ATE315980T1 - VERFAHREN UND VORRICHTUNG ZUR ßIN-SITUß ÜBERWACHUNG DER DICKE WÄHREND DES CHEMISCH- MECHANISCHEN PLANIERVORGANGES - Google Patents

VERFAHREN UND VORRICHTUNG ZUR ßIN-SITUß ÜBERWACHUNG DER DICKE WÄHREND DES CHEMISCH- MECHANISCHEN PLANIERVORGANGES

Info

Publication number
ATE315980T1
ATE315980T1 AT01937595T AT01937595T ATE315980T1 AT E315980 T1 ATE315980 T1 AT E315980T1 AT 01937595 T AT01937595 T AT 01937595T AT 01937595 T AT01937595 T AT 01937595T AT E315980 T1 ATE315980 T1 AT E315980T1
Authority
AT
Austria
Prior art keywords
monitoring system
substrate
chemical
planning process
thickness during
Prior art date
Application number
AT01937595T
Other languages
German (de)
English (en)
Inventor
Hiroji Hanawa
Nils Johansson
Boguslaw A Swedek
Manoocher Birang
Fritz C Redeker
Rajeev Bajaj
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/574,008 external-priority patent/US6924641B1/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE315980T1 publication Critical patent/ATE315980T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
AT01937595T 2000-05-19 2001-05-18 VERFAHREN UND VORRICHTUNG ZUR ßIN-SITUß ÜBERWACHUNG DER DICKE WÄHREND DES CHEMISCH- MECHANISCHEN PLANIERVORGANGES ATE315980T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/574,008 US6924641B1 (en) 2000-05-19 2000-05-19 Method and apparatus for monitoring a metal layer during chemical mechanical polishing
US21722800P 2000-07-10 2000-07-10
US22166800P 2000-07-27 2000-07-27

Publications (1)

Publication Number Publication Date
ATE315980T1 true ATE315980T1 (de) 2006-02-15

Family

ID=27396396

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01937595T ATE315980T1 (de) 2000-05-19 2001-05-18 VERFAHREN UND VORRICHTUNG ZUR ßIN-SITUß ÜBERWACHUNG DER DICKE WÄHREND DES CHEMISCH- MECHANISCHEN PLANIERVORGANGES

Country Status (7)

Country Link
EP (1) EP1294534B2 (ja)
JP (4) JP5542293B2 (ja)
KR (1) KR100827871B1 (ja)
AT (1) ATE315980T1 (ja)
DE (3) DE60132385T2 (ja)
TW (1) TW496812B (ja)
WO (1) WO2001089765A1 (ja)

Families Citing this family (38)

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US8485862B2 (en) * 2000-05-19 2013-07-16 Applied Materials, Inc. Polishing pad for endpoint detection and related methods
US7374477B2 (en) 2002-02-06 2008-05-20 Applied Materials, Inc. Polishing pads useful for endpoint detection in chemical mechanical polishing
US6608495B2 (en) 2001-03-19 2003-08-19 Applied Materials, Inc. Eddy-optic sensor for object inspection
US6966816B2 (en) 2001-05-02 2005-11-22 Applied Materials, Inc. Integrated endpoint detection system with optical and eddy current monitoring
US6811466B1 (en) 2001-12-28 2004-11-02 Applied Materials, Inc. System and method for in-line metal profile measurement
JP2005517290A (ja) * 2002-02-06 2005-06-09 アプライド　マテリアルズ　インコーポレイテッド 渦電流モニタリングシステムを備えた化学機械的研磨の為の方法及び装置
EP1349199A1 (de) * 2002-03-28 2003-10-01 Esec Trading S.A. Einrichtung für die Montage von Halbleiterchips
DE10310262A1 (de) 2002-03-28 2003-10-23 Esec Trading Sa Einrichtung für die Montage von Halbleiterchips
US7205166B2 (en) * 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7112961B2 (en) 2002-12-13 2006-09-26 Applied Materials, Inc. Method and apparatus for dynamically measuring the thickness of an object
US6788050B2 (en) * 2002-12-23 2004-09-07 Lam Research Corp. System, method and apparatus for thin-film substrate signal separation using eddy current
KR100902893B1 (ko) * 2003-01-13 2009-06-16 엘지전자 주식회사 광디스크 표면의 기계적 내구성 검사 장치 및 방법
US7008296B2 (en) * 2003-06-18 2006-03-07 Applied Materials, Inc. Data processing for monitoring chemical mechanical polishing
JP2005051076A (ja) * 2003-07-29 2005-02-24 Trecenti Technologies Inc 半導体装置の製造方法
US7112960B2 (en) * 2003-07-31 2006-09-26 Applied Materials, Inc. Eddy current system for in-situ profile measurement
KR100947230B1 (ko) 2003-09-16 2010-03-11 엘지전자 주식회사 광디스크 표면의 기계적 내구성 검사 장치 및 방법
KR101078007B1 (ko) * 2004-06-21 2011-10-28 가부시키가이샤 에바라 세이사꾸쇼 폴리싱장치 및 폴리싱방법
JP2006128563A (ja) * 2004-11-01 2006-05-18 Toyo Tire & Rubber Co Ltd 半導体ウエハ研磨用研磨パッドおよび半導体デバイスの製造方法
JP2009026850A (ja) * 2007-07-18 2009-02-05 Elpida Memory Inc Ｃｍｐ装置及びｃｍｐによるウェハー研磨方法
JP2009033038A (ja) * 2007-07-30 2009-02-12 Elpida Memory Inc Ｃｍｐ装置及びｃｍｐによるウェハー研磨方法
JP4319692B2 (ja) 2007-09-03 2009-08-26 株式会社東京精密 研磨終了時点の予測・検出方法とその装置並びにリアルタイム膜厚モニタ方法とその装置
JP5495493B2 (ja) * 2008-02-07 2014-05-21 株式会社東京精密 膜厚測定装置、及び膜厚測定方法
DE102008021569A1 (de) 2008-04-30 2009-11-05 Advanced Micro Devices, Inc., Sunnyvale System und Verfahren zur optischen Endpunkterkennung während des CMP unter Anwendung eines substratüberspannenenden Signals
JP5513795B2 (ja) * 2009-07-16 2014-06-04 株式会社荏原製作所 研磨方法および装置
JP5513821B2 (ja) * 2009-09-17 2014-06-04 株式会社荏原製作所 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法
US9023667B2 (en) * 2011-04-27 2015-05-05 Applied Materials, Inc. High sensitivity eddy current monitoring system
US9308618B2 (en) 2012-04-26 2016-04-12 Applied Materials, Inc. Linear prediction for filtering of data during in-situ monitoring of polishing
US9067295B2 (en) * 2012-07-25 2015-06-30 Applied Materials, Inc. Monitoring retaining ring thickness and pressure control
US9205527B2 (en) * 2012-11-08 2015-12-08 Applied Materials, Inc. In-situ monitoring system with monitoring of elongated region
US9636797B2 (en) * 2014-02-12 2017-05-02 Applied Materials, Inc. Adjusting eddy current measurements
JP6423600B2 (ja) 2014-03-12 2018-11-14 株式会社荏原製作所 膜厚測定装置、及び、研磨装置
TW201710029A (zh) 2015-09-01 2017-03-16 Ebara Corp 渦電流檢測器
JP6779633B2 (ja) 2016-02-23 2020-11-04 株式会社荏原製作所 研磨装置
CN106985059B (zh) * 2017-04-27 2018-12-28 厦门大学 一种空心球体内外球面研抛方法及装置
CN107520740A (zh) * 2017-09-18 2017-12-29 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 一种化学机械抛光中光谱终点的检测方法、装置及系统
TWI689081B (zh) 2018-10-02 2020-03-21 華邦電子股份有限公司 非揮發性記憶體裝置的製造方法
US20200276685A1 (en) * 2019-02-28 2020-09-03 Kevin H. Song Controlling Chemical Mechanical Polishing Pad Stiffness By Adjusting Wetting in the Backing Layer
WO2024091314A1 (en) * 2022-10-27 2024-05-02 Applied Materials, Inc. Carrier head acoustic monitoring with sensor in platen

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Also Published As

Publication number Publication date
DE60116757T2 (de) 2006-07-27
JP5980843B2 (ja) 2016-08-31
JP5778110B2 (ja) 2015-09-16
JP6041833B2 (ja) 2016-12-14
JP2014209643A (ja) 2014-11-06
DE60116757T4 (de) 2007-01-18
EP1294534A1 (en) 2003-03-26
DE60132385T2 (de) 2008-05-15
DE60132385D1 (de) 2008-02-21
TW496812B (en) 2002-08-01
JP2013058762A (ja) 2013-03-28
KR100827871B1 (ko) 2008-05-07
EP1294534B1 (en) 2006-01-18
JP2003534649A (ja) 2003-11-18
WO2001089765A1 (en) 2001-11-29
KR20030001529A (ko) 2003-01-06
JP5542293B2 (ja) 2014-07-09
JP2014208401A (ja) 2014-11-06
EP1294534B2 (en) 2006-01-25
DE60116757D1 (de) 2006-04-06

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