DE69232389T2 - Informationsverarbeitungsgerät und Rastertunnelmikroskop - Google Patents

Informationsverarbeitungsgerät und Rastertunnelmikroskop

Info

Publication number
DE69232389T2
DE69232389T2 DE69232389T DE69232389T DE69232389T2 DE 69232389 T2 DE69232389 T2 DE 69232389T2 DE 69232389 T DE69232389 T DE 69232389T DE 69232389 T DE69232389 T DE 69232389T DE 69232389 T2 DE69232389 T2 DE 69232389T2
Authority
DE
Germany
Prior art keywords
electric member
information processing
recording medium
processing device
cantilever piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69232389T
Other languages
English (en)
Other versions
DE69232389D1 (de
Inventor
Kunihiro Sakai
Katsunori Hatanaka
Takahiro Oguchi
Akihiko Yamano
Shunichi Shido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24232491A external-priority patent/JP3118654B2/ja
Priority claimed from JP27328891A external-priority patent/JP2930454B2/ja
Priority claimed from JP4173331A external-priority patent/JP2997133B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69232389D1 publication Critical patent/DE69232389D1/de
Application granted granted Critical
Publication of DE69232389T2 publication Critical patent/DE69232389T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04Fine scanning or positioning
    • G01Q10/06Circuits or algorithms therefor
    • G01Q10/065Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16Probes, their manufacture, or their related instrumentation, e.g. holders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06Probe tip arrays
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418Disposition or mounting of heads or record carriers
    • G11B9/1427Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00Applications, other than SPM, of scanning-probe techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69232389T 1991-08-29 1992-08-27 Informationsverarbeitungsgerät und Rastertunnelmikroskop Expired - Fee Related DE69232389T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24232491A JP3118654B2 (ja) 1991-08-29 1991-08-29 情報処理装置及び走査型トンネル電子顕微鏡
JP27328891A JP2930454B2 (ja) 1991-09-24 1991-09-24 記録及び/又は再生装置
JP4173331A JP2997133B2 (ja) 1992-06-30 1992-06-30 マルチプローブヘッド

Publications (2)

Publication Number Publication Date
DE69232389D1 DE69232389D1 (de) 2002-03-14
DE69232389T2 true DE69232389T2 (de) 2002-07-11

Family

ID=27323764

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69232389T Expired - Fee Related DE69232389T2 (de) 1991-08-29 1992-08-27 Informationsverarbeitungsgerät und Rastertunnelmikroskop

Country Status (5)

Country Link
US (1) US5329122A (de)
EP (1) EP0529616B1 (de)
AT (1) ATE212718T1 (de)
CA (1) CA2076925C (de)
DE (1) DE69232389T2 (de)

Families Citing this family (38)

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JP3246987B2 (ja) * 1992-09-10 2002-01-15 キヤノン株式会社 マルチプローブ制御回路を具備する情報処理装置
JP3025120B2 (ja) * 1992-12-21 2000-03-27 キヤノン株式会社 記録再生装置
JP3073616B2 (ja) * 1992-12-24 2000-08-07 キヤノン株式会社 マルチプローブを具備する情報処理装置
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
JP3162883B2 (ja) * 1993-09-29 2001-05-08 キヤノン株式会社 情報記録再生装置
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
JP3581421B2 (ja) * 1995-02-23 2004-10-27 キヤノン株式会社 情報処理装置
WO1996028837A1 (en) * 1995-03-10 1996-09-19 Molecular Imaging Corporation Hybrid control system for scanning probe microscopes
US6011664A (en) * 1995-08-31 2000-01-04 Carnegie Mellon University Techniques for ultrahigh density writing with a probe on erasable magnetic media
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JP3679525B2 (ja) * 1996-10-07 2005-08-03 キヤノン株式会社 情報記録再生装置、および情報記録再生方法
EP0864846A3 (de) * 1997-03-12 2000-12-13 Haines, Miles, Dr. Rasterabtastmikroskop
JPH10312592A (ja) * 1997-05-13 1998-11-24 Canon Inc 情報処理装置および情報処理方法
US6459088B1 (en) 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
US7260051B1 (en) * 1998-12-18 2007-08-21 Nanochip, Inc. Molecular memory medium and molecular memory integrated circuit
JP2000266658A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc マルチプローブ及び走査型プローブ顕微鏡
US6448553B1 (en) 1999-04-26 2002-09-10 Canon Kabushiki Kaisha Signal detector to be used with scanning probe and atomic force microscope
US6233206B1 (en) * 1999-10-26 2001-05-15 International Business Machines Corporation High density magnetic thermal recording and reproducing assembly
EP1337807A1 (de) * 2000-11-16 2003-08-27 International Business Machines Corporation Ausleseverfahren und -gerät einer anordnung von thermischen wiederstandssensoren
TW571291B (en) * 2001-01-31 2004-01-11 Ibm Mechanical data processing
DE10115690A1 (de) * 2001-03-29 2002-10-10 Eidgenoess Tech Hochschule Quasi-Paralleles Rasterkraftmikroskop
JP2002310882A (ja) * 2001-04-17 2002-10-23 Canon Inc 走査型プローブによる信号検出装置、該装置によるプローブ顕微鏡、及び走査型プローブによる信号検出方法、該方法を用いてサンプル表面を観察する観察方法
KR100519752B1 (ko) * 2002-05-10 2005-10-07 삼성전자주식회사 시분할 다중 방식을 채용한 고속 고밀도 정보저장 장치 및이를 이용한 정보기록방법 및 정보재생방법
JP4082947B2 (ja) * 2002-07-09 2008-04-30 パイオニア株式会社 記録再生ヘッド及びその製造方法
US7233517B2 (en) 2002-10-15 2007-06-19 Nanochip, Inc. Atomic probes and media for high density data storage
US6982898B2 (en) * 2002-10-15 2006-01-03 Nanochip, Inc. Molecular memory integrated circuit utilizing non-vibrating cantilevers
US7373265B2 (en) * 2003-09-10 2008-05-13 Hewlett-Packard Development Company, L.P. Data storage device and a method of reading data in a data storage device
US7558185B2 (en) * 2004-01-29 2009-07-07 International Business Machines Corporation Storage device having flexible architecture and free scalability
US7447140B2 (en) * 2004-07-30 2008-11-04 Seagate Technology Llc Ferroelectric probe storage apparatus
JP4326017B2 (ja) * 2004-08-27 2009-09-02 パイオニア株式会社 プローブ、並びに記録装置、再生装置及び記録再生装置
US7463573B2 (en) 2005-06-24 2008-12-09 Nanochip, Inc. Patterned media for a high density data storage device
US7367119B2 (en) 2005-06-24 2008-05-06 Nanochip, Inc. Method for forming a reinforced tip for a probe storage device
US7309630B2 (en) * 2005-07-08 2007-12-18 Nanochip, Inc. Method for forming patterned media for a high density data storage device
US8302456B2 (en) * 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
US7486403B2 (en) * 2006-07-20 2009-02-03 Canon Kabushiki Kaisha Droplet shape measuring method and apparatus
US7948337B2 (en) * 2007-05-31 2011-05-24 Seagate Technology Llc Simultaneous rotational control using offset linear actuators
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
RU2638941C1 (ru) * 2016-08-11 2017-12-19 Федеральное государственное бюджетное учреждение науки Институт Механики УрО РАН Электрохимический сканирующий туннельный микроскоп

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2556492B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 再生装置及び再生法
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
DE3853155T2 (de) * 1987-10-09 1995-06-14 Hitachi Ltd Rastertunnelmikroskop mit einer Vorrichtung zum Berichtigen von Oberflächendaten.
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JP2896794B2 (ja) * 1988-09-30 1999-05-31 キヤノン株式会社 走査型トンネル電流検出装置,走査型トンネル顕微鏡,及び記録再生装置
DE3850968T2 (de) * 1988-10-14 1995-03-16 Ibm Abstandsgesteuerter Tunneleffektwandler und den Wandler verwendende Speichereinheit mit direktem Zugriff.
US5144581A (en) * 1989-02-09 1992-09-01 Olympus Optical Co., Ltd. Apparatus including atomic probes utilizing tunnel current to read, write and erase data
US4952857A (en) * 1989-03-24 1990-08-28 Quanscan, Inc. Scanning micromechanical probe control system
DE69031053T2 (de) * 1989-04-25 1998-01-29 Canon Kk Informationsaufzeichnungs-/Wiedergabegerät und Informationsaufzeichnungsträger
JP2775464B2 (ja) * 1989-04-27 1998-07-16 キヤノン株式会社 位置検出装置
JP2880182B2 (ja) * 1989-06-09 1999-04-05 株式会社日立製作所 表面顕微鏡
US5059793A (en) * 1989-10-04 1991-10-22 Olympus Optical Co., Ltd. Scanning tunneling microscope having proper servo control function
DE69126830T2 (de) * 1990-08-14 1997-11-20 Canon K.K., Tokio/Tokyo Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung
EP0487300A1 (de) * 1990-11-20 1992-05-27 Kabushiki Kaisha Toshiba Rastertunnelmikroskop
US5161149A (en) * 1991-07-22 1992-11-03 The Johns Hopkins University Electron density storage device and method using STM

Also Published As

Publication number Publication date
CA2076925A1 (en) 1993-03-01
EP0529616A2 (de) 1993-03-03
CA2076925C (en) 1999-08-31
EP0529616B1 (de) 2002-01-30
ATE212718T1 (de) 2002-02-15
EP0529616A3 (en) 1995-02-01
DE69232389D1 (de) 2002-03-14
US5329122A (en) 1994-07-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee