DE60144498D1 - Ausgeglichene vertikale Andockbewegung bei einem angetriebenen vertikalen Prüfkopfmanipulator - Google Patents

Ausgeglichene vertikale Andockbewegung bei einem angetriebenen vertikalen Prüfkopfmanipulator

Info

Publication number
DE60144498D1
DE60144498D1 DE60144498T DE60144498T DE60144498D1 DE 60144498 D1 DE60144498 D1 DE 60144498D1 DE 60144498 T DE60144498 T DE 60144498T DE 60144498 T DE60144498 T DE 60144498T DE 60144498 D1 DE60144498 D1 DE 60144498D1
Authority
DE
Germany
Prior art keywords
vertical
vertical support
main arm
balanced
powered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60144498T
Other languages
English (en)
Inventor
Alyn R Holt
Brian R Moore
Henri M Akouka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InTest Corp filed Critical InTest Corp
Application granted granted Critical
Publication of DE60144498D1 publication Critical patent/DE60144498D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56016—Apparatus features

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Transmission Devices (AREA)
  • Manipulator (AREA)
  • Vehicle Body Suspensions (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
DE60144498T 2000-03-01 2001-03-01 Ausgeglichene vertikale Andockbewegung bei einem angetriebenen vertikalen Prüfkopfmanipulator Expired - Lifetime DE60144498D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18619600P 2000-03-01 2000-03-01

Publications (1)

Publication Number Publication Date
DE60144498D1 true DE60144498D1 (de) 2011-06-01

Family

ID=22684009

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60117003T Expired - Lifetime DE60117003T2 (de) 2000-03-01 2001-03-01 Vertikal ausgeglichener prüfkopfmanipulator
DE60144498T Expired - Lifetime DE60144498D1 (de) 2000-03-01 2001-03-01 Ausgeglichene vertikale Andockbewegung bei einem angetriebenen vertikalen Prüfkopfmanipulator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE60117003T Expired - Lifetime DE60117003T2 (de) 2000-03-01 2001-03-01 Vertikal ausgeglichener prüfkopfmanipulator

Country Status (11)

Country Link
US (1) US7554321B2 (de)
EP (2) EP1650573B1 (de)
JP (1) JP2003525433A (de)
KR (1) KR20020082862A (de)
CN (1) CN100495040C (de)
AT (1) ATE317128T1 (de)
AU (1) AU2001239949A1 (de)
DE (2) DE60117003T2 (de)
MY (2) MY144519A (de)
TW (1) TWI222911B (de)
WO (1) WO2001064389A2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY127154A (en) * 2000-09-22 2006-11-30 Intest Corp Apparatus and method for balancing and for providing a compliant range to a test head
AU2002368253A1 (en) * 2002-10-02 2004-04-23 Intest Ip Corp. Test head positioning apparatus
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
KR20060057603A (ko) * 2003-08-06 2006-05-26 인테스트 코포레이션 테스트 헤드 위치지정 시스템
CN100429757C (zh) * 2004-03-25 2008-10-29 东京毅力科创株式会社 重物转动装置
JP4793809B2 (ja) * 2004-09-02 2011-10-12 東京エレクトロン株式会社 重量物の旋回機構
US8607935B2 (en) 2005-12-20 2013-12-17 Intuitive Surgical Operations, Inc. Guide systems for laminated spring assemblies
TWI490513B (zh) * 2006-12-29 2015-07-01 Intest Corp 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法
US8350584B2 (en) 2006-12-29 2013-01-08 Intest Corporation Test head positioning system and method
MY158281A (en) * 2007-02-23 2016-09-30 Intest Corp Test head manipulator
US7750657B2 (en) * 2007-03-15 2010-07-06 Applied Materials Inc. Polishing head testing with movable pedestal
JP5221118B2 (ja) * 2007-12-14 2013-06-26 東京エレクトロン株式会社 検査装置
CN101846589B (zh) * 2009-03-24 2013-06-05 京元电子股份有限公司 翻转测试模块及其测试系统
US8981807B2 (en) 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
CN103782182B (zh) 2011-07-12 2016-08-24 英泰斯特股份有限公司 驳接测试头与外围设备的方法与装置
US8935952B2 (en) * 2012-06-27 2015-01-20 International Business Machines Corporation Dynamic rack cabinet stability testing
CN102735387B (zh) * 2012-07-16 2014-08-06 台州市计量技术研究院 静态扭矩精密测试装置及利用上述装置测试扭矩的方法
CN103629913B (zh) * 2012-08-16 2015-04-08 上海华虹宏力半导体制造有限公司 公转式旋转干燥机垂直重心调节装置
JP5953215B2 (ja) * 2012-12-07 2016-07-20 三鷹光器株式会社 医療用バランシングスタンドの自動バランス調整構造
EP2956368B1 (de) 2013-02-13 2018-12-26 Lantech.Com LLC Verpackungsmaterialprofilierung für eine kraftbasierte umwicklung
EP3521183B1 (de) 2014-01-14 2021-05-19 Lantech.com, LLC Dynamische anpassung von auf überwachte hüllkraft und/oder filmbruchreduktion reagierenden hüllkraftparametern
EP3204301B1 (de) 2014-10-07 2020-03-11 Lantech.Com LLC Auf laststabilität basierende umhüllung
EP3280646B1 (de) 2015-04-10 2021-06-02 Lantech.com, LLC Dehnfolienverpackungsmaschine zur unterstützung von eindämmungsvorgängen in der obersten schicht
CA2999861C (en) * 2015-09-25 2020-05-05 Lantech.Com, Llc Stretch wrapping machine with automated determination of load stability by subjecting a load to a disturbance
EP3523664A4 (de) * 2016-10-10 2020-06-17 Reid-Ashman Manufacturing, Inc. Manipulator
TWI658271B (zh) * 2017-08-25 2019-05-01 鴻勁精密股份有限公司 Electronic component crimping unit and test equipment for its application
AU2018338049B2 (en) 2017-09-22 2021-12-23 Lantech.Com, Llc Load wrapping apparatus wrap profiles with controlled wrap cycle interruptions
CN110303487B (zh) * 2018-05-17 2023-06-20 青岛理工大学 一种用于管材搬运的机械手装置
CN109856554A (zh) * 2019-04-22 2019-06-07 星云智能装备（昆山）有限公司 一种自动对插机构及电池包测试装置
CN110251197A (zh) * 2019-07-05 2019-09-20 四川大学 一种脊柱钻孔手术辅助装置
AU2020346736B2 (en) 2019-09-09 2024-02-22 Lantech.Com, Llc Stretch wrapping machine with dispense rate control based on sensed rate of dispensed packaging material and predicted load geometry
WO2021055193A1 (en) 2019-09-19 2021-03-25 Lantech.Com, Llc Packaging material grading and/or factory profiles
CN114325325B (zh) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 用于测试集成电路产品的装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1639608A (en) * 1926-03-24 1927-08-16 Hofland Christian Hitch for draft animals
CH516806A (de) * 1970-06-09 1971-12-15 Bbc Brown Boveri & Cie Elektrooptische Vorrichtung zur Drehung der Polarisationsebene einer linear polarisierten Lichtwelle
US3994476A (en) * 1975-03-20 1976-11-30 Gennep Jan Van Automatic braking arrangement for a windlass
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US5149029A (en) * 1982-08-25 1992-09-22 Intest Corporation Electronic test head positioner for test systems
US4943020A (en) 1987-09-17 1990-07-24 Schlumberger Technologies, Inc. Manipulator apparatus
US4893074A (en) 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
US5059089A (en) * 1988-10-17 1991-10-22 Kocaoglan Harutyun A Infinitely adjustable travel lead screw and multi-cylinder driven movement unit
US5030869A (en) 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5352946A (en) 1993-02-04 1994-10-04 Megamation Incorporated Linear motor suspension system
US5600258A (en) * 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
US5506512A (en) * 1993-11-25 1996-04-09 Tokyo Electron Limited Transfer apparatus having an elevator and prober using the same
KR960019641A (ko) * 1994-11-24 1996-06-17 오우라 히로시 테스트·헤드 접속 장치를 장비한 반도체 시험 장치
ATE205303T1 (de) 1995-02-23 2001-09-15 Aesop Inc Manipulator für einen testkopf einer automatischen testanlage
US5603677A (en) * 1995-03-28 1997-02-18 Sollo; Robert E. Weight assisted rehabilitation system
US5608334A (en) 1995-04-20 1997-03-04 Intest Corporation Device testing system with cable pivot and method of installation
JPH08324913A (ja) * 1995-06-06 1996-12-10 Hitachi Ltd エレベーター装置
US5606262A (en) * 1995-06-07 1997-02-25 Teradyne, Inc. Manipulator for automatic test equipment test head
JP3266509B2 (ja) * 1996-05-09 2002-03-18 東京エレクトロン株式会社 重量物旋回装置及び検査装置
US6023173A (en) * 1997-04-30 2000-02-08 Credence Systems Corporation Manipulator with expanded range of motion
US5949002A (en) 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance
US6271658B1 (en) * 1998-10-19 2001-08-07 St Assembly Test Services Pte, Ltd. Universal Docking System
US6009670A (en) * 1999-02-01 2000-01-04 Howard; Glenn Gate operator for vertical gate movement
US6837125B1 (en) * 1999-07-14 2005-01-04 Teradyne, Inc. Automatic test manipulator with support internal to test head
US6396257B1 (en) * 2000-04-26 2002-05-28 Credence Systems Corporation Test head manipulator for semiconductor tester with manual assist for vertical test head movement
US6640610B2 (en) * 2001-03-30 2003-11-04 Analog Devices, Inc. Automatic integrated mechanical and electrical angular motion detector test system

Also Published As

Publication number Publication date
ATE317128T1 (de) 2006-02-15
US20040051517A1 (en) 2004-03-18
AU2001239949A1 (en) 2001-09-12
WO2001064389A2 (en) 2001-09-07
MY144519A (en) 2011-09-30
KR20020082862A (ko) 2002-10-31
EP1650573A3 (de) 2006-07-19
TWI222911B (en) 2004-11-01
JP2003525433A (ja) 2003-08-26
EP1259829B1 (de) 2006-02-01
EP1650573A2 (de) 2006-04-26
CN1408065A (zh) 2003-04-02
DE60117003D1 (de) 2006-04-13
EP1259829A2 (de) 2002-11-27
MY138984A (en) 2009-08-28
DE60117003T2 (de) 2006-11-30
WO2001064389A3 (en) 2002-09-06
CN100495040C (zh) 2009-06-03
EP1650573B1 (de) 2011-04-20
US7554321B2 (en) 2009-06-30

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