ATE265990T1 - Verfahren und vorrichtung zur herstellung eines glasstabes aus synthetischem quarz - Google Patents

Verfahren und vorrichtung zur herstellung eines glasstabes aus synthetischem quarz

Info

Publication number
ATE265990T1
ATE265990T1 AT99933050T AT99933050T ATE265990T1 AT E265990 T1 ATE265990 T1 AT E265990T1 AT 99933050 T AT99933050 T AT 99933050T AT 99933050 T AT99933050 T AT 99933050T AT E265990 T1 ATE265990 T1 AT E265990T1
Authority
AT
Austria
Prior art keywords
crucible
silica
producing
glass rod
synthetic quartz
Prior art date
Application number
AT99933050T
Other languages
English (en)
Inventor
Ian George Sayce
Peter John Wells
Original Assignee
Saint Gobain Quartz Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Quartz Plc filed Critical Saint Gobain Quartz Plc
Application granted granted Critical
Publication of ATE265990T1 publication Critical patent/ATE265990T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484—Means for supporting, rotating or translating the article being formed
    • C03B19/1492—Deposition substrates, e.g. targets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/04—Forming tubes or rods by drawing from stationary or rotating tools or from forming nozzles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1407—Deposition reactors therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/52—Linear array of like burners

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
  • Glass Compositions (AREA)
AT99933050T 1998-07-15 1999-07-15 Verfahren und vorrichtung zur herstellung eines glasstabes aus synthetischem quarz ATE265990T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9815357.0A GB9815357D0 (en) 1998-07-15 1998-07-15 Improvements in and relating to the manufacture of synthetic vitreous silica ingot
PCT/GB1999/002278 WO2000003955A1 (en) 1998-07-15 1999-07-15 Process and apparatus for manufacturing a glass ingot from synthetic silica

Publications (1)

Publication Number Publication Date
ATE265990T1 true ATE265990T1 (de) 2004-05-15

Family

ID=10835565

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99933050T ATE265990T1 (de) 1998-07-15 1999-07-15 Verfahren und vorrichtung zur herstellung eines glasstabes aus synthetischem quarz

Country Status (12)

Country Link
US (1) US6763682B1 (de)
EP (1) EP1097110B1 (de)
JP (1) JP4639274B2 (de)
KR (1) KR100637027B1 (de)
CN (1) CN1227171C (de)
AT (1) ATE265990T1 (de)
AU (1) AU4922599A (de)
DE (1) DE69917035T2 (de)
GB (1) GB9815357D0 (de)
RU (1) RU2240988C2 (de)
UA (1) UA64008C2 (de)
WO (1) WO2000003955A1 (de)

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JP2001342026A (ja) 2000-05-30 2001-12-11 Tosoh Quartz Corp 石英ガラスの製造方法及び製造装置
JP4509342B2 (ja) * 2000-09-21 2010-07-21 東ソー・クォーツ株式会社 長尺石英ガラスの製造方法及びその装置
US6997015B2 (en) * 2001-11-27 2006-02-14 Corning Incorporated EUV lithography glass structures formed by extrusion consolidation process
US7299657B2 (en) * 2002-07-12 2007-11-27 Corning Incorporated Method of making high strain point glass
US20040118155A1 (en) * 2002-12-20 2004-06-24 Brown John T Method of making ultra-dry, Cl-free and F-doped high purity fused silica
DE10337388B4 (de) * 2003-08-13 2006-04-20 Heraeus Quarzglas Gmbh & Co. Kg Vertikal-Tiegelziehverfahren zur Herstellung eines zylinderförmigen Quarzglaskörpers und Vorrichtung zur Durchführung des Verfahrens
GB0605461D0 (en) * 2006-03-17 2006-04-26 Saint Gobain Quartz Plc Manufacture of large articles in synthetic vitreous silica
US8062986B2 (en) * 2007-07-27 2011-11-22 Corning Incorporated Fused silica having low OH, OD levels and method of making
GB2478307A (en) 2010-03-02 2011-09-07 Heraeus Quartz Uk Ltd Manufacture of silica glass
US9120700B2 (en) * 2010-03-26 2015-09-01 Corning Incorporated Non-contact etching of moving glass sheets
DE102010033408B3 (de) * 2010-08-05 2011-06-16 Heraeus Quarzglas Gmbh & Co. Kg Ziehverfahren zur Herstellung zylinderförmiger Bauteile aus Quarzglas
GB201106015D0 (en) 2011-04-08 2011-05-25 Heraeus Quartz Uk Ltd Production of silica soot bodies
CN102701568B (zh) * 2012-06-11 2014-07-09 山东理工大学 高纯石英连续熔融炉用陶瓷内胆的制备方法及连续熔融炉
GB2514118B (en) 2013-05-13 2015-11-11 Heraeus Quartz Uk Ltd Froth floatation separation and analysis
US10604437B2 (en) * 2014-10-20 2020-03-31 Navus Automation, Inc. Fused silica furnace system and method for continuous production of fused silica
US9751796B2 (en) * 2015-03-24 2017-09-05 Shin-Etsu Chemical Co., Ltd. Sintering apparatus and method for sintering
CN104926087B (zh) * 2015-07-16 2018-03-27 中国建筑材料科学研究总院 制备合成石英玻璃砣的沉积炉
CN104926088B (zh) * 2015-07-16 2018-04-10 中国建筑材料科学研究总院 高均匀合成石英玻璃砣的制备方法
CN109153593A (zh) 2015-12-18 2019-01-04 贺利氏石英玻璃有限两合公司 合成石英玻璃粉粒的制备
JP7044454B2 (ja) 2015-12-18 2022-03-30 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 石英ガラス調製時の中間体としての炭素ドープ二酸化ケイ素造粒体の調製
US11952303B2 (en) 2015-12-18 2024-04-09 Heraeus Quarzglas Gmbh & Co. Kg Increase in silicon content in the preparation of quartz glass
TWI812586B (zh) 2015-12-18 2023-08-21 德商何瑞斯廓格拉斯公司 石英玻璃體、其製備方法與應用、及用於控制烘箱出口處之露點
EP3390290B1 (de) 2015-12-18 2023-03-15 Heraeus Quarzglas GmbH & Co. KG Herstellung eines opaken quarzglaskörpers
TWI794150B (zh) 2015-12-18 2023-03-01 德商何瑞斯廓格拉斯公司 自二氧化矽顆粒製備石英玻璃體
TW201731782A (zh) 2015-12-18 2017-09-16 何瑞斯廓格拉斯公司 在多腔式爐中製備石英玻璃體
CN108698887B (zh) 2015-12-18 2022-01-21 贺利氏石英玻璃有限两合公司 由均质石英玻璃制得的玻璃纤维和预成形品
CN108698883A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 石英玻璃制备中的二氧化硅的喷雾造粒
KR20180095616A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 용융 가열로에서 이슬점 조절을 이용한 실리카 유리체의 제조
WO2018229151A1 (en) 2017-06-14 2018-12-20 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body
EP3656746B1 (de) 2018-11-23 2024-06-05 Heraeus Conamic UK Limited Verfahren und vorrichtung zum schneiden eines quarzglashohlkörpers
EP3656744A1 (de) * 2018-11-23 2020-05-27 Heraeus Conamic UK Limited Online-glühen von grossen quarzglasblöcken
CN114349310B (zh) * 2021-12-29 2023-06-23 中建材衢州金格兰石英有限公司 一种大直径石英砣熔制炉

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1363233A (fr) * 1963-04-16 1964-06-12 Corning Glass Works Procédé de fabrication de masses pleines, notamment de verres et céramiques, et appareil de mise en oeuvre
JPS63288906A (ja) 1987-05-20 1988-11-25 Nkk Corp ケイ酸の製造方法
JPS63319220A (ja) * 1987-06-23 1988-12-27 Nkk Corp ケイ酸の製造方法
JPS643028A (en) * 1987-06-26 1989-01-06 Nkk Corp Production of silicic acid
JPS643027A (en) * 1987-06-26 1989-01-06 Nkk Corp Production of silicic acid
JPS649823A (en) * 1987-06-30 1989-01-13 Nippon Kokan Kk Production of silicic acid
DE3815974C1 (de) * 1988-05-10 1989-08-24 Heraeus Quarzschmelze
DE4212099C2 (de) * 1992-04-10 1994-07-21 Heraeus Quarzglas Verfahren und Vorrichtung zur Herstellung eines Verbundkörpers aus Glas
DE69635662T2 (de) * 1995-09-12 2006-08-10 Corning Inc. Verfahren und Ofen zur Herstellung von Quarzglas mit reduziertem Gehalt an Schlieren
US5698484A (en) * 1995-09-12 1997-12-16 Corning Incorporated Method and containment vessel for producing fused silica glass and the fused silica blank produced
JPH10167741A (ja) * 1996-12-16 1998-06-23 Nikon Corp 合成石英ガラスの製造方法、合成石英ガラスの製造装置および合成石英ガラス

Also Published As

Publication number Publication date
JP2002520249A (ja) 2002-07-09
EP1097110B1 (de) 2004-05-06
JP4639274B2 (ja) 2011-02-23
AU4922599A (en) 2000-02-07
KR20010074714A (ko) 2001-08-09
DE69917035T2 (de) 2005-04-28
CN1227171C (zh) 2005-11-16
GB9815357D0 (en) 1998-09-16
US6763682B1 (en) 2004-07-20
EP1097110A1 (de) 2001-05-09
UA64008C2 (en) 2004-02-16
DE69917035D1 (de) 2004-06-09
RU2240988C2 (ru) 2004-11-27
KR100637027B1 (ko) 2006-10-20
CN1313839A (zh) 2001-09-19
WO2000003955A1 (en) 2000-01-27

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Legal Events

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