测试头操作器
US7750657B2 (en) * 2007-03-15 2010-07-06 Applied Materials Inc. Polishing head testing with movable pedestal
JP5221118B2 (ja) * 2007-12-14 2013-06-26 東京エレクトロン株式会社 検査装置
CN101846589B (zh) * 2009-03-24 2013-06-05 京元电子股份有限公司 翻转测试模块及其测试系统
US8981807B2 (en) * 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
SG10201605656TA (en) 2011-07-12 2016-08-30 Intest Corp Method and apparatus for docking a test head with a peripheral
US8935952B2 (en) * 2012-06-27 2015-01-20 International Business Machines Corporation Dynamic rack cabinet stability testing
CN102735387B (zh) * 2012-07-16 2014-08-06 台州市计量技术研究院 静态扭矩精密测试装置及利用上述装置测试扭矩的方法
CN103629913B (zh) * 2012-08-16 2015-04-08 上海华虹宏力半导体制造有限公司 公转式旋转干燥机垂直重心调节装置
JP5953215B2 (ja) * 2012-12-07 2016-07-20 三鷹光器株式会社 医療用バランシングスタンドの自動バランス調整構造
EP2956368B1 (de) 2013-02-13 2018-12-26 Lantech.Com LLC Verpackungsmaterialprofilierung für eine kraftbasierte umwicklung
EP3094563B1 (de) 2014-01-14 2019-03-27 Lantech.Com LLC Dynamische anpassung von auf überwachte hüllkraft reagierende hüllkraftparameter und/oder zur filmbruchreduktion
AU2015330915B2 (en) 2014-10-07 2018-11-08 Lantech.Com, Llc Load stability-based wrapping
WO2016164776A1 (en) 2015-04-10 2016-10-13 Lantech.Com, Llc Stretch wrapping machine supporting top layer containment operations
EP3353062B1 (de) 2015-09-25 2020-08-26 Lantech.Com LLC Stretchverpackungsmaschine mit automatischer lastprofilierung und das entsprechende verfahren
EP3523664B1 (de) * 2016-10-10 2025-11-19 Reid-Ashman Manufacturing, Inc. Manipulator
TWI658271B (zh) * 2017-08-25 2019-05-01 鴻勁精密股份有限公司 Electronic component crimping unit and test equipment for its application
WO2019058335A1 (en) 2017-09-22 2019-03-28 Lantech.Com, Llc LOAD PACKAGING PACKAGING PACKAGING PROFILES WITH CONTROLLED PACK CYCLE INTERRUPTIONS
CN110303487B (zh) * 2018-05-17 2023-06-20 青岛理工大学 一种用于管材搬运的机械手装置
CN109856554A (zh) * 2019-04-22 2019-06-07 星云智能装备（昆山）有限公司 一种自动对插机构及电池包测试装置
CN110251197A (zh) * 2019-07-05 2019-09-20 四川大学 一种脊柱钻孔手术辅助装置
US11479378B2 (en) 2019-09-09 2022-10-25 Lantech.Com, Llc Stretch wrapping machine with dispense rate control based on sensed rate of dispensed packaging material and predicted load geometry
EP4031455A4 (de) 2019-09-19 2024-04-03 Lantech.Com, Llc Klassifizierung von verpackungsmaterial und/oder werksprofilen
DE102021114443B4 (de) * 2021-06-04 2023-06-15 Xcerra Corp. Prüfkopf für einen Fingertester sowie Fingertester mit mehreren solcher Prüfköpfe und Verfahren zum Testen von Leiterplatten
CN114325325B (zh) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 用于测试集成电路产品的装置
US12480986B1 (en) * 2022-05-30 2025-11-25 Christos Tsironis Mechanism for remotely controlling the contacting of wafer probes attached to load pull tuners
CN115902431A (zh) * 2023-01-10 2023-04-04 深圳市信维通信股份有限公司 一种天线测试治具及其使用方法

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US3994476A (en) * 1975-03-20 1976-11-30 Gennep Jan Van Automatic braking arrangement for a windlass
US5149029A (en) * 1982-08-25 1992-09-22 Intest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4943020A (en) 1987-09-17 1990-07-24 Schlumberger Technologies, Inc. Manipulator apparatus
US4893074A (en) 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
US5059089A (en) 1988-10-17 1991-10-22 Kocaoglan Harutyun A Infinitely adjustable travel lead screw and multi-cylinder driven movement unit
US5030869A (en) 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
US5241870A (en) 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5352946A (en) * 1993-02-04 1994-10-04 Megamation Incorporated Linear motor suspension system
JP3166434B2 (ja) * 1993-07-28 2001-05-14 安藤電気株式会社 Ｔａｂの位置決め穴を保護するｔａｂと電極の位置決め方法
US5600258A (en) 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
JP3095318B2 (ja) * 1993-11-25 2000-10-03 東京エレクトロン株式会社 被検査体のテスト装置
US5506512A (en) * 1993-11-25 1996-04-09 Tokyo Electron Limited Transfer apparatus having an elevator and prober using the same
JPH07263517A (ja) * 1994-03-24 1995-10-13 Hitachi Electron Eng Co Ltd Ｉｃソケットの位置決め装置
US5818219A (en) 1994-11-24 1998-10-06 Advantest Corp. Semiconductor test system having test head connection apparatus
ATE205303T1 (de) * 1995-02-23 2001-09-15 Aesop Inc Manipulator für einen testkopf einer automatischen testanlage
US5603677A (en) * 1995-03-28 1997-02-18 Sollo; Robert E. Weight assisted rehabilitation system
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JPH08324913A (ja) * 1995-06-06 1996-12-10 Hitachi Ltd エレベーター装置
US5606262A (en) * 1995-06-07 1997-02-25 Teradyne, Inc. Manipulator for automatic test equipment test head
JP3266509B2 (ja) * 1996-05-09 2002-03-18 東京エレクトロン株式会社 重量物旋回装置及び検査装置
US6023173A (en) * 1997-04-30 2000-02-08 Credence Systems Corporation Manipulator with expanded range of motion
US5949002A (en) * 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance
US6271658B1 (en) * 1998-10-19 2001-08-07 St Assembly Test Services Pte, Ltd. Universal Docking System
US6009670A (en) 1999-02-01 2000-01-04 Howard; Glenn Gate operator for vertical gate movement
US6837125B1 (en) * 1999-07-14 2005-01-04 Teradyne, Inc. Automatic test manipulator with support internal to test head
US6396257B1 (en) * 2000-04-26 2002-05-28 Credence Systems Corporation Test head manipulator for semiconductor tester with manual assist for vertical test head movement
US6640610B2 (en) * 2001-03-30 2003-11-04 Analog Devices, Inc. Automatic integrated mechanical and electrical angular motion detector test system

Also Published As

Publication number Publication date
JP2003525433A (ja) 2003-08-26
WO2001064389A3 (en) 2002-09-06
US20040051517A1 (en) 2004-03-18
MY144519A (en) 2011-09-30
KR20020082862A (ko) 2002-10-31
CN1408065A (zh) 2003-04-02
AU2001239949A1 (en) 2001-09-12
EP1259829B1 (de) 2006-02-01
DE60144498D1 (de) 2011-06-01
EP1650573B1 (de) 2011-04-20
EP1650573A3 (de) 2006-07-19
CN100495040C (zh) 2009-06-03
TWI222911B (en) 2004-11-01
US7554321B2 (en) 2009-06-30
WO2001064389A2 (en) 2001-09-07
MY138984A (en) 2009-08-28
DE60117003T2 (de) 2006-11-30
DE60117003D1 (de) 2006-04-13
EP1259829A2 (de) 2002-11-27
EP1650573A2 (de) 2006-04-26

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Legal Events

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