ATE162894T1 - Wässrige emulsionsphotoresiste mit polysiloxanen - Google Patents

Wässrige emulsionsphotoresiste mit polysiloxanen

Info

Publication number
ATE162894T1
ATE162894T1 AT94307902T AT94307902T ATE162894T1 AT E162894 T1 ATE162894 T1 AT E162894T1 AT 94307902 T AT94307902 T AT 94307902T AT 94307902 T AT94307902 T AT 94307902T AT E162894 T1 ATE162894 T1 AT E162894T1
Authority
AT
Austria
Prior art keywords
polysiloxanes
compsn
photoresists
aqueous emulsion
emulsion
Prior art date
Application number
AT94307902T
Other languages
English (en)
Inventor
Robert K Barr
Gene R Derrico
Original Assignee
Morton Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/199,037 external-priority patent/US5364737A/en
Application filed by Morton Int Inc filed Critical Morton Int Inc
Application granted granted Critical
Publication of ATE162894T1 publication Critical patent/ATE162894T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Silicon Polymers (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Materials For Photolithography (AREA)
  • Adornments (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
AT94307902T 1994-01-25 1994-10-27 Wässrige emulsionsphotoresiste mit polysiloxanen ATE162894T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US18687594A 1994-01-25 1994-01-25
US08/199,037 US5364737A (en) 1994-01-25 1994-02-18 Waterbone photoresists having associate thickeners
US08/221,313 US5387494A (en) 1994-01-25 1994-03-30 Waterborne photoresists having polysiloxanes

Publications (1)

Publication Number Publication Date
ATE162894T1 true ATE162894T1 (de) 1998-02-15

Family

ID=27392160

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94307902T ATE162894T1 (de) 1994-01-25 1994-10-27 Wässrige emulsionsphotoresiste mit polysiloxanen

Country Status (12)

Country Link
EP (1) EP0664491B1 (de)
JP (1) JP2703731B2 (de)
CN (1) CN1072812C (de)
AT (1) ATE162894T1 (de)
AU (1) AU661438B1 (de)
BR (1) BR9500255A (de)
CA (1) CA2133149C (de)
DE (1) DE69408295T2 (de)
ES (1) ES2117216T3 (de)
HK (1) HK1002939A1 (de)
IL (1) IL112009A (de)
SG (1) SG43816A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4397601B2 (ja) * 2003-02-06 2010-01-13 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． フェノール−ビフェニレン樹脂を含むネガ型感光性樹脂組成物
TWI377440B (en) * 2004-10-14 2012-11-21 Sumitomo Chemical Co Radiation sensitive resin composition
TW200622486A (en) * 2004-10-14 2006-07-01 Sumitomo Chemical Co Radiation sensitive resin composition
CN100426015C (zh) * 2006-02-15 2008-10-15 虹创科技股份有限公司 彩色滤光片分隔墙及其制造方法,彩色滤光片及其制造方法
US8703385B2 (en) * 2012-02-10 2014-04-22 3M Innovative Properties Company Photoresist composition
JP6469006B2 (ja) * 2012-08-09 2019-02-13 スリーエム イノベイティブ プロパティズ カンパニー 光硬化性組成物

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2443785A1 (de) * 1974-09-13 1976-04-01 Basf Ag Fluessige, photovernetzbare formmasse zur herstellung von reliefdruckplatten
US4079028A (en) * 1975-10-03 1978-03-14 Rohm And Haas Company Polyurethane thickeners in latex compositions
DE3022473A1 (de) * 1980-06-14 1981-12-24 Hoechst Ag, 6000 Frankfurt Lichtempfindliches kopiermaterial und verfahren zu seiner herstellung
US4767826A (en) * 1985-07-18 1988-08-30 Polytechnic Institute Of New York Radiation-sensitive polymers
US4743698A (en) * 1985-10-01 1988-05-10 Alco Chemical Corp. Acrylic emulsion copolymers for thickening aqueous systems and copolymerizable surfactant monomers for use therein
US4762747A (en) * 1986-07-29 1988-08-09 Industrial Technology Research Institute Single component aqueous acrylic adhesive compositions for flexible printed circuits and laminates made therefrom
JPH0246460A (ja) * 1988-08-08 1990-02-15 Toyobo Co Ltd 感光性樹脂組成物
US5045435A (en) * 1988-11-25 1991-09-03 Armstrong World Industries, Inc. Water-borne, alkali-developable, photoresist coating compositions and their preparation
US5268256A (en) * 1990-08-02 1993-12-07 Ppg Industries, Inc. Photoimageable electrodepositable photoresist composition for producing non-tacky films
JP3040202B2 (ja) * 1991-07-12 2000-05-15 ダブリュー・アール・グレース・アンド・カンパニー−コーン 水系感光性樹脂組成物及びそれを用いたプリント回路板の製造方法
JP3240769B2 (ja) * 1992-10-02 2001-12-25 ジェイエスアール株式会社 感光性樹脂組成物
JPH06258832A (ja) * 1992-11-17 1994-09-16 W R Grace & Co 感光性樹脂組成物
JPH06230573A (ja) * 1993-01-29 1994-08-19 Japan Synthetic Rubber Co Ltd レジスト組成物
EP0666504B1 (de) * 1994-01-10 1998-06-03 E.I. Du Pont De Nemours And Company Lichtempfindliche wässrige Emulsion, lichtempfindlicher Film und Verfahren zur Herstellung

Also Published As

Publication number Publication date
CN1106936A (zh) 1995-08-16
CN1072812C (zh) 2001-10-10
CA2133149A1 (en) 1995-07-26
SG43816A1 (en) 1997-11-14
EP0664491A1 (de) 1995-07-26
DE69408295T2 (de) 1998-05-14
IL112009A0 (en) 1995-03-15
EP0664491B1 (de) 1998-01-28
JPH07234506A (ja) 1995-09-05
AU661438B1 (en) 1995-07-20
DE69408295D1 (de) 1998-03-05
ES2117216T3 (es) 1998-08-01
CA2133149C (en) 1999-05-11
IL112009A (en) 1999-03-12
BR9500255A (pt) 1995-11-14
JP2703731B2 (ja) 1998-01-26
HK1002939A1 (en) 1998-09-25

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee