ATE170628T1 - Rastertunnelmikroskop mit freitragendem verstellungselement - Google Patents
Rastertunnelmikroskop mit freitragendem verstellungselementInfo
- Publication number
- ATE170628T1 ATE170628T1 AT92305283T AT92305283T ATE170628T1 AT E170628 T1 ATE170628 T1 AT E170628T1 AT 92305283 T AT92305283 T AT 92305283T AT 92305283 T AT92305283 T AT 92305283T AT E170628 T1 ATE170628 T1 AT E170628T1
- Authority
- AT
- Austria
- Prior art keywords
- free
- adjustment element
- scanning tunnel
- tunnel microscope
- supporting adjustment
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2045—Cantilevers, i.e. having one fixed end adapted for in-plane bending displacement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
- Y10S977/837—Piezoelectric property of nanomaterial
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/861—Scanning tunneling probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/873—Tip holder
Landscapes
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Micromachines (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3165282A JP2923813B2 (ja) | 1991-06-11 | 1991-06-11 | カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE170628T1 true ATE170628T1 (de) | 1998-09-15 |
Family
ID=15809371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT92305283T ATE170628T1 (de) | 1991-06-11 | 1992-06-09 | Rastertunnelmikroskop mit freitragendem verstellungselement |
Country Status (6)
Country | Link |
---|---|
US (1) | US5357108A (de) |
EP (1) | EP0518618B1 (de) |
JP (1) | JP2923813B2 (de) |
AT (1) | ATE170628T1 (de) |
CA (1) | CA2070946C (de) |
DE (1) | DE69226817T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3261544B2 (ja) * | 1991-10-03 | 2002-03-04 | キヤノン株式会社 | カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置 |
JP3402661B2 (ja) * | 1992-07-06 | 2003-05-06 | キヤノン株式会社 | カンチレバー型プローブ、及びこれを用いた情報処理装置 |
JP3135779B2 (ja) * | 1994-03-18 | 2001-02-19 | キヤノン株式会社 | 情報処理装置 |
JP3192887B2 (ja) * | 1994-09-21 | 2001-07-30 | キヤノン株式会社 | プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置 |
SE9500849D0 (sv) * | 1995-03-10 | 1995-03-10 | Pharmacia Ab | Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods |
DE19530092A1 (de) * | 1995-08-16 | 1997-02-20 | Daimler Benz Ag | Überprüfbarer Foliendrucksensor |
JP3679519B2 (ja) * | 1995-09-14 | 2005-08-03 | キヤノン株式会社 | トンネル電流または微小力または磁気力検出用の微小ティップの製造方法、並びにその微小ティップを有するプローブの製造方法とそのプローブ、該プローブを有するプローブユニットと走査型プローブ顕微鏡及び情報記録再生装置 |
US5874668A (en) | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
JPH09196933A (ja) * | 1996-01-19 | 1997-07-31 | Canon Inc | プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置 |
JPH10312592A (ja) * | 1997-05-13 | 1998-11-24 | Canon Inc | 情報処理装置および情報処理方法 |
JP2000035396A (ja) | 1998-07-16 | 2000-02-02 | Canon Inc | 微小突起を有するプローブ、及びその製造方法 |
KR100595146B1 (ko) * | 1998-12-05 | 2006-08-30 | 엘지전자 주식회사 | 근접장광기록/재생장치 |
JP4576631B2 (ja) * | 1999-11-10 | 2010-11-10 | 正喜 江刺 | 積層型圧電アクチュエータの製造方法 |
KR100364720B1 (ko) * | 1999-12-29 | 2002-12-16 | 엘지전자 주식회사 | 초미세 탐침형 픽업 소자 및 그 제조방법 |
US6831765B2 (en) * | 2001-02-22 | 2004-12-14 | Canon Kabushiki Kaisha | Tiltable-body apparatus, and method of fabricating the same |
WO2004063090A2 (en) * | 2003-01-13 | 2004-07-29 | Triad Sensors Inc. | High displacement bistable micro actuator |
JP5027984B2 (ja) * | 2003-03-28 | 2012-09-19 | キヤノン株式会社 | 揺動体を用いた電位測定装置、電位測定方法、及び画像形成装置 |
JP2004301554A (ja) * | 2003-03-28 | 2004-10-28 | Canon Inc | 電位測定装置及び画像形成装置 |
US7055378B2 (en) | 2003-08-11 | 2006-06-06 | Veeco Instruments, Inc. | System for wide frequency dynamic nanomechanical analysis |
US20050210988A1 (en) * | 2004-03-05 | 2005-09-29 | Jun Amano | Method of making piezoelectric cantilever pressure sensor array |
US7562557B2 (en) * | 2004-04-21 | 2009-07-21 | MEAS France | Flexural resonator sensing device and method |
JP2006317358A (ja) * | 2005-05-16 | 2006-11-24 | Canon Inc | 電位測定装置、およびそれを用いた画像形成装置 |
US7382137B2 (en) * | 2005-05-27 | 2008-06-03 | Canon Kabushiki Kaisha | Potential measuring apparatus |
JP5188024B2 (ja) * | 2006-02-09 | 2013-04-24 | キヤノン株式会社 | 揺動体装置、電位測定装置、及び光偏向装置 |
CA2678943A1 (en) * | 2007-03-13 | 2008-09-18 | Nanoink, Inc. | Nanolithography with use of viewports |
KR101336962B1 (ko) * | 2007-06-01 | 2013-12-04 | 삼성전자주식회사 | 복합 구조의 빔을 이용한 나노 공진기 |
US8505110B2 (en) * | 2007-10-10 | 2013-08-06 | Eloret Corporation | Apparatus and process for controlled nanomanufacturing using catalyst retaining structures |
US8624616B2 (en) * | 2008-07-01 | 2014-01-07 | Intel Corporation | Suspended IO trace design for SSP cantilever data read / write |
JP2010078500A (ja) * | 2008-09-26 | 2010-04-08 | Toshiba Corp | 慣性センサ |
US20120069099A1 (en) * | 2010-09-16 | 2012-03-22 | Huffman James D | Transducer having an improved electric field |
JP5787586B2 (ja) | 2011-04-14 | 2015-09-30 | キヤノン株式会社 | 電気機械変換装置 |
JP6355436B2 (ja) | 2014-05-30 | 2018-07-11 | キヤノン株式会社 | 受信装置、表示装置および受信制御プログラム |
JP6596310B2 (ja) * | 2015-11-11 | 2019-10-23 | ローム株式会社 | 圧電センサ、センサシステム、および圧電素子 |
CN111830295B (zh) * | 2019-04-18 | 2023-04-21 | 成都辰显光电有限公司 | 一种测试微元件电气性能的装置 |
JP2021120701A (ja) | 2020-01-30 | 2021-08-19 | キヤノン株式会社 | 画像形成システム及び方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4672496A (en) * | 1981-07-22 | 1987-06-09 | Matsushita Electric Industrial Co., Ltd. | Magnetic head having electromechanical transducer disposed at one end thereof |
JPS58102774A (ja) * | 1981-12-14 | 1983-06-18 | Nec Corp | インクジエツト記録装置 |
JPS612376A (ja) * | 1984-06-14 | 1986-01-08 | Ngk Spark Plug Co Ltd | シ−ト状圧電体 |
US4906840A (en) * | 1988-01-27 | 1990-03-06 | The Board Of Trustees Of Leland Stanford Jr., University | Integrated scanning tunneling microscope |
JP2547869B2 (ja) * | 1988-11-09 | 1996-10-23 | キヤノン株式会社 | プローブユニット,該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置 |
US5015850A (en) * | 1989-06-20 | 1991-05-14 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated microscope assembly |
US5117148A (en) * | 1989-11-07 | 1992-05-26 | Murata Manufacturing Co., Ltd. | Vibrator |
JPH07108102B2 (ja) * | 1990-05-01 | 1995-11-15 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータの製造方法 |
JP3030574B2 (ja) * | 1990-08-16 | 2000-04-10 | キヤノン株式会社 | 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置 |
JP2741629B2 (ja) * | 1990-10-09 | 1998-04-22 | キヤノン株式会社 | カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置 |
-
1991
- 1991-06-11 JP JP3165282A patent/JP2923813B2/ja not_active Expired - Fee Related
-
1992
- 1992-06-09 EP EP92305283A patent/EP0518618B1/de not_active Expired - Lifetime
- 1992-06-09 AT AT92305283T patent/ATE170628T1/de not_active IP Right Cessation
- 1992-06-09 DE DE69226817T patent/DE69226817T2/de not_active Expired - Fee Related
- 1992-06-09 US US07/895,621 patent/US5357108A/en not_active Expired - Lifetime
- 1992-06-10 CA CA002070946A patent/CA2070946C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0518618A3 (en) | 1993-06-16 |
CA2070946C (en) | 1996-11-26 |
EP0518618B1 (de) | 1998-09-02 |
JPH04364413A (ja) | 1992-12-16 |
EP0518618A2 (de) | 1992-12-16 |
DE69226817D1 (de) | 1998-10-08 |
US5357108A (en) | 1994-10-18 |
CA2070946A1 (en) | 1992-12-12 |
DE69226817T2 (de) | 1999-01-21 |
JP2923813B2 (ja) | 1999-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |