DE69124181D1 - Sonde mit freitragendem Arm, Rastertunnelstrommikroskop und Informationsverarbeitungsapparat unter Anwendung davon - Google Patents

Sonde mit freitragendem Arm, Rastertunnelstrommikroskop und Informationsverarbeitungsapparat unter Anwendung davon

Info

Publication number
DE69124181D1
DE69124181D1 DE69124181T DE69124181T DE69124181D1 DE 69124181 D1 DE69124181 D1 DE 69124181D1 DE 69124181 T DE69124181 T DE 69124181T DE 69124181 T DE69124181 T DE 69124181T DE 69124181 D1 DE69124181 D1 DE 69124181D1
Authority
DE
Germany
Prior art keywords
probe
processing apparatus
information processing
cantilever arm
scanning tunneling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69124181T
Other languages
English (en)
Other versions
DE69124181T2 (de
Inventor
Hiroyasu Nose
Kunihiro Sakai
Toshimitsu Kawase
Toshihiko Miyazaki
Katsuhiko Shinjo
Yutaka Hirai
Takayuki Yagi
Katsunori Hatanaka
Keisuke Yamamoto
Yuji Kasanuki
Yoshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69124181D1 publication Critical patent/DE69124181D1/de
Application granted granted Critical
Publication of DE69124181T2 publication Critical patent/DE69124181T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1409—Heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/724—Devices having flexible or movable element
    • Y10S977/732—Nanocantilever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
    • Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument
DE69124181T 1990-10-09 1991-10-04 Sonde mit freitragendem Arm, Rastertunnelstrommikroskop und Informationsverarbeitungsapparat unter Anwendung davon Expired - Fee Related DE69124181T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2269540A JP2741629B2 (ja) 1990-10-09 1990-10-09 カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置

Publications (2)

Publication Number Publication Date
DE69124181D1 true DE69124181D1 (de) 1997-02-27
DE69124181T2 DE69124181T2 (de) 1997-04-30

Family

ID=17473804

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69124181T Expired - Fee Related DE69124181T2 (de) 1990-10-09 1991-10-04 Sonde mit freitragendem Arm, Rastertunnelstrommikroskop und Informationsverarbeitungsapparat unter Anwendung davon

Country Status (6)

Country Link
US (1) US5321685A (de)
EP (1) EP0480645B1 (de)
JP (1) JP2741629B2 (de)
AT (1) ATE147858T1 (de)
CA (1) CA2052882C (de)
DE (1) DE69124181T2 (de)

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EP0492915B1 (de) * 1990-12-17 1996-09-04 Canon Kabushiki Kaisha Freitragende Sonde und Apparat zur Anwendung derselben
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP3261544B2 (ja) * 1991-10-03 2002-03-04 キヤノン株式会社 カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置
US6472794B1 (en) 1992-07-10 2002-10-29 Matsushita Electric Industrial Co., Ltd. Microactuator
JP2895694B2 (ja) * 1992-12-08 1999-05-24 シャープ株式会社 情報記録・再生用スライダー、情報記録・再生用スライダーの製造方法および情報記録・再生装置
JP3025120B2 (ja) * 1992-12-21 2000-03-27 キヤノン株式会社 記録再生装置
US5418771A (en) * 1993-02-25 1995-05-23 Canon Kabushiki Kaisha Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
US5537863A (en) * 1993-07-15 1996-07-23 Nikon Corporation Scanning probe microscope having a cantilever used therein
US20020053734A1 (en) 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
US5587620A (en) * 1993-12-21 1996-12-24 Hewlett-Packard Company Tunable thin film acoustic resonators and method for making the same
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WO1996030717A1 (de) * 1995-03-30 1996-10-03 Carl Zeiss Jena Gmbh Mikromechanische sonde für rastermikroskope
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WO1997009584A1 (en) * 1995-09-01 1997-03-13 International Business Machines Corporation Cantilever with integrated deflection sensor
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
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US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
JPH09229945A (ja) * 1996-02-23 1997-09-05 Canon Inc マイクロ構造体を支持するエアブリッジ型構造体の製造方法とその雌型基板、並びに、エアブリッジ型構造体とそれを用いたマイクロ構造体およびトンネル電流または微小力検出用のプローブ
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JP3639684B2 (ja) 1997-01-13 2005-04-20 キヤノン株式会社 エバネッセント波検出用の微小探針とその製造方法、及び該微小探針を備えたプローブとその製造方法、並びに該微小探針を備えたエバネッセント波検出装置、近視野走査光学顕微鏡、情報再生装置
JP2000332313A (ja) * 1999-05-21 2000-11-30 Matsushita Electric Ind Co Ltd 薄膜圧電型バイモルフ素子及びその応用
KR100364720B1 (ko) * 1999-12-29 2002-12-16 엘지전자 주식회사 초미세 탐침형 픽업 소자 및 그 제조방법
KR100424540B1 (ko) * 2001-04-21 2004-03-30 (주)지우텍 다중 액츄에이터를 갖는 ａｆｍ용 캔틸레버 구조물, 이를포함하는 ａｆｍ 시스템 및 상기 ａｆｍ을 이용한 물질의특성 측정 방법
KR100418881B1 (ko) * 2001-05-23 2004-02-19 엘지전자 주식회사 Ａｆｍ 용 고감도 압전저항 캔틸레버
JP4082947B2 (ja) * 2002-07-09 2008-04-30 パイオニア株式会社 記録再生ヘッド及びその製造方法
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US9671429B2 (en) * 2003-05-07 2017-06-06 University Of Southern California Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
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US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
US10641792B2 (en) * 2003-12-31 2020-05-05 University Of Southern California Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
JP4478495B2 (ja) * 2004-03-31 2010-06-09 ソニー株式会社 振動型ジャイロセンサ素子及びその製造方法
DE102006011598A1 (de) * 2006-03-10 2007-09-13 Universität Hamburg Cantilever eines Rastersondenmikroskops
KR20090055876A (ko) * 2007-11-29 2009-06-03 삼성전자주식회사 전계기록재생헤드, 이를 채용한 전계기록재생장치 및전계기록재생헤드의 제조방법
US7990818B2 (en) * 2008-12-23 2011-08-02 General Electric Company Cascaded control of a pick-up head for multi-layer optical data storage
US8266718B2 (en) * 2009-02-20 2012-09-11 The Board Of Trustees Of Leland Stanford Junior University Modulated microwave microscopy and probes used therewith
US9761787B2 (en) * 2015-06-02 2017-09-12 The Board Of Trustees Of The University Of Alabama Consensus-based multi-piezoelectric microcantilever sensor
CN106018566B (zh) * 2016-07-05 2018-07-13 华中科技大学 一种超声换能装置
US11262383B1 (en) 2018-09-26 2022-03-01 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US11867721B1 (en) 2019-12-31 2024-01-09 Microfabrica Inc. Probes with multiple springs, methods for making, and methods for using
US11761982B1 (en) 2019-12-31 2023-09-19 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact and methods for making such probes
US11774467B1 (en) 2020-09-01 2023-10-03 Microfabrica Inc. Method of in situ modulation of structural material properties and/or template shape

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Also Published As

Publication number Publication date
JP2741629B2 (ja) 1998-04-22
DE69124181T2 (de) 1997-04-30
CA2052882A1 (en) 1992-04-10
EP0480645A1 (de) 1992-04-15
US5321685A (en) 1994-06-14
CA2052882C (en) 1997-08-05
JPH04147448A (ja) 1992-05-20
EP0480645B1 (de) 1997-01-15
ATE147858T1 (de) 1997-02-15

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