ATE297006T1 - System und verfahren zum ausführen von bestimmten optischen messungen - Google Patents

System und verfahren zum ausführen von bestimmten optischen messungen

Info

Publication number
ATE297006T1
ATE297006T1 AT97954530T AT97954530T ATE297006T1 AT E297006 T1 ATE297006 T1 AT E297006T1 AT 97954530 T AT97954530 T AT 97954530T AT 97954530 T AT97954530 T AT 97954530T AT E297006 T1 ATE297006 T1 AT E297006T1
Authority
AT
Austria
Prior art keywords
diffraction grating
sample
detector
orders
diffracted orders
Prior art date
Application number
AT97954530T
Other languages
German (de)
English (en)
Inventor
Iosif Zeylikovich
Robert R Alfano
Original Assignee
Res Foundation Of City College
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Res Foundation Of City College filed Critical Res Foundation Of City College
Application granted granted Critical
Publication of ATE297006T1 publication Critical patent/ATE297006T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0066—Optical coherence imaging
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0068—Confocal scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G01B9/02014—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation by using pulsed light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0073—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by tomography, i.e. reconstruction of 3D images from 2D projections
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0082—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes
    • A61B5/0084—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes for introduction into the body, e.g. by catheters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Public Health (AREA)
  • Biophysics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measuring Volume Flow (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
AT97954530T 1996-12-04 1997-12-04 System und verfahren zum ausführen von bestimmten optischen messungen ATE297006T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3322096P 1996-12-04 1996-12-04
US4248997P 1997-04-02 1997-04-02
PCT/US1997/022274 WO1998025105A1 (en) 1996-12-04 1997-12-04 A system and method for performing selected optical measurements

Publications (1)

Publication Number Publication Date
ATE297006T1 true ATE297006T1 (de) 2005-06-15

Family

ID=26709434

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97954530T ATE297006T1 (de) 1996-12-04 1997-12-04 System und verfahren zum ausführen von bestimmten optischen messungen

Country Status (8)

Country Link
US (1) US5943133A (enExample)
EP (1) EP0943075B1 (enExample)
JP (1) JP4020434B2 (enExample)
AT (1) ATE297006T1 (enExample)
AU (1) AU5895998A (enExample)
DE (1) DE69733430T2 (enExample)
ES (1) ES2244016T3 (enExample)
WO (1) WO1998025105A1 (enExample)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6437867B2 (en) 1996-12-04 2002-08-20 The Research Foundation Of The City University Of New York Performing selected optical measurements with optical coherence domain reflectometry
DE69934482T2 (de) * 1998-02-11 2007-09-27 Non-Invasive Technology, Inc. Nachweis, abbildung und kennzeichnung von brustumoren
JP4733265B2 (ja) * 1998-02-11 2011-07-27 ノン−インヴェイシヴ テクノロジイ，インク． 脳組織の画像形成および特徴表示
DE69941975D1 (de) * 1998-02-13 2010-03-18 Non Invasive Technology Inc Untersuchung, beobachtung und bilddarstellung von abdominal-gewebe
US20070167704A1 (en) * 1998-02-13 2007-07-19 Britton Chance Transabdominal examination, monitoring and imaging of tissue
US6445944B1 (en) * 1999-02-01 2002-09-03 Scimed Life Systems Medical scanning system and related method of scanning
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
US7904139B2 (en) 1999-08-26 2011-03-08 Non-Invasive Technology Inc. Optical examination of biological tissue using non-contact irradiation and detection
US7840257B2 (en) * 2003-01-04 2010-11-23 Non Invasive Technology, Inc. Examination of biological tissue using non-contact optical probes
US6813029B1 (en) * 1999-10-09 2004-11-02 Robert Bosch Gmbh Interferometric measuring device for form measurement
US7006676B1 (en) 2000-01-21 2006-02-28 Medical Optical Imaging, Inc. Method and apparatus for detecting an abnormality within a host medium utilizing frequency-swept modulation diffusion tomography
DE10014066A1 (de) 2000-03-22 2001-09-27 Definiens Ag Verfahren zum Auffinden von Objekten
AU4209901A (en) * 2000-03-23 2001-10-03 Defence Science & Tech Org Method and apparatus for estimating chromatic dispersion in fibre bragg gratings
AUPQ641500A0 (en) * 2000-03-23 2000-04-15 Defence Science And Technology Organisation Method and apparatus for estimating chromatic dispersion in fibre bragg gratings
US7058211B2 (en) * 2001-07-18 2006-06-06 Scimed Life Systems, Inc. Electronics interface for an ultrasound console
US6847454B2 (en) * 2001-07-16 2005-01-25 Scimed Life Systems, Inc. Systems and methods for processing signals from an interferometer by an ultrasound console
US6728571B1 (en) * 2001-07-16 2004-04-27 Scimed Life Systems, Inc. Electronically scanned optical coherence tomography with frequency modulated signals
US20030045798A1 (en) * 2001-09-04 2003-03-06 Richard Hular Multisensor probe for tissue identification
US7006231B2 (en) * 2001-10-18 2006-02-28 Scimed Life Systems, Inc. Diffraction grating based interferometric systems and methods
US6741364B2 (en) 2002-08-13 2004-05-25 Harris Corporation Apparatus for determining relative positioning of objects and related methods
US7376455B2 (en) * 2003-05-22 2008-05-20 Scimed Life Systems, Inc. Systems and methods for dynamic optical imaging
US7777895B2 (en) * 2003-08-28 2010-08-17 4D Technology Corporation Linear-carrier phase-mask interferometer
US7230717B2 (en) * 2003-08-28 2007-06-12 4D Technology Corporation Pixelated phase-mask interferometer
US7224468B2 (en) * 2003-10-20 2007-05-29 Agilent Technologies, Inc. En-face functional imaging using multiple wavelengths
US7510283B2 (en) * 2003-11-20 2009-03-31 Heidelberg Engineering Optische Messsysteme Gmbh High resolution imaging for diagnostic evaluation of the fundus of the human eye
US7184148B2 (en) 2004-05-14 2007-02-27 Medeikon Corporation Low coherence interferometry utilizing phase
US7190464B2 (en) * 2004-05-14 2007-03-13 Medeikon Corporation Low coherence interferometry for detecting and characterizing plaques
US7242480B2 (en) * 2004-05-14 2007-07-10 Medeikon Corporation Low coherence interferometry for detecting and characterizing plaques
US20050254059A1 (en) * 2004-05-14 2005-11-17 Alphonse Gerard A Low coherence interferometric system for optical metrology
US7327463B2 (en) 2004-05-14 2008-02-05 Medrikon Corporation Low coherence interferometry utilizing magnitude
US7474408B2 (en) * 2004-05-14 2009-01-06 Medeikon Corporation Low coherence interferometry utilizing phase
EP1776792A4 (en) * 2004-08-11 2012-01-04 Tyco Electronics Subsea Comm SYSTEM AND METHOD FOR SPECTRALLY LOADING AN OPTICAL TRANSMISSION SYSTEM
US7417740B2 (en) * 2004-11-12 2008-08-26 Medeikon Corporation Single trace multi-channel low coherence interferometric sensor
JP4123305B2 (ja) * 2005-03-30 2008-07-23 株式会社ニコン 画像作成方法および顕微鏡装置
US7397563B2 (en) * 2005-11-08 2008-07-08 Honeywell International Inc. Pass-line insensitive sensor
US7460233B2 (en) * 2005-11-08 2008-12-02 Honeywell International Inc. Pass-line and tilt insensitive sensor
US20120083691A1 (en) * 2006-05-25 2012-04-05 Josef Bille Diagnostic Imaging for Age-Related Macular Degeneration (AMD) Using Second Harmonic Generation (SHG) Techniques
US20080009922A1 (en) * 2006-05-25 2008-01-10 Josef Bille Photodynamic therapy for treating age-related macular degeneration
US7488930B2 (en) * 2006-06-02 2009-02-10 Medeikon Corporation Multi-channel low coherence interferometer
DE102006031822B3 (de) * 2006-07-07 2007-12-06 Universität Zu Lübeck Verfahren zur Abtastung optischer Interferenzmuster mit Zeilensensoren
US7800760B2 (en) * 2008-04-17 2010-09-21 Heidelberg Engineering Gmbh System and method for high resolution imaging of cellular detail in the retina
US20120172698A1 (en) 2010-12-30 2012-07-05 Boston Scientific Scimed, Inc. Imaging system
RU2575946C1 (ru) 2012-02-29 2016-02-27 Нэшнл Юниверсити Корпорейшн Кагава Юниверсити Устройство измерения спектральных характеристик и способ измерения спектральных характеристик
TWI468641B (zh) * 2012-11-09 2015-01-11 Univ Nat Central 影像拍攝與座標擷取時間同步之校正方法與校正系統及其延遲時間計算方法
EP2991538B1 (en) 2013-04-30 2020-08-12 Idx Llc Parallel optical coherence tomography apparatuses, systems, and related methods
JPWO2017158697A1 (ja) 2016-03-14 2019-01-17 オリンパス株式会社 画像取得方法および画像取得装置
US10107615B2 (en) 2016-04-20 2018-10-23 Quality Vision International, Inc. Remote probe for optical measuring machine
US10107614B1 (en) 2017-04-18 2018-10-23 Quality Vision International, Inc. Optical pen for interferometric measuring machine
WO2018198115A1 (en) * 2017-04-23 2018-11-01 Oryx Vision Ltd. An optical arrangement and method for use in continuously scanning an optical sensor
KR20180124489A (ko) * 2017-05-12 2018-11-21 휴멘 주식회사 광간섭 측정 장치
US11041711B2 (en) * 2019-08-01 2021-06-22 Yu-Yen Wang Optical measurement system
CN113251943A (zh) * 2020-02-12 2021-08-13 三营超精密光电(晋城)有限公司 基于光干涉的测量系统及方法
JP7742015B2 (ja) * 2021-01-29 2025-09-19 株式会社東京精密 光周波数変調器
CN113695267B (zh) * 2021-08-30 2023-05-26 深圳市洲明科技股份有限公司 一种墨色分选装置及其分选方法
CN114778487A (zh) * 2022-01-14 2022-07-22 山东师范大学 一种微区非线性光学测量系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614235A (en) * 1969-07-28 1971-10-19 Charles R Munnerlyn Diffraction grating interferometer
DE2627609A1 (de) * 1976-06-19 1977-12-29 Ibm Deutschland Interferometrisches verfahren
WO1992019930A1 (en) * 1991-04-29 1992-11-12 Massachusetts Institute Of Technology Method and apparatus for optical imaging and measurement
CH693968A5 (de) * 1993-04-21 2004-05-14 Fraunhofer Ges Forschung Verfahren und Vorrichtung fuer die Topographiepruefung von Oberflaechen.
DE59403306D1 (de) * 1994-02-26 1997-08-14 Heidenhain Gmbh Dr Johannes Interferometer

Also Published As

Publication number Publication date
JP4020434B2 (ja) 2007-12-12
EP0943075A1 (en) 1999-09-22
JP2002514301A (ja) 2002-05-14
AU5895998A (en) 1998-06-29
EP0943075A4 (en) 2000-03-01
EP0943075B1 (en) 2005-06-01
DE69733430D1 (de) 2005-07-07
DE69733430T2 (de) 2006-07-06
US5943133A (en) 1999-08-24
ES2244016T3 (es) 2005-12-01
WO1998025105A1 (en) 1998-06-11

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