ATE142336T1 - Freitragende sonde und apparat zur anwendung derselben - Google Patents

Freitragende sonde und apparat zur anwendung derselben

Info

Publication number
ATE142336T1
ATE142336T1 AT91311620T AT91311620T ATE142336T1 AT E142336 T1 ATE142336 T1 AT E142336T1 AT 91311620 T AT91311620 T AT 91311620T AT 91311620 T AT91311620 T AT 91311620T AT E142336 T1 ATE142336 T1 AT E142336T1
Authority
AT
Austria
Prior art keywords
probe
free
applying
same
piezoelectric material
Prior art date
Application number
AT91311620T
Other languages
English (en)
Inventor
Takayuki Yagi
Yutaka Hirai
Osamu Takamatsu
Masaru Nakayama
Yuji Kasanuki
Keisuke Yamamoto
Yasuhiro Shimada
Yoshio Suzuki
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE142336T1 publication Critical patent/ATE142336T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Micromachines (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
AT91311620T 1990-12-17 1991-12-13 Freitragende sonde und apparat zur anwendung derselben ATE142336T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP41103890 1990-12-17
JP40666790 1990-12-26
JP18706391 1991-07-02

Publications (1)

Publication Number Publication Date
ATE142336T1 true ATE142336T1 (de) 1996-09-15

Family

ID=27325833

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91311620T ATE142336T1 (de) 1990-12-17 1991-12-13 Freitragende sonde und apparat zur anwendung derselben

Country Status (6)

Country Link
US (1) US5506829A (de)
EP (1) EP0492915B1 (de)
JP (1) JP3060137B2 (de)
AT (1) ATE142336T1 (de)
CA (1) CA2057619C (de)
DE (1) DE69121868T2 (de)

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JP3261544B2 (ja) * 1991-10-03 2002-03-04 キヤノン株式会社 カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
JP3581475B2 (ja) * 1995-02-13 2004-10-27 キヤノン株式会社 情報処理装置
JPH08329538A (ja) * 1995-05-30 1996-12-13 Hewlett Packard Co <Hp> プローブ装置
US6507553B2 (en) 1995-07-24 2003-01-14 General Nanotechnology Llc Nanometer scale data storage device and associated positioning system
JPH09196933A (ja) * 1996-01-19 1997-07-31 Canon Inc プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
JP3157840B2 (ja) * 1996-03-13 2001-04-16 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 新規なカンチレバー構造
JPH10313008A (ja) * 1997-05-13 1998-11-24 Canon Inc 微細パターンの形成方法及び該微細パターンを有する電気素子
JP3978818B2 (ja) * 1997-08-08 2007-09-19 ソニー株式会社 微小ヘッド素子の製造方法
US6045431A (en) * 1997-12-23 2000-04-04 Speedfam Corporation Manufacture of thin-film magnetic heads
US6802646B1 (en) 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
EP1196939A4 (de) * 1999-07-01 2002-09-18 Gen Nanotechnology Llc Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7053369B1 (en) * 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
WO2004023490A2 (en) 2002-09-09 2004-03-18 General Nanotechnology Llc Fluid delivery for scanning probe microscopy
JP4385607B2 (ja) * 2003-01-29 2009-12-16 セイコーエプソン株式会社 表面弾性波素子、周波数フィルタ、発振器、電子回路並びに電子機器
KR100506094B1 (ko) * 2003-05-22 2005-08-04 삼성전자주식회사 탐침을 이용한 정보저장장치의 위치 검출 시스템 및 그 방법
US7055378B2 (en) 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
KR100552698B1 (ko) * 2003-11-24 2006-02-20 삼성전자주식회사 정보 저장 장치 및 그 정보 추종 방법
EP1740318A2 (de) * 2004-04-21 2007-01-10 Symyx Technologies, Inc. Biegungsresonatormessvorrichtung und verfahren
WO2006083566A2 (en) * 2005-01-28 2006-08-10 Wayne State University Biosensor based on polymer cantilevers
JP5196106B2 (ja) * 2007-03-28 2013-05-15 セイコーエプソン株式会社 圧電素子の製造方法
JP5265973B2 (ja) * 2007-07-27 2013-08-14 富士フイルム株式会社 圧電素子及び液体吐出装置
JP4931733B2 (ja) * 2007-08-16 2012-05-16 セイコーインスツル株式会社 顕微鏡用プローブ及び走査型プローブ顕微鏡
JP6387289B2 (ja) * 2014-09-29 2018-09-05 新科實業有限公司ＳＡＥ Ｍａｇｎｅｔｉｃｓ（Ｈ．Ｋ．）Ｌｔｄ． 薄膜圧電体素子およびその製造方法並びにそれを有するヘッドジンバルアセンブリ、ハードディスク装置、インクジェットヘッド、可変焦点レンズおよびセンサ
US9761787B2 (en) * 2015-06-02 2017-09-12 The Board Of Trustees Of The University Of Alabama Consensus-based multi-piezoelectric microcantilever sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3300400A1 (de) * 1982-01-06 1983-07-14 Canon K.K., Tokyo Halbleiterbauelement
US4829507A (en) * 1984-09-14 1989-05-09 Xerox Corporation Method of and system for atomic scale readout of recorded information
JPS6180536A (ja) * 1984-09-14 1986-04-24 ゼロツクス　コーポレーシヨン 原子規模密度情報記緑および読出し装置並びに方法
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
EP0553937B1 (de) * 1987-07-31 1999-03-03 Canon Kabushiki Kaisha Aufzeichnungsgerät und Wiedergabegerät
DE3856336T2 (de) * 1987-09-24 2000-01-27 Canon K.K., Tokio/Tokyo Mikrosonde
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH0298896A (ja) * 1988-10-05 1990-04-11 Olympus Optical Co Ltd 記憶装置
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
JPH02206043A (ja) * 1989-02-03 1990-08-15 Olympus Optical Co Ltd 記憶装置
JP2741629B2 (ja) * 1990-10-09 1998-04-22 キヤノン株式会社 カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置

Also Published As

Publication number Publication date
EP0492915A1 (de) 1992-07-01
DE69121868D1 (de) 1996-10-10
CA2057619C (en) 1997-08-19
EP0492915B1 (de) 1996-09-04
CA2057619A1 (en) 1992-06-18
DE69121868T2 (de) 1997-02-06
JPH05120742A (ja) 1993-05-18
JP3060137B2 (ja) 2000-07-10
US5506829A (en) 1996-04-09

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Legal Events

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